DE9210359U1 - - Google Patents

Info

Publication number
DE9210359U1
DE9210359U1 DE9210359U DE9210359U DE9210359U1 DE 9210359 U1 DE9210359 U1 DE 9210359U1 DE 9210359 U DE9210359 U DE 9210359U DE 9210359 U DE9210359 U DE 9210359U DE 9210359 U1 DE9210359 U1 DE 9210359U1
Authority
DE
Germany
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE9210359U
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG filed Critical Leybold AG
Priority to DE9210359U priority Critical patent/DE9210359U1/de
Publication of DE9210359U1 publication Critical patent/DE9210359U1/de
Priority to NL9300458A priority patent/NL9300458A/nl
Priority to KR2019930012769U priority patent/KR0132714Y1/ko
Priority to JP1993042322U priority patent/JP2511064Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24D—DOMESTIC- OR SPACE-HEATING SYSTEMS, e.g. CENTRAL HEATING SYSTEMS; DOMESTIC HOT-WATER SUPPLY SYSTEMS; ELEMENTS OR COMPONENTS THEREFOR
    • F24D19/00—Details
    • F24D19/10—Arrangement or mounting of control or safety devices
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/541—Heating or cooling of the substrates
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24D—DOMESTIC- OR SPACE-HEATING SYSTEMS, e.g. CENTRAL HEATING SYSTEMS; DOMESTIC HOT-WATER SUPPLY SYSTEMS; ELEMENTS OR COMPONENTS THEREFOR
    • F24D3/00—Hot-water central heating systems
    • F24D3/12—Tube and panel arrangements for ceiling, wall, or underfloor heating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Thermal Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Central Heating Systems (AREA)
DE9210359U 1992-08-03 1992-08-03 Expired - Lifetime DE9210359U1 (de)

Priority Applications (4)

Application Number Priority Date Filing Date Title
DE9210359U DE9210359U1 (de) 1992-08-03 1992-08-03
NL9300458A NL9300458A (nl) 1992-08-03 1993-03-15 Inrichting voor het aanbrengen van een bekledingslaag op substraten.
KR2019930012769U KR0132714Y1 (ko) 1992-08-03 1993-07-12 바닥의 안전을 위한 장치
JP1993042322U JP2511064Y2 (ja) 1992-08-03 1993-08-02 基板を被覆するための装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE9210359U DE9210359U1 (de) 1992-08-03 1992-08-03

Publications (1)

Publication Number Publication Date
DE9210359U1 true DE9210359U1 (de) 1992-09-24

Family

ID=6882272

Family Applications (1)

Application Number Title Priority Date Filing Date
DE9210359U Expired - Lifetime DE9210359U1 (de) 1992-08-03 1992-08-03

Country Status (4)

Country Link
JP (1) JP2511064Y2 (de)
KR (1) KR0132714Y1 (de)
DE (1) DE9210359U1 (de)
NL (1) NL9300458A (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014104009A1 (de) * 2014-03-24 2015-09-24 Aixtron Se Auf seinen beiden voneinander wegweisenden Breitseiten je ein Substrat tragender Substratträger
US10260147B2 (en) 2014-03-24 2019-04-16 Aixtron Se Device for depositing nanotubes

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109609923B (zh) * 2019-01-11 2023-08-25 广东谛思纳为新材料科技有限公司 一种便于拉链扣电离子镀铂加工的自动化装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58170532A (ja) * 1982-03-30 1983-10-07 Toshiba Corp 真空用加熱装置
DE4029905C2 (de) * 1990-09-21 1993-10-28 Leybold Ag Vorrichtung für den Transport von Substraten

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
NICHTS ERMITTELT *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014104009A1 (de) * 2014-03-24 2015-09-24 Aixtron Se Auf seinen beiden voneinander wegweisenden Breitseiten je ein Substrat tragender Substratträger
US10260147B2 (en) 2014-03-24 2019-04-16 Aixtron Se Device for depositing nanotubes

Also Published As

Publication number Publication date
KR940006064U (ko) 1994-03-22
JPH0625359U (ja) 1994-04-05
KR0132714Y1 (ko) 1998-12-15
JP2511064Y2 (ja) 1996-09-18
NL9300458A (nl) 1994-03-01

Similar Documents

Publication Publication Date Title
DE9200027U1 (de)
BR9207065A (de)
DE9200134U1 (de)
DE9200028U1 (de)
DE9200128U1 (de)
DE9200082U1 (de)
DE9200099U1 (de)
DE9200096U1 (de)
DE9200097U1 (de)
DE9200014U1 (de)
DE9200068U1 (de)
DE9200022U1 (de)
DE9200100U1 (de)
DE9200269U1 (de)
DE9200150U1 (de)
DE9200129U1 (de)
DE9200114U1 (de)
DE9200160U1 (de)
DE9200176U1 (de)
DE9200209U1 (de)
DE9200211U1 (de)
DE9200212U1 (de)
DE9200237U1 (de)
DE9200111U1 (de)
DE9200159U1 (de)