DE69832633D1 - Säuberung von elektronenemittierenden elementen - Google Patents
Säuberung von elektronenemittierenden elementenInfo
- Publication number
- DE69832633D1 DE69832633D1 DE69832633T DE69832633T DE69832633D1 DE 69832633 D1 DE69832633 D1 DE 69832633D1 DE 69832633 T DE69832633 T DE 69832633T DE 69832633 T DE69832633 T DE 69832633T DE 69832633 D1 DE69832633 D1 DE 69832633D1
- Authority
- DE
- Germany
- Prior art keywords
- cleaning
- emitting elements
- electronic emitting
- electronic
- elements
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/38—Exhausting, degassing, filling, or cleaning vessels
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
- H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Cold Cathode And The Manufacture (AREA)
- Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
- Cleaning In General (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US940873 | 1997-09-30 | ||
US08/940,873 US6004180A (en) | 1997-09-30 | 1997-09-30 | Cleaning of electron-emissive elements |
PCT/US1998/018509 WO1999017323A2 (en) | 1997-09-30 | 1998-09-22 | Cleaning of electron-emissive elements |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69832633D1 true DE69832633D1 (de) | 2006-01-05 |
DE69832633T2 DE69832633T2 (de) | 2006-08-17 |
Family
ID=25475565
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69832633T Expired - Lifetime DE69832633T2 (de) | 1997-09-30 | 1998-09-22 | Säuberung von elektronenemittierenden elementen |
Country Status (7)
Country | Link |
---|---|
US (1) | US6004180A (de) |
EP (1) | EP1021818B1 (de) |
JP (1) | JP4323092B2 (de) |
KR (1) | KR100387053B1 (de) |
DE (1) | DE69832633T2 (de) |
HK (1) | HK1031154A1 (de) |
WO (1) | WO1999017323A2 (de) |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6149483A (en) * | 1998-07-30 | 2000-11-21 | Candescent Technologies Corporation | Cleaning of components of flat panel display |
US6624592B1 (en) * | 1998-08-31 | 2003-09-23 | Candescent Intellectual Property Services, Inc | Procedures and apparatus for turning-on and turning-off elements within a field emission display device |
JP2000133736A (ja) * | 1998-10-26 | 2000-05-12 | Furukawa Electric Co Ltd:The | 半導体レーザ素子の気密封止方法及び気密封止装置 |
FR2805663A1 (fr) * | 2000-02-25 | 2001-08-31 | Pixtech Sa | Procede de nettoyage par plasma d'un ecran plat de visualisation |
US6738336B2 (en) * | 2001-05-16 | 2004-05-18 | Hewlett-Packard Development Company, L.P. | Data storage device |
US6873097B2 (en) * | 2001-06-28 | 2005-03-29 | Candescent Technologies Corporation | Cleaning of cathode-ray tube display |
DE10209493B4 (de) * | 2002-03-07 | 2007-03-22 | Carl Zeiss Smt Ag | Verfahren zur Vermeidung von Kontamination auf optischen Elementen, Vorrichtung zur Regelung von Kontamination auf optischen Elementen und EUV-Lithographievorrichtung |
KR100438590B1 (ko) * | 2002-08-16 | 2004-07-02 | 엘지전자 주식회사 | 평면형 전계방출소자의 오염물질 제거방법 및 장치 |
JP2004288547A (ja) * | 2003-03-24 | 2004-10-14 | Matsushita Electric Ind Co Ltd | 電界放出型電子源およびその製造方法および画像表示装置 |
US7081992B2 (en) * | 2004-01-16 | 2006-07-25 | Euv Llc | Condenser optic with sacrificial reflective surface |
US8959762B2 (en) | 2005-08-08 | 2015-02-24 | Rf Micro Devices, Inc. | Method of manufacturing an electronic module |
US8062930B1 (en) | 2005-08-08 | 2011-11-22 | Rf Micro Devices, Inc. | Sub-module conformal electromagnetic interference shield |
US8220145B2 (en) * | 2007-06-27 | 2012-07-17 | Rf Micro Devices, Inc. | Isolated conformal shielding |
US8053872B1 (en) | 2007-06-25 | 2011-11-08 | Rf Micro Devices, Inc. | Integrated shield for a no-lead semiconductor device package |
US20080315101A1 (en) * | 2007-06-20 | 2008-12-25 | Chien-Min Sung | Diamond-like carbon infrared detector and associated methods |
US9137934B2 (en) | 2010-08-18 | 2015-09-15 | Rf Micro Devices, Inc. | Compartmentalized shielding of selected components |
US8835226B2 (en) | 2011-02-25 | 2014-09-16 | Rf Micro Devices, Inc. | Connection using conductive vias |
US9627230B2 (en) | 2011-02-28 | 2017-04-18 | Qorvo Us, Inc. | Methods of forming a microshield on standard QFN package |
US9807890B2 (en) | 2013-05-31 | 2017-10-31 | Qorvo Us, Inc. | Electronic modules having grounded electromagnetic shields |
US11127689B2 (en) | 2018-06-01 | 2021-09-21 | Qorvo Us, Inc. | Segmented shielding using wirebonds |
US11219144B2 (en) | 2018-06-28 | 2022-01-04 | Qorvo Us, Inc. | Electromagnetic shields for sub-modules |
US11114363B2 (en) | 2018-12-20 | 2021-09-07 | Qorvo Us, Inc. | Electronic package arrangements and related methods |
US11515282B2 (en) | 2019-05-21 | 2022-11-29 | Qorvo Us, Inc. | Electromagnetic shields with bonding wires for sub-modules |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3639657A1 (de) * | 1986-11-20 | 1988-06-01 | Philips Patentverwaltung | Verfahren zum reinigen von metallbauteilen fuer kathodenstrahlroehren |
FR2719155B1 (fr) * | 1994-04-25 | 1996-05-15 | Commissariat Energie Atomique | Procédé de réalisation de sources d'électrons à micropointes et source d'électrons à micropointes obtenue par ce procédé. |
FR2719156B1 (fr) * | 1994-04-25 | 1996-05-24 | Commissariat Energie Atomique | Source d'électrons à micropointes, les micropointes comportant deux parties. |
US5470266A (en) * | 1994-07-06 | 1995-11-28 | Itt Corporation | Low temperature process and apparatus for cleaning photo-cathodes |
US5462468A (en) * | 1994-12-16 | 1995-10-31 | Philips Electronics North America Corporation | CRT electron gun cleaning using carbon dioxide snow |
-
1997
- 1997-09-30 US US08/940,873 patent/US6004180A/en not_active Expired - Lifetime
-
1998
- 1998-09-22 WO PCT/US1998/018509 patent/WO1999017323A2/en active IP Right Grant
- 1998-09-22 JP JP2000514296A patent/JP4323092B2/ja not_active Expired - Fee Related
- 1998-09-22 KR KR10-2000-7003359A patent/KR100387053B1/ko not_active IP Right Cessation
- 1998-09-22 DE DE69832633T patent/DE69832633T2/de not_active Expired - Lifetime
- 1998-09-22 EP EP98950613A patent/EP1021818B1/de not_active Expired - Lifetime
-
2001
- 2001-01-19 HK HK01100498A patent/HK1031154A1/xx not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR20010030782A (ko) | 2001-04-16 |
EP1021818A4 (de) | 2001-04-04 |
WO1999017323A3 (en) | 1999-09-02 |
WO1999017323A2 (en) | 1999-04-08 |
DE69832633T2 (de) | 2006-08-17 |
HK1031154A1 (en) | 2001-06-01 |
EP1021818A2 (de) | 2000-07-26 |
JP2001518682A (ja) | 2001-10-16 |
EP1021818B1 (de) | 2005-11-30 |
KR100387053B1 (ko) | 2003-06-12 |
JP4323092B2 (ja) | 2009-09-02 |
US6004180A (en) | 1999-12-21 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |