DE9116285U1 - Vorrichtung zur Halterung und zum Transport von Substraten in Vakuumanlagen - Google Patents

Vorrichtung zur Halterung und zum Transport von Substraten in Vakuumanlagen

Info

Publication number
DE9116285U1
DE9116285U1 DE9116285U DE9116285U DE9116285U1 DE 9116285 U1 DE9116285 U1 DE 9116285U1 DE 9116285 U DE9116285 U DE 9116285U DE 9116285 U DE9116285 U DE 9116285U DE 9116285 U1 DE9116285 U1 DE 9116285U1
Authority
DE
Germany
Prior art keywords
substrates
frame
holding
fastening elements
spring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE9116285U
Other languages
German (de)
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG filed Critical Leybold AG
Priority to DE9116285U priority Critical patent/DE9116285U1/de
Priority claimed from DE4136342A external-priority patent/DE4136342A1/de
Publication of DE9116285U1 publication Critical patent/DE9116285U1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Packaging Frangible Articles (AREA)
DE9116285U 1991-11-05 1991-11-05 Vorrichtung zur Halterung und zum Transport von Substraten in Vakuumanlagen Expired - Lifetime DE9116285U1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE9116285U DE9116285U1 (de) 1991-11-05 1991-11-05 Vorrichtung zur Halterung und zum Transport von Substraten in Vakuumanlagen

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE9116285U DE9116285U1 (de) 1991-11-05 1991-11-05 Vorrichtung zur Halterung und zum Transport von Substraten in Vakuumanlagen
DE4136342A DE4136342A1 (de) 1991-11-05 1991-11-05 Vorrichtung zur halterung und zum transport von substraten in vakuumanlagen

Publications (1)

Publication Number Publication Date
DE9116285U1 true DE9116285U1 (de) 1992-05-27

Family

ID=25908800

Family Applications (1)

Application Number Title Priority Date Filing Date
DE9116285U Expired - Lifetime DE9116285U1 (de) 1991-11-05 1991-11-05 Vorrichtung zur Halterung und zum Transport von Substraten in Vakuumanlagen

Country Status (1)

Country Link
DE (1) DE9116285U1 (US20050103857A1-20050519-P00003.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE9301727U1 (de) * 1993-02-09 1993-03-25 Leybold AG, 6450 Hanau Vorrichtung zum Halten und Transportieren plattenförmiger Substrate
WO2012153232A3 (de) * 2011-05-12 2013-01-03 Roth & Rau Ag Substrattransportmodul, belade- und entladesystem und transportverfahren für substrate in einer substratbearbeitungsanlage

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE9301727U1 (de) * 1993-02-09 1993-03-25 Leybold AG, 6450 Hanau Vorrichtung zum Halten und Transportieren plattenförmiger Substrate
WO2012153232A3 (de) * 2011-05-12 2013-01-03 Roth & Rau Ag Substrattransportmodul, belade- und entladesystem und transportverfahren für substrate in einer substratbearbeitungsanlage

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