DK0411816T3 - Tilspidsede, bølgeledende halvledere og fremgangsmåder til fremstilling af sådanne - Google Patents

Tilspidsede, bølgeledende halvledere og fremgangsmåder til fremstilling af sådanne

Info

Publication number
DK0411816T3
DK0411816T3 DK90308134.7T DK90308134T DK0411816T3 DK 0411816 T3 DK0411816 T3 DK 0411816T3 DK 90308134 T DK90308134 T DK 90308134T DK 0411816 T3 DK0411816 T3 DK 0411816T3
Authority
DK
Denmark
Prior art keywords
semiconductors
waveguide
tapered
making
methods
Prior art date
Application number
DK90308134.7T
Other languages
Danish (da)
English (en)
Inventor
Thomas L Koch
Uziel Koren
Original Assignee
At & T Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US07/389,074 external-priority patent/US4944838A/en
Priority claimed from US07/389,087 external-priority patent/US4932032A/en
Application filed by At & T Corp filed Critical At & T Corp
Application granted granted Critical
Publication of DK0411816T3 publication Critical patent/DK0411816T3/da

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/1028—Coupling to elements in the cavity, e.g. coupling to waveguides adjacent the active region, e.g. forward coupled [DFC] structures
    • H01S5/1032—Coupling to elements comprising an optical axis that is not aligned with the optical axis of the active region
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/1228—Tapered waveguides, e.g. integrated spot-size transformers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/136—Integrated optical circuits characterised by the manufacturing method by etching
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/30—Optical coupling means for use between fibre and thin-film device
    • G02B6/305—Optical coupling means for use between fibre and thin-film device and having an integrated mode-size expanding section, e.g. tapered waveguide
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
    • H01L21/30604—Chemical etching
    • H01L21/30612—Etching of AIIIBV compounds
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/1003—Waveguide having a modified shape along the axis, e.g. branched, curved, tapered, voids
    • H01S5/1014—Tapered waveguide, e.g. spotsize converter

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Electromagnetism (AREA)
  • Optical Integrated Circuits (AREA)
DK90308134.7T 1989-08-03 1990-07-25 Tilspidsede, bølgeledende halvledere og fremgangsmåder til fremstilling af sådanne DK0411816T3 (da)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/389,074 US4944838A (en) 1989-08-03 1989-08-03 Method of making tapered semiconductor waveguides
US07/389,087 US4932032A (en) 1989-08-03 1989-08-03 Tapered semiconductor waveguides

Publications (1)

Publication Number Publication Date
DK0411816T3 true DK0411816T3 (da) 1994-10-17

Family

ID=27012543

Family Applications (1)

Application Number Title Priority Date Filing Date
DK90308134.7T DK0411816T3 (da) 1989-08-03 1990-07-25 Tilspidsede, bølgeledende halvledere og fremgangsmåder til fremstilling af sådanne

Country Status (7)

Country Link
EP (1) EP0411816B1 (ko)
JP (1) JP2634687B2 (ko)
KR (1) KR930010131B1 (ko)
CA (1) CA2020246C (ko)
DE (1) DE69012704T2 (ko)
DK (1) DK0411816T3 (ko)
HK (1) HK193995A (ko)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19538232A1 (de) * 1995-10-13 1997-04-17 Siemens Ag Optoelektronisches Bauelement mit kodirektionaler Modenkopplung
DE19606537A1 (de) * 1996-02-22 1997-08-28 Bosch Gmbh Robert Verfahren zur Herstellung einer Masterstruktur
CN1922519B (zh) * 2004-08-23 2010-12-01 莫莱克斯公司 用于改善光纤和集成平面波导管之间的光耦合效率的系统和锥形波导管及其制造方法
JP2011164376A (ja) * 2010-02-10 2011-08-25 Mitsubishi Electric Corp スポットサイズ変換導波路
WO2016195701A1 (en) * 2015-06-05 2016-12-08 Iulian Basarab Petrescu-Prahova Emitter semiconductor laser type of device

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3978426A (en) * 1975-03-11 1976-08-31 Bell Telephone Laboratories, Incorporated Heterostructure devices including tapered optical couplers
US4546480A (en) * 1983-08-19 1985-10-08 Xerox Corporation Injection lasers with quantum size effect transparent waveguiding

Also Published As

Publication number Publication date
CA2020246C (en) 1994-02-01
CA2020246A1 (en) 1991-02-04
KR930010131B1 (ko) 1993-10-14
EP0411816B1 (en) 1994-09-21
JPH0369904A (ja) 1991-03-26
EP0411816A3 (en) 1991-11-06
KR910005501A (ko) 1991-03-30
EP0411816A2 (en) 1991-02-06
HK193995A (en) 1996-01-05
DE69012704T2 (de) 1995-01-12
JP2634687B2 (ja) 1997-07-30
DE69012704D1 (de) 1994-10-27

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