DK3044970T3 - MICROELECTROMECHANICAL DEVICE FOR GENERATION OF PHYSICAL POWER - Google Patents

MICROELECTROMECHANICAL DEVICE FOR GENERATION OF PHYSICAL POWER Download PDF

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Publication number
DK3044970T3
DK3044970T3 DK14780629.3T DK14780629T DK3044970T3 DK 3044970 T3 DK3044970 T3 DK 3044970T3 DK 14780629 T DK14780629 T DK 14780629T DK 3044970 T3 DK3044970 T3 DK 3044970T3
Authority
DK
Denmark
Prior art keywords
piezoelectric
elements
bending
movable
microelectromechanical device
Prior art date
Application number
DK14780629.3T
Other languages
Danish (da)
English (en)
Inventor
Shay Kaplan
Yuval Cohen
Simon Meir Ben
Original Assignee
Audio Pixels Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Audio Pixels Ltd filed Critical Audio Pixels Ltd
Application granted granted Critical
Publication of DK3044970T3 publication Critical patent/DK3044970T3/en

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Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/04—Microphones
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00—Piezoelectric transducers; Electrostrictive transducers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00—Piezoelectric transducers; Electrostrictive transducers
    • H04R17/005—Piezoelectric transducers; Electrostrictive transducers using a piezoelectric polymer
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/704—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/802—Circuitry or processes for operating piezoelectric or electrostrictive devices not otherwise provided for, e.g. drive circuits
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R2201/00—Details of transducers, loudspeakers or microphones covered by H04R1/00 but not provided for in any of its subgroups
    • H04R2201/003—Mems transducers or their use

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
DK14780629.3T 2013-09-09 2014-09-08 MICROELECTROMECHANICAL DEVICE FOR GENERATION OF PHYSICAL POWER DK3044970T3 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US14/021,152 US9510103B2 (en) 2013-09-09 2013-09-09 Microelectromechanical apparatus for generating a physical effect
PCT/IL2014/050798 WO2015033346A1 (en) 2013-09-09 2014-09-08 Microelectromechanical apparatus for generating a physical effect

Publications (1)

Publication Number Publication Date
DK3044970T3 true DK3044970T3 (en) 2019-03-04

Family

ID=51659977

Family Applications (1)

Application Number Title Priority Date Filing Date
DK14780629.3T DK3044970T3 (en) 2013-09-09 2014-09-08 MICROELECTROMECHANICAL DEVICE FOR GENERATION OF PHYSICAL POWER

Country Status (8)

Country Link
US (2) US9510103B2 (https=)
EP (1) EP3044970B1 (https=)
JP (1) JP6472804B2 (https=)
KR (1) KR102180850B1 (https=)
CN (1) CN105612764B (https=)
DK (1) DK3044970T3 (https=)
IL (1) IL244088B (https=)
WO (1) WO2015033346A1 (https=)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9510103B2 (en) 2013-09-09 2016-11-29 Audio Pixels Ltd. Microelectromechanical apparatus for generating a physical effect
DE102013224718A1 (de) * 2013-12-03 2015-06-03 Robert Bosch Gmbh MEMS-Mikrofonbauelement und Vorrichtung mit einem solchen MEMS-Mikrofonbauelement
DE102014108984B4 (de) * 2014-06-26 2017-04-06 Tdk Corporation Wandlerelement
US10567883B2 (en) 2015-07-22 2020-02-18 Audio Pixels Ltd. Piezo-electric actuators
CN107852555B (zh) * 2015-07-22 2020-03-13 音频像素有限公司 Dsr扬声器元件及制造dsr扬声器元件的方法
DE102015114242A1 (de) 2015-08-27 2017-03-02 USound GmbH MEMS-Lautsprecher mit Positionssensor
DE102015116707A1 (de) * 2015-10-01 2017-04-06 USound GmbH Flexible MEMS-Leiterplatteneinheit sowie Schallwandleranordnung
US10516943B2 (en) * 2016-05-04 2019-12-24 Infineon Technologies Ag Microelectromechanical device, an array of microelectromechanical devices, a method of manufacturing a microelectromechanical device, and a method of operating a microelectromechanical device
US10636936B2 (en) * 2018-03-05 2020-04-28 Sharp Kabushiki Kaisha MEMS array system and method of manipulating objects
EP3432594A1 (en) 2018-03-09 2019-01-23 Oticon A/s Audio device with mems speaker
US11697135B2 (en) * 2018-11-09 2023-07-11 Texas Instruments Incorporated Multi-frequency hybrid piezo actuation and capactive transducer
WO2020136994A1 (ja) 2018-12-27 2020-07-02 株式会社村田製作所 圧電トランスデューサ
IT201900001017A1 (it) * 2019-01-23 2020-07-23 St Microelectronics Srl Trasduttore elettroacustico microelettromeccanico ad attuazione piezoelettrica e relativo procedimento di fabbricazione
TWI803124B (zh) 2021-12-29 2023-05-21 財團法人工業技術研究院 具多重振動部的微機電裝置
IL299527A (en) 2022-12-26 2024-07-01 Audio Pixels Ltd Electro-Mechanical Device Comprising An Electrically Split Array Of Moving Elements, And Methods Of Controlling Thereof
CN116317694B (zh) * 2023-05-18 2023-08-04 南京航空航天大学 一种利用挠曲电效应调控压电器件频率及电势分布的方法
KR102808604B1 (ko) * 2023-09-11 2025-05-20 연세대학교 산학협력단 보호층이 형성된 2차원 압전 물질 기반의 마이크로폰 및 이의 제조 방법

Family Cites Families (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3736896A1 (de) 1987-10-30 1989-05-11 Siemens Ag Elektroakustischer wandler
EP1438754B1 (de) 2001-10-22 2005-12-28 miniswys SA Piezoelektrischer antrieb
US6710950B2 (en) 2002-06-05 2004-03-23 Nokia Mobile Phones Limited Piezoelectric actuator for digital camera optical system
KR100512960B1 (ko) 2002-09-26 2005-09-07 삼성전자주식회사 플렉서블 ｍｅｍｓ 트랜스듀서와 그 제조방법 및 이를채용한 플렉서블 ｍｅｍｓ 무선 마이크로폰
EP1648038B1 (en) 2003-07-22 2011-02-16 NGK Insulators, Ltd. Actuator element and device having actuator element
US7141915B2 (en) * 2003-07-22 2006-11-28 Ngk Insulators, Ltd. Actuator device
WO2007007733A1 (ja) 2005-07-11 2007-01-18 Matsushita Electric Industrial Co., Ltd. 光源、光源装置、レーザ画像形成装置、および集積回路
CA2616268A1 (en) 2005-07-22 2007-02-01 Qualcomm Incorporated Mems devices having support structures and methods of fabricating the same
EP2495212A3 (en) * 2005-07-22 2012-10-31 QUALCOMM MEMS Technologies, Inc. Mems devices having support structures and methods of fabricating the same
US7880565B2 (en) 2005-08-03 2011-02-01 Kolo Technologies, Inc. Micro-electro-mechanical transducer having a surface plate
US8085964B2 (en) 2006-05-22 2011-12-27 Audio Pixels Ltd. Apparatus and methods for generating pressure waves
US8457338B2 (en) 2006-05-22 2013-06-04 Audio Pixels Ltd. Apparatus and methods for generating pressure waves
JP4925275B2 (ja) * 2006-08-28 2012-04-25 パナソニック株式会社 半導体装置
CN101953174B (zh) 2007-11-21 2014-12-10 奥迪欧彼塞尔斯有限公司 数字扬声器装置
KR101562339B1 (ko) 2008-09-25 2015-10-22 삼성전자 주식회사 압전형 마이크로 스피커 및 그 제조 방법
WO2010038229A2 (en) 2008-10-02 2010-04-08 Audio Pixels Ltd. Actuator apparatus with comb-drive component and methods useful for manufacturing and operating same
GB2467776A (en) 2009-02-13 2010-08-18 Wolfson Microelectronics Plc Integrated MEMS transducer and circuitry
NO336140B1 (no) 2009-09-18 2015-05-26 Sintef Aktuator for mikro optisk enhet
KR101561662B1 (ko) 2009-09-29 2015-10-21 삼성전자주식회사 곡선형 리드선들을 가진 압전형 마이크로 스피커 및 그 제조 방법
DE202010000890U1 (de) 2010-01-14 2010-04-08 Chen, Hui San Leitungsanordnung für eine LED-Lampe
WO2011111042A1 (en) 2010-03-11 2011-09-15 Audio Pixels Ltd. Electrostatic parallel plate actuators whose moving elements are driven only by electrostatic force and methods useful in conjunction therewith
KR20120036631A (ko) 2010-10-08 2012-04-18 삼성전자주식회사 압전형 마이크로 스피커 및 그 제조방법
KR101831013B1 (ko) 2010-11-26 2018-02-21 오디오 픽셀즈 리미티드 액츄에이터 어레이에서의 개별 어드레싱 및 잡음 감소를 위한 장치 및 방법
US8811636B2 (en) * 2011-11-29 2014-08-19 Qualcomm Mems Technologies, Inc. Microspeaker with piezoelectric, metal and dielectric membrane
US9029963B2 (en) 2012-09-25 2015-05-12 Sand 9, Inc. MEMS microphone
US8971555B2 (en) 2013-06-13 2015-03-03 Koss Corporation Multi-mode, wearable, wireless microphone
US9510103B2 (en) * 2013-09-09 2016-11-29 Audio Pixels Ltd. Microelectromechanical apparatus for generating a physical effect
US10327052B2 (en) 2015-04-08 2019-06-18 King Abdullah University Of Science And Technology Piezoelectric array elements for sound reconstruction with a digital input

Also Published As

Publication number Publication date
JP2016536155A (ja) 2016-11-24
EP3044970A1 (en) 2016-07-20
CN105612764B (zh) 2018-10-09
US20170033274A1 (en) 2017-02-02
US9510103B2 (en) 2016-11-29
IL244088A0 (en) 2016-04-21
IL244088B (en) 2020-06-30
US10522733B2 (en) 2019-12-31
CN105612764A (zh) 2016-05-25
KR102180850B1 (ko) 2020-11-20
US20150071467A1 (en) 2015-03-12
WO2015033346A1 (en) 2015-03-12
KR20160069517A (ko) 2016-06-16
EP3044970B1 (en) 2018-11-07
JP6472804B2 (ja) 2019-02-20

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