DE69831759D1 - Infrarotempfindliches bolometer - Google Patents

Infrarotempfindliches bolometer

Info

Publication number
DE69831759D1
DE69831759D1 DE69831759T DE69831759T DE69831759D1 DE 69831759 D1 DE69831759 D1 DE 69831759D1 DE 69831759 T DE69831759 T DE 69831759T DE 69831759 T DE69831759 T DE 69831759T DE 69831759 D1 DE69831759 D1 DE 69831759D1
Authority
DE
Germany
Prior art keywords
infrared sensitive
sensitive bolometer
bolometer
infrared
sensitive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69831759T
Other languages
English (en)
Other versions
DE69831759T2 (de
Inventor
Baek Ju
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
WiniaDaewoo Co Ltd
Original Assignee
Daewoo Electronics Co Ltd
Dongbu Daewoo Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daewoo Electronics Co Ltd, Dongbu Daewoo Electronics Corp filed Critical Daewoo Electronics Co Ltd
Application granted granted Critical
Publication of DE69831759D1 publication Critical patent/DE69831759D1/de
Publication of DE69831759T2 publication Critical patent/DE69831759T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Radiation Pyrometers (AREA)
DE69831759T 1998-12-18 1998-12-18 Infrarotempfindliches bolometer Expired - Lifetime DE69831759T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/KR1998/000443 WO2000037905A1 (en) 1998-12-18 1998-12-18 Infrared bolometer

Publications (2)

Publication Number Publication Date
DE69831759D1 true DE69831759D1 (de) 2005-11-03
DE69831759T2 DE69831759T2 (de) 2006-03-23

Family

ID=19531212

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69831759T Expired - Lifetime DE69831759T2 (de) 1998-12-18 1998-12-18 Infrarotempfindliches bolometer

Country Status (5)

Country Link
EP (1) EP1147387B1 (de)
JP (1) JP3396719B2 (de)
CN (1) CN1163734C (de)
DE (1) DE69831759T2 (de)
WO (1) WO2000037905A1 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2875298B1 (fr) * 2004-09-16 2007-03-02 Commissariat Energie Atomique Detecteur thermique de rayonnement electromagnetique comportant une membrane absorbante fixee en suspension
JP4770549B2 (ja) * 2006-03-28 2011-09-14 パナソニック電工株式会社 赤外線センサ
CN101246052B (zh) * 2008-03-18 2010-05-12 吉林省光电子产业孵化器有限公司 一种微型光辐射探测器的制作方法
KR101408905B1 (ko) * 2013-04-25 2014-06-19 한국과학기술원 고 응답 멤스 디바이스 및 그 제조방법
CN103759838B (zh) * 2014-01-13 2016-06-01 浙江大立科技股份有限公司 微桥结构红外探测器及其制造方法
EP3667269B1 (de) 2017-08-10 2024-09-18 Hamamatsu Photonics K.K. Lichtdetektor

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3827212C1 (de) * 1988-08-11 1989-12-14 Ant Nachrichtentechnik Gmbh, 7150 Backnang, De
JP3374498B2 (ja) * 1993-12-27 2003-02-04 株式会社デンソー 赤外線センサ
JPH08129875A (ja) * 1994-10-28 1996-05-21 Hewlett Packard Co <Hp> 導電性針の位置ずれを低減したプローブ装置
US5844238A (en) * 1996-03-27 1998-12-01 David Sarnoff Research Center, Inc. Infrared imager using room temperature capacitance sensor
JPH10111178A (ja) * 1996-10-08 1998-04-28 Nikon Corp 熱型赤外線センサ及びこれを用いたイメージセンサ
JPH10185681A (ja) * 1996-11-08 1998-07-14 Mitsuteru Kimura 熱型赤外線センサとその製造方法およびこれを用いた赤外線イメージセンサ

Also Published As

Publication number Publication date
JP3396719B2 (ja) 2003-04-14
WO2000037905A1 (en) 2000-06-29
CN1337002A (zh) 2002-02-20
DE69831759T2 (de) 2006-03-23
CN1163734C (zh) 2004-08-25
EP1147387A1 (de) 2001-10-24
EP1147387B1 (de) 2005-09-28
JP2002533666A (ja) 2002-10-08

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition