DK199901580A - Silicium mesa struktur integreret i en glas på silicium bølgeleder, samt fremgangsmåde til fremstiiling heraf - Google Patents

Silicium mesa struktur integreret i en glas på silicium bølgeleder, samt fremgangsmåde til fremstiiling heraf

Info

Publication number
DK199901580A
DK199901580A DK199901580A DKPA199901580A DK199901580A DK 199901580 A DK199901580 A DK 199901580A DK 199901580 A DK199901580 A DK 199901580A DK PA199901580 A DKPA199901580 A DK PA199901580A DK 199901580 A DK199901580 A DK 199901580A
Authority
DK
Denmark
Prior art keywords
silicon
fabrication
glass
well
mesa structure
Prior art date
Application number
DK199901580A
Other languages
Danish (da)
English (en)
Inventor
Mattsson Kent Erik
Original Assignee
Nkt Res As
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nkt Res As filed Critical Nkt Res As
Priority to DK199901580A priority Critical patent/DK199901580A/da
Priority to US10/111,391 priority patent/US6775455B1/en
Priority to EP00972652.2A priority patent/EP1230717B1/de
Priority to AU11317/01A priority patent/AU1131701A/en
Priority to PCT/DK2000/000615 priority patent/WO2001033676A2/en
Publication of DK199901580A publication Critical patent/DK199901580A/da

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements with at least one potential jump barrier, e.g. PN, PIN junction
    • G02F1/025—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements with at least one potential jump barrier, e.g. PN, PIN junction in an optical waveguide structure
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2202/00—Materials and properties
    • G02F2202/10—Materials and properties semiconductor
    • G02F2202/105—Materials and properties semiconductor single crystal Si
DK199901580A 1999-11-03 1999-11-03 Silicium mesa struktur integreret i en glas på silicium bølgeleder, samt fremgangsmåde til fremstiiling heraf DK199901580A (da)

Priority Applications (5)

Application Number Priority Date Filing Date Title
DK199901580A DK199901580A (da) 1999-11-03 1999-11-03 Silicium mesa struktur integreret i en glas på silicium bølgeleder, samt fremgangsmåde til fremstiiling heraf
US10/111,391 US6775455B1 (en) 1999-11-03 2000-11-03 Silicon mesa structure integrated in a glass-on-silicon waveguide, and a method of manufacturing it
EP00972652.2A EP1230717B1 (de) 1999-11-03 2000-11-03 Eine in einem glas-auf-silizium-wellenleiter integrierte siliziummesastruktur deren herstellungsverfahren
AU11317/01A AU1131701A (en) 1999-11-03 2000-11-03 A silicon mesa structure integrated in a glass-on-silicon waveguide, and a method of manufacturing it
PCT/DK2000/000615 WO2001033676A2 (en) 1999-11-03 2000-11-03 A silicon mesa structure integrated in a glass-on-silicon waveguide, and a method of manufacturing it

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DK199901580A DK199901580A (da) 1999-11-03 1999-11-03 Silicium mesa struktur integreret i en glas på silicium bølgeleder, samt fremgangsmåde til fremstiiling heraf

Publications (1)

Publication Number Publication Date
DK199901580A true DK199901580A (da) 2001-05-04

Family

ID=8106262

Family Applications (1)

Application Number Title Priority Date Filing Date
DK199901580A DK199901580A (da) 1999-11-03 1999-11-03 Silicium mesa struktur integreret i en glas på silicium bølgeleder, samt fremgangsmåde til fremstiiling heraf

Country Status (5)

Country Link
US (1) US6775455B1 (de)
EP (1) EP1230717B1 (de)
AU (1) AU1131701A (de)
DK (1) DK199901580A (de)
WO (1) WO2001033676A2 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7118682B2 (en) * 2003-03-28 2006-10-10 Sioptical, Inc. Low loss SOI/CMOS compatible silicon waveguide and method of making the same
JP2005128419A (ja) * 2003-10-27 2005-05-19 Nec Corp 光導波路構造およびその作製方法
US9219020B2 (en) * 2012-03-08 2015-12-22 Infineon Technologies Ag Semiconductor device, wafer assembly and methods of manufacturing wafer assemblies and semiconductor devices
US8995800B2 (en) 2012-07-06 2015-03-31 Teledyne Scientific & Imaging, Llc Method of fabricating silicon waveguides with embedded active circuitry

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4585299A (en) * 1983-07-19 1986-04-29 Fairchild Semiconductor Corporation Process for fabricating optical wave-guiding components and components made by the process
US5057022A (en) 1989-03-20 1991-10-15 Miller Robert O Method of making a silicon integrated circuit waveguide
FR2683054B1 (fr) * 1991-10-25 1993-12-03 Commissariat A Energie Atomique Modulateur electrooptique integre et procede de fabrication de ce modulateur.
FR2726097B1 (fr) 1994-10-25 1996-11-15 Commissariat Energie Atomique Cellule electro-optique a mode transverse electrique pour un modulateur et procede de realisation d'une telle cellule
JP3147141B2 (ja) * 1995-08-30 2001-03-19 株式会社日立製作所 光アセンブリ
US5793913A (en) * 1996-07-10 1998-08-11 Northern Telecom Limited Method for the hybrid integration of discrete elements on a semiconductor substrate
JP3343846B2 (ja) * 1996-10-21 2002-11-11 日本電信電話株式会社 光導波路の製造方法
GB2318647B (en) 1997-08-30 1998-09-09 Bookham Technology Ltd Integrated optical polariser
JP3337403B2 (ja) * 1997-09-19 2002-10-21 日本電信電話株式会社 周波数安定化レーザ
GB2332284B (en) 1998-05-01 1999-11-03 Bookham Technology Ltd Branched optical waveguide,and its method of use
GB2348293A (en) 1999-03-25 2000-09-27 Bookham Technology Ltd Optical phase modulator

Also Published As

Publication number Publication date
EP1230717B1 (de) 2017-07-19
WO2001033676A3 (en) 2008-01-10
EP1230717A1 (de) 2002-08-14
WO2001033676A2 (en) 2001-05-10
AU1131701A (en) 2001-05-14
US6775455B1 (en) 2004-08-10

Similar Documents

Publication Publication Date Title
DE60008978D1 (de) Kristallisiertes Li2O-Al2O3-SiO2 Glas und die dafür benötigten kristallisierbaren Gläser
WO2002042803A3 (en) Apparatus and method for integrated photonic devices
IT1320495B1 (it) Crogiuolo di vetro di silice, e procedimento per la sua fabbricazione.
DE60201920D1 (de) Optisches Glas
EP1094039A4 (de) Verfahren zur herstellung eines quartzglastiegels
DE60001606D1 (de) Kristallisiertes Li2O-Al2O3-SiO2 Glas und die dafür benötigten kristallisierbaren Gläser
PT1064343E (pt) Processo de hidroconversao integrada com fluxo inverso de hidrogenio
FR2796637B1 (fr) Verre borosilicate ou aluminosilicate pour amplification optique
ATE341118T1 (de) Trennung von integrierten optischen modulen und strukturen
AU2002324943A1 (en) Glass bonded fiber array and method for the fabrication thereof
DE60010836D1 (de) Gerät / Beil zum Brechen von Glas
DE60128302D1 (de) Plasmafeste Quartzglas-Haltevorrichtung
DK199901580A (da) Silicium mesa struktur integreret i en glas på silicium bølgeleder, samt fremgangsmåde til fremstiiling heraf
DE60114338D1 (de) Herstellungsverfahren für optisches Halbleitermodul
EP1306354A4 (de) Dorn zur herstellung von quartzglas und optische fasermatrix den dorn verwendend, optische faser, verfahren zur herstellung eines quarzglaselementes
DE69832035D1 (de) Abscheidung von Glas über eine Halbleiterscheibe
WO2002048766A3 (en) Large area optical integrated circuits
AU9105298A (en) Vertical interconnect process for silicon segments with thermally conductive epoxy preform
WO2003036343A3 (en) Mechanical beam steering for optical integrated circuits
DE60300262D1 (de) Optisches Glas
IT1313260B1 (it) Dispositivo fotosensore integrato su semiconduttore e relativoprocesso di fabbricazione.
ITTO20000938A0 (it) Metodo per il recupero dell'usura di una mola in una macchina di molatura di lastre di vetro e macchina di molatura utilizzante tale metodo.
DE69934547D1 (de) Tintentrahldruckkopf mit grossem Silizium-wafer und zugehöriges Herstellungsverfahren
FR2795714B1 (fr) Procede de fabrication d'une bouteille en verre du type a l'ancienne
FR2794045B1 (fr) Dispositif de centrage et de positionnement d'une ebauche de verre de lunettes

Legal Events

Date Code Title Description
AHB Application shelved due to non-payment