DE69904332D1 - Vorrichtung zur Messung der Linear- oder Winkelverschiebung - Google Patents

Vorrichtung zur Messung der Linear- oder Winkelverschiebung

Info

Publication number
DE69904332D1
DE69904332D1 DE69904332T DE69904332T DE69904332D1 DE 69904332 D1 DE69904332 D1 DE 69904332D1 DE 69904332 T DE69904332 T DE 69904332T DE 69904332 T DE69904332 T DE 69904332T DE 69904332 D1 DE69904332 D1 DE 69904332D1
Authority
DE
Germany
Prior art keywords
angular displacement
measuring linear
linear
measuring
angular
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69904332T
Other languages
English (en)
Other versions
DE69904332T2 (de
Inventor
Lucien M Borgognon
Marco M Cardillo
Roland M Duteil
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tesa SARL
Original Assignee
Brown and Sharpe Tesa SA
Tesa Brown and Sharpe SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Brown and Sharpe Tesa SA, Tesa Brown and Sharpe SA filed Critical Brown and Sharpe Tesa SA
Application granted granted Critical
Publication of DE69904332D1 publication Critical patent/DE69904332D1/de
Publication of DE69904332T2 publication Critical patent/DE69904332T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B3/00—Measuring instruments characterised by the use of mechanical techniques
    • G01B3/22—Feeler-pin gauges, e.g. dial gauges

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
DE69904332T 1999-10-22 1999-10-22 Vorrichtung zur Messung der Linear- oder Winkelverschiebung Expired - Lifetime DE69904332T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP99810966A EP1094294B1 (de) 1999-10-22 1999-10-22 Vorrichtung zur Messung der Linear- oder Winkelverschiebung

Publications (2)

Publication Number Publication Date
DE69904332D1 true DE69904332D1 (de) 2003-01-16
DE69904332T2 DE69904332T2 (de) 2003-10-02

Family

ID=8243103

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69904332T Expired - Lifetime DE69904332T2 (de) 1999-10-22 1999-10-22 Vorrichtung zur Messung der Linear- oder Winkelverschiebung

Country Status (6)

Country Link
US (1) US6513262B1 (de)
EP (1) EP1094294B1 (de)
JP (1) JP3524474B2 (de)
CN (1) CN1175243C (de)
DE (1) DE69904332T2 (de)
HK (1) HK1038789B (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7259552B2 (en) 2002-05-31 2007-08-21 Siemens Power Generation, Inc. Wear monitor for turbo-machine
JP5089020B2 (ja) * 2005-01-19 2012-12-05 創世理工株式会社 基板上に作製された半導体電子デバイス
US20060271420A1 (en) * 2005-05-27 2006-11-30 Peter Anselmann System and method for performing capacity checks and resource scheduling within a supply chain management system
JP4810168B2 (ja) * 2005-09-12 2011-11-09 株式会社ミツトヨ デジタル表示式測定器
JP5038691B2 (ja) * 2006-11-28 2012-10-03 株式会社ミツトヨ デジタルインジケータおよびデジタルインジケータの使用方法
EP2650638B1 (de) * 2012-04-12 2014-11-19 Tesa Sa Tragbares Instrument zum Messen von Abmessungen
US10495446B2 (en) * 2015-06-29 2019-12-03 Kla-Tencor Corporation Methods and apparatus for measuring height on a semiconductor wafer
CN105588607B (zh) * 2015-12-10 2017-11-14 蓝正飞 光电传感器
CN108311953A (zh) * 2018-03-28 2018-07-24 上海瓦姆石油天然气管业有限公司 一种用于数控加工中心的高精度百分表
CN109029230B (zh) * 2018-06-21 2021-02-26 清华大学 接触式位移传感器测量装置及测量电路
JP2022067704A (ja) * 2020-10-21 2022-05-09 株式会社ミツトヨ パネルモジュールユニット

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1497372A (en) * 1924-06-10 Island
CH352497A (de) * 1955-08-31 1961-02-28 Instr Aktiebolaget Metron Messuhr
US3691871A (en) * 1970-06-25 1972-09-19 Rolamite Inc Rotary motion transmitting apparatus
US3721010A (en) * 1971-02-08 1973-03-20 H Ristow Dial indicator gage
US4433290A (en) * 1981-11-12 1984-02-21 Defelsko Corporation Magnetic coating thickness comparator having parallel magnetic rods with nonmagnetic slide indicators
JPS58135903A (ja) * 1982-02-08 1983-08-12 Mitsutoyo Mfg Co Ltd ダイヤルゲ−ジ
DE3211118C2 (de) * 1982-03-26 1984-09-06 Rudolf 6490 Schlüchtern Röth Taststangenmeßgerät mit einer digitalen Anzeigeeinheit
US4527336A (en) * 1982-07-02 1985-07-09 Mitutoyo Mfg. Co., Ltd. Displacement measuring instrument
DE3403903A1 (de) * 1984-02-04 1985-08-08 Schneider & Kern GmbH & Co KG, 7119 Niedernhall Elektronisches laengenmessgeraet
CH683042A5 (fr) * 1990-05-18 1993-12-31 Tesa Sa Dispositif antichoc pour un appareil de mesure.
US5125165A (en) * 1990-11-28 1992-06-30 Mitutoyo Corporation Precision linear measuring device having an improved spindle mounting device
GB9111382D0 (en) * 1991-05-25 1991-07-17 Renishaw Metrology Ltd Improvements in measuring probes
GB9116044D0 (en) * 1991-07-24 1991-09-11 Nat Res Dev Probes
US5768798A (en) * 1995-02-10 1998-06-23 Mitutoyo Corporation Displacement detecting apparatus
JP3290077B2 (ja) * 1996-09-26 2002-06-10 株式会社ミツトヨ ダイヤルゲージ
DE19738316A1 (de) * 1997-09-02 1999-03-04 Itt Mfg Enterprises Inc Berührungsloser Wegmesser insbesondere zur Verschleißmessung von Bremsklötzen

Also Published As

Publication number Publication date
DE69904332T2 (de) 2003-10-02
CN1305087A (zh) 2001-07-25
EP1094294B1 (de) 2002-12-04
JP2001124539A (ja) 2001-05-11
US6513262B1 (en) 2003-02-04
EP1094294A1 (de) 2001-04-25
HK1038789B (zh) 2005-05-27
HK1038789A1 (en) 2002-03-28
JP3524474B2 (ja) 2004-05-10
CN1175243C (zh) 2004-11-10

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: TESA SA, RENENS, CH