DE69937858D1 - Verfahren und Vorrichtung zur Messung von Vibrationswellen - Google Patents

Verfahren und Vorrichtung zur Messung von Vibrationswellen

Info

Publication number
DE69937858D1
DE69937858D1 DE69937858T DE69937858T DE69937858D1 DE 69937858 D1 DE69937858 D1 DE 69937858D1 DE 69937858 T DE69937858 T DE 69937858T DE 69937858 T DE69937858 T DE 69937858T DE 69937858 D1 DE69937858 D1 DE 69937858D1
Authority
DE
Germany
Prior art keywords
vibration waves
measuring vibration
measuring
waves
vibration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69937858T
Other languages
English (en)
Other versions
DE69937858T2 (de
Inventor
Shigeru Ando
Muneo Harada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of DE69937858D1 publication Critical patent/DE69937858D1/de
Application granted granted Critical
Publication of DE69937858T2 publication Critical patent/DE69937858T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
    • G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
    • G01H11/08—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means using piezoelectric devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H3/00—Measuring characteristics of vibrations by using a detector in a fluid
    • G01H3/04—Frequency
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H1/00—Measuring characteristics of vibrations in solids by using direct conduction to the detector
    • G01H1/04—Measuring characteristics of vibrations in solids by using direct conduction to the detector of vibrations which are transverse to direction of propagation
    • G01H1/06—Frequency

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Pressure Sensors (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
DE69937858T 1998-05-22 1999-05-22 Verfahren und Vorrichtung zur Messung von Vibrationswellen Expired - Lifetime DE69937858T2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP14191598 1998-05-22
JP14191598 1998-05-22
JP12530399A JP3348686B2 (ja) 1998-05-22 1999-04-30 振動波検出方法及び装置
JP12530399 1999-04-30

Publications (2)

Publication Number Publication Date
DE69937858D1 true DE69937858D1 (de) 2008-02-14
DE69937858T2 DE69937858T2 (de) 2009-01-02

Family

ID=26461771

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69937858T Expired - Lifetime DE69937858T2 (de) 1998-05-22 1999-05-22 Verfahren und Vorrichtung zur Messung von Vibrationswellen

Country Status (8)

Country Link
US (1) US6079274A (de)
EP (1) EP0959333B1 (de)
JP (1) JP3348686B2 (de)
KR (1) KR100354976B1 (de)
AU (1) AU746037B2 (de)
DE (1) DE69937858T2 (de)
DK (1) DK0959333T3 (de)
TW (1) TWI243238B (de)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3348687B2 (ja) * 1998-05-22 2002-11-20 住友金属工業株式会社 振動波検出方法及び装置
US6360611B1 (en) * 2000-04-21 2002-03-26 Kohji Toda Device for ultrasound radiation into a material
US6600389B2 (en) * 2001-05-30 2003-07-29 Intel Corporation Tapered structures for generating a set of resonators with systematic resonant frequencies
DE10129456A1 (de) * 2001-06-19 2003-01-09 Fraunhofer Ges Forschung Vorrichtung und Verfahren zur Erfassung und Analyse von Schallsignalen
US7444877B2 (en) * 2002-08-20 2008-11-04 The Regents Of The University Of California Optical waveguide vibration sensor for use in hearing aid
KR100583103B1 (ko) 2002-12-31 2006-05-23 주식회사 하이닉스반도체 반도체 소자의 제조 방법
US7088031B2 (en) * 2003-04-22 2006-08-08 Infinite Power Solutions, Inc. Method and apparatus for an ambient energy battery or capacitor recharge system
US20080178682A1 (en) * 2005-01-10 2008-07-31 The Regents Of The University Of California Resonator circuit having reduced effects of parasitic feed-through capacitance
JP2006200976A (ja) * 2005-01-19 2006-08-03 Denso Corp 超音波センサ
US7559242B2 (en) * 2005-03-31 2009-07-14 Intel Corporation Silicon micromachined ultra-sensitive vibration spectrum sensor array (VSSA)
US7600429B2 (en) * 2006-04-20 2009-10-13 Intel Corporation Vibration spectrum sensor array having differing sensors
JP4539920B2 (ja) * 2006-05-12 2010-09-08 国立大学法人 東京大学 振動波検出方法及び装置
JP2008008683A (ja) * 2006-06-27 2008-01-17 Univ Of Tokyo 振動波検出方法及び装置
JP2008139136A (ja) * 2006-12-01 2008-06-19 Matsushita Electric Ind Co Ltd 力学量センサおよびその製造方法
KR100999838B1 (ko) 2008-05-09 2010-12-09 한국과학기술원 다중외팔보 mems 센서의 제조방법 및 다중외팔보 mems 센서를 이용한 음원위치 추정방법
EP2442445B1 (de) * 2010-10-12 2013-12-11 Nxp B.V. MEMS-Oszillator
US8629036B2 (en) 2011-11-11 2014-01-14 International Business Machines Corporation Integrated semiconductor devices with amorphous silicon beam, methods of manufacture and design structure
US8546240B2 (en) 2011-11-11 2013-10-01 International Business Machines Corporation Methods of manufacturing integrated semiconductor devices with single crystalline beam
US9105751B2 (en) 2011-11-11 2015-08-11 International Business Machines Corporation Integrated semiconductor devices with single crystalline beam, methods of manufacture and design structure
KR102207928B1 (ko) * 2014-08-13 2021-01-26 삼성전자주식회사 음향 센싱 소자 및 주파수 정보 획득 방법
KR102454950B1 (ko) * 2015-12-11 2022-10-14 삼성전자주식회사 분광기 및 분광기를 포함하는 이미지 센서
JP7030331B2 (ja) * 2018-03-28 2022-03-07 リバーエレテック株式会社 Ａｅセンサ素子及びａｅセンサ
KR20200059379A (ko) * 2018-11-20 2020-05-29 삼성전자주식회사 공진기, 이를 포함하는 공진기 시스템 및 공진기 제조 방법
KR20220037551A (ko) * 2020-09-17 2022-03-25 삼성전자주식회사 공진기 및 차동 증폭기를 포함하는 센서 인터페이스
KR20230069710A (ko) * 2021-11-12 2023-05-19 삼성전자주식회사 지향성 음향 센서

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3614678A (en) * 1967-08-11 1971-10-19 Gen Electric Electromechanical filters with integral piezoresistive output and methods of making same
DE3731196A1 (de) * 1987-09-17 1989-03-30 Messerschmitt Boelkow Blohm Frequenzselektiver schallwandler
US5001933A (en) * 1989-12-26 1991-03-26 The United States Of America As Represented By The Secretary Of The Army Micromechanical vibration sensor
US5856722A (en) * 1996-01-02 1999-01-05 Cornell Research Foundation, Inc. Microelectromechanics-based frequency signature sensor

Also Published As

Publication number Publication date
EP0959333B1 (de) 2008-01-02
KR100354976B1 (ko) 2002-10-05
JP3348686B2 (ja) 2002-11-20
TWI243238B (en) 2005-11-11
DK0959333T3 (da) 2008-05-13
KR19990088491A (ko) 1999-12-27
EP0959333A3 (de) 2003-01-15
AU746037B2 (en) 2002-04-11
AU3121899A (en) 1999-12-02
US6079274A (en) 2000-06-27
JP2000046639A (ja) 2000-02-18
EP0959333A2 (de) 1999-11-24
DE69937858T2 (de) 2009-01-02

Similar Documents

Publication Publication Date Title
DE69937858D1 (de) Verfahren und Vorrichtung zur Messung von Vibrationswellen
DE69532091D1 (de) Verfahren und Vorrichtung zur Durchführung von Messungen
DE59804595D1 (de) Verfahren und vorrichtung zur messung von dichte und massenstrom
DE69941058D1 (de) Verfahren und gerät zur akustischen bohrlochmessung
DE69530563D1 (de) Verfahren und Vorrichtung zur Messung der Chemilumineszenz
DE69520858D1 (de) Vorrichtung und Verfahren zur Seitenaufprall-Prüfung
DE69733124D1 (de) Vorrichtung und verfahren zur messung der flächenkontur
DE69820601D1 (de) Verfahren und vorrichtung zur messung und ortung des zahnapex
DE69623248T2 (de) Verfahren und Vorrichtung zur Entfernungsmessung
DE69718551T2 (de) Verfahren und Vorrichtung zur Messung von Substrattemperaturen
DE69927328T2 (de) Vorrichtung und Verfahren zur Signalspitzenbegrenzung
DE69934807D1 (de) Vorrichtung und verfahren zur messung von pulsus paradoxus
DE59811327D1 (de) Verfahren und vorrichtung zur ermittlung der fahrzeugmasse
DE69928465D1 (de) Vorrichtung und Verfahren zur simultanen Messung von unterschiedlichen Strahlungsarten
DE69700087T2 (de) Gerät und Verfahren zur Signalanalyse
DE69727520D1 (de) Vorrichtung und Verfahren zur Flüssigkeitsstandsmessung
DE69522327T2 (de) Verfahren und vorrichtung zur richtungsbestimmung
DE69942346D1 (de) Verfahren und vorrichtung zur zerstörungsfreien prüfung
DE69819227D1 (de) Vorrichtung und Verfahren zur Trübungsmessung
DE60107476D1 (de) Verfahren und Vorrichtung zur dynamischen Unwuchtmessung
DE4497995T1 (de) Vorrichtung und Verfahren zur Frequenzmessung
DE60231036D1 (de) Verfahren und vorrichtung zur messung von wellenfrontaberrationen
DE59610934D1 (de) Vorrichtung und verfahren zur steifigkeitsmessung von flachen sendungen
DE59804984D1 (de) Verfahren zur Unwuchtbestimmung und Unwuchtmesseinrichtung
DE59609675D1 (de) Verfahren und Vorrichtung zur Abstandsmessung

Legal Events

Date Code Title Description
8364 No opposition during term of opposition