DE69831759D1 - Infrarotempfindliches bolometer - Google Patents
Infrarotempfindliches bolometerInfo
- Publication number
- DE69831759D1 DE69831759D1 DE69831759T DE69831759T DE69831759D1 DE 69831759 D1 DE69831759 D1 DE 69831759D1 DE 69831759 T DE69831759 T DE 69831759T DE 69831759 T DE69831759 T DE 69831759T DE 69831759 D1 DE69831759 D1 DE 69831759D1
- Authority
- DE
- Germany
- Prior art keywords
- infrared sensitive
- sensitive bolometer
- bolometer
- infrared
- sensitive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
- G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/KR1998/000443 WO2000037905A1 (en) | 1998-12-18 | 1998-12-18 | Infrared bolometer |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69831759D1 true DE69831759D1 (de) | 2005-11-03 |
DE69831759T2 DE69831759T2 (de) | 2006-03-23 |
Family
ID=19531212
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69831759T Expired - Lifetime DE69831759T2 (de) | 1998-12-18 | 1998-12-18 | Infrarotempfindliches bolometer |
Country Status (5)
Country | Link |
---|---|
EP (1) | EP1147387B1 (de) |
JP (1) | JP3396719B2 (de) |
CN (1) | CN1163734C (de) |
DE (1) | DE69831759T2 (de) |
WO (1) | WO2000037905A1 (de) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2875298B1 (fr) * | 2004-09-16 | 2007-03-02 | Commissariat Energie Atomique | Detecteur thermique de rayonnement electromagnetique comportant une membrane absorbante fixee en suspension |
JP4770549B2 (ja) * | 2006-03-28 | 2011-09-14 | パナソニック電工株式会社 | 赤外線センサ |
CN101246052B (zh) * | 2008-03-18 | 2010-05-12 | 吉林省光电子产业孵化器有限公司 | 一种微型光辐射探测器的制作方法 |
KR101408905B1 (ko) * | 2013-04-25 | 2014-06-19 | 한국과학기술원 | 고 응답 멤스 디바이스 및 그 제조방법 |
CN103759838B (zh) * | 2014-01-13 | 2016-06-01 | 浙江大立科技股份有限公司 | 微桥结构红外探测器及其制造方法 |
JPWO2019031234A1 (ja) | 2017-08-10 | 2020-08-27 | 浜松ホトニクス株式会社 | 光検出器 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3827212C1 (de) * | 1988-08-11 | 1989-12-14 | Ant Nachrichtentechnik Gmbh, 7150 Backnang, De | |
JP3374498B2 (ja) * | 1993-12-27 | 2003-02-04 | 株式会社デンソー | 赤外線センサ |
JPH08129875A (ja) * | 1994-10-28 | 1996-05-21 | Hewlett Packard Co <Hp> | 導電性針の位置ずれを低減したプローブ装置 |
US5844238A (en) * | 1996-03-27 | 1998-12-01 | David Sarnoff Research Center, Inc. | Infrared imager using room temperature capacitance sensor |
JPH10111178A (ja) * | 1996-10-08 | 1998-04-28 | Nikon Corp | 熱型赤外線センサ及びこれを用いたイメージセンサ |
JPH10185681A (ja) * | 1996-11-08 | 1998-07-14 | Mitsuteru Kimura | 熱型赤外線センサとその製造方法およびこれを用いた赤外線イメージセンサ |
-
1998
- 1998-12-18 EP EP98959288A patent/EP1147387B1/de not_active Expired - Lifetime
- 1998-12-18 DE DE69831759T patent/DE69831759T2/de not_active Expired - Lifetime
- 1998-12-18 WO PCT/KR1998/000443 patent/WO2000037905A1/en active IP Right Grant
- 1998-12-18 JP JP2000589915A patent/JP3396719B2/ja not_active Expired - Fee Related
- 1998-12-18 CN CNB988143658A patent/CN1163734C/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP3396719B2 (ja) | 2003-04-14 |
DE69831759T2 (de) | 2006-03-23 |
JP2002533666A (ja) | 2002-10-08 |
CN1337002A (zh) | 2002-02-20 |
EP1147387A1 (de) | 2001-10-24 |
EP1147387B1 (de) | 2005-09-28 |
WO2000037905A1 (en) | 2000-06-29 |
CN1163734C (zh) | 2004-08-25 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |