DK1430108T3 - Fremgangsmåde til dannelse af en cellevækstoverflade på et polymersubstrat - Google Patents

Fremgangsmåde til dannelse af en cellevækstoverflade på et polymersubstrat

Info

Publication number
DK1430108T3
DK1430108T3 DK02750161.8T DK02750161T DK1430108T3 DK 1430108 T3 DK1430108 T3 DK 1430108T3 DK 02750161 T DK02750161 T DK 02750161T DK 1430108 T3 DK1430108 T3 DK 1430108T3
Authority
DK
Denmark
Prior art keywords
forming
cell growth
polymer substrate
growth surface
polymer
Prior art date
Application number
DK02750161.8T
Other languages
Danish (da)
English (en)
Inventor
Oliva V Lachance
Hongming Wang
Marie D Bryhan
Paul E Gagnon
Zhong-He Shen
Original Assignee
Corning Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Corning Inc filed Critical Corning Inc
Application granted granted Critical
Publication of DK1430108T3 publication Critical patent/DK1430108T3/da

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/14—Surface shaping of articles, e.g. embossing; Apparatus therefor by plasma treatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/14—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by electrical means
    • B05D3/141—Plasma treatment
    • B05D3/142—Pretreatment
    • B05D3/144—Pretreatment of polymeric substrates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/14—Surface shaping of articles, e.g. embossing; Apparatus therefor by plasma treatment
    • B29C59/142—Surface shaping of articles, e.g. embossing; Apparatus therefor by plasma treatment of profiled articles, e.g. hollow or tubular articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D7/00—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials
    • B05D7/22—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials to internal surfaces, e.g. of tubes

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Apparatus Associated With Microorganisms And Enzymes (AREA)
DK02750161.8T 2001-09-04 2002-07-18 Fremgangsmåde til dannelse af en cellevækstoverflade på et polymersubstrat DK1430108T3 (da)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/947,035 US6617152B2 (en) 2001-09-04 2001-09-04 Method for creating a cell growth surface on a polymeric substrate
PCT/US2002/022926 WO2003020872A1 (en) 2001-09-04 2002-07-18 Method for creating a cell growth surface on a polymeric substrate

Publications (1)

Publication Number Publication Date
DK1430108T3 true DK1430108T3 (da) 2012-09-10

Family

ID=25485405

Family Applications (1)

Application Number Title Priority Date Filing Date
DK02750161.8T DK1430108T3 (da) 2001-09-04 2002-07-18 Fremgangsmåde til dannelse af en cellevækstoverflade på et polymersubstrat

Country Status (6)

Country Link
US (2) US6617152B2 (enExample)
EP (1) EP1430108B1 (enExample)
JP (1) JP4163617B2 (enExample)
CA (1) CA2459353A1 (enExample)
DK (1) DK1430108T3 (enExample)
WO (1) WO2003020872A1 (enExample)

Families Citing this family (86)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005110676A (ja) * 2003-09-17 2005-04-28 Think Engineering Kk 生細胞培養基材、該基材の製造方法、および該製造方法に用いるエッチング処理装置、並びに生細胞の培養方法
JP4752047B2 (ja) * 2004-06-30 2011-08-17 国立大学法人北海道大学 細胞培養用基材の製造方法及び細胞培養方法
US7157375B2 (en) * 2004-08-25 2007-01-02 Agere Systems, Inc. Methods of downstream microwave photoresist removal and via clean, particularly following Stop-On TiN etching
US8017395B2 (en) 2004-12-17 2011-09-13 Lifescan, Inc. Seeding cells on porous supports
JP4660702B2 (ja) * 2005-05-19 2011-03-30 国立大学法人名古屋大学 プラズマ発生装置付き射出成形装置並びに射出成形及び表面処理方法
AU2006202209B2 (en) * 2005-05-27 2011-04-14 Lifescan, Inc. Amniotic fluid derived cells
JP2009500297A (ja) * 2005-06-08 2009-01-08 セントカー・インコーポレーテツド 眼の変性についての細胞療法
WO2007008755A2 (en) * 2005-07-08 2007-01-18 The Board Of Regents, The University Of Texas System Surface functionalization of polymeric materials
CA2634510C (en) 2005-12-21 2018-01-09 Universite Catholique De Louvain Isolated liver stem cells
US8741643B2 (en) * 2006-04-28 2014-06-03 Lifescan, Inc. Differentiation of pluripotent stem cells to definitive endoderm lineage
US20080153077A1 (en) * 2006-06-12 2008-06-26 David Henry Substrates for immobilizing cells and tissues and methods of use thereof
EP1873205A1 (en) * 2006-06-12 2008-01-02 Corning Incorporated Thermo-responsive blends and uses thereof
US8497126B2 (en) * 2006-06-30 2013-07-30 Corning Incorporated Method of making enhanced cell growth surface
EP2061918A2 (en) * 2006-09-06 2009-05-27 Corning Incorporated Nanofibers, nanofilms and methods of making/using thereof
US8053230B2 (en) * 2006-09-07 2011-11-08 Nalge Nunc International Corporation Culture dish with lid
WO2008060382A2 (en) 2006-10-12 2008-05-22 Massachusetts Institute Of Technology Multi-well micropatterning by ablation
US9080145B2 (en) * 2007-07-01 2015-07-14 Lifescan Corporation Single pluripotent stem cell culture
RU2473685C2 (ru) 2007-07-31 2013-01-27 Лайфскен, Инк. Дифференцировка человеческих эмбриональных стволовых клеток
JP2010538108A (ja) * 2007-08-31 2010-12-09 コーニング インコーポレイテッド 高分子基板の反応表面
US7923241B2 (en) 2007-10-10 2011-04-12 Corning Incorporated Cell culture article and methods thereof
US8105822B2 (en) * 2007-10-10 2012-01-31 Corning Incorporated Biosensor article and methods thereof
CN107574142B (zh) 2007-11-27 2021-07-06 生命扫描有限公司 人胚胎干细胞的分化
BRPI0908033A2 (pt) 2008-02-21 2015-08-04 Centocor Ortho Biotech Inc Método placas de superfície modificada e composições para adesão, cultura e desprendimento de célula
US20100087002A1 (en) * 2008-02-21 2010-04-08 Benjamin Fryer Methods, Surface Modified Plates and Compositions for Cell Attachment, Cultivation and Detachment
US8623648B2 (en) 2008-04-24 2014-01-07 Janssen Biotech, Inc. Treatment of pluripotent cells
CA2729121C (en) 2008-06-30 2019-04-09 Centocor Ortho Biotech Inc. Differentiation of pluripotent stem cells
CN108486040A (zh) * 2008-06-30 2018-09-04 詹森生物科技公司 多能干细胞的分化
US20100028307A1 (en) * 2008-07-31 2010-02-04 O'neil John J Pluripotent stem cell differentiation
EP2346988B1 (en) * 2008-10-31 2017-05-31 Janssen Biotech, Inc. Differentiation of human embryonic stem cells to the pancreatic endocrine lineage
JP2012507289A (ja) 2008-10-31 2012-03-29 ヤンセン バイオテツク,インコーポレーテツド ヒト胚性幹細胞の膵内分泌系への分化
MX2011005288A (es) 2008-11-20 2011-06-01 Centocor Ortho Biotech Inc Celulas madre pluripotentes en microportadores.
CA2744227C (en) * 2008-11-20 2018-10-02 Centocor Ortho Biotech Inc. Methods and compositions for cell attachment and cultivation on planar substrates
US20110011854A1 (en) * 2009-02-23 2011-01-20 Middleton Scott W Low crystallinity susceptor films
WO2010096736A2 (en) * 2009-02-23 2010-08-26 Graphic Packaging International, Inc. Plasma treated susceptor films
US9284108B2 (en) 2009-02-23 2016-03-15 Graphic Packaging International, Inc. Plasma treated susceptor films
JP5636380B2 (ja) * 2009-02-23 2014-12-03 グラフィック パッケージング インターナショナル インコーポレイテッド 低結晶度サセプタフィルム
US20110002897A1 (en) 2009-06-11 2011-01-06 Burnham Institute For Medical Research Directed differentiation of stem cells
EP2456858B1 (en) * 2009-07-20 2018-08-29 Janssen Biotech, Inc. Differentiation of human embryonic stem cells
EP2456862A4 (en) 2009-07-20 2013-02-27 Janssen Biotech Inc DIFFERENTIATION OF HUMAN EMBRYONIC STEM CELLS
RU2540016C2 (ru) * 2009-07-20 2015-01-27 Янссен Байотек, Инк. Дифференцировка эмбриональных стволовых клеток человека
WO2011045644A1 (en) * 2009-10-12 2011-04-21 Caridianbct, Inc. Method of assembling a hollow fiber bioreactor
PH12012500818A1 (en) * 2009-10-29 2019-11-29 Janssen Biotech Inc Pluripotent stem cells
RU2664864C1 (ru) * 2009-12-23 2018-08-23 Янссен Байотек, Инк. Способы увеличения экспрессии ngn3 и nkx6.1 в эндокринных клетках поджелудочной железы
DK2516625T3 (da) 2009-12-23 2024-09-09 Janssen Biotech Inc Differentiering af humane embryonale stamceller
EP2536819B1 (en) 2010-02-16 2024-12-18 The University of North Carolina at Chapel Hill Array of micromolded structures for collecting or culturing of cells
AU2011223900A1 (en) * 2010-03-01 2012-09-13 Janssen Biotech, Inc. Methods for purifying cells derived from pluripotent stem cells
AU2011250912A1 (en) 2010-05-12 2012-11-22 Janssen Biotech, Inc. Differentiation of human embryonic stem cells
US20120052581A1 (en) 2010-08-27 2012-03-01 Derosa Michael Edward Microporous Cell Culture Substrates
US20120071575A1 (en) 2010-08-27 2012-03-22 Derosa Michael Edward Microporous Thermoplastic Article
CN103221536B (zh) 2010-08-31 2016-08-31 詹森生物科技公司 人胚胎干细胞的分化
WO2012030540A2 (en) 2010-08-31 2012-03-08 Janssen Biotech, Inc. Differentiation of pluripotent stem cells
KR101836850B1 (ko) 2010-08-31 2018-03-09 얀센 바이오테크 인코포레이티드 인간 배아 줄기 세포의 분화
US9725689B2 (en) 2010-10-08 2017-08-08 Terumo Bct, Inc. Configurable methods and systems of growing and harvesting cells in a hollow fiber bioreactor system
US20120295353A1 (en) 2011-05-20 2012-11-22 Yulong Hong Methods of making and using polymers and compositions
RU2705001C2 (ru) 2011-12-22 2019-11-01 Янссен Байотек, Инк. Дифференцировка эмбриональных стволовых клеток человека в одногормональные инсулинположительные клетки
MX354775B (es) 2012-03-07 2018-03-20 Janssen Biotech Inc Medios definidos para la expansion y el mantenimiento de celulas madre pluripotentes.
CN104334719B (zh) 2012-06-08 2018-02-13 詹森生物科技公司 人胚胎干细胞向胰腺内分泌细胞的分化
MX2015008578A (es) 2012-12-31 2015-09-07 Janssen Biotech Inc Diferenciacion de celulas madre embrionarias humanas en celulas endocrinas pancreaticas mediante el uso de relugadores de hb9.
US10370644B2 (en) 2012-12-31 2019-08-06 Janssen Biotech, Inc. Method for making human pluripotent suspension cultures and cells derived therefrom
KR102084561B1 (ko) 2012-12-31 2020-03-04 얀센 바이오테크 인코포레이티드 췌장 내분비 세포로의 분화를 위한 공기-액체 계면에서의 인간 배아 줄기세포의 배양
DK2938722T3 (da) 2012-12-31 2022-02-14 Janssen Biotech Inc Suspension og klyngedannelse af humane pluripotente celler til differentiering til endokrine pankreasceller
EP3068867B1 (en) 2013-11-16 2018-04-18 Terumo BCT, Inc. Expanding cells in a bioreactor
GR1009056B (el) * 2014-03-12 2017-06-23 Εθνικο Κεντρο Ερευνας Φυσικων Επιστημων (Εκεφε) "Δημοκριτος" Νανοδομημενα με ηλεκτρικες εκκενωσεις πλασματος υποστρωματα για επιλεκτικο εμπλουτισμο καρκινικων κυτταρων
US11008547B2 (en) 2014-03-25 2021-05-18 Terumo Bct, Inc. Passive replacement of media
SG11201609473XA (en) 2014-05-16 2016-12-29 Janssen Biotech Inc Use of small molecules to enhance mafa expression in pancreatic endocrine cells
EP3198006B1 (en) 2014-09-26 2021-03-24 Terumo BCT, Inc. Scheduled feed
WO2017004592A1 (en) 2015-07-02 2017-01-05 Terumo Bct, Inc. Cell growth with mechanical stimuli
WO2017180361A1 (en) 2016-04-14 2017-10-19 Janssen Biotech, Inc. Differentiation of pluripotent stem cells to intestinal midgut endoderm cells
WO2017205667A1 (en) 2016-05-25 2017-11-30 Terumo Bct, Inc. Cell expansion
US11104874B2 (en) 2016-06-07 2021-08-31 Terumo Bct, Inc. Coating a bioreactor
US11685883B2 (en) 2016-06-07 2023-06-27 Terumo Bct, Inc. Methods and systems for coating a cell growth surface
US20190352610A1 (en) * 2017-01-05 2019-11-21 Agency For Science, Technology And Research Methods of generating hepatic macrophages and uses thereof
CA3049781A1 (en) * 2017-01-27 2018-08-02 Stratatech Corporation Container systems to support the transport, thawing and use of cryopreserved human skin substitutes
JP7393945B2 (ja) 2017-03-31 2023-12-07 テルモ ビーシーティー、インコーポレーテッド 細胞増殖
US12234441B2 (en) 2017-03-31 2025-02-25 Terumo Bct, Inc. Cell expansion
US11624046B2 (en) 2017-03-31 2023-04-11 Terumo Bct, Inc. Cell expansion
US20200291342A1 (en) * 2017-10-20 2020-09-17 Sio2 Medical Products, Inc. Polymeric cell culture surface having high cell adhesion
CA3106981A1 (en) * 2018-08-13 2020-02-20 Sio2 Medical Products, Inc. Polymeric cell culturing surface having high cell adhesion
CN111171360A (zh) * 2020-02-28 2020-05-19 广州洁特生物过滤股份有限公司 细胞培养装置表面改性方法及细胞培养装置
CN111286066A (zh) * 2020-02-28 2020-06-16 广州洁特生物过滤股份有限公司 基材亲水表面的制备工艺以及三维细胞培养支架
EP4314244B1 (en) 2021-03-23 2025-07-23 Terumo BCT, Inc. Cell capture and expansion
KR20240006059A (ko) 2021-05-05 2024-01-12 후지필름 셀룰러 다이내믹스, 인코포레이티드 Ipsc-유래된 미세아교세포에 대한 방법 및 조성물
KR20240055838A (ko) 2021-09-10 2024-04-29 후지필름 셀룰러 다이내믹스, 인코포레이티드 유도된 만능 줄기 세포 유래된 세포의 조성물 및 이의 사용 방법
US12152699B2 (en) 2022-02-28 2024-11-26 Terumo Bct, Inc. Multiple-tube pinch valve assembly
USD1099116S1 (en) 2022-09-01 2025-10-21 Terumo Bct, Inc. Display screen or portion thereof with a graphical user interface for displaying cell culture process steps and measurements of an associated bioreactor device
US20240269189A1 (en) 2022-12-19 2024-08-15 FUJIFILM Holdings America Corporation Extracellular vesicle-enriched secretome composition derived from induced pluripotent stem cell derived-microglia and methods of use thereof

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3616458A (en) * 1969-12-31 1971-10-26 Yosimaro Moriya Apparatus for activating internal surfaces of plastic hollow articles
JPS5712032A (en) 1980-06-26 1982-01-21 Sekisui Chem Co Ltd Apparatus for treatment with activated gas
US4452679A (en) * 1981-10-07 1984-06-05 Becton Dickinson And Company Substrate with chemically modified surface and method of manufacture thereof
CA1201400A (en) * 1982-04-16 1986-03-04 Joel L. Williams Chemically specific surfaces for influencing cell activity during culture
US4752426A (en) 1985-06-27 1988-06-21 Yoshito Ikada Process for manufacture of plastic resinous tubes
US4919659A (en) * 1985-12-16 1990-04-24 The Board Of Regents For The University Of Washington Radio frequency plasma deposited polymers that enhance cell growth
US4927676A (en) * 1988-07-01 1990-05-22 Becton, Dickinson And Company Method for rapid adherence of endothelial cells onto a surface and surfaces prepared thereby
US5369012A (en) 1992-03-26 1994-11-29 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Method of making a membrane having hydrophilic and hydrophobic surfaces for adhering cells or antibodies by using atomic oxygen or hydroxyl radicals
MX9303141A (es) * 1992-05-28 1994-04-29 Polar Materials Inc Metodos y aparatos para depositar recubrimientos de barrera.
US5257633A (en) * 1992-06-23 1993-11-02 Becton, Dickinson And Company Surface modified blood collection tubes
US5283086A (en) * 1992-12-23 1994-02-01 The University Of Western Ontario Plasma treatment of polymer powders
AU6828696A (en) 1995-08-31 1997-03-19 Ashby Scientific Ltd Apparatus and methods for culturing biological material
DE19532412C2 (de) * 1995-09-01 1999-09-30 Agrodyn Hochspannungstechnik G Vorrichtung zur Oberflächen-Vorbehandlung von Werkstücken
US6033582A (en) 1996-01-22 2000-03-07 Etex Corporation Surface modification of medical implants
US5702770A (en) 1996-01-30 1997-12-30 Becton, Dickinson And Company Method for plasma processing
DE19629877C1 (de) * 1996-07-24 1997-03-27 Schott Glaswerke CVD-Verfahren und Vorrichtung zur Innenbeschichtung von Hohlkörpern
US6391655B1 (en) 1997-07-30 2002-05-21 Corning Incorporated Oxidized styrenic polymers for DNA binding
AU747272B2 (en) * 1997-09-30 2002-05-09 Tetra Laval Holdings & Finance Sa Method and apparatus for treating the inside surface of plastic bottles in a plasma enhanced process
CH692583A5 (de) 1998-03-03 2002-08-15 Weidmann H Ag Kulturgefäss.
FR2776540B1 (fr) * 1998-03-27 2000-06-02 Sidel Sa Recipient en matiere a effet barriere et procede et appareil pour sa fabrication
SE9901100D0 (sv) * 1999-03-24 1999-03-24 Amersham Pharm Biotech Ab Surface and tis manufacture and uses
US6114243A (en) * 1999-11-15 2000-09-05 Chartered Semiconductor Manufacturing Ltd Method to avoid copper contamination on the sidewall of a via or a dual damascene structure
AU2001238307A1 (en) 2000-02-11 2001-08-20 Rutgers, The State University Of New Jersey Micropatterning surfaces of polymeric substrates

Also Published As

Publication number Publication date
CA2459353A1 (en) 2003-03-13
US20030049834A1 (en) 2003-03-13
JP4163617B2 (ja) 2008-10-08
EP1430108B1 (en) 2012-05-23
US20030180903A1 (en) 2003-09-25
US6617152B2 (en) 2003-09-09
EP1430108A1 (en) 2004-06-23
EP1430108A4 (en) 2007-11-21
JP2005504855A (ja) 2005-02-17
WO2003020872A1 (en) 2003-03-13
US7579179B2 (en) 2009-08-25

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