DK167789B1 - Resonanssensorelement og fremgangsmaade til fremstilling deraf - Google Patents
Resonanssensorelement og fremgangsmaade til fremstilling deraf Download PDFInfo
- Publication number
- DK167789B1 DK167789B1 DK065687A DK65687A DK167789B1 DK 167789 B1 DK167789 B1 DK 167789B1 DK 065687 A DK065687 A DK 065687A DK 65687 A DK65687 A DK 65687A DK 167789 B1 DK167789 B1 DK 167789B1
- Authority
- DK
- Denmark
- Prior art keywords
- sensor element
- resonance sensor
- piezoelectric
- piezoelectric material
- element according
- Prior art date
Links
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- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
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Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
- H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
- H03H9/2468—Tuning fork resonators
- H03H9/2473—Double-Ended Tuning Fork [DETF] resonators
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/0072—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks of microelectro-mechanical resonators or networks
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02244—Details of microelectro-mechanical resonators
- H03H9/02259—Driving or detection means
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
- H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02244—Details of microelectro-mechanical resonators
- H03H2009/02488—Vibration modes
- H03H2009/02511—Vertical, i.e. perpendicular to the substrate plane
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02244—Details of microelectro-mechanical resonators
- H03H2009/02488—Vibration modes
- H03H2009/02519—Torsional
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S73/00—Measuring and testing
- Y10S73/04—Piezoelectric
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/42—Piezoelectric device making
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49082—Resistor making
- Y10T29/49103—Strain gauge making
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Micromachines (AREA)
- Measurement Of Resistance Or Impedance (AREA)
- Input Circuits Of Receivers And Coupling Of Receivers And Audio Equipment (AREA)
- Radar Systems Or Details Thereof (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Gyroscopes (AREA)
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US06/743,255 US4764244A (en) | 1985-06-11 | 1985-06-11 | Resonant sensor and method of making same |
| US74325585 | 1985-06-11 | ||
| PCT/US1986/001249 WO1986007507A1 (en) | 1985-06-11 | 1986-06-05 | Resonant sensor and method of making same |
| US8601249 | 1986-06-05 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| DK65687D0 DK65687D0 (da) | 1987-02-10 |
| DK65687A DK65687A (da) | 1987-04-10 |
| DK167789B1 true DK167789B1 (da) | 1993-12-13 |
Family
ID=24988089
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DK065687A DK167789B1 (da) | 1985-06-11 | 1987-02-10 | Resonanssensorelement og fremgangsmaade til fremstilling deraf |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US4764244A (ko) |
| EP (1) | EP0222012B1 (ko) |
| JP (1) | JPS63500068A (ko) |
| KR (1) | KR880700542A (ko) |
| AU (1) | AU584040B2 (ko) |
| DK (1) | DK167789B1 (ko) |
| FI (1) | FI870542A0 (ko) |
| WO (1) | WO1986007507A1 (ko) |
Families Citing this family (96)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5216490A (en) * | 1988-01-13 | 1993-06-01 | Charles Stark Draper Laboratory, Inc. | Bridge electrodes for microelectromechanical devices |
| US5016072A (en) * | 1988-01-13 | 1991-05-14 | The Charles Stark Draper Laboratory, Inc. | Semiconductor chip gyroscopic transducer |
| US4906840A (en) * | 1988-01-27 | 1990-03-06 | The Board Of Trustees Of Leland Stanford Jr., University | Integrated scanning tunneling microscope |
| GB8806214D0 (en) * | 1988-03-16 | 1988-04-13 | Avery Ltd W & T | Vibrating force sensor |
| US4836882A (en) * | 1988-09-12 | 1989-06-06 | The United States Of America As Represented By The Secretary Of The Army | Method of making an acceleration hardened resonator |
| US5049775A (en) * | 1988-09-30 | 1991-09-17 | Boston University | Integrated micromechanical piezoelectric motor |
| EP0419021A3 (en) * | 1989-08-30 | 1991-10-09 | Schlumberger Industries Limited | Sensors with vibrating elements |
| US5034608A (en) * | 1989-09-08 | 1991-07-23 | Massachusetts Institute Of Technology | Infrared sensor operable without cooling |
| US5188704A (en) * | 1989-10-20 | 1993-02-23 | International Business Machines Corporation | Selective silicon nitride plasma etching |
| US5258868A (en) * | 1990-02-02 | 1993-11-02 | Rosemount Inc. | Optical process variable transmitter |
| US5126812A (en) * | 1990-02-14 | 1992-06-30 | The Charles Stark Draper Laboratory, Inc. | Monolithic micromechanical accelerometer |
| US5473945A (en) * | 1990-02-14 | 1995-12-12 | The Charles Stark Draper Laboratory, Inc. | Micromechanical angular accelerometer with auxiliary linear accelerometer |
| US5966230A (en) * | 1990-05-29 | 1999-10-12 | Symbol Technologies, Inc. | Integrated scanner on a common substrate |
| US5625483A (en) * | 1990-05-29 | 1997-04-29 | Symbol Technologies, Inc. | Integrated light source and scanning element implemented on a semiconductor or electro-optical substrate |
| US5142912A (en) * | 1990-06-15 | 1992-09-01 | Honeywell Inc. | Semiconductor pressure sensor |
| US5165289A (en) * | 1990-07-10 | 1992-11-24 | Johnson Service Company | Resonant mechanical sensor |
| US5408119A (en) * | 1990-10-17 | 1995-04-18 | The Charles Stark Draper Laboratory, Inc. | Monolithic micromechanical vibrating string accelerometer with trimmable resonant frequency |
| US5605598A (en) * | 1990-10-17 | 1997-02-25 | The Charles Stark Draper Laboratory Inc. | Monolithic micromechanical vibrating beam accelerometer with trimmable resonant frequency |
| US5162691A (en) * | 1991-01-22 | 1992-11-10 | The United States Of America As Represented By The Secretary Of The Army | Cantilevered air-gap type thin film piezoelectric resonator |
| US5129983A (en) * | 1991-02-25 | 1992-07-14 | The Charles Stark Draper Laboratory, Inc. | Method of fabrication of large area micromechanical devices |
| US5203208A (en) * | 1991-04-29 | 1993-04-20 | The Charles Stark Draper Laboratory | Symmetrical micromechanical gyroscope |
| US5431772A (en) * | 1991-05-09 | 1995-07-11 | International Business Machines Corporation | Selective silicon nitride plasma etching process |
| US5331852A (en) * | 1991-09-11 | 1994-07-26 | The Charles Stark Draper Laboratory, Inc. | Electromagnetic rebalanced micromechanical transducer |
| US5635639A (en) * | 1991-09-11 | 1997-06-03 | The Charles Stark Draper Laboratory, Inc. | Micromechanical tuning fork angular rate sensor |
| US5339051A (en) * | 1991-12-09 | 1994-08-16 | Sandia Corporation | Micro-machined resonator oscillator |
| US5198716A (en) * | 1991-12-09 | 1993-03-30 | The United States Of America As Represented By The United States Department Of Energy | Micro-machined resonator |
| US5408877A (en) * | 1992-03-16 | 1995-04-25 | The Charles Stark Draper Laboratory, Inc. | Micromechanical gyroscopic transducer with improved drive and sense capabilities |
| US5349855A (en) * | 1992-04-07 | 1994-09-27 | The Charles Stark Draper Laboratory, Inc. | Comb drive micromechanical tuning fork gyro |
| US5767405A (en) * | 1992-04-07 | 1998-06-16 | The Charles Stark Draper Laboratory, Inc. | Comb-drive micromechanical tuning fork gyroscope with piezoelectric readout |
| US5179499A (en) * | 1992-04-14 | 1993-01-12 | Cornell Research Foundation, Inc. | Multi-dimensional precision micro-actuator |
| JPH05300765A (ja) * | 1992-04-17 | 1993-11-12 | Seiko Instr Inc | 圧電モータ用振動体の製造方法 |
| EP0576400B1 (en) * | 1992-06-24 | 1996-09-04 | Algra Holding Ag | Method of making piezoelectric pressure-sensitive key or keyboard and product of the method |
| US5364742A (en) * | 1992-09-21 | 1994-11-15 | International Business Machines Corporation | Micro-miniature structures and method of fabrication thereof |
| US5367217A (en) * | 1992-11-18 | 1994-11-22 | Alliedsignal Inc. | Four bar resonating force transducer |
| US5650568A (en) * | 1993-02-10 | 1997-07-22 | The Charles Stark Draper Laboratory, Inc. | Gimballed vibrating wheel gyroscope having strain relief features |
| WO1994030030A1 (en) * | 1993-06-04 | 1994-12-22 | The Regents Of The University Of California | Microfabricated acoustic source and receiver |
| US5728089A (en) * | 1993-06-04 | 1998-03-17 | The Regents Of The University Of California | Microfabricated structure to be used in surgery |
| US5511427A (en) * | 1993-07-21 | 1996-04-30 | Honeywell Inc. | Cantilevered microbeam temperature sensor |
| US5438231A (en) * | 1993-08-23 | 1995-08-01 | Rockwell International Corporation | Thin film micromechanical resonator gyro |
| US5456111A (en) * | 1994-01-24 | 1995-10-10 | Alliedsignal Inc. | Capacitive drive vibrating beam accelerometer |
| US5492596A (en) * | 1994-02-04 | 1996-02-20 | The Charles Stark Draper Laboratory, Inc. | Method of making a micromechanical silicon-on-glass tuning fork gyroscope |
| US5581035A (en) * | 1994-08-29 | 1996-12-03 | The Charles Stark Draper Laboratory, Inc. | Micromechanical sensor with a guard band electrode |
| US5646348A (en) * | 1994-08-29 | 1997-07-08 | The Charles Stark Draper Laboratory, Inc. | Micromechanical sensor with a guard band electrode and fabrication technique therefor |
| US5725729A (en) * | 1994-09-26 | 1998-03-10 | The Charles Stark Draper Laboratory, Inc. | Process for micromechanical fabrication |
| US5528409A (en) * | 1994-10-13 | 1996-06-18 | Nt International, Inc. | Fiber-optic interface system |
| US5610431A (en) * | 1995-05-12 | 1997-03-11 | The Charles Stark Draper Laboratory, Inc. | Covers for micromechanical sensors and other semiconductor devices |
| US5856722A (en) * | 1996-01-02 | 1999-01-05 | Cornell Research Foundation, Inc. | Microelectromechanics-based frequency signature sensor |
| US5817942A (en) * | 1996-02-28 | 1998-10-06 | The Charles Stark Draper Laboratory, Inc. | Capacitive in-plane accelerometer |
| WO1998001948A1 (en) * | 1996-07-03 | 1998-01-15 | International Business Machines Corporation | Mechanical signal processor comprising means for loss compensation |
| US5892153A (en) * | 1996-11-21 | 1999-04-06 | The Charles Stark Draper Laboratory, Inc. | Guard bands which control out-of-plane sensitivities in tuning fork gyroscopes and other sensors |
| US5783973A (en) * | 1997-02-24 | 1998-07-21 | The Charles Stark Draper Laboratory, Inc. | Temperature insensitive silicon oscillator and precision voltage reference formed therefrom |
| US5911156A (en) * | 1997-02-24 | 1999-06-08 | The Charles Stark Draper Laboratory, Inc. | Split electrode to minimize charge transients, motor amplitude mismatch errors, and sensitivity to vertical translation in tuning fork gyros and other devices |
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| US3614677A (en) * | 1966-04-29 | 1971-10-19 | Ibm | Electromechanical monolithic resonator |
| US4278492A (en) * | 1980-01-21 | 1981-07-14 | Hewlett-Packard Company | Frequency trimming of surface acoustic wave devices |
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| US4614119A (en) * | 1985-03-08 | 1986-09-30 | The Foxboro Company | Resonant hollow beam and method |
-
1985
- 1985-06-11 US US06/743,255 patent/US4764244A/en not_active Expired - Fee Related
-
1986
- 1986-06-05 EP EP86903988A patent/EP0222012B1/en not_active Expired - Lifetime
- 1986-06-05 KR KR870700114A patent/KR880700542A/ko not_active Application Discontinuation
- 1986-06-05 WO PCT/US1986/001249 patent/WO1986007507A1/en active IP Right Grant
- 1986-06-05 AU AU59932/86A patent/AU584040B2/en not_active Expired - Fee Related
- 1986-06-05 JP JP61503526A patent/JPS63500068A/ja active Pending
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1987
- 1987-02-10 FI FI870542A patent/FI870542A0/fi not_active IP Right Cessation
- 1987-02-10 DK DK065687A patent/DK167789B1/da active
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| Publication number | Publication date |
|---|---|
| DK65687A (da) | 1987-04-10 |
| EP0222012B1 (en) | 1991-07-24 |
| KR880700542A (ko) | 1988-03-15 |
| JPS63500068A (ja) | 1988-01-07 |
| US4764244A (en) | 1988-08-16 |
| FI870542A (fi) | 1987-02-10 |
| AU5993286A (en) | 1987-01-07 |
| WO1986007507A1 (en) | 1986-12-18 |
| FI870542A0 (fi) | 1987-02-10 |
| AU584040B2 (en) | 1989-05-11 |
| EP0222012A1 (en) | 1987-05-20 |
| DK65687D0 (da) | 1987-02-10 |
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