JPS57150000A - Device of putting x-ray at object - Google Patents

Device of putting x-ray at object

Info

Publication number
JPS57150000A
JPS57150000A JP1952182A JP1952182A JPS57150000A JP S57150000 A JPS57150000 A JP S57150000A JP 1952182 A JP1952182 A JP 1952182A JP 1952182 A JP1952182 A JP 1952182A JP S57150000 A JPS57150000 A JP S57150000A
Authority
JP
Japan
Prior art keywords
putting
ray
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1952182A
Other languages
Japanese (ja)
Inventor
Jiei Marotsuchi Fuiritsupu
Emu Epusutain Harorudo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Battelle Development Corp
Original Assignee
Battelle Development Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Battelle Development Corp filed Critical Battelle Development Corp
Publication of JPS57150000A publication Critical patent/JPS57150000A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21G—CONVERSION OF CHEMICAL ELEMENTS; RADIOACTIVE SOURCES
    • G21G4/00—Radioactive sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • X-Ray Techniques (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP1952182A 1981-02-09 1982-02-09 Device of putting x-ray at object Pending JPS57150000A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US23277481A 1981-02-09 1981-02-09

Publications (1)

Publication Number Publication Date
JPS57150000A true JPS57150000A (en) 1982-09-16

Family

ID=22874523

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1952182A Pending JPS57150000A (en) 1981-02-09 1982-02-09 Device of putting x-ray at object

Country Status (3)

Country Link
EP (1) EP0058137A3 (en)
JP (1) JPS57150000A (en)
CA (1) CA1184675A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6119752U (en) * 1984-07-11 1986-02-05 理学電機株式会社 X-ray guide tube
JPH01140100A (en) * 1987-11-26 1989-06-01 Nec Corp Method of taking-out x-ray

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4484339A (en) * 1981-02-09 1984-11-20 Battelle Development Corporation Providing X-rays
CA1254261A (en) * 1984-11-08 1989-05-16 James M. Forsyth Long life x-ray source target
US4692934A (en) * 1984-11-08 1987-09-08 Hampshire Instruments X-ray lithography system

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4852075A (en) * 1971-10-29 1973-07-21

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3870882A (en) * 1973-05-23 1975-03-11 Gca Corp Esca x-ray source
US4119855A (en) * 1977-07-08 1978-10-10 Massachusetts Institute Of Technology Non vacuum soft x-ray lithographic source

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4852075A (en) * 1971-10-29 1973-07-21

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6119752U (en) * 1984-07-11 1986-02-05 理学電機株式会社 X-ray guide tube
JPH0448560Y2 (en) * 1984-07-11 1992-11-16
JPH01140100A (en) * 1987-11-26 1989-06-01 Nec Corp Method of taking-out x-ray

Also Published As

Publication number Publication date
CA1184675A (en) 1985-03-26
EP0058137A3 (en) 1983-03-16
EP0058137A2 (en) 1982-08-18

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