DK586678A - Fremgangsmaade til fremstilling af saerdeles rene siliciumkrystaller - Google Patents

Fremgangsmaade til fremstilling af saerdeles rene siliciumkrystaller

Info

Publication number
DK586678A
DK586678A DK586678A DK586678A DK586678A DK 586678 A DK586678 A DK 586678A DK 586678 A DK586678 A DK 586678A DK 586678 A DK586678 A DK 586678A DK 586678 A DK586678 A DK 586678A
Authority
DK
Denmark
Prior art keywords
procedure
preparation
pure silicon
silicon crystals
crystals
Prior art date
Application number
DK586678A
Other languages
Danish (da)
English (en)
Inventor
F Koehl
Original Assignee
Wacker Chemitronic
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wacker Chemitronic filed Critical Wacker Chemitronic
Publication of DK586678A publication Critical patent/DK586678A/da

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/06—Silicon
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/30—Mechanisms for rotating or moving either the melt or the crystal

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
DK586678A 1977-12-30 1978-12-29 Fremgangsmaade til fremstilling af saerdeles rene siliciumkrystaller DK586678A (da)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2758888A DE2758888C2 (de) 1977-12-30 1977-12-30 Verfahren zur Herstellung reinster Siliciumeinkristalle

Publications (1)

Publication Number Publication Date
DK586678A true DK586678A (da) 1979-07-01

Family

ID=6027734

Family Applications (1)

Application Number Title Priority Date Filing Date
DK586678A DK586678A (da) 1977-12-30 1978-12-29 Fremgangsmaade til fremstilling af saerdeles rene siliciumkrystaller

Country Status (8)

Country Link
US (1) US4239585A (de)
JP (1) JPS5494478A (de)
DE (1) DE2758888C2 (de)
DK (1) DK586678A (de)
FR (1) FR2413124A1 (de)
GB (1) GB2014871B (de)
IT (1) IT1109399B (de)
NL (1) NL7812363A (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3069547D1 (en) * 1980-06-26 1984-12-06 Ibm Process for controlling the oxygen content of silicon ingots pulled by the czochralski method
EP0055619B1 (de) * 1980-12-29 1985-05-29 Monsanto Company Verfahren zur Regelung der Konzentration und Distribution von Sauerstoff in Silizium, gezüchtet nach der Czochralskimethode
US4511428A (en) * 1982-07-09 1985-04-16 International Business Machines Corporation Method of controlling oxygen content and distribution in grown silicon crystals
DE3333960A1 (de) * 1983-09-20 1985-04-04 Wacker-Chemitronic Gesellschaft für Elektronik-Grundstoffe mbH, 8263 Burghausen Verfahren zur herstellung von versetzungsfreien einkristallstaeben aus silicium
JPS6262520U (de) * 1985-10-11 1987-04-18
US4659423A (en) * 1986-04-28 1987-04-21 International Business Machines Corporation Semiconductor crystal growth via variable melt rotation
US5215620A (en) * 1989-09-19 1993-06-01 Shin-Etsu Handotai Co. Ltd. Method for pulling a silicon single crystal by imposing a periodic rotation rate on a constant rotation rate
JPH0699225B2 (ja) * 1989-10-23 1994-12-07 信越半導体株式会社 シリコン単結晶引上げ方法
JPH0777999B2 (ja) * 1989-11-24 1995-08-23 信越半導体株式会社 アンチモンドープ単結晶シリコンの育成方法
JP3341378B2 (ja) * 1993-08-25 2002-11-05 富士通株式会社 シリコン結晶中の水素濃度測定方法及びシリコン結晶の製造方法
US5593498A (en) * 1995-06-09 1997-01-14 Memc Electronic Materials, Inc. Apparatus for rotating a crucible of a crystal pulling machine
US5911825A (en) * 1997-09-30 1999-06-15 Seh America, Inc. Low oxygen heater
EP1560951B1 (de) * 2002-11-12 2010-10-27 MEMC Electronic Materials, Inc. Verfahren zur herstellung eines siliciumeinkristalles unter verwendung der rotation des tiegels um die temperaturgradienten zu steuern

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB797377A (en) 1955-10-18 1958-07-02 Gen Electric Co Ltd Improvements in or relating to the production of semi-conductor bodies
GB838848A (en) * 1955-11-30 1960-06-22 Rauland Corp Improvements in or relating to methods of manufacturing crystalline material
US3275417A (en) * 1963-10-15 1966-09-27 Texas Instruments Inc Production of dislocation-free silicon single crystals
DE1519922A1 (de) * 1966-06-10 1970-03-12 Halbleiterwerk Frankfurt Oder Verfahren und Vorrichtung zum Ziehen von Kristallen aus einem Schmelztiegel
DE1644020A1 (de) * 1967-10-04 1971-03-25 Siemens Ag Verfahren zum Herstellen von tiegelgezogenen Einkristallstaeben mit homogener Dotierung
US3929557A (en) * 1973-06-11 1975-12-30 Us Air Force Periodically and alternately accelerating and decelerating rotation rate of a feed crystal
DE2438852C3 (de) * 1974-08-13 1980-02-07 Siemens Ag, 1000 Berlin Und 8000 Muenchen Verfahren zum Herstellen von homogen-dotierten Halbleitereinkristallstäben
US4010064A (en) 1975-05-27 1977-03-01 International Business Machines Corporation Controlling the oxygen content of Czochralski process of silicon crystals by sandblasting silica vessel
US4040895A (en) * 1975-10-22 1977-08-09 International Business Machines Corporation Control of oxygen in silicon crystals

Also Published As

Publication number Publication date
NL7812363A (nl) 1979-07-03
DE2758888A1 (de) 1979-07-05
DE2758888C2 (de) 1983-09-22
JPS5727077B2 (de) 1982-06-08
FR2413124A1 (fr) 1979-07-27
IT1109399B (it) 1985-12-16
JPS5494478A (en) 1979-07-26
IT7852468A0 (it) 1978-12-28
FR2413124B1 (de) 1983-12-30
US4239585A (en) 1980-12-16
GB2014871B (en) 1982-04-21
GB2014871A (en) 1979-09-05

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Legal Events

Date Code Title Description
ATS Application withdrawn