EA199900738A1 - Аппарат и способ управления микромассовым расходом - Google Patents

Аппарат и способ управления микромассовым расходом

Info

Publication number
EA199900738A1
EA199900738A1 EA199900738A EA199900738A EA199900738A1 EA 199900738 A1 EA199900738 A1 EA 199900738A1 EA 199900738 A EA199900738 A EA 199900738A EA 199900738 A EA199900738 A EA 199900738A EA 199900738 A1 EA199900738 A1 EA 199900738A1
Authority
EA
Eurasian Patent Office
Prior art keywords
throttled
restrictor
flow rate
flow
actuator
Prior art date
Application number
EA199900738A
Other languages
English (en)
Other versions
EA001508B1 (ru
Inventor
Чарлз Е. Миллер
Джерри С. Висс
Ричард Б. мл. Бэлсли
Луис Т. Йосида
Майкл Штайнбах
Original Assignee
Энджиниринг Межерментс Компани
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Энджиниринг Межерментс Компани filed Critical Энджиниринг Межерментс Компани
Publication of EA199900738A1 publication Critical patent/EA199900738A1/ru
Publication of EA001508B1 publication Critical patent/EA001508B1/ru

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/004—Actuating devices; Operating means; Releasing devices actuated by piezoelectric means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/004—Actuating devices; Operating means; Releasing devices actuated by piezoelectric means
    • F16K31/005—Piezoelectric benders
    • F16K31/006—Piezoelectric benders having a free end
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0694—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means or flow sources of very small size, e.g. microfluidics
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0402—Cleaning, repairing, or assembling
    • Y10T137/0491—Valve or valve element assembling, disassembling, or replacing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/598—With repair, tapping, assembly, or disassembly means
    • Y10T137/5987—Solenoid or electromagnetically operated valve
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7761—Electrically actuated valve

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Flow Control (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
  • Respiratory Apparatuses And Protective Means (AREA)

Abstract

Регулятор (10) микромассового расхода имеет дросселируемый ограничитель (28) со звуковой скоростью потока, обеспечивающий колебание клапана (26) для непрерывно повторяющегося открытия и закрытия дросселируемого ограничителя (28) со звуковой скоростью потока в последовательности с временной модуляцией, чтобы устанавливать или изменять массовый расход газа через дросселируемый ограничитель (28) со звуковой скоростью потока за период времени до какого-либо значения между отсутствием потока и максимальным массовым расходом. Биморфный пьезоэлектрический исполнительный механизм (40) покрывают напыленным диэлектрическим слоем (78} и затем инкапсулируют в покрытие (80) из нержавеющей стали или другого металла. Элемент (46) закрытия на исполнительном механизме (40) точно устанавливается на седло (70) клапана посредством приведения в действие исполнительного механизма (40) для прижатия элемента (46) закрытия в обмазке связующего вещества к седлу (70) клапана до отверждения связующего вещества.Международная заявка была опубликована вместе с отчетом о международном поиске.
EA199900738A 1997-02-11 1998-02-11 Устройство регулятора потока текучей среды, исполнительный механизм клапана и способ его изготовления EA001508B1 (ru)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/799,304 US6062256A (en) 1997-02-11 1997-02-11 Micro mass flow control apparatus and method
PCT/US1998/002805 WO1998037343A2 (en) 1997-02-11 1998-02-11 Micro mass flow control apparatus and method

Publications (2)

Publication Number Publication Date
EA199900738A1 true EA199900738A1 (ru) 2000-02-28
EA001508B1 EA001508B1 (ru) 2001-04-23

Family

ID=25175550

Family Applications (1)

Application Number Title Priority Date Filing Date
EA199900738A EA001508B1 (ru) 1997-02-11 1998-02-11 Устройство регулятора потока текучей среды, исполнительный механизм клапана и способ его изготовления

Country Status (7)

Country Link
US (3) US6062256A (ru)
EP (1) EP0960364A4 (ru)
JP (1) JP2001513922A (ru)
KR (1) KR20000070952A (ru)
CN (1) CN1158585C (ru)
EA (1) EA001508B1 (ru)
WO (1) WO1998037343A2 (ru)

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US6062256A (en) 2000-05-16
KR20000070952A (ko) 2000-11-25
EP0960364A4 (en) 2004-09-01
EP0960364A2 (en) 1999-12-01
CN1158585C (zh) 2004-07-21
CN1247605A (zh) 2000-03-15
WO1998037343A3 (en) 1998-11-26
US6095175A (en) 2000-08-01
JP2001513922A (ja) 2001-09-04
EA001508B1 (ru) 2001-04-23
WO1998037343A2 (en) 1998-08-27
US6230731B1 (en) 2001-05-15

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