DE69928359D1 - Heizgerät mit einem aus Kohlenstoff versehenen Drahtheizelement, das in einem Quarzglasrohr eingeschlossen ist - Google Patents

Heizgerät mit einem aus Kohlenstoff versehenen Drahtheizelement, das in einem Quarzglasrohr eingeschlossen ist

Info

Publication number
DE69928359D1
DE69928359D1 DE69928359T DE69928359T DE69928359D1 DE 69928359 D1 DE69928359 D1 DE 69928359D1 DE 69928359 T DE69928359 T DE 69928359T DE 69928359 T DE69928359 T DE 69928359T DE 69928359 D1 DE69928359 D1 DE 69928359D1
Authority
DE
Germany
Prior art keywords
heater
heating element
glass tube
quartz glass
wire heating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69928359T
Other languages
English (en)
Other versions
DE69928359T2 (de
Inventor
Eiichi Toya
Tomio Konn
Tomohiro Nagata
Norihiko Saito
Shigeru Yamamura
Ken Nakao
Takanori Saito
Hisaei Osanai
Toshiyuki Makiya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Coorstek KK
Original Assignee
Toshiba Ceramics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Ceramics Co Ltd filed Critical Toshiba Ceramics Co Ltd
Publication of DE69928359D1 publication Critical patent/DE69928359D1/de
Application granted granted Critical
Publication of DE69928359T2 publication Critical patent/DE69928359T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/40—Heating elements having the shape of rods or tubes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/0033—Heating devices using lamps
    • H05B3/0038—Heating devices using lamps for industrial applications
    • H05B3/0047—Heating devices using lamps for industrial applications for semiconductor manufacture
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
DE69928359T 1998-12-01 1999-12-01 Heizgerät mit einem aus Kohlenstoff versehenen Drahtheizelement, das in einem Quarzglasrohr eingeschlossen ist Expired - Lifetime DE69928359T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP35693598 1998-12-01
JP35693598 1998-12-01

Publications (2)

Publication Number Publication Date
DE69928359D1 true DE69928359D1 (de) 2005-12-22
DE69928359T2 DE69928359T2 (de) 2006-08-03

Family

ID=18451519

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69928359T Expired - Lifetime DE69928359T2 (de) 1998-12-01 1999-12-01 Heizgerät mit einem aus Kohlenstoff versehenen Drahtheizelement, das in einem Quarzglasrohr eingeschlossen ist

Country Status (5)

Country Link
US (2) US6407371B1 (de)
EP (1) EP1006754B1 (de)
KR (1) KR100334993B1 (de)
DE (1) DE69928359T2 (de)
TW (1) TW469612B (de)

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US7718930B2 (en) * 2003-04-07 2010-05-18 Tokyo Electron Limited Loading table and heat treating apparatus having the loading table
JP4380236B2 (ja) * 2003-06-23 2009-12-09 東京エレクトロン株式会社 載置台及び熱処理装置
US20050217799A1 (en) * 2004-03-31 2005-10-06 Tokyo Electron Limited Wafer heater assembly
AT414073B (de) * 2004-10-05 2006-08-15 Kerschbaum Margarete Heizgerät
US10244793B2 (en) 2005-07-19 2019-04-02 Juul Labs, Inc. Devices for vaporization of a substance
US11647783B2 (en) 2005-07-19 2023-05-16 Juul Labs, Inc. Devices for vaporization of a substance
FR2896942B1 (fr) * 2006-01-27 2014-03-14 Thermor Ind "dispositif de chauffage electrique"
JP2008108703A (ja) * 2006-09-28 2008-05-08 Covalent Materials Corp 面状ヒータ及びこのヒータを備えた半導体熱処理装置
CN101400198B (zh) * 2007-09-28 2010-09-29 北京富纳特创新科技有限公司 面热光源,其制备方法及应用其加热物体的方法
CN101409962B (zh) * 2007-10-10 2010-11-10 清华大学 面热光源及其制备方法
CN101409961B (zh) * 2007-10-10 2010-06-16 清华大学 面热光源,其制备方法及应用其加热物体的方法
JP5014080B2 (ja) * 2007-11-19 2012-08-29 コバレントマテリアル株式会社 面状ヒータ
KR101450895B1 (ko) * 2008-03-17 2014-10-21 엘지전자 주식회사 필라멘트 지지부재 및 이를 포함하는 튜브히터
US20100122980A1 (en) * 2008-06-13 2010-05-20 Tsinghua University Carbon nanotube heater
US20100126985A1 (en) * 2008-06-13 2010-05-27 Tsinghua University Carbon nanotube heater
US20100000669A1 (en) * 2008-06-13 2010-01-07 Tsinghua University Carbon nanotube heater
US20100282458A1 (en) * 2009-05-08 2010-11-11 Yale Ann Carbon fiber heating source and heating system using the same
CN102011101B (zh) * 2009-09-04 2013-06-05 清华大学 金刚石薄膜的生长装置
US8538249B2 (en) * 2009-10-20 2013-09-17 General Electric Company Broiler for cooking appliances
US20120145700A1 (en) * 2010-12-14 2012-06-14 I-Shou Tsai Electrical heating wire containing carbon fiber
WO2013025921A1 (en) 2011-08-16 2013-02-21 Ploom, Inc. Low temperature electronic vaporization device and methods
KR101370456B1 (ko) * 2011-08-30 2014-03-06 신진하이텍(주) 아크 방전을 방지하는 탄소발열체
CN104220911B (zh) * 2011-10-06 2017-10-24 Ofs菲特尔有限责任公司 用于制造光纤光栅的系统和技术
US10279934B2 (en) 2013-03-15 2019-05-07 Juul Labs, Inc. Fillable vaporizer cartridge and method of filling
US10264629B2 (en) * 2013-05-30 2019-04-16 Osram Sylvania Inc. Infrared heat lamp assembly
EP4233587A1 (de) 2013-08-20 2023-08-30 VMR Products, LLC Verdampfer
KR102256889B1 (ko) 2013-12-23 2021-05-31 쥴 랩스, 인크. 기화 디바이스 시스템 및 방법
US10076139B2 (en) 2013-12-23 2018-09-18 Juul Labs, Inc. Vaporizer apparatus
USD842536S1 (en) 2016-07-28 2019-03-05 Juul Labs, Inc. Vaporizer cartridge
USD825102S1 (en) 2016-07-28 2018-08-07 Juul Labs, Inc. Vaporizer device with cartridge
US10159282B2 (en) 2013-12-23 2018-12-25 Juul Labs, Inc. Cartridge for use with a vaporizer device
US20160366947A1 (en) 2013-12-23 2016-12-22 James Monsees Vaporizer apparatus
US10058129B2 (en) 2013-12-23 2018-08-28 Juul Labs, Inc. Vaporization device systems and methods
KR102627987B1 (ko) 2014-12-05 2024-01-22 쥴 랩스, 인크. 교정된 투여량 제어
CN105407554B (zh) * 2015-10-16 2019-08-09 苏州热工研究院有限公司 一种loca实验锆管内部加热装置
DE202017007467U1 (de) 2016-02-11 2021-12-08 Juul Labs, Inc. Befüllbare Verdampferkartusche
EP3419443A4 (de) 2016-02-11 2019-11-20 Juul Labs, Inc. Sicheres befestigen von kartuschen für verdampfervorrichtungen
US10405582B2 (en) 2016-03-10 2019-09-10 Pax Labs, Inc. Vaporization device with lip sensing
USD849996S1 (en) 2016-06-16 2019-05-28 Pax Labs, Inc. Vaporizer cartridge
USD848057S1 (en) 2016-06-23 2019-05-07 Pax Labs, Inc. Lid for a vaporizer
USD851830S1 (en) 2016-06-23 2019-06-18 Pax Labs, Inc. Combined vaporizer tamp and pick tool
USD836541S1 (en) 2016-06-23 2018-12-25 Pax Labs, Inc. Charging device
KR200482108Y1 (ko) * 2016-07-11 2016-12-23 샤프에너지테크(주) 전기총량 절감장치를 이용한 스탠드형 난방기
CN105960033B (zh) * 2016-07-12 2022-12-23 北京中兴实强陶瓷轴承有限公司 一种加热器
USD887632S1 (en) 2017-09-14 2020-06-16 Pax Labs, Inc. Vaporizer cartridge
TWM587435U (zh) * 2019-08-20 2019-12-11 蘇文宏 離水斷電玻璃管式加溫器
JP7197534B2 (ja) * 2020-06-12 2022-12-27 日本碍子株式会社 セラミックヒータ

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IT211553Z2 (it) * 1985-11-08 1989-03-06 Strada Antonio Dispositivo termoregolatore ad immersione, particolarmente per acquari.
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US5575941A (en) * 1994-08-31 1996-11-19 Johnson; J. Evan Cartridge heater
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US6061500A (en) * 1998-07-10 2000-05-09 Su; Wen-Hong Electronic heater for an aquarium

Also Published As

Publication number Publication date
EP1006754A2 (de) 2000-06-07
EP1006754A3 (de) 2001-05-16
US20020162835A1 (en) 2002-11-07
DE69928359T2 (de) 2006-08-03
US6407371B1 (en) 2002-06-18
KR20000047805A (ko) 2000-07-25
US6515264B2 (en) 2003-02-04
TW469612B (en) 2001-12-21
KR100334993B1 (ko) 2002-05-02
EP1006754B1 (de) 2005-11-16

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Legal Events

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8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: COVALENT MATERIALS CORP., TOKYO, JP