DK2443645T3 - Lavinterferens-sensorhoved til en strålingsdetektor, såvel som en strålingsdetektor som indeholder dette lavinterferens-sensorhoved - Google Patents

Lavinterferens-sensorhoved til en strålingsdetektor, såvel som en strålingsdetektor som indeholder dette lavinterferens-sensorhoved Download PDF

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Publication number
DK2443645T3
DK2443645T3 DK10735220T DK10735220T DK2443645T3 DK 2443645 T3 DK2443645 T3 DK 2443645T3 DK 10735220 T DK10735220 T DK 10735220T DK 10735220 T DK10735220 T DK 10735220T DK 2443645 T3 DK2443645 T3 DK 2443645T3
Authority
DK
Denmark
Prior art keywords
radiation detector
sensor head
low interference
interference sensor
well
Prior art date
Application number
DK10735220T
Other languages
English (en)
Inventor
Robert Krömer
Meiken Falke
Original Assignee
Bruker Nano Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bruker Nano Gmbh filed Critical Bruker Nano Gmbh
Application granted granted Critical
Publication of DK2443645T3 publication Critical patent/DK2443645T3/da

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/24—Measuring radiation intensity with semiconductor detectors
    • G01T1/244—Auxiliary details, e.g. casings, cooling, damping or insulation against damage by, e.g. heat, pressure or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/24—Measuring radiation intensity with semiconductor detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/02—Details
    • H01J2237/026—Shields
    • H01J2237/0264—Shields magnetic
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2441—Semiconductor detectors, e.g. diodes
    • H01J2237/24415—X-ray
    • H01J2237/2442—Energy-dispersive (Si-Li type) spectrometer

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Molecular Biology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Measurement Of Radiation (AREA)
DK10735220T 2009-06-15 2010-06-15 Lavinterferens-sensorhoved til en strålingsdetektor, såvel som en strålingsdetektor som indeholder dette lavinterferens-sensorhoved DK2443645T3 (da)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102009026946A DE102009026946B4 (de) 2009-06-15 2009-06-15 Störungsarmer Sensorkopf für einen Strahlungsdetektor sowie diesen störungsarmen Sensorkopf enthaltender Strahlungsdetektor
PCT/EP2010/058361 WO2010146044A1 (de) 2009-06-15 2010-06-15 Störungsarmer sensorkopf für einen strahlungsdetektor sowie diesen störungsarmen sensorkopf enthaltender strahlungsdetektor

Publications (1)

Publication Number Publication Date
DK2443645T3 true DK2443645T3 (da) 2019-11-04

Family

ID=42668776

Family Applications (1)

Application Number Title Priority Date Filing Date
DK10735220T DK2443645T3 (da) 2009-06-15 2010-06-15 Lavinterferens-sensorhoved til en strålingsdetektor, såvel som en strålingsdetektor som indeholder dette lavinterferens-sensorhoved

Country Status (6)

Country Link
US (1) US9299532B2 (da)
EP (1) EP2443645B1 (da)
JP (1) JP6196774B2 (da)
DE (1) DE102009026946B4 (da)
DK (1) DK2443645T3 (da)
WO (1) WO2010146044A1 (da)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011104489A1 (de) * 2011-06-17 2012-12-20 Pndetector Gmbh Halbleiterdriftdetektor und entsprechendes Betriebsverfahren
DE102012213130A1 (de) 2012-07-26 2014-01-30 Bruker Nano Gmbh Mehrfachmodul-Photonendetektor und seine Verwendung
JP5600722B2 (ja) * 2012-11-02 2014-10-01 株式会社堀場製作所 放射線検出器、放射線検出装置、及びｘ線分析装置
EP2881995B1 (en) * 2013-12-09 2020-07-15 Oxford Instruments Technologies Oy Semiconductor radiation detector with large active area, and method for its manufacture
JP6346016B2 (ja) * 2014-07-17 2018-06-20 日本電子株式会社 放射線分析装置
JP6563258B2 (ja) * 2015-06-11 2019-08-21 日本電子株式会社 放射線検出器およびその製造方法
US9818577B2 (en) 2016-01-25 2017-11-14 Applied Materials Israel Ltd. Multi mode system with a dispersion X-ray detector
US10074513B2 (en) 2016-01-25 2018-09-11 Applied Materials Israel Ltd. Multi mode systems with retractable detectors
CN111373287A (zh) * 2017-12-15 2020-07-03 株式会社堀场制作所 放射线检测器和放射线检测装置
CN110376229B (zh) 2019-06-12 2020-09-04 聚束科技（北京）有限公司 具备复合式探测系统的扫描电子显微镜和样品探测方法
JP2022143666A (ja) * 2021-03-18 2022-10-03 コニカミノルタ株式会社 放射線撮影装置

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AU533206B2 (en) * 1979-06-21 1983-11-10 Schlumberger Technology B.V. Cryostats for photon detectors
JPH0713659B2 (ja) 1988-12-22 1995-02-15 三菱電機株式会社 荷電粒子分布測定装置
US4979074A (en) * 1989-06-12 1990-12-18 Flavors Technology Printed circuit board heat sink
US5877498A (en) * 1992-09-28 1999-03-02 Hitachi, Ltd. Method and apparatus for X-ray analyses
JPH0883588A (ja) 1994-09-13 1996-03-26 Hitachi Ltd Ｘ線分析装置
US5903004A (en) 1994-11-25 1999-05-11 Hitachi, Ltd. Energy dispersive X-ray analyzer
JP3409954B2 (ja) 1994-11-25 2003-05-26 株式会社日立製作所 エネルギー分散形ｘ線検出装置
US6054277A (en) * 1996-05-08 2000-04-25 Regents Of The University Of Minnesota Integrated microchip genetic testing system
US5900667A (en) 1996-10-04 1999-05-04 Etec Systems, Inc. Operating a solid state particle detector within a magnetic deflection field so as to minimize eddy currents
US5841135A (en) * 1997-02-19 1998-11-24 Schlumberger Technology Corporation Method and apparatus for measuring formation density and the formation photo-electric factor with a multi-detector gamma-gamma tool
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JP2002221504A (ja) * 2001-01-26 2002-08-09 Hitachi Ltd Ｘ線検出装置および荷電粒子線装置
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DE102008014578B3 (de) 2008-03-14 2009-11-26 Bruker Axs Microanalysis Gmbh Streufeldarme Magnetfalle sowie diese enthaltender Röntgendetektor
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CN103887134B (zh) 2009-05-15 2017-01-11 Fei 公司 带集成探测器的电子显微镜

Also Published As

Publication number Publication date
EP2443645A1 (de) 2012-04-25
JP2012530252A (ja) 2012-11-29
EP2443645B1 (de) 2019-08-07
US9299532B2 (en) 2016-03-29
JP6196774B2 (ja) 2017-09-13
US20120132818A1 (en) 2012-05-31
DE102009026946B4 (de) 2012-03-08
DE102009026946A1 (de) 2010-12-30
WO2010146044A1 (de) 2010-12-23

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