DE69900910T2 - Einspritzvorrichtung für einen reaktor - Google Patents

Einspritzvorrichtung für einen reaktor

Info

Publication number
DE69900910T2
DE69900910T2 DE69900910T DE69900910T DE69900910T2 DE 69900910 T2 DE69900910 T2 DE 69900910T2 DE 69900910 T DE69900910 T DE 69900910T DE 69900910 T DE69900910 T DE 69900910T DE 69900910 T2 DE69900910 T2 DE 69900910T2
Authority
DE
Germany
Prior art keywords
injector
reactor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69900910T
Other languages
English (en)
Other versions
DE69900910D1 (de
Inventor
R Lottes
A Torack
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SunEdison Inc
Original Assignee
SunEdison Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SunEdison Inc filed Critical SunEdison Inc
Publication of DE69900910D1 publication Critical patent/DE69900910D1/de
Application granted granted Critical
Publication of DE69900910T2 publication Critical patent/DE69900910T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth
    • C30B25/14—Feed and outlet means for the gases; Modifying the flow of the reactive gases
DE69900910T 1998-05-05 1999-04-13 Einspritzvorrichtung für einen reaktor Expired - Fee Related DE69900910T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/072,564 US5891250A (en) 1998-05-05 1998-05-05 Injector for reactor
PCT/US1999/008015 WO1999057343A1 (en) 1998-05-05 1999-04-13 Injector for reactor

Publications (2)

Publication Number Publication Date
DE69900910D1 DE69900910D1 (de) 2002-03-28
DE69900910T2 true DE69900910T2 (de) 2002-11-28

Family

ID=22108422

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69900910T Expired - Fee Related DE69900910T2 (de) 1998-05-05 1999-04-13 Einspritzvorrichtung für einen reaktor

Country Status (8)

Country Link
US (1) US5891250A (de)
EP (1) EP1076732B1 (de)
JP (1) JP2002514005A (de)
KR (1) KR20010034842A (de)
CN (1) CN1305541A (de)
DE (1) DE69900910T2 (de)
TW (1) TW414925B (de)
WO (1) WO1999057343A1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100352171B1 (ko) * 2000-04-14 2002-09-12 (주) 제노텍 올리고뉴클레오타이드를 지지체에 고정시키는 방법 및 그방법에 의하여 제조되는 올리고뉴클레오타이드 어레이
US6339016B1 (en) * 2000-06-30 2002-01-15 Memc Electronic Materials, Inc. Method and apparatus for forming an epitaxial silicon wafer with a denuded zone
CA2462336C (en) * 2001-10-05 2008-02-26 Tyco Healthcare Group, Lp Surgical stapling apparatus and method
US10184193B2 (en) 2015-05-18 2019-01-22 Globalwafers Co., Ltd. Epitaxy reactor and susceptor system for improved epitaxial wafer flatness

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5221556A (en) * 1987-06-24 1993-06-22 Epsilon Technology, Inc. Gas injectors for reaction chambers in CVD systems
WO1989012703A1 (en) * 1988-06-22 1989-12-28 Asm Epitaxy, Inc. Gas injector apparatus for chemical vapor deposition reactors
JPH0633233B2 (ja) * 1989-10-13 1994-05-02 住友金属工業株式会社 気相成長装置
US5106453A (en) * 1990-01-29 1992-04-21 At&T Bell Laboratories MOCVD method and apparatus
US5269847A (en) * 1990-08-23 1993-12-14 Applied Materials, Inc. Variable rate distribution gas flow reaction chamber
JP2790009B2 (ja) * 1992-12-11 1998-08-27 信越半導体株式会社 シリコンエピタキシャル層の成長方法および成長装置
TW359943B (en) * 1994-07-18 1999-06-01 Silicon Valley Group Thermal Single body injector and method for delivering gases to a surface
FR2739871B1 (fr) * 1995-10-11 1997-12-26 Sgs Thomson Microelectronics Dispositif d'injection de gaz dans un reacteur de depot chimique en phase vapeur

Also Published As

Publication number Publication date
WO1999057343A1 (en) 1999-11-11
US5891250A (en) 1999-04-06
EP1076732B1 (de) 2002-02-20
CN1305541A (zh) 2001-07-25
EP1076732A1 (de) 2001-02-21
DE69900910D1 (de) 2002-03-28
KR20010034842A (ko) 2001-04-25
JP2002514005A (ja) 2002-05-14
TW414925B (en) 2000-12-11

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Legal Events

Date Code Title Description
8339 Ceased/non-payment of the annual fee