DE60130715D1 - Teilchendetektor - Google Patents

Teilchendetektor

Info

Publication number
DE60130715D1
DE60130715D1 DE60130715T DE60130715T DE60130715D1 DE 60130715 D1 DE60130715 D1 DE 60130715D1 DE 60130715 T DE60130715 T DE 60130715T DE 60130715 T DE60130715 T DE 60130715T DE 60130715 D1 DE60130715 D1 DE 60130715D1
Authority
DE
Germany
Prior art keywords
particle detector
detector
particle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60130715T
Other languages
English (en)
Other versions
DE60130715T2 (de
Inventor
Armin Heinz Hayn
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss SMT GmbH
Zeiss Carl Smt Ltd
Original Assignee
Carl Zeiss SMT GmbH
Zeiss Carl Smt Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss SMT GmbH, Zeiss Carl Smt Ltd filed Critical Carl Zeiss SMT GmbH
Publication of DE60130715D1 publication Critical patent/DE60130715D1/de
Application granted granted Critical
Publication of DE60130715T2 publication Critical patent/DE60130715T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Measurement Of Radiation (AREA)
DE60130715T 2000-08-10 2001-08-08 Teilchendetektor Expired - Lifetime DE60130715T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB0019547 2000-08-10
GB0019547A GB2367686B (en) 2000-08-10 2000-08-10 Improvements in or relating to particle detectors

Publications (2)

Publication Number Publication Date
DE60130715D1 true DE60130715D1 (de) 2007-11-15
DE60130715T2 DE60130715T2 (de) 2008-07-03

Family

ID=9897271

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60130715T Expired - Lifetime DE60130715T2 (de) 2000-08-10 2001-08-08 Teilchendetektor

Country Status (5)

Country Link
US (2) US6781124B2 (de)
EP (1) EP1179833B1 (de)
AT (2) ATE375001T1 (de)
DE (1) DE60130715T2 (de)
GB (1) GB2367686B (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2806527B1 (fr) 2000-03-20 2002-10-25 Schlumberger Technologies Inc Colonne a focalisation simultanee d'un faisceau de particules et d'un faisceau optique
GB2367686B (en) * 2000-08-10 2002-12-11 Leo Electron Microscopy Ltd Improvements in or relating to particle detectors
DE10211977A1 (de) * 2002-03-18 2003-10-02 Leo Elektronenmikroskopie Gmbh Rasterelektronenmikroskop
ATE524821T1 (de) * 2002-05-31 2011-09-15 Zeiss Carl Smt Ltd Verbesserungen in einem teilchendetektor
CZ20022105A3 (cs) * 2002-06-17 2004-02-18 Tescan, S. R. O. Detektor sekundárních elektronů, zejména v rastrovacím elektronovém mikroskopu
US6979822B1 (en) * 2002-09-18 2005-12-27 Fei Company Charged particle beam system
US7560703B1 (en) * 2007-05-21 2009-07-14 Kla-Tencor Corporation Integrated segmented scintillation detector
US7791020B2 (en) * 2008-03-31 2010-09-07 Fei Company Multistage gas cascade amplifier
US8299432B2 (en) * 2008-11-04 2012-10-30 Fei Company Scanning transmission electron microscope using gas amplification
US20100148065A1 (en) * 2008-12-17 2010-06-17 Baxter International Inc. Electron beam sterilization monitoring system and method
JP5352262B2 (ja) 2009-02-06 2013-11-27 株式会社日立ハイテクノロジーズ 荷電粒子線装置
DE102011005732B4 (de) * 2011-03-17 2013-08-22 Carl Zeiss Microscopy Gmbh Einrichtung zur Röntgenspektroskopie
JP5829556B2 (ja) * 2012-03-15 2015-12-09 日本特殊陶業株式会社 微粒子検知システム
EP3176808B1 (de) * 2015-12-03 2019-10-16 Carl Zeiss Microscopy Ltd. Verfahren zur detektion geladener partikel und partikelstrahlvorrichtung zur durchführung des verfahrens
JP6739207B2 (ja) * 2016-03-31 2020-08-12 株式会社日立ハイテク 荷電粒子線装置
CN106783493B (zh) 2016-12-01 2018-07-10 聚束科技（北京）有限公司 一种真空气氛处理装置、样品观测系统及方法
US11239048B2 (en) * 2020-03-09 2022-02-01 Kla Corporation Arrayed column detector

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2534796C3 (de) * 1975-08-04 1979-07-05 Max-Planck-Gesellschaft Zur Foerderung Der Wissenschaften E.V., 3400 Goettingen Rotationssymetrischer Ionen-Elektronen-Konverter
AU521225B2 (en) * 1977-04-19 1982-03-25 Delalande S.A. Alkylenedioxy phenyl derivatives
KR850001390B1 (ko) * 1980-07-31 1985-09-24 니혼 덴시 가부시끼 가이샤 2차 전자 검출장치
US4596929A (en) * 1983-11-21 1986-06-24 Nanometrics Incorporated Three-stage secondary emission electron detection in electron microscopes
US4785182A (en) * 1987-05-21 1988-11-15 Electroscan Corporation Secondary electron detector for use in a gaseous atmosphere
GB2229854B (en) * 1989-03-28 1993-10-27 Robinson Vivian N E Backscattered electron detector
JP3081393B2 (ja) * 1992-10-15 2000-08-28 株式会社日立製作所 走査電子顕微鏡
US5485008A (en) * 1994-06-23 1996-01-16 University Of Maryland, College Park Low magnification gas limiting aperture assembly for electron microscopy devices
GB9623768D0 (en) * 1996-11-15 1997-01-08 Leo Electron Microscopy Limite Scanning electron microscope
US6052429A (en) * 1997-02-20 2000-04-18 Dkk Corporation X-ray analyzing apparatus
JP2002507045A (ja) * 1998-03-10 2002-03-05 エッサーズ、エリック 走査型電子顕微鏡
PL189008B1 (pl) * 1998-10-21 2005-05-31 Politechnika Wroclawska Wysokociśnieniowy skaningowy mikroskop elektronowy
EP1236220B8 (de) * 1999-11-29 2013-02-20 Carl Zeiss Microscopy GmbH Detektor für ein rasterelektronenmikroskop mit variablem druck und rasterelektronenmikroskop mit einem solchen detektor
GB2367686B (en) * 2000-08-10 2002-12-11 Leo Electron Microscopy Ltd Improvements in or relating to particle detectors
CN1511332A (zh) * 2000-12-01 2004-07-07 Ү���о�����չ���޹�˾ 采用扫描电子显微镜在非真空环境下检验样品的装置和方法

Also Published As

Publication number Publication date
US20020088939A1 (en) 2002-07-11
US20040227080A1 (en) 2004-11-18
EP1179833A3 (de) 2005-04-13
US6781124B2 (en) 2004-08-24
US6943352B2 (en) 2005-09-13
ATE375001T1 (de) 2007-10-15
GB2367686B (en) 2002-12-11
EP1179833A2 (de) 2002-02-13
DE60130715T2 (de) 2008-07-03
GB2367686A (en) 2002-04-10
GB0019547D0 (en) 2000-09-27
AT7963U1 (de) 2005-11-15
EP1179833B1 (de) 2007-10-03

Similar Documents

Publication Publication Date Title
DE60114116D1 (de) Anwesenheitsdetektor
NO20004554D0 (no) Sand-detektor
DE50113505D1 (de) Partikelfalle
DE60129177D1 (de) Röntgenstrahl-Flächendetektor
DE60219989D1 (de) Einrasterkennungsschaltung
DE60128684D1 (de) Prozessorgest tzter drahtloser detektor
DE60035460D1 (de) In-Line Teilchendetektor
DE60130841D1 (de) Phasendetektor
DE50101406D1 (de) Bildgebender brandmelder
DE60216263D1 (de) Positionsdetektor
DE10195904T1 (de) Phasendetektor
NO20025980L (no) Grenseflate-detektor
DK1353994T3 (da) Modificerede uorganiske partikler
DE60228908D1 (de) Strahlungsdetektor
DE60130715D1 (de) Teilchendetektor
DE60225962D1 (de) Geldscheinprüfgerät
DE60100980D1 (de) Teilchensensor
DE69903921D1 (de) Magnetoresistiver detektor
FI20001652A0 (fi) Ilmaisinjärjestely
DE60110383D1 (de) Strahlungsdetektor
DE50205345D1 (de) Wärmeleitfähigkeitsdetektor
DE60109254D1 (de) Infrarotdetektor
DE60038007D1 (de) Teilchenstrahlgerät
DE60122094D1 (de) Infrarotdetektor
DE60137457D1 (de) Rotationsdetektor

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
R082 Change of representative

Ref document number: 1179833

Country of ref document: EP

Representative=s name: LOESENBECK UND KOLLEGEN, 33602 BIELEFELD, DE