DE69938260D1 - Einheit zum Halten eines Werkstückes mittels Vakuum und Vakuumkopf - Google Patents

Einheit zum Halten eines Werkstückes mittels Vakuum und Vakuumkopf

Info

Publication number
DE69938260D1
DE69938260D1 DE69938260T DE69938260T DE69938260D1 DE 69938260 D1 DE69938260 D1 DE 69938260D1 DE 69938260 T DE69938260 T DE 69938260T DE 69938260 T DE69938260 T DE 69938260T DE 69938260 D1 DE69938260 D1 DE 69938260D1
Authority
DE
Germany
Prior art keywords
absorption
vacuum
head
air
portions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69938260T
Other languages
English (en)
Other versions
DE69938260T2 (de
Inventor
Akiyoshi Ochiai
Akio Morishita
Kazuyuki Toda
Ryoichi Furuhashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yamazaki Mazak Corp
Original Assignee
Yamazaki Mazak Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP31541398A external-priority patent/JP3895483B2/ja
Priority claimed from JP10315414A external-priority patent/JP2000127076A/ja
Application filed by Yamazaki Mazak Corp filed Critical Yamazaki Mazak Corp
Publication of DE69938260D1 publication Critical patent/DE69938260D1/de
Application granted granted Critical
Publication of DE69938260T2 publication Critical patent/DE69938260T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q7/00—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting
    • B23Q7/04—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting by means of grippers
    • B23Q7/048—Multiple gripper units
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
    • B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
    • B25B11/005—Vacuum work holders
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • B65G47/918—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers with at least two picking-up heads
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manipulator (AREA)
  • Magnetic Heads (AREA)
  • Specific Conveyance Elements (AREA)
  • Adornments (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Jet Pumps And Other Pumps (AREA)
DE69938260T 1998-10-19 1999-10-15 Einheit zum Halten eines Werkstückes mittels Vakuum und Vakuumkopf Expired - Fee Related DE69938260T2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP31541398A JP3895483B2 (ja) 1998-10-19 1998-10-19 ワーク吸着搬送装置
JP10315414A JP2000127076A (ja) 1998-10-19 1998-10-19 吸着ヘッド
JP31541498 1998-10-19
JP31541398 1998-10-19

Publications (2)

Publication Number Publication Date
DE69938260D1 true DE69938260D1 (de) 2008-04-10
DE69938260T2 DE69938260T2 (de) 2009-03-05

Family

ID=26568294

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69938260T Expired - Fee Related DE69938260T2 (de) 1998-10-19 1999-10-15 Einheit zum Halten eines Werkstückes mittels Vakuum und Vakuumkopf
DE69924578T Expired - Lifetime DE69924578T2 (de) 1998-10-19 1999-10-15 Saugknöpfetragvorrichtung zur Werkstückaufnahme

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE69924578T Expired - Lifetime DE69924578T2 (de) 1998-10-19 1999-10-15 Saugknöpfetragvorrichtung zur Werkstückaufnahme

Country Status (5)

Country Link
US (1) US6311966B1 (de)
EP (2) EP0995542B1 (de)
KR (1) KR100481020B1 (de)
AT (2) ATE292542T1 (de)
DE (2) DE69938260T2 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117800089A (zh) * 2024-01-29 2024-04-02 北京沃华慧通测控技术有限公司 一种环形工件搬运设备及搬运方法

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1014241B1 (de) * 1998-12-25 2005-03-16 Yamazaki Mazak Kabushiki Kaisha Einheit zur Teile-Klassifizierung
WO2002063322A1 (en) 2001-02-08 2002-08-15 Seiko Epson Corporation Member exchanger, method of controlling member exchanger, ic inspection method, ic handler, and ic inspector
EP1249398A1 (de) * 2001-04-09 2002-10-16 FPS Food Processing Systems B.V. Saugnapfgerät
US6817145B2 (en) * 2002-08-28 2004-11-16 Chung-Teng Chen Glasshouse strut
JP5008252B2 (ja) * 2004-05-18 2012-08-22 パナソニック株式会社 燃料電池用液体燃料収納容器及び燃料電池システム
ATE465827T1 (de) 2007-03-06 2010-05-15 Trumpf Sachsen Gmbh Maschinelle anordnung zum bearbeiten von plattenartigen werkstücken mit einer bearbeitungseinrichtung sowie mit einer handlingvorrichtung für bearbeitungsprodukte
US20100126320A1 (en) * 2008-11-21 2010-05-27 Trumpf, Inc. Vacuum based part separation
JP5505713B2 (ja) * 2010-04-26 2014-05-28 株式会社Ｓｕｍｃｏ 研磨液分配装置及びこれを備えた研磨装置
CN102909499A (zh) * 2011-08-03 2013-02-06 重庆长安凌云汽车零部件有限公司 汽车儿童安全座椅固定器机器人焊接智能工作站
CN103367217B (zh) * 2012-04-11 2016-08-24 上海微电子装备有限公司 一种硅片吸附装置及其吸附方法
CN104051290B (zh) * 2013-03-12 2018-03-09 松下知识产权经营株式会社 接合装置及薄膜状基板保持单元
CN106670657B (zh) * 2015-11-11 2019-04-02 上海酷铃自动化设备有限公司 真空吸盘机械搬运装置板料搬运装置
CN107640885A (zh) * 2017-09-19 2018-01-30 深圳市华星光电技术有限公司 一种残材夹取装置
CN107627242B (zh) * 2017-10-20 2023-07-11 昆山佰奥智能装备股份有限公司 可分离的载具定位机构
USD864263S1 (en) * 2018-04-26 2019-10-22 Jinan Jinqiang Laser CNC Equipment Co., Ltd Loader machine
JP7156067B2 (ja) * 2019-02-07 2022-10-19 トヨタ自動車株式会社 把持誤差補正方法、装置、及び、プログラム
CN109809184B (zh) * 2019-03-21 2021-05-14 大族激光科技产业集团股份有限公司 一种上下料装置
CN113579725A (zh) * 2021-07-30 2021-11-02 博众精工科技股份有限公司 一种定位移载装置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1042281A (en) * 1974-07-22 1978-11-14 Cominco Ltd. Method and apparatus for dust control treatment
DE3333301A1 (de) * 1983-09-15 1985-03-28 Otto Hänsel GmbH, 3000 Hannover Vorrichtung zum einlegen von suesswarenstuecken, wie pralinen, bonbons, schokoladetabletten od. dgl. in schachteln oder verpackungseinsaetze
US4684113A (en) * 1984-09-28 1987-08-04 The Boeing Company Universal holding fixture
NL9200001A (nl) * 1992-01-02 1993-08-02 Rohaco Ind Handling B V Inrichting voor het grijpen en verplaatsen van voorwerpen.
JP3070344B2 (ja) * 1992-07-31 2000-07-31 トヨタ自動車株式会社 プレス用切板ワークの清浄装置
ES2075800B1 (es) * 1993-10-14 1998-07-16 Torres Martinez M Instalacion para el transporte y volteo de grandes piezas.
US5544968A (en) * 1995-06-02 1996-08-13 Advanced Machine & Engineering Co. Lockable ball joint apparatus
NL1006715C2 (nl) * 1997-08-04 1999-02-08 Food Processing Systems Productoverdraaginrichting alsmede een samenstel omvattende een dergelijke productoverdraaginrichting.
US5975183A (en) * 1998-03-23 1999-11-02 Northrop Grumman Corporation Repair pressure applicator for in the field damaged aircraft

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117800089A (zh) * 2024-01-29 2024-04-02 北京沃华慧通测控技术有限公司 一种环形工件搬运设备及搬运方法

Also Published As

Publication number Publication date
EP1452267A1 (de) 2004-09-01
KR20000029186A (ko) 2000-05-25
ATE292542T1 (de) 2005-04-15
DE69924578D1 (de) 2005-05-12
DE69924578T2 (de) 2006-02-09
US6311966B1 (en) 2001-11-06
EP1452267B1 (de) 2008-02-27
EP0995542A3 (de) 2002-10-16
ATE387285T1 (de) 2008-03-15
EP0995542A2 (de) 2000-04-26
EP0995542B1 (de) 2005-04-06
DE69938260T2 (de) 2009-03-05
KR100481020B1 (ko) 2005-04-07

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee