DE69928359D1 - Heizgerät mit einem aus Kohlenstoff versehenen Drahtheizelement, das in einem Quarzglasrohr eingeschlossen ist - Google Patents

Heizgerät mit einem aus Kohlenstoff versehenen Drahtheizelement, das in einem Quarzglasrohr eingeschlossen ist

Info

Publication number
DE69928359D1
DE69928359D1 DE69928359T DE69928359T DE69928359D1 DE 69928359 D1 DE69928359 D1 DE 69928359D1 DE 69928359 T DE69928359 T DE 69928359T DE 69928359 T DE69928359 T DE 69928359T DE 69928359 D1 DE69928359 D1 DE 69928359D1
Authority
DE
Germany
Prior art keywords
heater
heating element
glass tube
quartz glass
wire heating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69928359T
Other languages
English (en)
Other versions
DE69928359T2 (de
Inventor
Eiichi Toya
Tomio Konn
Tomohiro Nagata
Norihiko Saito
Shigeru Yamamura
Ken Nakao
Takanori Saito
Hisaei Osanai
Toshiyuki Makiya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Coorstek KK
Original Assignee
Toshiba Ceramics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Ceramics Co Ltd filed Critical Toshiba Ceramics Co Ltd
Application granted granted Critical
Publication of DE69928359D1 publication Critical patent/DE69928359D1/de
Publication of DE69928359T2 publication Critical patent/DE69928359T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/40—Heating elements having the shape of rods or tubes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/0033—Heating devices using lamps
    • H05B3/0038—Heating devices using lamps for industrial applications
    • H05B3/0047—Heating devices using lamps for industrial applications for semiconductor manufacture
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Resistance Heating (AREA)
DE69928359T 1998-12-01 1999-12-01 Heizgerät mit einem aus Kohlenstoff versehenen Drahtheizelement, das in einem Quarzglasrohr eingeschlossen ist Expired - Lifetime DE69928359T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP35693598 1998-12-01
JP35693598 1998-12-01

Publications (2)

Publication Number Publication Date
DE69928359D1 true DE69928359D1 (de) 2005-12-22
DE69928359T2 DE69928359T2 (de) 2006-08-03

Family

ID=18451519

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69928359T Expired - Lifetime DE69928359T2 (de) 1998-12-01 1999-12-01 Heizgerät mit einem aus Kohlenstoff versehenen Drahtheizelement, das in einem Quarzglasrohr eingeschlossen ist

Country Status (5)

Country Link
US (2) US6407371B1 (de)
EP (1) EP1006754B1 (de)
KR (1) KR100334993B1 (de)
DE (1) DE69928359T2 (de)
TW (1) TW469612B (de)

Families Citing this family (53)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20000024405A (ko) * 2000-02-11 2000-05-06 김창현 전기 스토브용 히터 구조체
JP3587249B2 (ja) * 2000-03-30 2004-11-10 東芝セラミックス株式会社 流体加熱装置
US20020091114A1 (en) * 2000-10-04 2002-07-11 Odile Piot-Grosjean Combination of a CB1 receptor antagonist and of sibutramine, the pharmaceutical compositions comprising them and their use in the treatment of obesity
US6922017B2 (en) 2000-11-30 2005-07-26 Matsushita Electric Industrial Co., Ltd. Infrared lamp, method of manufacturing the same, and heating apparatus using the infrared lamp
US6793700B2 (en) * 2002-01-14 2004-09-21 Air Products And Chemicals, Inc. Apparatus and method for production of synthesis gas using radiant and convective reforming
EP1349429A3 (de) * 2002-03-25 2007-10-24 Tokyo Electron Limited Heizer mit Abdichtung aus Drahtheizelementobjekt aus Kohlenstoff und Vorrichtung zum Heizen einer Flüssigkeit die denselben Heizer benützt
WO2004090960A1 (ja) * 2003-04-07 2004-10-21 Tokyo Electron Limited 載置台構造及びこの載置台構造を有する熱処理装置
JP4380236B2 (ja) * 2003-06-23 2009-12-09 東京エレクトロン株式会社 載置台及び熱処理装置
US20050217799A1 (en) * 2004-03-31 2005-10-06 Tokyo Electron Limited Wafer heater assembly
AT414073B (de) * 2004-10-05 2006-08-15 Kerschbaum Margarete Heizgerät
US11647783B2 (en) 2005-07-19 2023-05-16 Juul Labs, Inc. Devices for vaporization of a substance
US10244793B2 (en) 2005-07-19 2019-04-02 Juul Labs, Inc. Devices for vaporization of a substance
FR2896942B1 (fr) * 2006-01-27 2014-03-14 Thermor Ind "dispositif de chauffage electrique"
JP2008108703A (ja) * 2006-09-28 2008-05-08 Covalent Materials Corp 面状ヒータ及びこのヒータを備えた半導体熱処理装置
CN101409961B (zh) * 2007-10-10 2010-06-16 清华大学 面热光源,其制备方法及应用其加热物体的方法
CN101409962B (zh) * 2007-10-10 2010-11-10 清华大学 面热光源及其制备方法
CN101400198B (zh) * 2007-09-28 2010-09-29 北京富纳特创新科技有限公司 面热光源,其制备方法及应用其加热物体的方法
JP5014080B2 (ja) * 2007-11-19 2012-08-29 コバレントマテリアル株式会社 面状ヒータ
KR101450895B1 (ko) * 2008-03-17 2014-10-21 엘지전자 주식회사 필라멘트 지지부재 및 이를 포함하는 튜브히터
US20100122980A1 (en) * 2008-06-13 2010-05-20 Tsinghua University Carbon nanotube heater
US20100000669A1 (en) * 2008-06-13 2010-01-07 Tsinghua University Carbon nanotube heater
US20100126985A1 (en) * 2008-06-13 2010-05-27 Tsinghua University Carbon nanotube heater
US20100282458A1 (en) * 2009-05-08 2010-11-11 Yale Ann Carbon fiber heating source and heating system using the same
CN102011101B (zh) * 2009-09-04 2013-06-05 清华大学 金刚石薄膜的生长装置
US8538249B2 (en) * 2009-10-20 2013-09-17 General Electric Company Broiler for cooking appliances
US20120145700A1 (en) * 2010-12-14 2012-06-14 I-Shou Tsai Electrical heating wire containing carbon fiber
CA2845090C (en) 2011-08-16 2023-01-31 Ploom, Inc. Low temperature electronic vaporization device and methods
KR101370456B1 (ko) * 2011-08-30 2014-03-06 신진하이텍(주) 아크 방전을 방지하는 탄소발열체
EP2764385B1 (de) * 2011-10-06 2020-12-09 OFS Fitel, LLC Systeme und verfahren zur herstellung optischer fasergitter
US10279934B2 (en) 2013-03-15 2019-05-07 Juul Labs, Inc. Fillable vaporizer cartridge and method of filling
US10264629B2 (en) * 2013-05-30 2019-04-16 Osram Sylvania Inc. Infrared heat lamp assembly
CN105658100A (zh) 2013-08-20 2016-06-08 Vmr产品有限公司 蒸发器
US10058129B2 (en) 2013-12-23 2018-08-28 Juul Labs, Inc. Vaporization device systems and methods
USD825102S1 (en) 2016-07-28 2018-08-07 Juul Labs, Inc. Vaporizer device with cartridge
US20160366947A1 (en) 2013-12-23 2016-12-22 James Monsees Vaporizer apparatus
US10076139B2 (en) 2013-12-23 2018-09-18 Juul Labs, Inc. Vaporizer apparatus
US10159282B2 (en) 2013-12-23 2018-12-25 Juul Labs, Inc. Cartridge for use with a vaporizer device
USD842536S1 (en) 2016-07-28 2019-03-05 Juul Labs, Inc. Vaporizer cartridge
HUE053216T2 (hu) 2013-12-23 2021-06-28 Juul Labs Int Inc Párologtató eszközös rendszerek
UA124185C2 (uk) 2014-12-05 2021-08-04 Джуул Лебз, Інк. Пристрій для точного контролю дози
CN105407554B (zh) * 2015-10-16 2019-08-09 苏州热工研究院有限公司 一种loca实验锆管内部加热装置
MX2018009703A (es) 2016-02-11 2019-07-08 Juul Labs Inc Cartuchos de fijacion segura para dispositivos vaporizadores.
SG11201806793TA (en) 2016-02-11 2018-09-27 Juul Labs Inc Fillable vaporizer cartridge and method of filling
US10405582B2 (en) 2016-03-10 2019-09-10 Pax Labs, Inc. Vaporization device with lip sensing
USD849996S1 (en) 2016-06-16 2019-05-28 Pax Labs, Inc. Vaporizer cartridge
USD848057S1 (en) 2016-06-23 2019-05-07 Pax Labs, Inc. Lid for a vaporizer
USD851830S1 (en) 2016-06-23 2019-06-18 Pax Labs, Inc. Combined vaporizer tamp and pick tool
USD836541S1 (en) 2016-06-23 2018-12-25 Pax Labs, Inc. Charging device
KR200482108Y1 (ko) * 2016-07-11 2016-12-23 샤프에너지테크(주) 전기총량 절감장치를 이용한 스탠드형 난방기
CN105960033B (zh) * 2016-07-12 2022-12-23 北京中兴实强陶瓷轴承有限公司 一种加热器
USD887632S1 (en) 2017-09-14 2020-06-16 Pax Labs, Inc. Vaporizer cartridge
TWM587435U (zh) * 2019-08-20 2019-12-11 蘇文宏 離水斷電玻璃管式加溫器
JP7197534B2 (ja) * 2020-06-12 2022-12-27 日本碍子株式会社 セラミックヒータ

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3346723A (en) * 1964-04-20 1967-10-10 Heraeus Schott Quarzschmelze Electric infrared emitter
USRE30126E (en) * 1973-07-25 1979-10-23 Bilateral heater unit
US4125761A (en) * 1974-10-08 1978-11-14 Churchill John W Bilateral heater unit
IT211553Z2 (it) * 1985-11-08 1989-03-06 Strada Antonio Dispositivo termoregolatore ad immersione, particolarmente per acquari.
DE69111493T2 (de) * 1990-03-12 1996-03-21 Ngk Insulators Ltd Wafer-Heizgeräte für Apparate, zur Halbleiterherstellung Heizanlage mit diesen Heizgeräten und Herstellung von Heizgeräten.
US5083012A (en) * 1990-05-30 1992-01-21 Custom Electric Manufacturing Company Resistance wire heating element
US5408071A (en) * 1992-06-11 1995-04-18 Atd Corporation Electric heater with heat distributing means comprising stacked foil layers
GB2278722A (en) 1993-05-21 1994-12-07 Ea Tech Ltd Improvements relating to infra-red radiation sources
US5753891A (en) * 1994-08-31 1998-05-19 Tokyo Electron Limited Treatment apparatus
US5575941A (en) * 1994-08-31 1996-11-19 Johnson; J. Evan Cartridge heater
US5907663A (en) * 1998-06-24 1999-05-25 Lee; Wen-Ching Far-infrared electric heater
US6061500A (en) * 1998-07-10 2000-05-09 Su; Wen-Hong Electronic heater for an aquarium

Also Published As

Publication number Publication date
US20020162835A1 (en) 2002-11-07
EP1006754B1 (de) 2005-11-16
KR100334993B1 (ko) 2002-05-02
EP1006754A3 (de) 2001-05-16
DE69928359T2 (de) 2006-08-03
EP1006754A2 (de) 2000-06-07
KR20000047805A (ko) 2000-07-25
US6407371B1 (en) 2002-06-18
TW469612B (en) 2001-12-21
US6515264B2 (en) 2003-02-04

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: COVALENT MATERIALS CORP., TOKYO, JP