EP0030765B1 - Miroirs polygonaux pour balayage à rotation - Google Patents

Miroirs polygonaux pour balayage à rotation Download PDF

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Publication number
EP0030765B1
EP0030765B1 EP80201170A EP80201170A EP0030765B1 EP 0030765 B1 EP0030765 B1 EP 0030765B1 EP 80201170 A EP80201170 A EP 80201170A EP 80201170 A EP80201170 A EP 80201170A EP 0030765 B1 EP0030765 B1 EP 0030765B1
Authority
EP
European Patent Office
Prior art keywords
master
facet
base
layer
preforms
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
EP80201170A
Other languages
German (de)
English (en)
Other versions
EP0030765A3 (en
EP0030765A2 (fr
Inventor
Harry Howden
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Philips Electronics UK Ltd
Koninklijke Philips NV
Original Assignee
Philips Electronic and Associated Industries Ltd
Philips Electronics UK Ltd
Philips Gloeilampenfabrieken NV
Koninklijke Philips Electronics NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Electronic and Associated Industries Ltd, Philips Electronics UK Ltd, Philips Gloeilampenfabrieken NV, Koninklijke Philips Electronics NV filed Critical Philips Electronic and Associated Industries Ltd
Publication of EP0030765A2 publication Critical patent/EP0030765A2/fr
Publication of EP0030765A3 publication Critical patent/EP0030765A3/en
Application granted granted Critical
Publication of EP0030765B1 publication Critical patent/EP0030765B1/fr
Expired legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/40—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal all coatings being metal coatings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G02B5/09—Multifaceted or polygonal mirrors, e.g. polygonal scanning mirrors; Fresnel mirrors
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S359/00—Optical: systems and elements
    • Y10S359/90—Methods
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S425/00—Plastic article or earthenware shaping or treating: apparatus
    • Y10S425/808—Lens mold
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/10—Methods of surface bonding and/or assembly therefor

Definitions

  • This invention relates to a method of manufacturing polygonal-shaped, multi-faceted rotary scanners by replication.
  • this invention relates to a method of manufacturing polygonal-shaped, multi-faceted rotary scanners of the kind which comprises a plurality of optically flat surfaces on reflective layers which are integrally bonded to a multi-faceted polygonal base at precise angles to the axis of rotation of the multi-faceted polygonal base.
  • Multi-faceted polygonal scanners of this kind can be employed in a wide range of applications, typically for the accurate reflection of light, or other electromagnetic radiations, such as thermal radiation, from a radiation source for passage along a narrow path of a radiation sensor remote from the radiation source.
  • each radiation-reflective facet of the multi-faceted polygonal scanner is set is subject to misalignment during manufacture and when the scanner is in use.
  • the angle of each reflective facet is known to be critical because it determines the direction of the reflected radiation and the duration of the scan relative to the angular velocity of the rotating scanner.
  • the relative angles at which the radiation reflective facets are set to each other also must be constant even when the scanner is subjected to large induced stresses due to high-speed rotation when the scanner is in use.
  • the master however, then has to be removed without damaging either the preform or the master which is required for subsequent use.
  • the preform is removed by a pushing action, or as illustrated by Figure 1 of the aforesaid U.S. Specification, by the use of screws which apply pressures at various disengagement points. It is clear that great care must be exercised if damage or distortion is to be avoided and this can be both time-consuming and expensive particularly when surplus resin becomes firmly set onto variously angled non-polished surfaces of the master.
  • the aforesaid process does not lend itself to a cheap simple manufacture of a multi-faceted preform with accurately produced surfaces for concentric positioning within said accurately produced master. Coating the surface of a plurality of facets with a single layer of gold may also be difficult to effect and expensive in material particularly if various surfaces are almost inaccessible. On removal of the master by breaking it away from the preform the gold layer so produced must separate from the surface of each facet of the master whilst remaining adhesively bonded to the hardened epoxy. Good separation obviously becomes increasingly difficult with an increase in the number of facets on the faceted master and with an increase in the changes of the angles of the facets.
  • the invention aims to provide solutions to these problems of accessibility and removal.
  • the use of individual, independently located master preforms also makes it easier to remove the preforms without damaging the reflective layers.
  • a method of manufacturing a polygonal-shaped, multi-faceted rotary scanner by replication which rotary scanner comprises a plurality of optically flat surfaces on relective layers which are integrally bonded to a multi-faceted polygonal base at precise anglesto the axis of rotation of the multi-faceted polygonal base, wherein the optically flat reflective surfaces are each formed by coating an optically flat surface of a master preform with a reflective layer and locating the reflectively coated surface above and at the required angle to said base on a fixture on which said base has previously been concentrically mounted, adhesively bonding the reflective layer to the polygonal base with a resin in liquid form, hardening the resin and removing the master preform from the fixture to leave the reflective layer integrally bonded to the base, characterised in that for forming the plurality of optically flat surfaces of the scanner a corresponding plurality of separate flat master preforms is used, each preform being independently located with its reflectively coated surface at the required angle by locating means comprising upper and
  • the master preforms are separately produced and may be identical or different.
  • the master preforms are also preferably produced by replication techniques and in sufficiently large numbers that they can replace master preforms which have become damaged in use of additionally worked, for example, by re-coating previously used preforms with a further parting reflective layer while resin in contact with other preforms is hardening.
  • the master preform furthermore may be easily coated with a parting layer for each subsequent use in the method.
  • Each master preform may be simply manufactured to a first order of accuracy for the required profile and the surface finish by- known techniques. Such techniques include mass production methods for casting, machining, grinding and/or polishing the surfaces of the master preform and also, if desired, hand-figuring and polishing techniques as used for producing surfaces for astronomical optical applications.
  • the flat master preforms each comprise a flat glass substrate having an optically polished surface which is coated with a parting layer, the surface of which adjacent the substrate comprises a radiation reflective layer.
  • the parting layer may comprise a reflective layer of gold on the polished glass surface, a layer of platinum on the layer of gold and a layer of nickel on the layer of platinum.
  • the multi-faceted polygonal base may be produced by casting and machining so that each facet is set substantially at the required angle and has a substantially flat surface, the angle and the surface finish being to a second order of profile accuracy and surface finish when compared with highly accurate profiles produced by known techniques for hand-figured optical profiles.
  • the base is machined from a blank of metal such as aluminium.
  • the base may be in the form of a regular octahedron, although 6, 7 or 9 to 14 facet surfaces may be equally satisfactory.
  • Each of the gaps bounded by the reflectively coated surfaces of the master preforms on one side and the stepped facet surfaces of the multi-faceted polygonal base on the other side may have a depth of from 0.5 mm to 0.15 mm.
  • the gaps may be identical in depth, preferably 0.10 mm.
  • the master preforms are coated with a parting layer at least on their optically polished surfaces.
  • the parting layer preferably comprises a thin layer of gold on which, if desired, there is deposited a thin layer of platinum and further, if desired, a thin layer of nickel.
  • the gold may be deposited by vapour deposition and the platinum and/or nickel deposited by electrodeposition.
  • the gold layer in this embodiment then becomes the outermost layer and the reflective surface for the appropriate facet of the polygonal scanner.
  • Other non-corrosive, specularly reflective metals, such as, tin, aluminium or copper are also suitable.
  • the gap between the surface of each facet of the base and the respective parting layer is filled by the resin in liqaid form, said liquid resin being displaced on contact with the parting layer.
  • the gap may be filled by a liquid thermosetting resin which is hardened by heat.
  • Liquid self-polymerising resins are particularly satisfactory, that is, liquid resins which self- harden and in which hardeners, accelerators, catalysts and/or fillers if desired are incorporated. Solvent-based liquid resins are not particularly suitable because of a loss of volume or shrinkage on hardening.
  • Particularly suitable resins are epoxy resins based on the reaction product of bisphenol A and epichlorhydrin and to which a hardener, if desired, is added.
  • Such resins in general, have a suitable viscosity to flow on contact in the liquid state, can be made to flow free from entrapped bubbles by displacement on contact with the reflectively coated surface of the master preform and have a high structural strength when hardened. They also have a low coefficient of shrinkage on hardening and a low coefficient of thermal expansion over a useful working temperature range.
  • a rapid curing liquid resin such as, polycryan- acrylate or a copolymer thereof can be used particularly to set each master preform separately.
  • Each master preform can be quickly positioned and it will set separately, the master preform again being accurately positioned by contact with a part of its face against the corresponding pair of upper and lower facet members of the master fixture.
  • each master preform may be held against the corresponding upper and lower facet members of the master fixture by one or more spring clips until the liquid resin is hardened.
  • the liquid resin used was thermosetting resin comprising an epoxy bisphenol A to which a hardener was added.
  • the liquid resin was applied to at least a part of each facet surface of the polygonal base and was displaced to cover these surfaces and fill the gaps between said surfaces and the reflectively coated surfaces of the master preforms. Excess liquid resin was removed prior to hardening of the resin. No trapped air bubbles were present in the hardened resin.
  • the multi-faceted polygonal master fixture 1 is formed of cast aluminium and comprises a number of precisely machined pairs of angled upper and lower facet members, some of which are indicated by the numerals, 2; 2 1 , 3'; 2 2 , 32; 22, 33 and 2 °, 34 .
  • a multi-faceted polygonal base 4 ( Figure 2) is removably positioned concentrically in the space indicated by the broken line A of Figure 1 when the upper facet members 2, 21,22,23 and 2 4 are removed.
  • the polygonal base 4 is accurately positioned between the upper and lower facet members of the fixture 1 so that each of the facet surfaces 5, 6, 7, 8, 9, 10, 11 and 12 of the base is disposed in a plane which is stepped just below the plane defined by a corresponding pair of the upper and lower facet members.
  • the base 4 is preferably formed by machining a blank of aluminium and the facet surfaces 5, 6, 7, 8, 9, 10, 11 and 12 are prepared to a second order of profile accuracy only.
  • Figure 3 shows one of a number of master preforms each comprising a flat glass substrate with a surface which is accurately prepared to a first order of accuracy for both the resultant profile and the optically polished surface.
  • the optically polished surface is coated with a thin parting layer comprising a vapour deposited film of gold 13, electrodeposited platinum 14 and electrodeposited nickel 15.
  • Figure 4 illustrates a longitudinal cross-section of one master preform 21 with a parting layer comprising gold 13, platinum 14 and nickel 15 coated on one surface.
  • the parting layer is shown in contact with an upper facet member 2 and a lower facet member 3 of the fixture.
  • a gap 20 is formed between the nickel layer 15 and the adjacent flat facet surface of the multi-faceted polygonal base 4.
  • the polygonal base 4 when positioned between the upper and lower facet members 2, 3; 21,31; 2 2 , 3 2 ; 2 3 , 3 3 and 2 4 , 3 4 was treated by placing three drops of a liquid epoxy resin on each facet surface of the base.
  • the drops of resin formed a small, stable pool of liquid resin on each surface. If necessary the fixture 1 can be tilted to one side to keep the initial pool of liquid resin in the centre of each facet.
  • Each preform 10 was then placed with the nickel 15 face downwards so that on contact therewith the respective pool of liquid resin was spread to fill completely the gap 20 between the nickel layer 15 and the respective facet surfaces 5, 6, 7,8,9, 10, 11 or 12 of the base 4. Excess liquid resin was removed in each case by wiping with a cloth.
  • the preforms were each held in position until the resin hardened by spring clips (not shown) which were located at attachment holes 16 in the upper facet members and holes 17, 18, 19 in the lower facet members 2, 3.
  • a gap of 0.1 mm was left between the layer 15 on each master preform and the respective facet surface of base 4.
  • the assembly was dismantled by removing each master preform 21 separately, followed by the upper part comprising the upper facet members 2 , 3 1 , 2 2 , 2 3 , 2 4 of the master fixture and the removing the finished multi-faceted polygonal scanner.
  • the component parts were then reassembled to form the master fixture 1 again and the master preforms 21 were each recoated with a further parting layer 13,14 and 15.
  • Another multi-faceted polygonal base 4 prepared again to a second degree of accuracy for the facet surfaces was then positioned in the fixture 1 and a further scanner was replicated as above. No obvious defects were noticeable between the first scanner produced and the second and further scanners produced by the same method in a production run.

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  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Casting Or Compression Moulding Of Plastics Or The Like (AREA)
  • Moulding By Coating Moulds (AREA)
  • Mechanical Optical Scanning Systems (AREA)

Claims (7)

1. Procédé de fabrication d'un miroir de balayage polygonal rotatif à plusieurs facettes par réplique, miroir de balayage rotatif comportant une pluralité de surfaces optiquement planes sur des couches réflectrices qui sont intimement liées à une base polygonale à plusieurs facettes sous des angles précis par rapport à l'axe de rotation de la base polygonale à plusieurs facettes, procédé suivant lequel on forme chacune des surfaces réflectrices optiquement planes en revêtant une surface optiquement plane d'une préforme maîtresse d'une couche réflectrice et en fixant la surface à revêtement réflecteur sur un support au-dessus de ladite base et sous l'angle requis par rapport à celle-ci, support sur lequel ladite base a été monté précédemment en position concentrique, en liant par adhésion la couche réflectrice à la base polygonale au moyen d'une résine en forme liquide, en durcissant la résine et en enlevant la préforme maîtresse du support de façon que la couche réflectrice reste intimement liée à la base, caractérisé en ce que, pour former la pluralité de surfaces optiquement planes du miroir de balayage, on utilise une pluralité correspondante de préformes maîtresses plates séparées, alors que chaque préforme sa surface à revêtement réflecteur étant disposée sous l'angle requis, est fixée individuellement, par des moyens de fixation comportant des éléments de facette supérieurs et inférieurs d'un support maître polygonal à plusieurs facettes présentant des pluralités correspondantes desdits éléments de facette supérieurs, et inférieurs que chaque surface à revêtement réflecteur est positionnée dans un plan défini par une paire correspondante desdits éléments de facette supérieurs et inférieurs et au-dessus d'une facette correspondante de la base polygonale qui es montée concentriquement entre lesdites pluralités d'éléments de facette supérieurs en inférieurs, que chaque facette de la base présente un gradin au-dessous du plan de la paire correspondante d'éléments de facette supérieurs et inférieurs de façon à former entre la facette et ce plan un espace suffisant pour compenser toute différence existant entre l'angle que fait la facette avec l'axe de la base et l'angle requis de la surface optiquement plane respective, tel que déterminé par la paire correspondante d'éléments de facette supérieurs et inférieurs, et que la liaison de chaque couche réflectrice à la facette correspondante de la base polygonale est effectuée par déplacement de la résine liquide dès que celle-ci est entrée en contact avec la couche réflectrice.
2. Procédé selon la revendication 1, caractérisé en ce que les préformes maîtresses plates comportent chacune un substrat plat en verre ayant une surface optiquement polie, revêtue d'une couche de séparation dont la surface contiguë au substrat comporte une couche réflectrice de rayonnements.
3. Procédé selon la revendication 2, caractérisé en ce que la couche de séparation comporte une couche réflectrice en or recouvrant la surface polie de verre, une couche en platine superposée à la couche en or et une couche en nickel superposée à la couche en platine.
4. Procédé selon l'une quelconque des revendications 1 à 3, caractérisé en ce que la base polygonale à plusieurs facettes est réalisée par coulée et par usinage de telle façon chaque facette soit réglée sensiblement sous l'angle requis et qu'elle présente une surface sensiblement plane, l'angle et le poli de surface produits ayant un degré de précision inférieur à celui des surfaces optiquement plates des préformes maîtresses.
5. Procédé selon l'une quelconque des revendications 1 à 4, caractérisé en ce que chacun des espaces limités, d'un côté, par les surfaces à revêtement réflecteur des préformes maîtresses et, de l'autre côté, par les surfaces de facette à grandin de la base polygonale à plusieurs facettes ont une profondeur comprise entre 0,5 mm et 0,15 mm.
6. Procédé selon l'une quelconque des revendications précédentes, caractérisé en ce que la résine liquide est une résine thermodurcissable comportant un bisphénol époxyde A additionné d'un durcissant, résine liquide qui est appliquée sur au moins une partie de chaque surface de facette de la base polygonale et qui est déplacée de façon à couvrir ces surfaces et à remplir les espaces compris entre lesdites surfaces et les surfaces à revêtement réflecteur des préformes maîtresses, l'excès éventuel de résine liquide étant éliminé avant le durcissement de la résine.
7. Procédé selon l'une quelconque des revendications 1 à 6, caractérisé en ce que la base polygonale à plusieurs facettes et le support polygonal maître à plusieurs facettes affectent chacun _ la forme d'un octaèdre régulier et en ce que huit préformes maîtresses plates sont choisies parmi un plus grand nombre de préformes maîtresses de réplique revêtues chacune d'une couche réflectrice de séparation.
EP80201170A 1979-12-13 1980-12-08 Miroirs polygonaux pour balayage à rotation Expired EP0030765B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB7942998 1979-12-13
GB7942998A GB2065323B (en) 1979-12-13 1979-12-13 Making polygonal rotary scanners

Publications (3)

Publication Number Publication Date
EP0030765A2 EP0030765A2 (fr) 1981-06-24
EP0030765A3 EP0030765A3 (en) 1982-08-04
EP0030765B1 true EP0030765B1 (fr) 1985-07-03

Family

ID=10509818

Family Applications (1)

Application Number Title Priority Date Filing Date
EP80201170A Expired EP0030765B1 (fr) 1979-12-13 1980-12-08 Miroirs polygonaux pour balayage à rotation

Country Status (5)

Country Link
US (1) US4367014A (fr)
EP (1) EP0030765B1 (fr)
JP (1) JPS5694319A (fr)
DE (1) DE3070840D1 (fr)
GB (1) GB2065323B (fr)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE446889B (sv) * 1980-08-05 1986-10-13 Mitsubishi Heavy Ind Ltd Inloppslada vid en pappersmaskin
GB2087189B (en) * 1980-11-10 1984-08-01 Philips Electronic Associated Imaging apparatus
DE3324746C2 (de) * 1983-07-08 1986-04-10 Erwin Sick Gmbh Optik-Elektronik, 7808 Waldkirch Drehspiegelanordnung
US4575201A (en) * 1983-11-03 1986-03-11 Burroughs Corp. Method and apparatus for producing folded optical path devices
US4980016A (en) * 1985-08-07 1990-12-25 Canon Kabushiki Kaisha Process for producing electric circuit board
US4768861A (en) * 1987-03-25 1988-09-06 Epner Technology Incorporated Method of fabrication of multi-faceted scanner mirrors
US5408357A (en) * 1992-11-09 1995-04-18 Prince Corporation Display depolarizer
JP3283678B2 (ja) * 1994-01-26 2002-05-20 株式会社リコー 光走査装置
CA2150314A1 (fr) * 1994-07-26 1996-01-27 Daniel Schichman Systeme de lentille a relais, repete
US6542304B2 (en) * 1999-05-17 2003-04-01 Toolz, Ltd. Laser beam device with apertured reflective element
US9368371B2 (en) 2014-04-22 2016-06-14 Applied Materials, Inc. Retaining ring having inner surfaces with facets
NL2023384B1 (en) * 2019-06-26 2021-02-01 Confocal Nl B V Re-scan microscope system and method

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4093350A (en) * 1976-05-19 1978-06-06 Xerox Corporation System for centrifugally casting a thin film plastic in a replica process for providing multi-faceted polygonal scanners
US4101365A (en) * 1976-05-19 1978-07-18 Xerox Corporation Process of making high speed multifaceted polygonal scanners
JPS6049291B2 (ja) * 1977-06-21 1985-11-01 オリンパス光学工業株式会社 回転多面反射鏡
US4277141A (en) * 1979-03-28 1981-07-07 Tropel, Inc. Multifaceted mirror and assembly fixture and method of making such mirror

Also Published As

Publication number Publication date
GB2065323A (en) 1981-06-24
DE3070840D1 (en) 1985-08-08
US4367014A (en) 1983-01-04
EP0030765A3 (en) 1982-08-04
EP0030765A2 (fr) 1981-06-24
JPS5694319A (en) 1981-07-30
GB2065323B (en) 1983-11-30

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