DE69907695D1 - Unterstützung für eine optische linse und verfahren zu deren betrieb - Google Patents
Unterstützung für eine optische linse und verfahren zu deren betriebInfo
- Publication number
- DE69907695D1 DE69907695D1 DE69907695T DE69907695T DE69907695D1 DE 69907695 D1 DE69907695 D1 DE 69907695D1 DE 69907695 T DE69907695 T DE 69907695T DE 69907695 T DE69907695 T DE 69907695T DE 69907695 D1 DE69907695 D1 DE 69907695D1
- Authority
- DE
- Germany
- Prior art keywords
- support
- optical lens
- maintaining
- plane
- support surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02C—SPECTACLES; SUNGLASSES OR GOGGLES INSOFAR AS THEY HAVE THE SAME FEATURES AS SPECTACLES; CONTACT LENSES
- G02C13/00—Assembling; Repairing; Cleaning
- G02C13/001—Assembling; Repairing
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
- G02B7/026—Mountings, adjusting means, or light-tight connections, for optical elements for lenses using retaining rings or springs
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9811099A FR2783055B1 (fr) | 1998-09-04 | 1998-09-04 | Support pour lentille optique, et son procede de mise en oeuvre |
FR9811099 | 1998-09-04 | ||
PCT/FR1999/002093 WO2000014295A1 (fr) | 1998-09-04 | 1999-09-02 | Support pour lentille optique, et son procede de mise en oeuvre |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69907695D1 true DE69907695D1 (de) | 2003-06-12 |
DE69907695T2 DE69907695T2 (de) | 2004-03-25 |
Family
ID=9530148
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69907695T Expired - Fee Related DE69907695T2 (de) | 1998-09-04 | 1999-09-02 | Unterstützung für eine optische linse und verfahren zu deren betrieb |
Country Status (8)
Country | Link |
---|---|
US (1) | US6473247B1 (de) |
EP (1) | EP1109946B1 (de) |
JP (1) | JP4402297B2 (de) |
AT (1) | ATE239805T1 (de) |
AU (1) | AU5428199A (de) |
DE (1) | DE69907695T2 (de) |
FR (1) | FR2783055B1 (de) |
WO (1) | WO2000014295A1 (de) |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10115914A1 (de) * | 2001-03-30 | 2002-10-02 | Zeiss Carl | Vorrichtung zur Lagerung eines optischen Elementes in einer Optik |
DE10136387A1 (de) * | 2001-07-26 | 2003-02-13 | Zeiss Carl | Objektiv, insbesondere Objektiv für die Halbleiter-Lithographie |
DE10219514A1 (de) | 2002-04-30 | 2003-11-13 | Zeiss Carl Smt Ag | Beleuchtungssystem, insbesondere für die EUV-Lithographie |
FR2839788B1 (fr) * | 2002-05-14 | 2004-11-05 | Essilor Int | Support individuel de lentille optique |
EP1620842B1 (de) | 2003-04-25 | 2013-04-10 | TPO Displays Corp. | Ansteuerungsverfahren und ansteuerungsvorrichtung für eine anzeigevorrichtung mit aktiver matrix |
DE10339362A1 (de) * | 2003-08-27 | 2005-03-24 | Carl Zeiss Smt Ag | Vorrichtung zur Verhinderung des Kriechens eines optischen Elementes |
US7265917B2 (en) | 2003-12-23 | 2007-09-04 | Carl Zeiss Smt Ag | Replacement apparatus for an optical element |
TWI234046B (en) * | 2004-03-26 | 2005-06-11 | Benq Corp | Apparatus for positioning lens and projector having the same |
FR2895524B1 (fr) * | 2005-12-23 | 2008-05-02 | Essilor Int | Lentille optique et procede mettant en oeuvre des moyens d'indexation angulaire |
FR2895521B1 (fr) | 2005-12-23 | 2008-02-01 | Essilor Int | Installation et procede de revetement pour lentille ophtalmique. |
EP1914579A1 (de) | 2006-10-18 | 2008-04-23 | ESSILOR INTERNATIONAL Compagnie Générale d'Optique | Substrathalter zur Aufnahme von zu beschichtenden Gläsern |
US8347814B2 (en) * | 2008-01-22 | 2013-01-08 | Raytheon Canada Limited | Method and apparatus for coating a curved surface |
DE102008000967B4 (de) | 2008-04-03 | 2015-04-09 | Carl Zeiss Smt Gmbh | Projektionsbelichtungsanlage für die EUV-Mikrolithographie |
US20090258151A1 (en) * | 2008-04-10 | 2009-10-15 | Raytheon Company | Method and Apparatus for Coating Curved Surfaces |
US8398776B2 (en) * | 2008-05-12 | 2013-03-19 | Raytheon Canada Limited | Method and apparatus for supporting workpieces in a coating apparatus |
CN101609187B (zh) * | 2008-06-16 | 2011-02-09 | 广达电脑股份有限公司 | 电子装置及其组合结构 |
US8246748B2 (en) * | 2008-07-09 | 2012-08-21 | Raytheon Canada Limited | Method and apparatus for coating surfaces |
US20110020623A1 (en) * | 2009-07-22 | 2011-01-27 | Raytheon Company | Method and Apparatus for Repairing an Optical Component Substrate Through Coating |
EP2460907A4 (de) * | 2009-07-30 | 2014-03-26 | Hoya Corp | Dampfablagerungsvorrichtung für optische linsen |
US9435626B2 (en) * | 2011-08-12 | 2016-09-06 | Corning Incorporated | Kinematic fixture for transparent part metrology |
JP6357669B2 (ja) * | 2015-01-21 | 2018-07-18 | 東海光学株式会社 | 蒸着装置及び蒸着装置用光学基板保持部材 |
EP4112769A1 (de) * | 2021-06-30 | 2023-01-04 | Satisloh AG | Halter zum halten eines substrats, insbesondere eines brillenglases, während der vakuumbeschichtung desselben in einer kastenbeschichtungsvorrichtung und vorrichtung zum laden/entladen des substrats in einen/aus einem solchen halter |
EP4122688A1 (de) * | 2021-07-19 | 2023-01-25 | Essilor International | Haltevorrichtung für optische gegenstände |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2532971A (en) * | 1947-04-12 | 1950-12-05 | Pacific Universal Products Cor | Method and apparatus for producing optical coatings |
JPS6117038U (ja) * | 1984-07-03 | 1986-01-31 | 有限会社 前田事務用品製造所 | 組合せ式の収納箱 |
US5198034A (en) * | 1987-03-31 | 1993-03-30 | Epsilon Technology, Inc. | Rotatable substrate supporting mechanism with temperature sensing device for use in chemical vapor deposition equipment |
JPS63192295U (de) * | 1987-05-30 | 1988-12-12 | ||
DE3921671A1 (de) * | 1989-07-01 | 1991-01-03 | Leybold Ag | Linsenhalterung, insbesondere halterung fuer in einer hochvakuum-aufdampfanlage oder -sputteranlage zu beschichtende brillenglaslinsen |
US5660693A (en) * | 1991-01-18 | 1997-08-26 | Applied Vision Limited | Ion vapour deposition apparatus and method |
JPH04277616A (ja) * | 1991-03-06 | 1992-10-02 | Hitachi Ltd | 基板の支持治具 |
CH684645A5 (de) * | 1991-12-19 | 1994-11-15 | Balzers Hochvakuum | Substrathalte-Vorrichtung für Vakuumprozesse. |
JPH0613136U (ja) * | 1992-07-23 | 1994-02-18 | 森尾電機株式会社 | 半導体製造装置に於ける半導体ウエハー保持機構 |
JP2694248B2 (ja) * | 1993-02-22 | 1997-12-24 | セイコーインスツルメンツ株式会社 | 試料搬送装置 |
JP2602409Y2 (ja) * | 1993-10-04 | 2000-01-17 | 日新電機株式会社 | 基板収納円板 |
JPH08229489A (ja) * | 1995-02-23 | 1996-09-10 | Hitachi Ltd | 真空ベローズ型薄型ガラス保持装置とこれを用いた薬液塗布処理装置 |
JPH08323572A (ja) * | 1995-05-30 | 1996-12-10 | Nitto Denko Corp | 吸着式固定治具 |
JPH1059453A (ja) * | 1996-08-26 | 1998-03-03 | Nikon Corp | 光学部品の支持部材及び貯蔵ケース |
-
1998
- 1998-09-04 FR FR9811099A patent/FR2783055B1/fr not_active Expired - Fee Related
-
1999
- 1999-09-02 DE DE69907695T patent/DE69907695T2/de not_active Expired - Fee Related
- 1999-09-02 EP EP99940278A patent/EP1109946B1/de not_active Expired - Lifetime
- 1999-09-02 JP JP2000569033A patent/JP4402297B2/ja not_active Expired - Fee Related
- 1999-09-02 US US09/786,399 patent/US6473247B1/en not_active Expired - Lifetime
- 1999-09-02 AT AT99940278T patent/ATE239805T1/de not_active IP Right Cessation
- 1999-09-02 WO PCT/FR1999/002093 patent/WO2000014295A1/fr active IP Right Grant
- 1999-09-02 AU AU54281/99A patent/AU5428199A/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
EP1109946A1 (de) | 2001-06-27 |
FR2783055A1 (fr) | 2000-03-10 |
JP2002524237A (ja) | 2002-08-06 |
FR2783055B1 (fr) | 2000-11-24 |
AU5428199A (en) | 2000-03-27 |
DE69907695T2 (de) | 2004-03-25 |
ATE239805T1 (de) | 2003-05-15 |
JP4402297B2 (ja) | 2010-01-20 |
WO2000014295A1 (fr) | 2000-03-16 |
US6473247B1 (en) | 2002-10-29 |
EP1109946B1 (de) | 2003-05-07 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |