JP7030331B2 - Aeセンサ素子及びaeセンサ - Google Patents
Aeセンサ素子及びaeセンサ Download PDFInfo
- Publication number
- JP7030331B2 JP7030331B2 JP2018062008A JP2018062008A JP7030331B2 JP 7030331 B2 JP7030331 B2 JP 7030331B2 JP 2018062008 A JP2018062008 A JP 2018062008A JP 2018062008 A JP2018062008 A JP 2018062008A JP 7030331 B2 JP7030331 B2 JP 7030331B2
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- JP
- Japan
- Prior art keywords
- sensor element
- sensor
- resonator
- groove
- case
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Description
2,12a,12b ベース部
2a ベース部の下部
3,13a,13b 共振子
3a 表面
3b 裏面
3c 両側面
4,4a,4b,14a,14b 溝部
4c 電界遮断溝
5,5a,5b,15a,15b 溝部の電極膜
6,6a 側面の電極膜
7a 正極端子
7b 負極端子
11a 第1のAEセンサ素子
11b 第2のAEセンサ素子
16,23 フレーム
20 AEセンサ
21 ケース
21a 上ケース
21b 下ケース
22 電子回路
24 キャビティ
Claims (3)
- 板状の水晶材によって形成され、少なくとも1本の共振子の表面と裏面にそれぞれ4本ずつの溝部が対向するように設けられた共振子を備え、各溝部の内周面には電極膜が形成され、前記共振子の表面と裏面に設けられたそれぞれ2本ずつの溝部に隣接して1本の電界遮断溝が設けられ、該電界遮断溝は内周面に前記電極膜を有しないAEセンサ素子。
- 請求項1に記載のAEセンサ素子と、AEセンサ素子を収容するケースと、を有するAEセンサ。
- 前記AEセンサ素子及びケースがウエハレベルパッケージからなる請求項2に記載のAEセンサ。
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JP2018062008A JP7030331B2 (ja) | 2018-03-28 | 2018-03-28 | Aeセンサ素子及びaeセンサ |
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JP2018062008A JP7030331B2 (ja) | 2018-03-28 | 2018-03-28 | Aeセンサ素子及びaeセンサ |
Publications (3)
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JP2019174254A JP2019174254A (ja) | 2019-10-10 |
JP2019174254A5 JP2019174254A5 (ja) | 2021-04-30 |
JP7030331B2 true JP7030331B2 (ja) | 2022-03-07 |
Family
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Family Applications (1)
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JP2018062008A Active JP7030331B2 (ja) | 2018-03-28 | 2018-03-28 | Aeセンサ素子及びaeセンサ |
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JP (1) | JP7030331B2 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110793620B (zh) * | 2019-11-28 | 2024-01-26 | 长安大学 | 一种噪声检测装置及检测方法 |
JP2021124469A (ja) * | 2020-02-07 | 2021-08-30 | 多摩川精機株式会社 | Aeセンサ用音片アレイ配列構造、その配列構成方法、aeセンサ用音片アレイ、およびaeセンサ |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000046639A (ja) | 1998-05-22 | 2000-02-18 | Sumitomo Metal Ind Ltd | 振動波検出方法及び装置 |
JP2004085419A (ja) | 2002-08-28 | 2004-03-18 | Matsushita Electric Ind Co Ltd | 共振子、共振子アレイおよび音響センサ |
JP2007303995A (ja) | 2006-05-12 | 2007-11-22 | Univ Of Tokyo | 振動波検出方法及び装置 |
JP2008008683A (ja) | 2006-06-27 | 2008-01-17 | Univ Of Tokyo | 振動波検出方法及び装置 |
JP2009165164A (ja) | 1999-01-20 | 2009-07-23 | Seiko Epson Corp | 振動子及び振動子を搭載した電子機器 |
JP2011232264A (ja) | 2010-04-29 | 2011-11-17 | Seiko Epson Corp | 圧電センサー、圧電センサー素子及び圧電振動片 |
JP2014240789A (ja) | 2013-06-12 | 2014-12-25 | ソニー株式会社 | 圧電デバイス及び電子機器 |
JP2017200014A (ja) | 2016-04-26 | 2017-11-02 | セイコーエプソン株式会社 | 振動片基板、振動片の製造方法、振動子、発振器、電子機器および移動体 |
-
2018
- 2018-03-28 JP JP2018062008A patent/JP7030331B2/ja active Active
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000046639A (ja) | 1998-05-22 | 2000-02-18 | Sumitomo Metal Ind Ltd | 振動波検出方法及び装置 |
JP2009165164A (ja) | 1999-01-20 | 2009-07-23 | Seiko Epson Corp | 振動子及び振動子を搭載した電子機器 |
JP2004085419A (ja) | 2002-08-28 | 2004-03-18 | Matsushita Electric Ind Co Ltd | 共振子、共振子アレイおよび音響センサ |
JP2007303995A (ja) | 2006-05-12 | 2007-11-22 | Univ Of Tokyo | 振動波検出方法及び装置 |
JP2008008683A (ja) | 2006-06-27 | 2008-01-17 | Univ Of Tokyo | 振動波検出方法及び装置 |
JP2011232264A (ja) | 2010-04-29 | 2011-11-17 | Seiko Epson Corp | 圧電センサー、圧電センサー素子及び圧電振動片 |
JP2014240789A (ja) | 2013-06-12 | 2014-12-25 | ソニー株式会社 | 圧電デバイス及び電子機器 |
JP2017200014A (ja) | 2016-04-26 | 2017-11-02 | セイコーエプソン株式会社 | 振動片基板、振動片の製造方法、振動子、発振器、電子機器および移動体 |
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JP2019174254A (ja) | 2019-10-10 |
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