DE69840474D1 - Temperaturunempfindlicher siliziumoszillator und daraus erzeugte präzesionsspannungsreferenz - Google Patents

Temperaturunempfindlicher siliziumoszillator und daraus erzeugte präzesionsspannungsreferenz

Info

Publication number
DE69840474D1
DE69840474D1 DE69840474T DE69840474T DE69840474D1 DE 69840474 D1 DE69840474 D1 DE 69840474D1 DE 69840474 T DE69840474 T DE 69840474T DE 69840474 T DE69840474 T DE 69840474T DE 69840474 D1 DE69840474 D1 DE 69840474D1
Authority
DE
Germany
Prior art keywords
siliconoscillator
preserved
sensitive
temperature
volts reference
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69840474T
Other languages
English (en)
Inventor
Marc S Weinberg
Paul A Ward
Anthony S Kourepenis
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Charles Stark Draper Laboratory Inc
Original Assignee
Charles Stark Draper Laboratory Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Charles Stark Draper Laboratory Inc filed Critical Charles Stark Draper Laboratory Inc
Application granted granted Critical
Publication of DE69840474D1 publication Critical patent/DE69840474D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02433—Means for compensation or elimination of undesired effects
    • H03H9/02448—Means for compensation or elimination of undesired effects of temperature influence
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H03H9/2426—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators in combination with other electronic elements
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03L—AUTOMATIC CONTROL, STARTING, SYNCHRONISATION OR STABILISATION OF GENERATORS OF ELECTRONIC OSCILLATIONS OR PULSES
    • H03L1/00—Stabilisation of generator output against variations of physical values, e.g. power supply
    • H03L1/02—Stabilisation of generator output against variations of physical values, e.g. power supply against variations of temperature only
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03L—AUTOMATIC CONTROL, STARTING, SYNCHRONISATION OR STABILISATION OF GENERATORS OF ELECTRONIC OSCILLATIONS OR PULSES
    • H03L7/00—Automatic control of frequency or phase; Synchronisation
    • H03L7/06—Automatic control of frequency or phase; Synchronisation using a reference signal applied to a frequency- or phase-locked loop
    • H03L7/08—Details of the phase-locked loop
    • H03L7/099—Details of the phase-locked loop concerning mainly the controlled oscillator of the loop
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H2009/02488—Vibration modes
    • H03H2009/02496—Horizontal, i.e. parallel to the substrate plane
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H2009/02488—Vibration modes
    • H03H2009/02511—Vertical, i.e. perpendicular to the substrate plane

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
  • Stabilization Of Oscillater, Synchronisation, Frequency Synthesizers (AREA)
DE69840474T 1997-02-24 1998-02-24 Temperaturunempfindlicher siliziumoszillator und daraus erzeugte präzesionsspannungsreferenz Expired - Lifetime DE69840474D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/804,796 US5783973A (en) 1997-02-24 1997-02-24 Temperature insensitive silicon oscillator and precision voltage reference formed therefrom
PCT/US1998/003619 WO1998037635A1 (en) 1997-02-24 1998-02-24 Temperature insensitive silicon oscillator and precision voltage reference formed therefrom

Publications (1)

Publication Number Publication Date
DE69840474D1 true DE69840474D1 (de) 2009-03-05

Family

ID=25189859

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69840474T Expired - Lifetime DE69840474D1 (de) 1997-02-24 1998-02-24 Temperaturunempfindlicher siliziumoszillator und daraus erzeugte präzesionsspannungsreferenz

Country Status (6)

Country Link
US (1) US5783973A (de)
EP (1) EP0962052B1 (de)
JP (1) JP4343273B2 (de)
CA (1) CA2282604A1 (de)
DE (1) DE69840474D1 (de)
WO (1) WO1998037635A1 (de)

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EP0962052A1 (de) 1999-12-08
EP0962052A4 (de) 2002-03-27
JP4343273B2 (ja) 2009-10-14
EP0962052B1 (de) 2009-01-14
US5783973A (en) 1998-07-21
WO1998037635A1 (en) 1998-08-27
CA2282604A1 (en) 1998-08-27

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