DK2319955T3 - Fjernforbrændingsaflejring-brænder og/eller relaterede fremgangsmåder - Google Patents
Fjernforbrændingsaflejring-brænder og/eller relaterede fremgangsmåder Download PDFInfo
- Publication number
- DK2319955T3 DK2319955T3 DK10190212.0T DK10190212T DK2319955T3 DK 2319955 T3 DK2319955 T3 DK 2319955T3 DK 10190212 T DK10190212 T DK 10190212T DK 2319955 T3 DK2319955 T3 DK 2319955T3
- Authority
- DK
- Denmark
- Prior art keywords
- burner
- substrate
- distribution device
- coating
- precursor
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/453—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating passing the reaction gases through burners or torches, e.g. atmospheric pressure CVD
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/001—General methods for coating; Devices therefor
- C03C17/002—General methods for coating; Devices therefor for flat glass, e.g. float glass
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
- C03C17/23—Oxides
- C03C17/245—Oxides by deposition from the vapour phase
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/401—Oxides containing silicon
- C23C16/402—Silicon dioxide
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45502—Flow conditions in reaction chamber
- C23C16/45504—Laminar flow
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23D—BURNERS
- F23D14/00—Burners for combustion of a gas, e.g. of a gas stored under pressure as a liquid
- F23D14/12—Radiant burners
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23D—BURNERS
- F23D14/00—Burners for combustion of a gas, e.g. of a gas stored under pressure as a liquid
- F23D14/12—Radiant burners
- F23D14/125—Radiant burners heating a wall surface to incandescence
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23D—BURNERS
- F23D14/00—Burners for combustion of a gas, e.g. of a gas stored under pressure as a liquid
- F23D14/12—Radiant burners
- F23D14/14—Radiant burners using screens or perforated plates
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23D—BURNERS
- F23D14/00—Burners for combustion of a gas, e.g. of a gas stored under pressure as a liquid
- F23D14/46—Details, e.g. noise reduction means
- F23D14/48—Nozzles
- F23D14/56—Nozzles for spreading the flame over an area, e.g. for desurfacing of solid material, for surface hardening, or for heating workpieces
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23D—BURNERS
- F23D91/00—Burners specially adapted for specific applications, not otherwise provided for
- F23D91/02—Burners specially adapted for specific applications, not otherwise provided for for use in particular heating operations
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/70—Properties of coatings
- C03C2217/73—Anti-reflective coatings with specific characteristics
- C03C2217/732—Anti-reflective coatings with specific characteristics made of a single layer
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/10—Deposition methods
- C03C2218/15—Deposition methods from the vapour phase
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Organic Chemistry (AREA)
- Combustion & Propulsion (AREA)
- General Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Geochemistry & Mineralogy (AREA)
- Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Plasma & Fusion (AREA)
- Inorganic Chemistry (AREA)
- Fluid Mechanics (AREA)
- Surface Treatment Of Glass (AREA)
Claims (15)
- FJERNFORBRÆNDINGSAFLEJRING-BRÆNDER OG/ELLER RELATEREDE FREMGANGSMÅDER PATENTKRAV1. Fjemforbrændingsaflejringssystem (600, 700) til anvendelse i forbrændingsaflejring, hvor der aflejres en coating (220) på et substrat (22), hvilket system omfatter: en infrarød (IR) brænder, der er konfigureret til at generere udstrålende energi (18') i et område mellem brænderen og substratet (22); og en fordelingsanordning (602), hvor fordelingsanordningen er anbragt uden for brænderen, konfigureret til at tilvejebringe en strøm (604), der omfatter en fordampet prækursor og en bæregas fra en position, der er væk fra den udstrålende energi, der er genereret af IR-brænderen, hvilken fordelingsanordning (602) endvidere er konfigureret til at foranledige strømmen (604) til at strømme parallelt med substratet (22) mellem substratet (22) og IR-brænderen, hvor, i drift, strømmen (604) er laminær, når den forlader fordelingsanordningen (602), og hvor, i drift, den udstrålende energi (18') er tilstrækkelig til at foranledige prækursoren i strømmen (604) til at blive forbrændt og opvarme substratet (22) for at gøre det muligt for en del af den forbrændte prækursor at danne coatingen (220), direkte eller indirekte, på substratet (22).
- 2. System ifølge krav 1, hvor fordelingsanordningen (602) er en luftkniv.
- 3. System ifølge krav 1, hvor en strøm af strømmen (604) er ensartet ved reaktionszonen.
- 4. System ifølge krav 1, hvor bæregassen er en inert gas, eller hvor bæregassen omfatter oxygen.
- 5. System ifølge krav 1, der endvidere omfatter bafler (702a; 702b), der mindst delvist omgiver reaktionszonen.
- 6. System ifølge krav 1, hvor fordelingsanordningen (602) er konfigureret til at oscillere for at reducere uensartetheder og/eller striber i coatingen.
- 7. System ifølge krav 1, hvor fordelingsanordningen (602) omfatter et samlerør med en spalteudgang, hvorigennem strømmen (604) skal passere.
- 8. System ifølge krav 1, der endvidere omfatter en flerhed af infrarøde (IR) brændere, hvilken flerhed af IR-brændere danner en enkelt udstrålende energifront.
- 9. Brænder ifølge krav 1, hvor fordelingsanordningen (602) er tilvejebragt på opstrømssiden af IR-brænderen, eller hvor fordelingsanordningen (602) er tilvejebragt på nedstrømssiden af IR-brænderen, eller hvor fordelingsanordningen (602) er tilvejebragt mellem tilstødende IR-brændere.
- 10. Fremgangsmåde til dannelse af en coating på et glassubstrat (22) ved anvendelse af forbrændingsaflejring, hvilken fremgangsmåde omfatter: tilvejebringelse af et glassubstrat (22) med mindst én overflade, der skal coates; tilvejebringelse af mindst én infrarød (IR) brænder; tilvejebringelse af en laminær strøm af en gasholdig strøm (604) via en fordelingsanordning (602), hvor fordelingsanordningen (602) er anbragt uden for brænderen, omfattende en prækursor og en bæregas, hvor strømmen (604) mindst initialt tilvejebringes væk fra IR-brænderen; foranledning af strømmen (604) til at passere mellem substratet (22) og den mindst ene IR-brænder parallelt med substratet (22); forbrænding, ved anvendelse af den mindst ene IR-brænder, af mindst en del af prækursoren i strømmen (604) for et danne et forbrændt materiale, hvor det forbrændte materiale omfatter ikke-fordampet materiale; og tilvejebringelse af glassubstratet (22) i et område, således at glassubstratet (22) opvarmes tilstrækkeligt til at gøre det muligt for det forbrændte materiale at danne coatingen, direkte eller indirekte, på glassubstratet (22).
- 11. Fremgangsmåde ifølge krav 10, hvor strømmen af den gasholdige strøm (604) er ensartet under forbrændingen.
- 12. Fremgangsmåde ifølge krav 10, hvor strømmen (604) tilvejebringes via en fordelingsanordning (602), der omfatter et samlerør med en spalteudgang, hvorigennem strømmen (604) skal passere.
- 13. Fremgangsmåde ifølge krav 10, hvor strømmen tilvejebringes via en luftkniv.
- 14. Fremgangsmåde ifølge krav 12, der endvidere omfatter at foranledige fordelingsanordningen til at oscillere for at reducere uensartetheder og/eller striber i coatingen.
- 15. Fremgangsmåde ifølge krav 10, der endvidere omfatter tilvejebringelse af brændstof ved en luftstrømningshastighed på ca. 75-125 standardliter pr. minut.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/591,168 US8563097B2 (en) | 2007-12-17 | 2009-11-10 | Remote combustion deposition burner and/or related methods |
Publications (1)
Publication Number | Publication Date |
---|---|
DK2319955T3 true DK2319955T3 (da) | 2018-07-16 |
Family
ID=43640461
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DK10190212.0T DK2319955T3 (da) | 2009-11-10 | 2010-11-05 | Fjernforbrændingsaflejring-brænder og/eller relaterede fremgangsmåder |
Country Status (6)
Country | Link |
---|---|
US (1) | US8563097B2 (da) |
EP (1) | EP2319955B1 (da) |
DK (1) | DK2319955T3 (da) |
ES (1) | ES2675056T3 (da) |
PL (1) | PL2319955T3 (da) |
TR (1) | TR201810802T4 (da) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8231730B2 (en) * | 2008-06-09 | 2012-07-31 | Guardian Industries Corp. | Combustion deposition burner and/or related methods |
US10745804B2 (en) * | 2017-01-31 | 2020-08-18 | Ofs Fitel, Llc | Parallel slit torch for making optical fiber preform |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE78517C (de) | F. GRAF, Aachen | Bunsenbrenner mit Wasserkühlung | ||
US78407A (en) | 1868-05-26 | Improvement in wool-boxes | ||
US5101558A (en) * | 1988-12-08 | 1992-04-07 | The Frymaster Corporation | Method for making a flashback resistant infrared gas burner apparatus |
JPH06221525A (ja) | 1993-01-27 | 1994-08-09 | Noritz Corp | 燃焼装置 |
ATE233327T1 (de) * | 1993-03-24 | 2003-03-15 | Georgia Tech Res Inst | Verfahren und vorrichtung zur verbrennungs cvd von filmen und beschichtungen |
US5858465A (en) * | 1993-03-24 | 1999-01-12 | Georgia Tech Research Corporation | Combustion chemical vapor deposition of phosphate films and coatings |
JPH0854528A (ja) | 1994-08-10 | 1996-02-27 | Furukawa Electric Co Ltd:The | 光導波路の製造方法 |
JP3268973B2 (ja) | 1996-04-19 | 2002-03-25 | 株式会社ノリタケカンパニーリミテド | ガラス成形体の絵付焼成法及びそのための装置 |
US6193911B1 (en) * | 1998-04-29 | 2001-02-27 | Morton International Incorporated | Precursor solution compositions for electronic devices using CCVD |
KR100308795B1 (ko) | 1999-01-27 | 2001-09-26 | 최만수 | 화염과 레이저를 이용한 미세입자 제조방법 및 미세입자 증착방법 |
AU2002220726A1 (en) * | 2001-11-26 | 2003-06-10 | Pirelli & C. S.P.A. | Burner for a vapour deposition process |
US20060127599A1 (en) * | 2002-02-12 | 2006-06-15 | Wojak Gregory J | Process and apparatus for preparing a diamond substance |
ATE448178T1 (de) | 2002-12-20 | 2009-11-15 | Prysmian Spa | Brenner für die chemische gasphasenabscheidung von glas |
DE102004019575A1 (de) | 2004-04-20 | 2005-11-24 | Innovent E.V. Technologieentwicklung | Verfahren zur Herstellung von transmissionsverbessernden und/oder reflexionsmindernden optischen Schichten |
US8440256B2 (en) * | 2007-12-17 | 2013-05-14 | Guardian Industries Corp. | Combustion deposition of metal oxide coatings deposited via infrared burners |
-
2009
- 2009-11-10 US US12/591,168 patent/US8563097B2/en not_active Expired - Fee Related
-
2010
- 2010-11-05 ES ES10190212.0T patent/ES2675056T3/es active Active
- 2010-11-05 PL PL10190212T patent/PL2319955T3/pl unknown
- 2010-11-05 EP EP10190212.0A patent/EP2319955B1/en not_active Not-in-force
- 2010-11-05 TR TR2018/10802T patent/TR201810802T4/tr unknown
- 2010-11-05 DK DK10190212.0T patent/DK2319955T3/da active
Also Published As
Publication number | Publication date |
---|---|
EP2319955B1 (en) | 2018-05-02 |
US8563097B2 (en) | 2013-10-22 |
EP2319955A1 (en) | 2011-05-11 |
US20100129561A1 (en) | 2010-05-27 |
TR201810802T4 (tr) | 2018-08-27 |
PL2319955T3 (pl) | 2018-10-31 |
ES2675056T3 (es) | 2018-07-06 |
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