DE69921077D1 - Kurzbogenquecksilberlampe und UV-Strahlungsvorrichtung - Google Patents

Kurzbogenquecksilberlampe und UV-Strahlungsvorrichtung

Info

Publication number
DE69921077D1
DE69921077D1 DE1999621077 DE69921077T DE69921077D1 DE 69921077 D1 DE69921077 D1 DE 69921077D1 DE 1999621077 DE1999621077 DE 1999621077 DE 69921077 T DE69921077 T DE 69921077T DE 69921077 D1 DE69921077 D1 DE 69921077D1
Authority
DE
Germany
Prior art keywords
short
mercury lamp
radiation device
arc mercury
arc
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE1999621077
Other languages
English (en)
Other versions
DE69921077T2 (de
Inventor
Motohiro Sakai
Yoshinori Aiura
Yukio Yasuda
Tatsumi Hiramoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ushio Denki KK
Original Assignee
Ushio Denki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Denki KK filed Critical Ushio Denki KK
Publication of DE69921077D1 publication Critical patent/DE69921077D1/de
Application granted granted Critical
Publication of DE69921077T2 publication Critical patent/DE69921077T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/12—Selection of substances for gas fillings; Specified operating pressure or temperature
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • G03F7/70016—Production of exposure light, i.e. light sources by discharge lamps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/12—Selection of substances for gas fillings; Specified operating pressure or temperature
    • H01J61/18—Selection of substances for gas fillings; Specified operating pressure or temperature having a metallic vapour as the principal constituent
    • H01J61/20—Selection of substances for gas fillings; Specified operating pressure or temperature having a metallic vapour as the principal constituent mercury vapour
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/82—Lamps with high-pressure unconstricted discharge having a cold pressure > 400 Torr
    • H01J61/822—High-pressure mercury lamps

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • General Physics & Mathematics (AREA)
  • Discharge Lamp (AREA)
  • Discharge Lamps And Accessories Thereof (AREA)
DE69921077T 1998-12-22 1999-12-21 Kurzbogenquecksilberlampe und UV-Strahlungsvorrichtung Expired - Lifetime DE69921077T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP10365102A JP2000188085A (ja) 1998-12-22 1998-12-22 ショートアーク型水銀ランプおよび紫外線発光装置
JP36510298 1998-12-22

Publications (2)

Publication Number Publication Date
DE69921077D1 true DE69921077D1 (de) 2004-11-18
DE69921077T2 DE69921077T2 (de) 2006-03-09

Family

ID=18483436

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69921077T Expired - Lifetime DE69921077T2 (de) 1998-12-22 1999-12-21 Kurzbogenquecksilberlampe und UV-Strahlungsvorrichtung

Country Status (6)

Country Link
US (1) US6573658B1 (de)
EP (1) EP1014424B1 (de)
JP (1) JP2000188085A (de)
KR (1) KR20000048332A (de)
DE (1) DE69921077T2 (de)
TW (1) TW511115B (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1273030A1 (de) * 2000-03-31 2003-01-08 Koninklijke Philips Electronics N.V. Entladungslampe
JP2002251979A (ja) * 2001-02-23 2002-09-06 Orc Mfg Co Ltd ショートアーク型放電灯
JP3938038B2 (ja) * 2002-12-18 2007-06-27 ウシオ電機株式会社 ショートアーク型放電ランプ
JP4042605B2 (ja) * 2003-03-31 2008-02-06 ウシオ電機株式会社 キセノンランプ
JP4765433B2 (ja) * 2005-06-24 2011-09-07 ウシオ電機株式会社 紫外線照射装置および光照射方法
JP2008034222A (ja) * 2006-07-28 2008-02-14 Ushio Inc ショートアーク型水銀ランプ
JP4525798B2 (ja) * 2008-05-28 2010-08-18 ウシオ電機株式会社 ショートアーク型水銀ランプ

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61189636A (ja) 1985-02-19 1986-08-23 Ushio Inc キセノン・水銀放電灯による半導体ウエハ−の露光方法
JPS622443A (ja) * 1985-06-28 1987-01-08 Ushio Inc フオトリソグラフイ
JP2878520B2 (ja) * 1992-03-17 1999-04-05 株式会社小糸製作所 放電ランプ装置用アークチューブ
US5497049A (en) * 1992-06-23 1996-03-05 U.S. Philips Corporation High pressure mercury discharge lamp
JPH07226186A (ja) 1994-02-08 1995-08-22 Wakomu Seisakusho:Kk 短アーク放電灯
DE4432315A1 (de) * 1994-09-12 1996-03-14 Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh Quecksilberdampf-Kurzbogenlampe
JPH08102287A (ja) * 1994-09-30 1996-04-16 Toshiba Lighting & Technol Corp 蛍光ランプおよびこれを使用した定着装置
US5594302A (en) * 1995-08-22 1997-01-14 Lamptech Ltd. Metal halide lamp including iron and molybdenum
JP2915362B2 (ja) * 1996-09-27 1999-07-05 ウシオ電機株式会社 ショートアーク型水銀ランプ
JPH10283993A (ja) * 1997-04-03 1998-10-23 Matsushita Electron Corp メタルハライドランプ
JP2857137B1 (ja) * 1997-12-25 1999-02-10 ウシオ電機株式会社 ショートアーク型水銀ランプ

Also Published As

Publication number Publication date
EP1014424A1 (de) 2000-06-28
JP2000188085A (ja) 2000-07-04
EP1014424B1 (de) 2004-10-13
KR20000048332A (ko) 2000-07-25
DE69921077T2 (de) 2006-03-09
TW511115B (en) 2002-11-21
US6573658B1 (en) 2003-06-03

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition