DE69841678D1 - Gelenkroboter - Google Patents
GelenkroboterInfo
- Publication number
- DE69841678D1 DE69841678D1 DE69841678T DE69841678T DE69841678D1 DE 69841678 D1 DE69841678 D1 DE 69841678D1 DE 69841678 T DE69841678 T DE 69841678T DE 69841678 T DE69841678 T DE 69841678T DE 69841678 D1 DE69841678 D1 DE 69841678D1
- Authority
- DE
- Germany
- Prior art keywords
- articulated robot
- articulated
- robot
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
- B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
- B25J9/041—Cylindrical coordinate type
- B25J9/042—Cylindrical coordinate type comprising an articulated arm
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67766—Mechanical parts of transfer devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67796—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations with angular orientation of workpieces
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
- H01L21/681—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment using optical controlling means
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S414/00—Material or article handling
- Y10S414/135—Associated with semiconductor wafer handling
- Y10S414/136—Associated with semiconductor wafer handling including wafer orienting means
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T74/00—Machine element or mechanism
- Y10T74/20—Control lever and linkage systems
- Y10T74/20207—Multiple controlling elements for single controlled element
- Y10T74/20341—Power elements as controlling elements
- Y10T74/2036—Pair of power elements
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Manipulator (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP29914597A JPH11129175A (ja) | 1997-10-30 | 1997-10-30 | 多関節ロボット |
JP30472097A JP3539537B2 (ja) | 1997-11-06 | 1997-11-06 | 多関節ロボット |
Publications (1)
Publication Number | Publication Date |
---|---|
DE69841678D1 true DE69841678D1 (de) | 2010-07-01 |
Family
ID=26561808
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69806326T Expired - Lifetime DE69806326T2 (de) | 1997-10-30 | 1998-10-21 | Gelenkroboter |
DE69841678T Expired - Lifetime DE69841678D1 (de) | 1997-10-30 | 1998-10-21 | Gelenkroboter |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69806326T Expired - Lifetime DE69806326T2 (de) | 1997-10-30 | 1998-10-21 | Gelenkroboter |
Country Status (3)
Country | Link |
---|---|
US (2) | US6491491B1 (de) |
EP (2) | EP1219394B1 (de) |
DE (2) | DE69806326T2 (de) |
Families Citing this family (33)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6491491B1 (en) | 1997-10-30 | 2002-12-10 | Sankyo Seiki Mfg. Co., Ltd. | Articulated robot |
US6162008A (en) * | 1999-06-08 | 2000-12-19 | Varian Semiconductor Equipment Associates, Inc. | Wafer orientation sensor |
US8768516B2 (en) * | 2009-06-30 | 2014-07-01 | Intuitive Surgical Operations, Inc. | Control of medical robotic system manipulator about kinematic singularities |
US6570356B2 (en) | 2000-04-07 | 2003-05-27 | Kawasaki Jukogyo Kabushiki Kaisha | Robot system |
KR20020087481A (ko) | 2000-04-07 | 2002-11-22 | 베리안 세미콘덕터 이큅먼트 어소시에이츠, 인크. | 갈륨비소 웨이퍼용 웨이퍼 배향 센서 |
KR100428781B1 (ko) * | 2001-04-16 | 2004-04-27 | 삼성전자주식회사 | 웨이퍼 이송 장치 및 그 이송 방법 |
FI112848B (fi) * | 2002-07-12 | 2004-01-30 | Finn Power Oy | Valmistussolu sekä siirto- ja käsittelylaitteisto työkappaleita varten |
US7572092B2 (en) * | 2002-10-07 | 2009-08-11 | Brooks Automation, Inc. | Substrate alignment system |
US6748293B1 (en) * | 2003-03-24 | 2004-06-08 | Varian Semiconductor Equipment Associates, Inc. | Methods and apparatus for high speed object handling |
US6944517B2 (en) * | 2003-07-03 | 2005-09-13 | Brooks Automation, Inc. | Substrate apparatus calibration and synchronization procedure |
JP3999712B2 (ja) * | 2003-07-14 | 2007-10-31 | 川崎重工業株式会社 | 多関節ロボット |
US7905960B2 (en) * | 2004-03-24 | 2011-03-15 | Jusung Engineering Co., Ltd. | Apparatus for manufacturing substrate |
US7255747B2 (en) | 2004-12-22 | 2007-08-14 | Sokudo Co., Ltd. | Coat/develop module with independent stations |
US7699021B2 (en) | 2004-12-22 | 2010-04-20 | Sokudo Co., Ltd. | Cluster tool substrate throughput optimization |
US7651306B2 (en) | 2004-12-22 | 2010-01-26 | Applied Materials, Inc. | Cartesian robot cluster tool architecture |
US7798764B2 (en) | 2005-12-22 | 2010-09-21 | Applied Materials, Inc. | Substrate processing sequence in a cartesian robot cluster tool |
US7819079B2 (en) | 2004-12-22 | 2010-10-26 | Applied Materials, Inc. | Cartesian cluster tool configuration for lithography type processes |
US7771151B2 (en) * | 2005-05-16 | 2010-08-10 | Muratec Automation Co., Ltd. | Interface between conveyor and semiconductor process tool load port |
US9248568B2 (en) * | 2005-07-11 | 2016-02-02 | Brooks Automation, Inc. | Unequal link SCARA arm |
US7374525B2 (en) * | 2006-01-25 | 2008-05-20 | Protedyne Corporation | SCARA-type robotic system |
JP5044138B2 (ja) * | 2006-04-17 | 2012-10-10 | 川崎重工業株式会社 | 搬送システムおよび加工設備 |
DK2021807T3 (da) * | 2006-04-24 | 2013-09-23 | Protedyne Corp | Robotsystem med autonomt betjenelige værktøjer |
DE602007013654D1 (de) * | 2006-05-31 | 2011-05-19 | Panasonic Corp | Verfahren zur berechnung eines rotationsmittelpunktes, verfahren zur berechnung einer rotationsachse, verfahren zur erstellung eines programms, betriebsverfahren und robotergerät |
US7694688B2 (en) | 2007-01-05 | 2010-04-13 | Applied Materials, Inc. | Wet clean system design |
US7950407B2 (en) | 2007-02-07 | 2011-05-31 | Applied Materials, Inc. | Apparatus for rapid filling of a processing volume |
KR20100031681A (ko) | 2007-05-18 | 2010-03-24 | 브룩스 오토메이션 인코퍼레이티드 | 빠른 교환 로봇을 가진 컴팩트 기판 운송 시스템 |
DE102011077546A1 (de) * | 2011-06-15 | 2012-12-20 | Technische Universität Berlin | Verfahren zum Betreiben eines Roboters, Roboter und Robotersystem |
US8768513B2 (en) * | 2011-08-08 | 2014-07-01 | Applied Materials, Inc. | Systems having multi-linkage robots and methods to correct positional and rotational alignment in multi-linkage robots |
JP5713047B2 (ja) * | 2013-04-18 | 2015-05-07 | 株式会社安川電機 | 移動ロボット、移動ロボットの位置決めシステム、及び、移動ロボットの位置決め方法 |
JP6467646B2 (ja) * | 2014-03-27 | 2019-02-13 | パナソニックIpマネジメント株式会社 | ロボット制御方法 |
US10279470B2 (en) * | 2014-06-12 | 2019-05-07 | Play-i, Inc. | System and method for facilitating program sharing |
DE102016118462A1 (de) * | 2016-09-29 | 2018-03-29 | Asys Automatic Systems Gmbh & Co. Kg | Handhabungsvorrichtung für Substrate, insbesondere Halbleitersubstrate |
US20220297320A1 (en) * | 2021-03-18 | 2022-09-22 | Applied Materials, Inc. | Increased number of load ports on factory interface with robot that moves on track |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2554260B1 (fr) | 1983-10-27 | 1987-10-30 | Flonic Sa | Appareil de lecture de cartes a memoire electronique |
US4693663A (en) | 1984-10-05 | 1987-09-15 | Donaldson Company, Inc. | Robot with articulated arm |
KR100309932B1 (ko) | 1986-04-28 | 2001-12-15 | 제임스 엠. 윌리암스 | 웨이퍼 운반 장치 및 방법 |
JPH04254351A (ja) * | 1991-02-06 | 1992-09-09 | Ishikawajima Harima Heavy Ind Co Ltd | ハンドリングロボット |
JP3030160B2 (ja) * | 1992-04-28 | 2000-04-10 | 東京エレクトロン株式会社 | 真空処理装置 |
GB9306177D0 (en) | 1993-03-25 | 1993-05-19 | Amp Gmbh | Smart card connector |
US5587637A (en) * | 1994-01-10 | 1996-12-24 | Tatsumo Kabushiki Kaisha | Robot arm device capable of conveying an article in circumferential and radial directions |
EP0774732B1 (de) | 1995-11-17 | 2006-01-18 | Kabushiki Kaisha Toshiba | Vorrichtung zur Kartenverarbeitung |
US5746565A (en) * | 1996-01-22 | 1998-05-05 | Integrated Solutions, Inc. | Robotic wafer handler |
JPH09234681A (ja) * | 1996-02-29 | 1997-09-09 | Sony Corp | 搬送装置 |
US5944476A (en) * | 1997-03-26 | 1999-08-31 | Kensington Laboratories, Inc. | Unitary specimen prealigner and continuously rotatable multiple link robot arm mechanism |
US6491491B1 (en) | 1997-10-30 | 2002-12-10 | Sankyo Seiki Mfg. Co., Ltd. | Articulated robot |
FR2774791B1 (fr) | 1998-02-09 | 2000-03-03 | Schlumberger Ind Sa | Lecteur de cartes a memoire electronique protege contre le vandalisme |
-
1998
- 1998-10-16 US US09/173,882 patent/US6491491B1/en not_active Expired - Lifetime
- 1998-10-21 DE DE69806326T patent/DE69806326T2/de not_active Expired - Lifetime
- 1998-10-21 EP EP01122439A patent/EP1219394B1/de not_active Expired - Lifetime
- 1998-10-21 DE DE69841678T patent/DE69841678D1/de not_active Expired - Lifetime
- 1998-10-21 EP EP98119888A patent/EP0913236B1/de not_active Expired - Lifetime
-
2001
- 2001-12-07 US US10/013,286 patent/US20020048505A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
EP0913236A3 (de) | 2000-05-10 |
DE69806326D1 (de) | 2002-08-08 |
EP0913236A2 (de) | 1999-05-06 |
DE69806326T2 (de) | 2003-03-06 |
US20020048505A1 (en) | 2002-04-25 |
EP0913236B1 (de) | 2002-07-03 |
US6491491B1 (en) | 2002-12-10 |
EP1219394A2 (de) | 2002-07-03 |
US20010041129A1 (en) | 2001-11-15 |
EP1219394B1 (de) | 2010-05-19 |
EP1219394A3 (de) | 2008-12-03 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |