CN105612764B - 用于产生物理效应的微机电装置 - Google Patents

用于产生物理效应的微机电装置 Download PDF

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Publication number
CN105612764B
CN105612764B CN201480048798.5A CN201480048798A CN105612764B CN 105612764 B CN105612764 B CN 105612764B CN 201480048798 A CN201480048798 A CN 201480048798A CN 105612764 B CN105612764 B CN 105612764B
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CN
China
Prior art keywords
moving element
piezoelectric
piezoelectric member
electric field
coupled
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201480048798.5A
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English (en)
Chinese (zh)
Other versions
CN105612764A (zh
Inventor
莎伊·卡普兰
尤沃·科恩
M·本西蒙
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Audio Pixels Ltd
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Audio Pixels Ltd
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Publication date
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Publication of CN105612764A publication Critical patent/CN105612764A/zh
Application granted granted Critical
Publication of CN105612764B publication Critical patent/CN105612764B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/802—Circuitry or processes for operating piezoelectric or electrostrictive devices not otherwise provided for, e.g. drive circuits
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/04—Microphones
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00—Piezoelectric transducers; Electrostrictive transducers
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00—Piezoelectric transducers; Electrostrictive transducers
    • H04R17/005—Piezoelectric transducers; Electrostrictive transducers using a piezoelectric polymer
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/704—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R2201/00—Details of transducers, loudspeakers or microphones covered by H04R1/00 but not provided for in any of its subgroups
    • H04R2201/003—Mems transducers or their use

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
CN201480048798.5A 2013-09-09 2014-09-08 用于产生物理效应的微机电装置 Expired - Fee Related CN105612764B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US14/021,152 US9510103B2 (en) 2013-09-09 2013-09-09 Microelectromechanical apparatus for generating a physical effect
US14/021,152 2013-09-09
PCT/IL2014/050798 WO2015033346A1 (en) 2013-09-09 2014-09-08 Microelectromechanical apparatus for generating a physical effect

Publications (2)

Publication Number Publication Date
CN105612764A CN105612764A (zh) 2016-05-25
CN105612764B true CN105612764B (zh) 2018-10-09

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201480048798.5A Expired - Fee Related CN105612764B (zh) 2013-09-09 2014-09-08 用于产生物理效应的微机电装置

Country Status (8)

Country Link
US (2) US9510103B2 (https=)
EP (1) EP3044970B1 (https=)
JP (1) JP6472804B2 (https=)
KR (1) KR102180850B1 (https=)
CN (1) CN105612764B (https=)
DK (1) DK3044970T3 (https=)
IL (1) IL244088B (https=)
WO (1) WO2015033346A1 (https=)

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DE102014108984B4 (de) * 2014-06-26 2017-04-06 Tdk Corporation Wandlerelement
US10567883B2 (en) 2015-07-22 2020-02-18 Audio Pixels Ltd. Piezo-electric actuators
CN107852555B (zh) * 2015-07-22 2020-03-13 音频像素有限公司 Dsr扬声器元件及制造dsr扬声器元件的方法
DE102015114242A1 (de) 2015-08-27 2017-03-02 USound GmbH MEMS-Lautsprecher mit Positionssensor
DE102015116707A1 (de) * 2015-10-01 2017-04-06 USound GmbH Flexible MEMS-Leiterplatteneinheit sowie Schallwandleranordnung
US10516943B2 (en) * 2016-05-04 2019-12-24 Infineon Technologies Ag Microelectromechanical device, an array of microelectromechanical devices, a method of manufacturing a microelectromechanical device, and a method of operating a microelectromechanical device
US10636936B2 (en) * 2018-03-05 2020-04-28 Sharp Kabushiki Kaisha MEMS array system and method of manipulating objects
EP3432594A1 (en) 2018-03-09 2019-01-23 Oticon A/s Audio device with mems speaker
US11697135B2 (en) * 2018-11-09 2023-07-11 Texas Instruments Incorporated Multi-frequency hybrid piezo actuation and capactive transducer
WO2020136994A1 (ja) 2018-12-27 2020-07-02 株式会社村田製作所 圧電トランスデューサ
IT201900001017A1 (it) * 2019-01-23 2020-07-23 St Microelectronics Srl Trasduttore elettroacustico microelettromeccanico ad attuazione piezoelettrica e relativo procedimento di fabbricazione
TWI803124B (zh) 2021-12-29 2023-05-21 財團法人工業技術研究院 具多重振動部的微機電裝置
IL299527A (en) 2022-12-26 2024-07-01 Audio Pixels Ltd Electro-Mechanical Device Comprising An Electrically Split Array Of Moving Elements, And Methods Of Controlling Thereof
CN116317694B (zh) * 2023-05-18 2023-08-04 南京航空航天大学 一种利用挠曲电效应调控压电器件频率及电势分布的方法
KR102808604B1 (ko) * 2023-09-11 2025-05-20 연세대학교 산학협력단 보호층이 형성된 2차원 압전 물질 기반의 마이크로폰 및 이의 제조 방법

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CN102576149A (zh) * 2009-09-18 2012-07-11 挪威科技工业研究院 用于移动微型机械元件的致动器

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CN102576149A (zh) * 2009-09-18 2012-07-11 挪威科技工业研究院 用于移动微型机械元件的致动器

Also Published As

Publication number Publication date
DK3044970T3 (en) 2019-03-04
JP2016536155A (ja) 2016-11-24
EP3044970A1 (en) 2016-07-20
US20170033274A1 (en) 2017-02-02
US9510103B2 (en) 2016-11-29
IL244088A0 (en) 2016-04-21
IL244088B (en) 2020-06-30
US10522733B2 (en) 2019-12-31
CN105612764A (zh) 2016-05-25
KR102180850B1 (ko) 2020-11-20
US20150071467A1 (en) 2015-03-12
WO2015033346A1 (en) 2015-03-12
KR20160069517A (ko) 2016-06-16
EP3044970B1 (en) 2018-11-07
JP6472804B2 (ja) 2019-02-20

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