DE69933921D1 - Korpuskularstrahlgerät - Google Patents
KorpuskularstrahlgerätInfo
- Publication number
- DE69933921D1 DE69933921D1 DE69933921T DE69933921T DE69933921D1 DE 69933921 D1 DE69933921 D1 DE 69933921D1 DE 69933921 T DE69933921 T DE 69933921T DE 69933921 T DE69933921 T DE 69933921T DE 69933921 D1 DE69933921 D1 DE 69933921D1
- Authority
- DE
- Germany
- Prior art keywords
- charged particle
- particle beam
- charged
- particle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/10—Lenses
- H01J37/145—Combinations of electrostatic and magnetic lenses
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/04—Means for controlling the discharge
- H01J2237/047—Changing particle velocity
- H01J2237/0475—Changing particle velocity decelerating
- H01J2237/04756—Changing particle velocity decelerating with electrostatic means
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP19990108986 EP1052679B1 (de) | 1999-05-06 | 1999-05-06 | Korpuskularstrahlgerät |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69933921D1 true DE69933921D1 (de) | 2006-12-21 |
DE69933921T2 DE69933921T2 (de) | 2007-03-01 |
Family
ID=8238124
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69933921T Expired - Fee Related DE69933921T2 (de) | 1999-05-06 | 1999-05-06 | Korpuskularstrahlgerät |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP1052679B1 (de) |
JP (1) | JP2000331638A (de) |
DE (1) | DE69933921T2 (de) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9601303B2 (en) * | 2015-08-12 | 2017-03-21 | ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Charged particle beam device and method for inspecting and/or imaging a sample |
US11239043B2 (en) * | 2020-05-19 | 2022-02-01 | ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Charged particle beam device and method for inspecting and/or imaging a sample |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3638682A1 (de) * | 1986-11-13 | 1988-05-19 | Siemens Ag | Spektrometerobjektiv fuer korpuskularstrahlmesstechnik |
JPH01120753A (ja) * | 1987-11-04 | 1989-05-12 | Fujitsu Ltd | 電子ビーム装置 |
US4926054A (en) * | 1988-03-17 | 1990-05-15 | Ict Integrated Circuit Testing Gesellschaft Fur Halbleiterpruftechnik Mbh | Objective lens for focusing charged particles in an electron microscope |
EP0810629B1 (de) * | 1991-11-27 | 2000-06-28 | Hitachi, Ltd. | Elektronenstrahlgerät |
JP3372138B2 (ja) * | 1995-06-26 | 2003-01-27 | 株式会社日立製作所 | 走査形電子顕微鏡 |
JP3774953B2 (ja) * | 1995-10-19 | 2006-05-17 | 株式会社日立製作所 | 走査形電子顕微鏡 |
JP3110727B2 (ja) * | 1999-04-20 | 2000-11-20 | 株式会社日立製作所 | 電子線装置の観察方法 |
-
1999
- 1999-05-06 EP EP19990108986 patent/EP1052679B1/de not_active Expired - Lifetime
- 1999-05-06 DE DE69933921T patent/DE69933921T2/de not_active Expired - Fee Related
-
2000
- 2000-04-24 JP JP2000122293A patent/JP2000331638A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
EP1052679A1 (de) | 2000-11-15 |
JP2000331638A (ja) | 2000-11-30 |
EP1052679B1 (de) | 2006-11-08 |
DE69933921T2 (de) | 2007-03-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |