DK2478404T3 - Aktuator til bevægelse af mikromekanisk element - Google Patents
Aktuator til bevægelse af mikromekanisk element Download PDFInfo
- Publication number
- DK2478404T3 DK2478404T3 DK10765764.5T DK10765764T DK2478404T3 DK 2478404 T3 DK2478404 T3 DK 2478404T3 DK 10765764 T DK10765764 T DK 10765764T DK 2478404 T3 DK2478404 T3 DK 2478404T3
- Authority
- DK
- Denmark
- Prior art keywords
- movement
- actuator
- micro
- mechanical
- mechanical movement
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
- G02B7/1822—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors comprising means for aligning the optical axis
- G02B7/1827—Motorised alignment
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2047—Membrane type
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/853—Ceramic compositions
- H10N30/8548—Lead-based oxides
- H10N30/8554—Lead-zirconium titanate [PZT] based
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Optics & Photonics (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Micromachines (AREA)
- Spectrometry And Color Measurement (AREA)
- Mounting And Adjusting Of Optical Elements (AREA)
- Lasers (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NO20093022A NO336140B1 (no) | 2009-09-18 | 2009-09-18 | Aktuator for mikro optisk enhet |
| PCT/EP2010/063628 WO2011033028A1 (en) | 2009-09-18 | 2010-09-16 | Actuator for moving a micro mechanical element |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DK2478404T3 true DK2478404T3 (da) | 2020-05-11 |
Family
ID=43416478
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DK10765764.5T DK2478404T3 (da) | 2009-09-18 | 2010-09-16 | Aktuator til bevægelse af mikromekanisk element |
Country Status (10)
| Country | Link |
|---|---|
| US (2) | US9250418B2 (da) |
| EP (1) | EP2478404B1 (da) |
| JP (1) | JP5778677B2 (da) |
| CN (1) | CN102576149B (da) |
| BR (1) | BR112012006044B1 (da) |
| CA (1) | CA2770937C (da) |
| DK (1) | DK2478404T3 (da) |
| EA (1) | EA021493B1 (da) |
| NO (1) | NO336140B1 (da) |
| WO (1) | WO2011033028A1 (da) |
Families Citing this family (29)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9236552B2 (en) | 2013-04-04 | 2016-01-12 | William N. Carr | Thermoelectric micro-platform for cooling and temperature sensing |
| DE102013105557B4 (de) * | 2013-05-29 | 2015-06-11 | Michael Förg | Piezoelektrischer Aktor |
| US9510103B2 (en) | 2013-09-09 | 2016-11-29 | Audio Pixels Ltd. | Microelectromechanical apparatus for generating a physical effect |
| JP6284076B2 (ja) * | 2013-11-22 | 2018-02-28 | 国立大学法人豊橋技術科学大学 | 物理・化学センサおよび特定物質の測定方法 |
| JP6284427B2 (ja) * | 2014-05-21 | 2018-02-28 | スタンレー電気株式会社 | 光偏向器及びその製造方法 |
| US9481572B2 (en) * | 2014-07-17 | 2016-11-01 | Texas Instruments Incorporated | Optical electronic device and method of fabrication |
| US9372114B2 (en) * | 2014-08-20 | 2016-06-21 | William N. Carr | Spectrophotometer comprising an integrated Fabry-Perot interferometer |
| JP2018520612A (ja) | 2015-07-22 | 2018-07-26 | オーディオ ピクセルズ エルティーディー．Ａｕｄｉｏ Ｐｉｘｅｌｓ Ｌｔｄ． | Ｄｓｒスピーカ素子及びその製造方法 |
| US10567883B2 (en) | 2015-07-22 | 2020-02-18 | Audio Pixels Ltd. | Piezo-electric actuators |
| NO344002B1 (en) | 2015-09-29 | 2019-08-12 | Sintef Tto As | Optical gas detector |
| NO20151312A1 (en) | 2015-10-05 | 2017-04-06 | Sintef Tto As | Infrared source |
| TWI581004B (zh) * | 2015-11-18 | 2017-05-01 | 財團法人工業技術研究院 | 可調式光學裝置 |
| KR101722876B1 (ko) * | 2016-04-25 | 2017-04-03 | 서울대학교산학협력단 | 루프로 연결되어 지능적으로 변형하는 구동기 |
| NO20161086A1 (no) * | 2016-06-29 | 2018-01-01 | Tunable As | Modulerbar Fabry-Perot |
| CN106533250B (zh) * | 2016-12-21 | 2018-08-24 | 深圳大学 | 一种多定子平面阵列结构的超声波电机 |
| IT201700091226A1 (it) * | 2017-08-07 | 2019-02-07 | St Microelectronics Srl | Dispositivo mems comprendente una membrana ed un attuatore per controllare la curvatura della membrana e compensare deformazioni indesiderate della membrana |
| CN107324275B (zh) * | 2017-08-29 | 2019-01-04 | 山东大学 | 一种串联环扇形压电三维微伺服平台的结构 |
| DE102018200378A1 (de) | 2018-01-11 | 2019-07-11 | Robert Bosch Gmbh | Interferometer und Verfahren zum Herstellen eines Interferometers |
| DE102018220422A1 (de) | 2018-11-28 | 2020-05-28 | Robert Bosch Gmbh | Aktuationseinrichtung für ein mikromechanisches Bauelement, mikromechanisches Bauelement und Verfahren zum Herstellen eines mikromechanisches Bauelements |
| DE102018220451A1 (de) | 2018-11-28 | 2020-05-28 | Robert Bosch Gmbh | Optische Filtereinrichtung und Verfahren zum Herstellen einer optischen Filtereinrichtung |
| NO20191052A1 (en) | 2019-09-02 | 2021-03-03 | Optronics Tech As | Gas detector |
| GB201914045D0 (en) | 2019-09-30 | 2019-11-13 | Sintef Tto As | Wireless charging of devices |
| CN113260897A (zh) * | 2019-10-25 | 2021-08-13 | 深圳市海谱纳米光学科技有限公司 | 一种可调光学滤波器件 |
| DE102020205599A1 (de) | 2020-05-04 | 2021-11-04 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein | Mikromechanischer Strahlungsdetektor, mikromechanisches Spektrometer und Verfahren zur Strahlungsmessung |
| GB202007601D0 (en) | 2020-05-21 | 2020-07-08 | Sintef Tto As | Wireless charging of devices |
| EP4154385A1 (en) | 2020-05-21 | 2023-03-29 | Sintef TTO AS | Relay wireless charging system |
| CN115698816A (zh) * | 2020-08-24 | 2023-02-03 | 深圳市海谱纳米光学科技有限公司 | 一种具有可动镜面的可调法珀腔器件及其制造方法 |
| US11899143B2 (en) | 2021-07-12 | 2024-02-13 | Robert Bosch Gmbh | Ultrasound sensor array for parking assist systems |
| US20230241611A1 (en) * | 2022-01-31 | 2023-08-03 | Tdk Corporation | Devices and Methods for Sensing and Sorting Particles |
Family Cites Families (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58152201A (ja) * | 1982-03-08 | 1983-09-09 | Matsushita Electric Ind Co Ltd | フアブリペロ型光学変調器 |
| US4859060A (en) * | 1985-11-26 | 1989-08-22 | 501 Sharp Kabushiki Kaisha | Variable interferometric device and a process for the production of the same |
| JPH01101421A (ja) * | 1987-10-15 | 1989-04-19 | Sharp Corp | 可変干渉装置 |
| US5550373A (en) * | 1994-12-30 | 1996-08-27 | Honeywell Inc. | Fabry-Perot micro filter-detector |
| EP1053574A4 (en) * | 1997-12-29 | 2002-11-06 | Coretek Inc | FABRY-PEROT FILTER AND LASER WITH SURFACE EMISSION AND VERTICAL, CONFOCAL CAVITY, TUNABLE BY MICROELECTROMECHANICS |
| US6830944B1 (en) * | 1999-03-18 | 2004-12-14 | Trustees Of Boston University | Piezoelectric bimorphs as microelectromechanical building blocks and constructions made using same |
| US6178033B1 (en) * | 1999-03-28 | 2001-01-23 | Lucent Technologies | Micromechanical membrane tilt-mirror switch |
| JP3999473B2 (ja) * | 2000-04-19 | 2007-10-31 | 日本碍子株式会社 | 耐久性に優れた一体型圧電／電歪膜型素子およびその製造方法 |
| US6518690B2 (en) * | 2000-04-19 | 2003-02-11 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive film type elements and process for producing the same |
| DE10046379A1 (de) * | 2000-09-20 | 2002-03-28 | Zeiss Carl | System zur gezielten Deformation von optischen Elementen |
| GB2371119A (en) * | 2000-09-25 | 2002-07-17 | Marconi Caswell Ltd | Micro electro-mechanical systems |
| US6379510B1 (en) * | 2000-11-16 | 2002-04-30 | Jonathan S. Kane | Method of making a low voltage micro-mirror array light beam switch |
| US7369723B1 (en) | 2001-11-09 | 2008-05-06 | The Charles Stark Draper Laboratory, Inc. | High speed piezoelectric optical system with tunable focal length |
| US6822798B2 (en) * | 2002-08-09 | 2004-11-23 | Optron Systems, Inc. | Tunable optical filter |
| US7265477B2 (en) * | 2004-01-05 | 2007-09-04 | Chang-Feng Wan | Stepping actuator and method of manufacture therefore |
| US7359124B1 (en) | 2004-04-30 | 2008-04-15 | Louisiana Tech University Research Foundation As A Division Of The Louisiana Tech University Foundation | Wide-angle variable focal length lens system |
| EP1684406A1 (en) * | 2004-06-07 | 2006-07-26 | Matsushita Electric Industrial Co., Ltd. | Actuator, fine motion mechanism including the actuator, and camera module including the fine motion mechanism |
| US8148874B2 (en) * | 2005-04-15 | 2012-04-03 | University Of Florida Research Foundation, Inc. | Microactuator having multiple degrees of freedom |
| JP2007139841A (ja) * | 2005-11-15 | 2007-06-07 | Funai Electric Co Ltd | 形状可変ミラー装置 |
| JP2007206480A (ja) * | 2006-02-03 | 2007-08-16 | Toko Inc | 光走査素子 |
| JP2007304411A (ja) * | 2006-05-12 | 2007-11-22 | Kyoto Univ | 形状可変ミラー |
| JP2008097683A (ja) * | 2006-10-10 | 2008-04-24 | Funai Electric Co Ltd | 可変形ミラー及びそれを備えた光ピックアップ装置 |
| JP5362587B2 (ja) * | 2007-02-12 | 2013-12-11 | ポライト エイエス | 焦点距離が可変の可撓性レンズ組立体 |
| KR20100015320A (ko) * | 2007-02-12 | 2010-02-12 | 포라이트 에이에스 | 휴대용 카메라에서 안정화된 영상을 제공하기 위한 장치 |
-
2009
- 2009-09-18 NO NO20093022A patent/NO336140B1/no unknown
-
2010
- 2010-09-16 JP JP2012529273A patent/JP5778677B2/ja active Active
- 2010-09-16 BR BR112012006044-9A patent/BR112012006044B1/pt active IP Right Grant
- 2010-09-16 CA CA2770937A patent/CA2770937C/en active Active
- 2010-09-16 WO PCT/EP2010/063628 patent/WO2011033028A1/en active Application Filing
- 2010-09-16 EP EP10765764.5A patent/EP2478404B1/en active Active
- 2010-09-16 DK DK10765764.5T patent/DK2478404T3/da active
- 2010-09-16 US US13/394,209 patent/US9250418B2/en active Active
- 2010-09-16 EA EA201290157A patent/EA021493B1/ru not_active IP Right Cessation
- 2010-09-16 CN CN201080040736.1A patent/CN102576149B/zh active Active
-
2014
- 2014-10-01 US US14/504,100 patent/US9329360B2/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| JP2013505471A (ja) | 2013-02-14 |
| NO20093022A1 (no) | 2011-03-21 |
| US9250418B2 (en) | 2016-02-02 |
| CN102576149B (zh) | 2016-01-20 |
| EA021493B1 (ru) | 2015-06-30 |
| US9329360B2 (en) | 2016-05-03 |
| NO336140B1 (no) | 2015-05-26 |
| JP5778677B2 (ja) | 2015-09-16 |
| US20120162664A1 (en) | 2012-06-28 |
| BR112012006044A2 (pt) | 2020-08-18 |
| CA2770937A1 (en) | 2011-03-24 |
| EP2478404B1 (en) | 2020-03-11 |
| WO2011033028A1 (en) | 2011-03-24 |
| EA201290157A1 (ru) | 2013-01-30 |
| US20150109650A1 (en) | 2015-04-23 |
| BR112012006044B1 (pt) | 2021-08-31 |
| CA2770937C (en) | 2018-04-17 |
| CN102576149A (zh) | 2012-07-11 |
| EP2478404A1 (en) | 2012-07-25 |
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