DE69832633D1 - Säuberung von elektronenemittierenden elementen - Google Patents

Säuberung von elektronenemittierenden elementen

Info

Publication number
DE69832633D1
DE69832633D1 DE69832633T DE69832633T DE69832633D1 DE 69832633 D1 DE69832633 D1 DE 69832633D1 DE 69832633 T DE69832633 T DE 69832633T DE 69832633 T DE69832633 T DE 69832633T DE 69832633 D1 DE69832633 D1 DE 69832633D1
Authority
DE
Germany
Prior art keywords
cleaning
emitting elements
electronic emitting
electronic
elements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69832633T
Other languages
English (en)
Other versions
DE69832633T2 (de
Inventor
Johan Knall
D Porter
D Stanners
J Spindt
A Bascom
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of DE69832633D1 publication Critical patent/DE69832633D1/de
Application granted granted Critical
Publication of DE69832633T2 publication Critical patent/DE69832633T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/38Exhausting, degassing, filling, or cleaning vessels
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02Manufacture of electrodes or electrode systems
    • H01J9/022Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/025Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Cold Cathode And The Manufacture (AREA)
  • Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
  • Cleaning In General (AREA)
DE69832633T 1997-09-30 1998-09-22 Säuberung von elektronenemittierenden elementen Expired - Lifetime DE69832633T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US940873 1997-09-30
US08/940,873 US6004180A (en) 1997-09-30 1997-09-30 Cleaning of electron-emissive elements
PCT/US1998/018509 WO1999017323A2 (en) 1997-09-30 1998-09-22 Cleaning of electron-emissive elements

Publications (2)

Publication Number Publication Date
DE69832633D1 true DE69832633D1 (de) 2006-01-05
DE69832633T2 DE69832633T2 (de) 2006-08-17

Family

ID=25475565

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69832633T Expired - Lifetime DE69832633T2 (de) 1997-09-30 1998-09-22 Säuberung von elektronenemittierenden elementen

Country Status (7)

Country Link
US (1) US6004180A (de)
EP (1) EP1021818B1 (de)
JP (1) JP4323092B2 (de)
KR (1) KR100387053B1 (de)
DE (1) DE69832633T2 (de)
HK (1) HK1031154A1 (de)
WO (1) WO1999017323A2 (de)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6149483A (en) * 1998-07-30 2000-11-21 Candescent Technologies Corporation Cleaning of components of flat panel display
US6624592B1 (en) * 1998-08-31 2003-09-23 Candescent Intellectual Property Services, Inc Procedures and apparatus for turning-on and turning-off elements within a field emission display device
JP2000133736A (ja) * 1998-10-26 2000-05-12 Furukawa Electric Co Ltd:The 半導体レーザ素子の気密封止方法及び気密封止装置
FR2805663A1 (fr) * 2000-02-25 2001-08-31 Pixtech Sa Procede de nettoyage par plasma d'un ecran plat de visualisation
US6738336B2 (en) * 2001-05-16 2004-05-18 Hewlett-Packard Development Company, L.P. Data storage device
US6873097B2 (en) * 2001-06-28 2005-03-29 Candescent Technologies Corporation Cleaning of cathode-ray tube display
DE10209493B4 (de) * 2002-03-07 2007-03-22 Carl Zeiss Smt Ag Verfahren zur Vermeidung von Kontamination auf optischen Elementen, Vorrichtung zur Regelung von Kontamination auf optischen Elementen und EUV-Lithographievorrichtung
KR100438590B1 (ko) * 2002-08-16 2004-07-02 엘지전자 주식회사 평면형 전계방출소자의 오염물질 제거방법 및 장치
JP2004288547A (ja) * 2003-03-24 2004-10-14 Matsushita Electric Ind Co Ltd 電界放出型電子源およびその製造方法および画像表示装置
US7081992B2 (en) * 2004-01-16 2006-07-25 Euv Llc Condenser optic with sacrificial reflective surface
US8959762B2 (en) 2005-08-08 2015-02-24 Rf Micro Devices, Inc. Method of manufacturing an electronic module
US8062930B1 (en) 2005-08-08 2011-11-22 Rf Micro Devices, Inc. Sub-module conformal electromagnetic interference shield
US8220145B2 (en) * 2007-06-27 2012-07-17 Rf Micro Devices, Inc. Isolated conformal shielding
US8053872B1 (en) 2007-06-25 2011-11-08 Rf Micro Devices, Inc. Integrated shield for a no-lead semiconductor device package
US20080315101A1 (en) * 2007-06-20 2008-12-25 Chien-Min Sung Diamond-like carbon infrared detector and associated methods
US9137934B2 (en) 2010-08-18 2015-09-15 Rf Micro Devices, Inc. Compartmentalized shielding of selected components
US8835226B2 (en) 2011-02-25 2014-09-16 Rf Micro Devices, Inc. Connection using conductive vias
US9627230B2 (en) 2011-02-28 2017-04-18 Qorvo Us, Inc. Methods of forming a microshield on standard QFN package
US9807890B2 (en) 2013-05-31 2017-10-31 Qorvo Us, Inc. Electronic modules having grounded electromagnetic shields
US11127689B2 (en) 2018-06-01 2021-09-21 Qorvo Us, Inc. Segmented shielding using wirebonds
US11219144B2 (en) 2018-06-28 2022-01-04 Qorvo Us, Inc. Electromagnetic shields for sub-modules
US11114363B2 (en) 2018-12-20 2021-09-07 Qorvo Us, Inc. Electronic package arrangements and related methods
US11515282B2 (en) 2019-05-21 2022-11-29 Qorvo Us, Inc. Electromagnetic shields with bonding wires for sub-modules

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3639657A1 (de) * 1986-11-20 1988-06-01 Philips Patentverwaltung Verfahren zum reinigen von metallbauteilen fuer kathodenstrahlroehren
FR2719155B1 (fr) * 1994-04-25 1996-05-15 Commissariat Energie Atomique Procédé de réalisation de sources d'électrons à micropointes et source d'électrons à micropointes obtenue par ce procédé.
FR2719156B1 (fr) * 1994-04-25 1996-05-24 Commissariat Energie Atomique Source d'électrons à micropointes, les micropointes comportant deux parties.
US5470266A (en) * 1994-07-06 1995-11-28 Itt Corporation Low temperature process and apparatus for cleaning photo-cathodes
US5462468A (en) * 1994-12-16 1995-10-31 Philips Electronics North America Corporation CRT electron gun cleaning using carbon dioxide snow

Also Published As

Publication number Publication date
KR20010030782A (ko) 2001-04-16
EP1021818A4 (de) 2001-04-04
WO1999017323A3 (en) 1999-09-02
WO1999017323A2 (en) 1999-04-08
DE69832633T2 (de) 2006-08-17
HK1031154A1 (en) 2001-06-01
EP1021818A2 (de) 2000-07-26
JP2001518682A (ja) 2001-10-16
EP1021818B1 (de) 2005-11-30
KR100387053B1 (ko) 2003-06-12
JP4323092B2 (ja) 2009-09-02
US6004180A (en) 1999-12-21

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Legal Events

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