DK0534825T3 - Helium-baseret lækagedetektor - Google Patents
Helium-baseret lækagedetektorInfo
- Publication number
- DK0534825T3 DK0534825T3 DK92402551.3T DK92402551T DK0534825T3 DK 0534825 T3 DK0534825 T3 DK 0534825T3 DK 92402551 T DK92402551 T DK 92402551T DK 0534825 T3 DK0534825 T3 DK 0534825T3
- Authority
- DK
- Denmark
- Prior art keywords
- pressure
- pump
- leak detector
- helium
- stages
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Examining Or Testing Airtightness (AREA)
- Rotary Pumps (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9111755A FR2681688B1 (fr) | 1991-09-24 | 1991-09-24 | Installation de detection de fuites de gaz utilisant la technique de reniflage. |
Publications (1)
Publication Number | Publication Date |
---|---|
DK0534825T3 true DK0534825T3 (da) | 1995-12-04 |
Family
ID=9417244
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DK92402551.3T DK0534825T3 (da) | 1991-09-24 | 1992-09-17 | Helium-baseret lækagedetektor |
Country Status (8)
Country | Link |
---|---|
US (1) | US5341671A (da) |
EP (1) | EP0534825B1 (da) |
JP (1) | JP3124842B2 (da) |
AT (1) | ATE129569T1 (da) |
DE (1) | DE69205654T2 (da) |
DK (1) | DK0534825T3 (da) |
ES (1) | ES2078708T3 (da) |
FR (1) | FR2681688B1 (da) |
Families Citing this family (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4228313A1 (de) * | 1992-08-26 | 1994-03-03 | Leybold Ag | Gegenstrom-Lecksucher mit Hochvakuumpumpe |
US5733104A (en) * | 1992-12-24 | 1998-03-31 | Balzers-Pfeiffer Gmbh | Vacuum pump system |
DE4343912A1 (de) * | 1993-12-22 | 1995-06-29 | Leybold Ag | Verfahren zum Betrieb eines mit einer Schnüffelleitung ausgerüsteten Testgaslecksuchers sowie für die Durchführung dieses Verfahrens geeigneter Testgaslecksucher |
GB9403184D0 (en) * | 1994-02-18 | 1994-04-06 | Boc Group Plc | Methods and apparatus for leak testing |
DE4442174A1 (de) * | 1994-11-26 | 1996-05-30 | Leybold Ag | Lecksuchgerät mit Vakuumpumpen und Betriebsverfahren dazu |
FR2728072B1 (fr) * | 1994-12-07 | 1997-01-10 | Cit Alcatel | Detecteur de fuite |
ES2192568T3 (es) * | 1994-12-23 | 2003-10-16 | Unaxis Balzers Ag | Procedimiento para el analisis de gases y analizador de gases. |
DE19504278A1 (de) * | 1995-02-09 | 1996-08-14 | Leybold Ag | Testgas-Lecksuchgerät |
FR2734633B1 (fr) * | 1995-05-24 | 1997-06-20 | Cit Alcatel | Installation pour detecter la presence d'helium dans un circuit de fluide |
FR2761776B1 (fr) * | 1997-04-03 | 1999-07-23 | Alsthom Cge Alcatel | Detecteur de fuite a gaz traceur |
FR2784184B1 (fr) | 1998-10-01 | 2000-12-15 | Cit Alcatel | Detecteur de fuite compact |
DE10055057A1 (de) * | 2000-11-07 | 2002-05-08 | Pfeiffer Vacuum Gmbh | Leckdetektorpumpe |
SE518522C2 (sv) * | 2001-03-21 | 2002-10-22 | Sensistor Ab | Metod och anordning vid täthetsprovning och läcksökning |
DE10156205A1 (de) * | 2001-11-15 | 2003-06-05 | Inficon Gmbh | Testgaslecksuchgerät |
US6679098B2 (en) * | 2002-02-25 | 2004-01-20 | Advanced Test Products, Inc. | High flow rate sample flow path assembly for electronic gas leak detectors |
DE102004029637A1 (de) * | 2004-06-18 | 2006-01-05 | Inficon Gmbh | Lecksuchgerät mit Schnüffelsonde |
GB0424198D0 (en) * | 2004-11-01 | 2004-12-01 | Boc Group Plc | Pumping arrangement |
DE102005021909A1 (de) * | 2005-05-12 | 2006-11-16 | Inficon Gmbh | Schnüffellecksucher mit Quarzfenstersensor |
DE102006056215A1 (de) | 2006-11-29 | 2008-06-05 | Inficon Gmbh | Schnüffellecksuchgerät |
DE102007035932A1 (de) * | 2007-07-31 | 2009-02-05 | Inficon Gmbh | Lecksuchgerät |
DE102007043382A1 (de) | 2007-09-12 | 2009-03-19 | Inficon Gmbh | Schnüffellecksucher |
DE102009035332A1 (de) * | 2009-07-30 | 2011-02-03 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
US9038441B2 (en) * | 2012-01-20 | 2015-05-26 | TLI Enterprises, Inc. | High speed helium leak detection system and method |
DE102016114983A1 (de) * | 2016-08-12 | 2018-02-15 | Pfeiffer Vacuum Gmbh | Vakuumsystem |
FR3069639B1 (fr) * | 2017-07-26 | 2019-08-30 | Pfeiffer Vacuum | Sonde de reniflage, detecteur de fuites et procede de detection de fuites |
FR3070489B1 (fr) * | 2017-08-29 | 2020-10-23 | Pfeiffer Vacuum | Detecteur de fuites et procede de detection de fuites pour le controle de l'etancheite d'objets a tester |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2452699A1 (fr) * | 1979-03-28 | 1980-10-24 | Cit Alcatel | Dispositif de reniflage pour detecteur de fuites a helium a spectrometre de masse |
EP0070341B1 (fr) * | 1981-07-22 | 1985-10-23 | COMPAGNIE INDUSTRIELLE DES TELECOMMUNICATIONS CIT-ALCATEL S.A. dite: | Détecteur de fuites à hélium |
FR2604522B1 (fr) * | 1986-09-26 | 1989-06-16 | Cit Alcatel | Installation de detection de fuite a gaz traceur et procede d'utilisation |
DE3775213D1 (de) * | 1987-03-27 | 1992-01-23 | Leybold Ag | Lecksuchgeraet und betriebsverfahren dazu. |
EP0344345B1 (de) * | 1988-06-01 | 1991-09-18 | Leybold Aktiengesellschaft | Pumpsystem für ein Lecksuchgerät |
US4893497A (en) * | 1988-09-12 | 1990-01-16 | Philip Danielson | Leak detection system |
FR2653558B1 (fr) * | 1989-10-23 | 1994-06-10 | Cit Alcatel | Systeme de detection de fuites a gaz traceur. |
DE69016198T2 (de) * | 1990-07-06 | 1995-05-18 | Cit Alcatel | Zweite Stufe für mechanische Vakuumpumpeinheit und Lecküberwachungssystem zur Anwendung dieser Einheit. |
FR2666410B1 (fr) * | 1990-09-05 | 1993-10-08 | Alcatel Cit | Detecteur de fuite haut flux a trois filtres moleculaires. |
-
1991
- 1991-09-24 FR FR9111755A patent/FR2681688B1/fr not_active Expired - Fee Related
-
1992
- 1992-09-17 DE DE69205654T patent/DE69205654T2/de not_active Expired - Fee Related
- 1992-09-17 AT AT92402551T patent/ATE129569T1/de not_active IP Right Cessation
- 1992-09-17 ES ES92402551T patent/ES2078708T3/es not_active Expired - Lifetime
- 1992-09-17 EP EP92402551A patent/EP0534825B1/fr not_active Expired - Lifetime
- 1992-09-17 DK DK92402551.3T patent/DK0534825T3/da active
- 1992-09-23 US US07/949,155 patent/US5341671A/en not_active Expired - Lifetime
- 1992-09-24 JP JP04254696A patent/JP3124842B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
DE69205654T2 (de) | 1996-03-21 |
ES2078708T3 (es) | 1995-12-16 |
ATE129569T1 (de) | 1995-11-15 |
FR2681688A1 (fr) | 1993-03-26 |
EP0534825B1 (fr) | 1995-10-25 |
US5341671A (en) | 1994-08-30 |
DE69205654D1 (de) | 1995-11-30 |
JP3124842B2 (ja) | 2001-01-15 |
JPH05223681A (ja) | 1993-08-31 |
FR2681688B1 (fr) | 1993-11-19 |
EP0534825A1 (fr) | 1993-03-31 |
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