BR0105474A - Processo de deposição de filme de carbono amorfo hidrogenado, filme de carbono amorfo hidrogenado e artigo revestido com filme de carbono amorfo hidrogenado - Google Patents

Processo de deposição de filme de carbono amorfo hidrogenado, filme de carbono amorfo hidrogenado e artigo revestido com filme de carbono amorfo hidrogenado

Info

Publication number
BR0105474A
BR0105474A BR0105474-0A BR0105474A BR0105474A BR 0105474 A BR0105474 A BR 0105474A BR 0105474 A BR0105474 A BR 0105474A BR 0105474 A BR0105474 A BR 0105474A
Authority
BR
Brazil
Prior art keywords
amorphous carbon
carbon film
hydrogenated amorphous
deposition process
coated article
Prior art date
Application number
BR0105474-0A
Other languages
English (en)
Inventor
Luiz Goncalves Neto
Ronaldo Domingues Mansano
Giuseppe Antonio Cirino
Luis Da Silva Zambom
Original Assignee
Fundacao De Amparo A Pesquisa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fundacao De Amparo A Pesquisa filed Critical Fundacao De Amparo A Pesquisa
Priority to BR0105474-0A priority Critical patent/BR0105474A/pt
Priority to EP02727066A priority patent/EP1436442A4/en
Priority to CA002458299A priority patent/CA2458299A1/en
Priority to JP2003530910A priority patent/JP2005533171A/ja
Priority to US10/487,031 priority patent/US7381452B2/en
Priority to PCT/BR2002/000067 priority patent/WO2003027350A1/en
Publication of BR0105474A publication Critical patent/BR0105474A/pt

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0605—Carbon
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/29—Coated or structually defined flake, particle, cell, strand, strand portion, rod, filament, macroscopic fiber or mass thereof
    • Y10T428/2913—Rod, strand, filament or fiber
    • Y10T428/2918—Rod, strand, filament or fiber including free carbon or carbide or therewith [not as steel]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Chemical Vapour Deposition (AREA)
  • Chemical Or Physical Treatment Of Fibers (AREA)

Abstract

"PROCESSO DE DEPOSIçãO DE FILME DE CARBONO AMORFO HIDROGENADO, FILME DE CARBONO AMORFO HIDROGENADO E ARTIGO REVESTIDO COM FILME DE CARBONO AMORFO HIDROGENADO". A presente invenção refere-se a um processo aperfeiçoado de deposição de um filme de carbono amorfo hidrogenado, mais especificamente a um processo aperfeiçoado de espirramento catódico de baixa temperatura, baixa potência e baixo vácuo. Refere-se ainda a invenção ao filme obtido por tal processo e artigos contendo revestimento de filme de carbono amorfo hidrogenado.
BR0105474-0A 2001-09-26 2001-09-26 Processo de deposição de filme de carbono amorfo hidrogenado, filme de carbono amorfo hidrogenado e artigo revestido com filme de carbono amorfo hidrogenado BR0105474A (pt)

Priority Applications (6)

Application Number Priority Date Filing Date Title
BR0105474-0A BR0105474A (pt) 2001-09-26 2001-09-26 Processo de deposição de filme de carbono amorfo hidrogenado, filme de carbono amorfo hidrogenado e artigo revestido com filme de carbono amorfo hidrogenado
EP02727066A EP1436442A4 (en) 2001-09-26 2002-05-08 FILM OF AMORPHOME HYDROGENATED CARBON
CA002458299A CA2458299A1 (en) 2001-09-26 2002-05-08 Amorphous hydrogenated carbon film
JP2003530910A JP2005533171A (ja) 2001-09-26 2002-05-08 非晶質水添炭素膜
US10/487,031 US7381452B2 (en) 2001-09-26 2002-05-08 Amorphous hydrogenated carbon film
PCT/BR2002/000067 WO2003027350A1 (en) 2001-09-26 2002-05-08 Amorphous hydrogenated carbon film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
BR0105474-0A BR0105474A (pt) 2001-09-26 2001-09-26 Processo de deposição de filme de carbono amorfo hidrogenado, filme de carbono amorfo hidrogenado e artigo revestido com filme de carbono amorfo hidrogenado

Publications (1)

Publication Number Publication Date
BR0105474A true BR0105474A (pt) 2003-09-23

Family

ID=37735130

Family Applications (1)

Application Number Title Priority Date Filing Date
BR0105474-0A BR0105474A (pt) 2001-09-26 2001-09-26 Processo de deposição de filme de carbono amorfo hidrogenado, filme de carbono amorfo hidrogenado e artigo revestido com filme de carbono amorfo hidrogenado

Country Status (6)

Country Link
US (1) US7381452B2 (pt)
EP (1) EP1436442A4 (pt)
JP (1) JP2005533171A (pt)
BR (1) BR0105474A (pt)
CA (1) CA2458299A1 (pt)
WO (1) WO2003027350A1 (pt)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BR0105474A (pt) 2001-09-26 2003-09-23 Fundacao De Amparo A Pesquisa Processo de deposição de filme de carbono amorfo hidrogenado, filme de carbono amorfo hidrogenado e artigo revestido com filme de carbono amorfo hidrogenado
US20040258547A1 (en) * 2003-04-02 2004-12-23 Kurt Burger Pump piston and/or elements sealing the pump piston, in particular a sealing ring of elastomeric material, and a device and method for coating an object of elastomeric material
CN1304631C (zh) * 2004-08-18 2007-03-14 吉林大学 直流辉光等离子体化学气相沉积方法制备碳纳米管的工艺
FI7155U1 (fi) * 2005-04-15 2006-07-24 Nokia Corp Kuori, matkaviestin, kannettava sähköinen laite, aitoustunniste, piirilevy ja antenni
JP2007148355A (ja) * 2005-10-28 2007-06-14 Sumitomo Electric Ind Ltd 光学薄膜および光学素子とその製造方法
US7684039B2 (en) * 2005-11-18 2010-03-23 Kla-Tencor Technologies Corporation Overlay metrology using the near infra-red spectral range
CN100442438C (zh) * 2006-12-20 2008-12-10 南京大学 一种非晶碳膜半导体制备方法
CN102459688B (zh) * 2009-06-18 2014-06-11 苏舍梅塔普拉斯有限责任公司 保护性涂层、具有保护性涂层的涂覆构件以及生产保护性涂层的方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4445997A (en) * 1983-08-17 1984-05-01 Shatterproof Glass Corporation Rotatable sputtering apparatus
US5073241A (en) * 1986-01-31 1991-12-17 Kabushiki Kaisha Meidenshae Method for carbon film production
US5074983A (en) 1989-04-21 1991-12-24 Hmt Technology Corporation Thin film testing method
JP3225576B2 (ja) 1992-01-28 2001-11-05 住友電気工業株式会社 自己修復性硬質固体潤滑膜で被覆した摺動機械部品
US5616179A (en) * 1993-12-21 1997-04-01 Commonwealth Scientific Corporation Process for deposition of diamondlike, electrically conductive and electron-emissive carbon-based films
TW366367B (en) * 1995-01-26 1999-08-11 Ibm Sputter deposition of hydrogenated amorphous carbon film
BR0105474A (pt) 2001-09-26 2003-09-23 Fundacao De Amparo A Pesquisa Processo de deposição de filme de carbono amorfo hidrogenado, filme de carbono amorfo hidrogenado e artigo revestido com filme de carbono amorfo hidrogenado

Also Published As

Publication number Publication date
US7381452B2 (en) 2008-06-03
US20040219304A1 (en) 2004-11-04
WO2003027350A1 (en) 2003-04-03
EP1436442A2 (en) 2004-07-14
JP2005533171A (ja) 2005-11-04
WO2003027350A9 (en) 2003-10-16
EP1436442A4 (en) 2007-03-21
CA2458299A1 (en) 2003-04-03

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Legal Events

Date Code Title Description
B25C Requirement related to requested transfer of rights

Owner name: FUNDACAO DE AMPARO A PESQUISA DO ESTADO DE SAO PAU

Free format text: A FIM DE ATENDER O SOLICITADO NA PETICAO DE TRANSFERENCIA NO 018080057132/SP DE 11/09/2008, QUEIRAREAPRESENTAR O DOCUMENTO DE CESSAO, FAZENDO CONSTAR NO MESMO A ASSINATURA DO CEDENTE E DE DUAS TESTEMUNHAS DEVIDAMENTE QUALIFICADAS.

B25A Requested transfer of rights approved

Owner name: FUNDACAO DE AMPARO A PESQUISA DO ESTADO DE SAO PAU

Free format text: TRANSFERIDO PARTE DOS DIEITOS DE: FUNDACAO DE AMPARO A PESQUISA DO ESTADO DE SAO PAULO - FAPESP

B07A Technical examination (opinion): publication of technical examination (opinion) [chapter 7.1 patent gazette]
B07A Technical examination (opinion): publication of technical examination (opinion) [chapter 7.1 patent gazette]
B06A Notification to applicant to reply to the report for non-patentability or inadequacy of the application [chapter 6.1 patent gazette]
B09A Decision: intention to grant [chapter 9.1 patent gazette]
B16A Patent or certificate of addition of invention granted

Free format text: PRAZO DE VALIDADE: 10 (DEZ) ANOS CONTADOS A PARTIR DE 13/11/2012, MEDIANTE O RECOLHIMENTO DA TAXA QUINQUENAL DE MANUTENCAO (ARTIGOS 119 E 120 DA LPI) E OBSERVADAS AS DEMAIS CONDICOES LEGAIS.

B21F Lapse acc. art. 78, item iv - on non-payment of the annual fees in time

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