DK170685D0 - Roterbart katodeforstoevningsapparat - Google Patents
Roterbart katodeforstoevningsapparatInfo
- Publication number
- DK170685D0 DK170685D0 DK170685A DK170685A DK170685D0 DK 170685 D0 DK170685 D0 DK 170685D0 DK 170685 A DK170685 A DK 170685A DK 170685 A DK170685 A DK 170685A DK 170685 D0 DK170685 D0 DK 170685D0
- Authority
- DK
- Denmark
- Prior art keywords
- nutring
- rootable
- appliance
- cotton
- rootable cotton
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
- H01J37/3405—Magnetron sputtering
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Centrifugal Separators (AREA)
- Coating By Spraying Or Casting (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US06/523,969 US4445997A (en) | 1983-08-17 | 1983-08-17 | Rotatable sputtering apparatus |
PCT/US1984/001299 WO1985000925A1 (en) | 1983-08-17 | 1984-08-15 | Rotatable sputtering apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
DK170685A DK170685A (da) | 1985-04-16 |
DK170685D0 true DK170685D0 (da) | 1985-04-16 |
Family
ID=24087180
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DK170685A DK170685D0 (da) | 1983-08-17 | 1985-04-16 | Roterbart katodeforstoevningsapparat |
Country Status (11)
Country | Link |
---|---|
US (1) | US4445997A (da) |
EP (1) | EP0152472A1 (da) |
JP (1) | JPS61500025A (da) |
AU (1) | AU574723B2 (da) |
BR (1) | BR8407018A (da) |
CA (1) | CA1221335A (da) |
DK (1) | DK170685D0 (da) |
FI (1) | FI79917C (da) |
HU (1) | HU196011B (da) |
NO (1) | NO851458L (da) |
WO (1) | WO1985000925A1 (da) |
Families Citing this family (52)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5096562A (en) * | 1989-11-08 | 1992-03-17 | The Boc Group, Inc. | Rotating cylindrical magnetron structure for large area coating |
US5047131A (en) * | 1989-11-08 | 1991-09-10 | The Boc Group, Inc. | Method for coating substrates with silicon based compounds |
BE1003701A3 (fr) * | 1990-06-08 | 1992-05-26 | Saint Roch Glaceries | Cathode rotative. |
JP3516949B2 (ja) * | 1990-08-10 | 2004-04-05 | バイラテック・シン・フィルムズ・インコーポレイテッド | 回転マグネトロンスパッタリングシステムにおけるアーク抑制のためのシールディング |
US5200049A (en) * | 1990-08-10 | 1993-04-06 | Viratec Thin Films, Inc. | Cantilever mount for rotating cylindrical magnetrons |
US5100527A (en) * | 1990-10-18 | 1992-03-31 | Viratec Thin Films, Inc. | Rotating magnetron incorporating a removable cathode |
US5106474A (en) * | 1990-11-21 | 1992-04-21 | Viratec Thin Films, Inc. | Anode structures for magnetron sputtering apparatus |
AU664995B2 (en) * | 1991-04-19 | 1995-12-14 | Surface Solutions, Incorporated | Method and apparatus for linear magnetron sputtering |
US5262032A (en) * | 1991-05-28 | 1993-11-16 | Leybold Aktiengesellschaft | Sputtering apparatus with rotating target and target cooling |
US5567289A (en) * | 1993-12-30 | 1996-10-22 | Viratec Thin Films, Inc. | Rotating floating magnetron dark-space shield and cone end |
US5620577A (en) * | 1993-12-30 | 1997-04-15 | Viratec Thin Films, Inc. | Spring-loaded mount for a rotatable sputtering cathode |
US5571393A (en) * | 1994-08-24 | 1996-11-05 | Viratec Thin Films, Inc. | Magnet housing for a sputtering cathode |
US5445721A (en) * | 1994-08-25 | 1995-08-29 | The Boc Group, Inc. | Rotatable magnetron including a replacement target structure |
US5518592A (en) * | 1994-08-25 | 1996-05-21 | The Boc Group, Inc. | Seal cartridge for a rotatable magnetron |
TW347369B (en) * | 1996-12-17 | 1998-12-11 | Asahi Glass Co Ltd | Organic substrate provided with a light absorptive antireflection film and process for production |
US6488824B1 (en) | 1998-11-06 | 2002-12-03 | Raycom Technologies, Inc. | Sputtering apparatus and process for high rate coatings |
JP2002529600A (ja) | 1998-11-06 | 2002-09-10 | シヴァク | 高レート・コーティング用のスパッタリング装置および方法 |
US6436252B1 (en) | 2000-04-07 | 2002-08-20 | Surface Engineered Products Corp. | Method and apparatus for magnetron sputtering |
DE10102493B4 (de) | 2001-01-19 | 2007-07-12 | W.C. Heraeus Gmbh | Rohrförmiges Target und Verfahren zur Herstellung eines solchen Targets |
DE60238979D1 (de) | 2001-04-20 | 2011-03-03 | Gen Plasma Inc | Penningentladungsplasmaquelle |
US7294283B2 (en) * | 2001-04-20 | 2007-11-13 | Applied Process Technologies, Inc. | Penning discharge plasma source |
US7399385B2 (en) * | 2001-06-14 | 2008-07-15 | Tru Vue, Inc. | Alternating current rotatable sputter cathode |
DE10145201C1 (de) * | 2001-09-13 | 2002-11-21 | Fraunhofer Ges Forschung | Einrichtung zum Beschichten von Substraten mit gekrümmter Oberfläche durch Pulsmagnetron-Zerstäuben |
BR0105474A (pt) * | 2001-09-26 | 2003-09-23 | Fundacao De Amparo A Pesquisa | Processo de deposição de filme de carbono amorfo hidrogenado, filme de carbono amorfo hidrogenado e artigo revestido com filme de carbono amorfo hidrogenado |
US20030173217A1 (en) * | 2002-03-14 | 2003-09-18 | Sputtering Components, Inc. | High-power ion sputtering magnetron |
WO2004005574A2 (en) * | 2002-07-02 | 2004-01-15 | Academy Precision Materials A Division Of Academy Corporation | Rotary target and method for onsite mechanical assembly of rotary target |
US20050276381A1 (en) * | 2003-07-02 | 2005-12-15 | Academy Corporation | Rotary target locking ring assembly |
WO2005028697A1 (en) * | 2003-09-12 | 2005-03-31 | Applied Process Technologies, Inc. | Magnetic mirror plasma source and method using same |
US20050224343A1 (en) * | 2004-04-08 | 2005-10-13 | Richard Newcomb | Power coupling for high-power sputtering |
US20060049043A1 (en) * | 2004-08-17 | 2006-03-09 | Matuska Neal W | Magnetron assembly |
US20060065524A1 (en) * | 2004-09-30 | 2006-03-30 | Richard Newcomb | Non-bonded rotatable targets for sputtering |
PL1799876T3 (pl) * | 2004-10-18 | 2009-07-31 | Bekaert Advanced Coatings | Płaski blok końcowy do podtrzymywania obrotowego targetu do napylania |
US20060096855A1 (en) * | 2004-11-05 | 2006-05-11 | Richard Newcomb | Cathode arrangement for atomizing a rotatable target pipe |
PT1856303E (pt) * | 2005-03-11 | 2009-02-27 | Bekaert Advanced Coatings | Bloco de extremidade individual em ângulo recto |
US20060260938A1 (en) * | 2005-05-20 | 2006-11-23 | Petrach Philip M | Module for Coating System and Associated Technology |
US20060278524A1 (en) * | 2005-06-14 | 2006-12-14 | Stowell Michael W | System and method for modulating power signals to control sputtering |
US20060278521A1 (en) * | 2005-06-14 | 2006-12-14 | Stowell Michael W | System and method for controlling ion density and energy using modulated power signals |
ATE415503T1 (de) * | 2005-08-10 | 2008-12-15 | Applied Materials Gmbh & Co Kg | Vakuumbeschichtungsanlage mit motorisch angetriebener drehkathode |
US7842355B2 (en) * | 2005-11-01 | 2010-11-30 | Applied Materials, Inc. | System and method for modulation of power and power related functions of PECVD discharge sources to achieve new film properties |
US20070095281A1 (en) * | 2005-11-01 | 2007-05-03 | Stowell Michael W | System and method for power function ramping of microwave liner discharge sources |
US8273222B2 (en) * | 2006-05-16 | 2012-09-25 | Southwest Research Institute | Apparatus and method for RF plasma enhanced magnetron sputter deposition |
US20090183983A1 (en) * | 2006-06-19 | 2009-07-23 | Bekaert Advanced Coatings | Insert piece for an end-block of a sputtering installation |
US8277617B2 (en) * | 2007-08-14 | 2012-10-02 | Southwest Research Institute | Conformal magnetron sputter deposition |
DE102008018609B4 (de) * | 2008-04-11 | 2012-01-19 | Von Ardenne Anlagentechnik Gmbh | Antriebsendblock für ein rotierendes Magnetron |
US8182662B2 (en) * | 2009-03-27 | 2012-05-22 | Sputtering Components, Inc. | Rotary cathode for magnetron sputtering apparatus |
WO2011056581A2 (en) | 2009-10-26 | 2011-05-12 | General Plasma, Inc. | Rotary magnetron magnet bar and apparatus containing the same for high target utilization |
US8747631B2 (en) * | 2010-03-15 | 2014-06-10 | Southwest Research Institute | Apparatus and method utilizing a double glow discharge plasma for sputter cleaning |
US8398834B2 (en) | 2010-04-02 | 2013-03-19 | NuvoSun, Inc. | Target utilization improvement for rotatable magnetrons |
EP2788523A1 (en) * | 2011-12-09 | 2014-10-15 | Applied Materials, Inc. | Rotatable sputter target |
GB201200574D0 (en) * | 2012-01-13 | 2012-02-29 | Gencoa Ltd | In-vacuum rotational device |
CN103074587B (zh) * | 2013-02-01 | 2014-10-15 | 湘潭宏大真空技术股份有限公司 | 大面积连续磁控溅射镀膜均匀性调整装置及调整方法 |
DE102021129523A1 (de) | 2021-11-12 | 2023-05-17 | VON ARDENNE Asset GmbH & Co. KG | Magnetsystem, Sputtervorrichtung und Gehäusedeckel |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2139313C3 (de) * | 1971-08-05 | 1975-09-11 | Inst Fiz An Gssr | Vorrichtung zum Autbringen von homogenen, dünnen Schichten auf Werkstücke |
US4362632A (en) * | 1974-08-02 | 1982-12-07 | Lfe Corporation | Gas discharge apparatus |
JPS51117933A (en) * | 1975-04-10 | 1976-10-16 | Tokuda Seisakusho | Spattering apparatus |
DE3069702D1 (en) * | 1980-08-08 | 1985-01-10 | Battelle Development Corp | Apparatus for coating substrates by high-rate cathodic sputtering, as well as sputtering cathode for such apparatus |
US4290877A (en) * | 1980-09-08 | 1981-09-22 | The United States Of America As Represented By The Secretary Of The Interior | Sputtering apparatus for coating elongated tubes and strips |
US4356073A (en) * | 1981-02-12 | 1982-10-26 | Shatterproof Glass Corporation | Magnetron cathode sputtering apparatus |
US4376025A (en) * | 1982-06-14 | 1983-03-08 | Battelle Development Corporation | Cylindrical cathode for magnetically-enhanced sputtering |
-
1983
- 1983-08-17 US US06/523,969 patent/US4445997A/en not_active Expired - Lifetime
-
1984
- 1984-08-02 CA CA000460255A patent/CA1221335A/en not_active Expired
- 1984-08-15 HU HU843554A patent/HU196011B/hu not_active IP Right Cessation
- 1984-08-15 BR BR8407018A patent/BR8407018A/pt not_active IP Right Cessation
- 1984-08-15 WO PCT/US1984/001299 patent/WO1985000925A1/en active IP Right Grant
- 1984-08-15 EP EP84903242A patent/EP0152472A1/en active Pending
- 1984-08-15 AU AU33907/84A patent/AU574723B2/en not_active Ceased
- 1984-08-15 JP JP59503242A patent/JPS61500025A/ja active Pending
-
1985
- 1985-04-12 NO NO851458A patent/NO851458L/no unknown
- 1985-04-16 DK DK170685A patent/DK170685D0/da not_active IP Right Cessation
- 1985-04-16 FI FI851516A patent/FI79917C/fi not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
AU574723B2 (en) | 1988-07-14 |
US4445997A (en) | 1984-05-01 |
DK170685A (da) | 1985-04-16 |
BR8407018A (pt) | 1985-07-30 |
FI851516A0 (fi) | 1985-04-16 |
HU196011B (en) | 1988-08-29 |
WO1985000925A1 (en) | 1985-02-28 |
FI79917C (fi) | 1990-03-12 |
FI79917B (fi) | 1989-11-30 |
EP0152472A1 (en) | 1985-08-28 |
CA1221335A (en) | 1987-05-05 |
NO851458L (no) | 1985-04-12 |
FI851516L (fi) | 1985-04-16 |
JPS61500025A (ja) | 1986-01-09 |
HUT37294A (en) | 1985-11-28 |
AU3390784A (en) | 1985-03-12 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DK170685A (da) | Roterbart katodeforstoevningsapparat | |
BR8406379A (pt) | Aparelho de termopervaporacao | |
DK177384A (da) | Bestraalingsapparat | |
BR8407030A (pt) | Aparelho de tratamento | |
BR8402385A (pt) | Aparelho hidraulico | |
BR8405390A (pt) | Aparelho de aquecimento | |
DK154323C (da) | Haarsaetteapparat | |
IT1179537B (it) | Lavastoviglie per impiego domestico | |
ES535146A0 (es) | Un aparato electrodomestico | |
DK47485A (da) | Vaeskeadskillelsesapparat | |
IT1167349B (it) | Apparecchio frigorifero perfezionato | |
BR8401876A (pt) | Aparelho de distribuicao | |
BR8407354A (pt) | Aparelho rotativo | |
BR8402391A (pt) | Aparelho de pesagem | |
ES528749A0 (es) | Perfeccionamientos en aparatos electrodomesticos | |
KR850001643U (ko) | 빨래집게 | |
KR850009504U (ko) | 조리기 | |
BR8306130A (pt) | Aparelho antimofo | |
BR8303650A (pt) | Aparelho odontologico | |
BR6301296U (pt) | Aparelho de sorteio | |
FI830366A0 (fi) | Tub | |
BR8400553A (pt) | Aparelho indutivo | |
KR840006260U (ko) | 조리기 | |
BR8206254A (pt) | Aparelho dendrometrico | |
DK139683D0 (da) | Biofeedbackapparat |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AHB | Application shelved due to non-payment | ||
B1 | Patent granted (law 1993) | ||
PBP | Patent lapsed |