DE69932942D1 - Integrierte hallanordnung - Google Patents

Integrierte hallanordnung

Info

Publication number
DE69932942D1
DE69932942D1 DE69932942T DE69932942T DE69932942D1 DE 69932942 D1 DE69932942 D1 DE 69932942D1 DE 69932942 T DE69932942 T DE 69932942T DE 69932942 T DE69932942 T DE 69932942T DE 69932942 D1 DE69932942 D1 DE 69932942D1
Authority
DE
Germany
Prior art keywords
active region
hall
symmetrical
parallel
contact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69932942T
Other languages
English (en)
Other versions
DE69932942T2 (de
Inventor
Ralph Steiner
Thomas Olbrich
Friedrich Kroener
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ams AG
Original Assignee
Austria Mikro Systeme International GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Austria Mikro Systeme International GmbH filed Critical Austria Mikro Systeme International GmbH
Publication of DE69932942D1 publication Critical patent/DE69932942D1/de
Application granted granted Critical
Publication of DE69932942T2 publication Critical patent/DE69932942T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N52/00—Hall-effect devices
    • H10N52/101—Semiconductor Hall-effect devices

Landscapes

  • Hall/Mr Elements (AREA)
  • Measuring Magnetic Variables (AREA)
  • Measurement Of The Respiration, Hearing Ability, Form, And Blood Characteristics Of Living Organisms (AREA)
  • Control Of Motors That Do Not Use Commutators (AREA)
DE69932942T 1998-07-02 1999-07-01 Integrierte Hall-Einrichtung Expired - Lifetime DE69932942T2 (de)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US9153498P 1998-07-02 1998-07-02
US91534P 1998-07-02
US10048698P 1998-09-16 1998-09-16
US100486P 1998-09-16
PCT/EP1999/004557 WO2000002266A1 (en) 1998-07-02 1999-07-01 Integrated hall device

Publications (2)

Publication Number Publication Date
DE69932942D1 true DE69932942D1 (de) 2006-10-05
DE69932942T2 DE69932942T2 (de) 2007-03-01

Family

ID=26784060

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69932942T Expired - Lifetime DE69932942T2 (de) 1998-07-02 1999-07-01 Integrierte Hall-Einrichtung

Country Status (4)

Country Link
EP (1) EP1129495B1 (de)
AT (1) ATE337617T1 (de)
DE (1) DE69932942T2 (de)
WO (1) WO2000002266A1 (de)

Families Citing this family (48)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10144268B4 (de) * 2001-09-08 2015-03-05 Robert Bosch Gmbh Vorrichtung zur Messung der Stärke einer Vektorkomponente eines Magnetfeldes
US7714570B2 (en) 2006-06-21 2010-05-11 Allegro Microsystems, Inc. Methods and apparatus for an analog rotational sensor having magnetic sensor elements
DE112008003576T5 (de) 2008-01-04 2011-01-20 Allegro Microsystems, Inc., Worcester Verfahren und Vorrichtung für einen Winkelsensor
US8093891B2 (en) * 2009-03-02 2012-01-10 Robert Bosch Gmbh Vertical Hall Effect sensor
EP2234185B1 (de) 2009-03-24 2012-10-10 austriamicrosystems AG Vertikaler Hallgenerator und Verfahren zur Herstellung eines vertikalen Hallgenerators
DE102009038938B4 (de) 2009-08-26 2013-10-10 Austriamicrosystems Ag Verfahren zur Herstellung eines vertikalen Hall-Sensors
US8395381B2 (en) 2010-07-09 2013-03-12 Invensense, Inc. Micromachined magnetic field sensors
US9062990B2 (en) 2011-02-25 2015-06-23 Allegro Microsystems, Llc Circular vertical hall magnetic field sensing element and method with a plurality of continuous output signals
US8786279B2 (en) 2011-02-25 2014-07-22 Allegro Microsystems, Llc Circuit and method for processing signals generated by a plurality of sensors
US8729890B2 (en) 2011-04-12 2014-05-20 Allegro Microsystems, Llc Magnetic angle and rotation speed sensor with continuous and discontinuous modes of operation based on rotation speed of a target object
US8860410B2 (en) 2011-05-23 2014-10-14 Allegro Microsystems, Llc Circuits and methods for processing a signal generated by a plurality of measuring devices
US8890518B2 (en) 2011-06-08 2014-11-18 Allegro Microsystems, Llc Arrangements for self-testing a circular vertical hall (CVH) sensing element and/or for self-testing a magnetic field sensor that uses a circular vertical hall (CVH) sensing element
US8793085B2 (en) 2011-08-19 2014-07-29 Allegro Microsystems, Llc Circuits and methods for automatically adjusting a magnetic field sensor in accordance with a speed of rotation sensed by the magnetic field sensor
US8922206B2 (en) 2011-09-07 2014-12-30 Allegro Microsystems, Llc Magnetic field sensing element combining a circular vertical hall magnetic field sensing element with a planar hall element
US9285438B2 (en) 2011-09-28 2016-03-15 Allegro Microsystems, Llc Circuits and methods for processing signals generated by a plurality of magnetic field sensing elements
US9046383B2 (en) 2012-01-09 2015-06-02 Allegro Microsystems, Llc Systems and methods that use magnetic field sensors to identify positions of a gear shift lever
US9182456B2 (en) 2012-03-06 2015-11-10 Allegro Microsystems, Llc Magnetic field sensor for sensing rotation of an object
US10215550B2 (en) 2012-05-01 2019-02-26 Allegro Microsystems, Llc Methods and apparatus for magnetic sensors having highly uniform magnetic fields
US8749005B1 (en) 2012-12-21 2014-06-10 Allegro Microsystems, Llc Magnetic field sensor and method of fabricating a magnetic field sensor having a plurality of vertical hall elements arranged in at least a portion of a polygonal shape
US9417295B2 (en) 2012-12-21 2016-08-16 Allegro Microsystems, Llc Circuits and methods for processing signals generated by a circular vertical hall (CVH) sensing element in the presence of a multi-pole magnet
US9606190B2 (en) 2012-12-21 2017-03-28 Allegro Microsystems, Llc Magnetic field sensor arrangements and associated methods
US9548443B2 (en) 2013-01-29 2017-01-17 Allegro Microsystems, Llc Vertical Hall Effect element with improved sensitivity
US9377285B2 (en) 2013-02-13 2016-06-28 Allegro Microsystems, Llc Magnetic field sensor and related techniques that provide varying current spinning phase sequences of a magnetic field sensing element
US9389060B2 (en) 2013-02-13 2016-07-12 Allegro Microsystems, Llc Magnetic field sensor and related techniques that provide an angle error correction module
US9099638B2 (en) 2013-03-15 2015-08-04 Allegro Microsystems, Llc Vertical hall effect element with structures to improve sensitivity
US9400164B2 (en) 2013-07-22 2016-07-26 Allegro Microsystems, Llc Magnetic field sensor and related techniques that provide an angle correction module
US9312473B2 (en) 2013-09-30 2016-04-12 Allegro Microsystems, Llc Vertical hall effect sensor
US9574867B2 (en) 2013-12-23 2017-02-21 Allegro Microsystems, Llc Magnetic field sensor and related techniques that inject an error correction signal into a signal channel to result in reduced error
US10120042B2 (en) 2013-12-23 2018-11-06 Allegro Microsystems, Llc Magnetic field sensor and related techniques that inject a synthesized error correction signal into a signal channel to result in reduced error
US9547048B2 (en) 2014-01-14 2017-01-17 Allegro Micosystems, LLC Circuit and method for reducing an offset component of a plurality of vertical hall elements arranged in a circle
US9753097B2 (en) 2014-05-05 2017-09-05 Allegro Microsystems, Llc Magnetic field sensors and associated methods with reduced offset and improved accuracy
US9448288B2 (en) 2014-05-20 2016-09-20 Allegro Microsystems, Llc Magnetic field sensor with improved accuracy resulting from a digital potentiometer
US9823092B2 (en) 2014-10-31 2017-11-21 Allegro Microsystems, Llc Magnetic field sensor providing a movement detector
US9638766B2 (en) 2014-11-24 2017-05-02 Allegro Microsystems, Llc Magnetic field sensor with improved accuracy resulting from a variable potentiometer and a gain circuit
US9684042B2 (en) 2015-02-27 2017-06-20 Allegro Microsystems, Llc Magnetic field sensor with improved accuracy and method of obtaining improved accuracy with a magnetic field sensor
US11163022B2 (en) 2015-06-12 2021-11-02 Allegro Microsystems, Llc Magnetic field sensor for angle detection with a phase-locked loop
US9739847B1 (en) 2016-02-01 2017-08-22 Allegro Microsystems, Llc Circular vertical hall (CVH) sensing element with signal processing
US9739848B1 (en) 2016-02-01 2017-08-22 Allegro Microsystems, Llc Circular vertical hall (CVH) sensing element with sliding integration
US10481220B2 (en) 2016-02-01 2019-11-19 Allegro Microsystems, Llc Circular vertical hall (CVH) sensing element with signal processing and arctangent function
US10385964B2 (en) 2016-06-08 2019-08-20 Allegro Microsystems, Llc Enhanced neutral gear sensor
US10585147B2 (en) 2016-06-14 2020-03-10 Allegro Microsystems, Llc Magnetic field sensor having error correction
US10739164B2 (en) 2017-01-27 2020-08-11 Allegro Microsystems, Llc Circuit for detecting motion of an object
US10495701B2 (en) 2017-03-02 2019-12-03 Allegro Microsystems, Llc Circular vertical hall (CVH) sensing element with DC offset removal
US10823586B2 (en) 2018-12-26 2020-11-03 Allegro Microsystems, Llc Magnetic field sensor having unequally spaced magnetic field sensing elements
US11237020B2 (en) 2019-11-14 2022-02-01 Allegro Microsystems, Llc Magnetic field sensor having two rows of magnetic field sensing elements for measuring an angle of rotation of a magnet
US11280637B2 (en) 2019-11-14 2022-03-22 Allegro Microsystems, Llc High performance magnetic angle sensor
US11802922B2 (en) 2021-01-13 2023-10-31 Allegro Microsystems, Llc Circuit for reducing an offset component of a plurality of vertical hall elements arranged in one or more circles
US11473935B1 (en) 2021-04-16 2022-10-18 Allegro Microsystems, Llc System and related techniques that provide an angle sensor for sensing an angle of rotation of a ferromagnetic screw

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3602611B2 (ja) * 1995-03-30 2004-12-15 株式会社東芝 横型ホール素子
US5572058A (en) * 1995-07-17 1996-11-05 Honeywell Inc. Hall effect device formed in an epitaxial layer of silicon for sensing magnetic fields parallel to the epitaxial layer
US5831513A (en) * 1997-02-04 1998-11-03 United Microelectronics Corp. Magnetic field sensing device

Also Published As

Publication number Publication date
WO2000002266A1 (en) 2000-01-13
ATE337617T1 (de) 2006-09-15
EP1129495B1 (de) 2006-08-23
DE69932942T2 (de) 2007-03-01
EP1129495A1 (de) 2001-09-05

Similar Documents

Publication Publication Date Title
DE69932942D1 (de) Integrierte hallanordnung
EP1033759A3 (de) MOS-Anordnung mit einer vergrabenen Gate und Verfahren zur Herstellung
WO2002037569A3 (en) Trench gate mos semiconductor device
WO2003042683A1 (en) Fet type sensor, ion density detecting method comprising this sensor, and base sequence detecting method
DE60138416D1 (de) Packung
EP1054451A3 (de) Leistungsbaulelement mit MOS-Gate umfassend erweiterte Graben und Dotierungsgebiete und Verfahren zur deren Herstellung
WO2002058159A3 (en) Mos-gated power device with doped polysilicon body and process for forming same
EP0371785A3 (de) Lateraler Leitfähigkeitsmodulations-MOSFET
CA2336933A1 (en) Silicon carbide horizontal channel buffered gate semiconductor devices
EP0272453A3 (de) Vereinigte bipolare/CMOS Technologie unter Verwendung eines elektrisch aktiven Grabens
JPS6442176A (en) Semiconductor device and manufacture thereof
WO1999028037A8 (de) Vorrichtung zum messen physiologischer parameter
TW200511577A (en) Vertical compound semiconductor field effect transistor structure
EP0813250A3 (de) Graben-Halbleiteranordnung
EP0735600A3 (de) Laterales Hallelement
WO2003042627A3 (de) Feldeffekttransistor-sensor für eine sonde eines rastersondenmikroskoskops
TW200509359A (en) Electrostatic discharge protection circuit, semiconductor circuit and fabrication thereof
TW343385B (en) Power transistor
DE60119937D1 (de) Halleffekt-sensor
TW200721371A (en) System and method for improving mesa width in a semiconductor device
WO2003085722A3 (en) Field effect transistor having a lateral depletion structure
CA2009068A1 (en) Trench jfet integrated circuit elements
WO2005012896A8 (de) Kapazitiv kontrollierter feldeffekt-gassensor, enthaltend eine hydrophobe schicht
GB0006092D0 (en) Trench-gate semiconductor devices
SE8603126D0 (sv) Cmos-integrerad krets och metod att tillverka en sadan

Legal Events

Date Code Title Description
8364 No opposition during term of opposition