EA200300416A1 - Способ и устройство для обработки электропроводных материалов с помощью атмосферной плазмы - Google Patents

Способ и устройство для обработки электропроводных материалов с помощью атмосферной плазмы

Info

Publication number
EA200300416A1
EA200300416A1 EA200300416A EA200300416A EA200300416A1 EA 200300416 A1 EA200300416 A1 EA 200300416A1 EA 200300416 A EA200300416 A EA 200300416A EA 200300416 A EA200300416 A EA 200300416A EA 200300416 A1 EA200300416 A1 EA 200300416A1
Authority
EA
Eurasian Patent Office
Prior art keywords
treated
jet
jets
plasma
cathodic
Prior art date
Application number
EA200300416A
Other languages
English (en)
Other versions
EA004439B1 (ru
Inventor
Павел Кулик
Анатолий Сайченко
Наиль Мусин
Original Assignee
Апит Корп. С.А.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Апит Корп. С.А. filed Critical Апит Корп. С.А.
Publication of EA200300416A1 publication Critical patent/EA200300416A1/ru
Publication of EA004439B1 publication Critical patent/EA004439B1/ru

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/401—Oxides containing silicon
    • C23C16/402—Silicon dioxide
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/513—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using plasma jets
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/44—Plasma torches using an arc using more than one torch

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Physics & Mathematics (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Inorganic Chemistry (AREA)
  • Plasma Technology (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Treatment Of Fiber Materials (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Chemical Vapour Deposition (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
  • Discharge Heating (AREA)

Abstract

Предлагаемое изобретение относится к атмосферно-плазменному способу обработки поверхности объекта, включающему действие генерирования плазменных струй с помощью плазмоструйных генераторов, направляемых на поверхность обрабатываемого объекта, и действие перемещения обрабатываемого объекта относительно плазмоструйных генераторов. По меньшей мере одна из плазменных струй является катодной плазменной струёй, и по меньшей мере одна плазменная струя является анодной плазменной струёй, при этом место приложения к поверхности обрабатываемого объекта анодной плазменной струи находится вблизи места приложения катодной плазменной струи.Международная заявка была опубликована вместе с отчетом о международном поиске.
EA200300416A 2000-11-10 2001-11-12 Способ и устройство для обработки электропроводных материалов с помощью атмосферной плазмы EA004439B1 (ru)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP00811065 2000-11-10
PCT/IB2001/002121 WO2002039791A1 (fr) 2000-11-10 2001-11-12 Procede de traitement par plasma atmospherique de materiaux conducteurs d'electricite et dispositif pour sa mise en oeuvre

Publications (2)

Publication Number Publication Date
EA200300416A1 true EA200300416A1 (ru) 2003-10-30
EA004439B1 EA004439B1 (ru) 2004-04-29

Family

ID=8175021

Family Applications (1)

Application Number Title Priority Date Filing Date
EA200300416A EA004439B1 (ru) 2000-11-10 2001-11-12 Способ и устройство для обработки электропроводных материалов с помощью атмосферной плазмы

Country Status (12)

Country Link
US (1) US6949716B2 (ru)
EP (2) EP1613133B1 (ru)
JP (1) JP2004514054A (ru)
CN (1) CN1265684C (ru)
AT (1) ATE315326T1 (ru)
AU (1) AU2002212616A1 (ru)
BR (1) BR0115035A (ru)
CA (1) CA2424891A1 (ru)
DE (1) DE60116522T2 (ru)
EA (1) EA004439B1 (ru)
UA (1) UA75613C2 (ru)
WO (1) WO2002039791A1 (ru)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10157191A1 (de) * 2001-11-23 2003-06-05 Fritzmeier Georg Gmbh & Co Mikrobiologische Energiequelle zum Antrieb eines Verbrauchers
KR100464856B1 (ko) * 2002-11-07 2005-01-05 삼성전자주식회사 표면 식각 방법 및 실리콘 기판 이면 식각 방법.
FR2856079B1 (fr) * 2003-06-11 2006-07-14 Pechiney Rhenalu Procede de traitement de surface pour toles et bandes en alliage d'aluminium
CN1716557A (zh) * 2004-02-25 2006-01-04 库力索法投资公司 用于引线焊接机的激光清洁系统
JP2005285520A (ja) * 2004-03-29 2005-10-13 Hiroshi Takigawa プラズマ発生用電極、プラズマ発生装置及びプラズマ処理装置
JP2005293945A (ja) * 2004-03-31 2005-10-20 Tama Tlo Kk プラズマ加熱装置およびノズル付き電極
JP4658506B2 (ja) 2004-03-31 2011-03-23 浩史 滝川 パルスアークプラズマ生成用電源回路及びパルスアークプラズマ処理装置
DE102004033728B4 (de) * 2004-07-13 2009-07-23 Plasmatreat Gmbh Verfahren zum Bearbeiten und Verkleben von Werkstücken aus einem Metall oder einer Metalllegierung mit einer hydratisierten Oxid- und/oder Hydroxidschicht
BRPI0514309B1 (pt) 2004-08-13 2016-03-29 Force Technology método para melhoria de um processo envolvendo um objeto sólido e um gás
PL1877351T3 (pl) * 2004-11-19 2009-06-30 Vetrotech Saint Gobain Int Ag Sposób i urządzenie do pasmowej i powierzchniowej obróbki powierzchni górnej tafli szklanych
DE102005012296A1 (de) * 2005-03-17 2006-09-21 Sms Demag Ag Verfahren und Vorrichtung zum Entzundern eines Metallbandes
US20060219754A1 (en) * 2005-03-31 2006-10-05 Horst Clauberg Bonding wire cleaning unit and method of wire bonding using same
SK51082006A3 (sk) * 2006-12-05 2008-07-07 Fakulta Matematiky, Fyziky A Informatiky Univerzitfakulta Matematiky, Fyziky A Informatiky Univerzity Komensk�Hoy Komensk�Ho Zariadenie a spôsob úpravy povrchov kovov a metaloZariadenie a spôsob úpravy povrchov kovov a metaloidov, oxidov kovov a oxidov metaloidov a nitridovidov, oxidov kovov a oxidov metaloidov a nitridovkovov a nitridov metaloidovkovov a nitridov metaloidov
US8399795B2 (en) * 2007-05-11 2013-03-19 Force Technology Enhancing plasma surface modification using high intensity and high power ultrasonic acoustic waves
EP2420582A2 (en) * 2009-04-14 2012-02-22 Dawonsys Co., Ltd. Surface treatment apparatus and method using plasma
DE102012104224A1 (de) * 2012-05-15 2013-11-21 Plasmatreat Gmbh Vorrichtung und Verfahren zur Behandlung eines Drahts aus leitfähigem Material
JP6482014B2 (ja) * 2014-07-30 2019-03-13 株式会社イーツーラボ プラズマ表面処理装置およびプラズマ表面処理システム
NL2014022B1 (en) * 2014-12-19 2016-10-12 Ihc Holland Ie Bv Device and method for crushing rock by means of pulsed electric energy.
JP6224139B2 (ja) * 2016-01-22 2017-11-01 沖野　晃俊 プラズマ処理装置
DE102020114016A1 (de) 2020-05-26 2021-12-02 Einhell Germany Ag Plasmabehandlung einer Trägerfolie für eine Elektrode eines Lithium-Ionen-Akkumulators
KR102451424B1 (ko) * 2020-07-14 2022-10-05 이창훈 롤투롤 플라즈마 생성 장치를 이용한 기재의 표면 세정 시스템 및 방법
DE102021118156A1 (de) 2021-07-14 2023-01-19 Rolls-Royce Deutschland Ltd & Co Kg Verfahren zur Oberflächenbehandlung eines Drahtes, eine supraleitende Vorrichtung, eine elektrische Maschine, ein Luftfahrzeug und eine Oberflächenbehandlungsvorrichtung

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3050616A (en) * 1957-09-09 1962-08-21 Union Carbide Corp Arc process and apparatus
FR2039566A5 (ru) * 1969-03-31 1971-01-15 Soudure Autogene Elect
US3940641A (en) * 1974-04-05 1976-02-24 Reynolds Metals Company Plasma jet electrode for magnetohydrodynamic generators
GB1493394A (en) * 1974-06-07 1977-11-30 Nat Res Dev Plasma heater assembly
US5548611A (en) * 1993-05-19 1996-08-20 Schuller International, Inc. Method for the melting, combustion or incineration of materials and apparatus therefor
JP3204801B2 (ja) * 1993-06-18 2001-09-04 富士写真フイルム株式会社 真空グロー放電処理装置及び処理方法
WO1997018692A1 (fr) * 1995-11-13 1997-05-22 Ist Instant Surface Technology S.A. Generateur de plasma a quatre buses pour la formation d'un jet active
US6050215A (en) 1995-11-13 2000-04-18 Ist Instant Surface Technology S.A. Plasma stream generator with a closed configuration arc
WO1997018694A1 (fr) * 1995-11-13 1997-05-22 Ist Instant Surface Technology S.A. Reacteur a jet de plasma
JPH11106947A (ja) * 1997-09-29 1999-04-20 Nkk Corp 金属板の表面改質方法
JPH11222530A (ja) * 1998-02-06 1999-08-17 Nitto Denko Corp フッ素樹脂被覆金属線の製造方法

Also Published As

Publication number Publication date
EP1332650B1 (fr) 2006-01-04
JP2004514054A (ja) 2004-05-13
BR0115035A (pt) 2004-02-03
EP1613133B1 (fr) 2013-01-16
DE60116522T2 (de) 2006-08-03
US20040026385A1 (en) 2004-02-12
AU2002212616A1 (en) 2002-05-21
CN1471800A (zh) 2004-01-28
ATE315326T1 (de) 2006-02-15
WO2002039791A1 (fr) 2002-05-16
DE60116522D1 (de) 2006-03-30
CA2424891A1 (fr) 2002-05-16
EP1332650A1 (fr) 2003-08-06
EP1613133A3 (fr) 2011-04-27
CN1265684C (zh) 2006-07-19
US6949716B2 (en) 2005-09-27
UA75613C2 (en) 2006-05-15
EA004439B1 (ru) 2004-04-29
EP1613133A2 (fr) 2006-01-04

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Legal Events

Date Code Title Description
MM4A Lapse of a eurasian patent due to non-payment of renewal fees within the time limit in the following designated state(s)

Designated state(s): AM AZ BY KZ KG MD TJ TM

MM4A Lapse of a eurasian patent due to non-payment of renewal fees within the time limit in the following designated state(s)

Designated state(s): RU