DE69829543D1 - Verfahren zur Erzeugung von Wasserdampf - Google Patents

Verfahren zur Erzeugung von Wasserdampf

Info

Publication number
DE69829543D1
DE69829543D1 DE69829543T DE69829543T DE69829543D1 DE 69829543 D1 DE69829543 D1 DE 69829543D1 DE 69829543 T DE69829543 T DE 69829543T DE 69829543 T DE69829543 T DE 69829543T DE 69829543 D1 DE69829543 D1 DE 69829543D1
Authority
DE
Germany
Prior art keywords
water vapor
generating water
generating
vapor
water
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69829543T
Other languages
English (en)
Other versions
DE69829543T2 (de
Inventor
Yukio Minami
Koji Kawada
Yoshikazu Tanabe
Nobukazu Ikeda
Akihiro Morimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Fujikin Inc
Original Assignee
Hitachi Ltd
Fujikin Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd, Fujikin Inc filed Critical Hitachi Ltd
Application granted granted Critical
Publication of DE69829543D1 publication Critical patent/DE69829543D1/de
Publication of DE69829543T2 publication Critical patent/DE69829543T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F22—STEAM GENERATION
    • F22B—METHODS OF STEAM GENERATION; STEAM BOILERS
    • F22B1/00—Methods of steam generation characterised by form of heating method
    • F22B1/003—Methods of steam generation characterised by form of heating method using combustion of hydrogen with oxygen
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B5/00—Water

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Development (AREA)
  • Sustainable Energy (AREA)
  • Combustion & Propulsion (AREA)
  • Thermal Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • General Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Formation Of Insulating Films (AREA)
  • Fuel Cell (AREA)
  • Control Of Non-Electrical Variables (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
DE69829543T 1997-12-10 1998-12-08 Verfahren zur Erzeugung von Wasserdampf Expired - Lifetime DE69829543T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP34028397 1997-12-10
JP34028397A JP3644810B2 (ja) 1997-12-10 1997-12-10 少流量の水分供給方法

Publications (2)

Publication Number Publication Date
DE69829543D1 true DE69829543D1 (de) 2005-05-04
DE69829543T2 DE69829543T2 (de) 2006-03-30

Family

ID=18335466

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69829543T Expired - Lifetime DE69829543T2 (de) 1997-12-10 1998-12-08 Verfahren zur Erzeugung von Wasserdampf

Country Status (9)

Country Link
US (1) US6334962B1 (de)
EP (1) EP0922905B1 (de)
JP (1) JP3644810B2 (de)
KR (1) KR100361958B1 (de)
CA (1) CA2255370C (de)
DE (1) DE69829543T2 (de)
IL (1) IL127395A (de)
SG (1) SG74106A1 (de)
TW (1) TW386187B (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW471068B (en) * 1997-03-05 2002-01-01 Hitachi Ltd Method for fabricating semiconductor integrated circuit device with insulation film
CN1279582C (zh) * 1999-08-06 2006-10-11 株式会社富士金 水分发生用反应炉
WO2001094254A1 (fr) * 2000-06-05 2001-12-13 Fujikin Incorporated Reacteur de production d'humidite
JP2002274812A (ja) * 2001-03-23 2002-09-25 Fujikin Inc 水分発生用反応炉
DE10119741B4 (de) * 2001-04-23 2012-01-19 Mattson Thermal Products Gmbh Verfahren und Vorrichtung zum Behandeln von Halbleitersubstraten
US20030124049A1 (en) * 2001-08-13 2003-07-03 Sowmya Krishnan Catalytic reactor apparatus and method for generating high purity water vapor
CN102287851A (zh) * 2011-07-13 2011-12-21 上海先进半导体制造股份有限公司 炉管点火方法
US9454158B2 (en) 2013-03-15 2016-09-27 Bhushan Somani Real time diagnostics for flow controller systems and methods
US10983538B2 (en) 2017-02-27 2021-04-20 Flow Devices And Systems Inc. Systems and methods for flow sensor back pressure adjustment for mass flow controller

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2582885A (en) * 1948-08-23 1952-01-15 Baker & Co Inc Method of removing free oxygen or free hydrogen from a gaseous medium
GB858079A (en) * 1959-01-13 1961-01-04 Engelhard Hanovia Inc Improvements in or relating to the combination of hydrogen and oxygen
US3240554A (en) * 1961-02-27 1966-03-15 Air Reduction Method of removing oxygen from relatively inert crude gases
US3535074A (en) * 1965-10-29 1970-10-20 Hitachi Ltd Method and apparatus for purifying crude inert gases
US3630956A (en) * 1969-04-01 1971-12-28 Air Prod & Chem Method of producing gases with controlled concentrations of water vapor
JPS62104038A (ja) * 1985-07-15 1987-05-14 Dainippon Screen Mfg Co Ltd 水蒸気含有酸素ガス供給装置
JP3331636B2 (ja) * 1992-10-05 2002-10-07 忠弘 大見 水分発生方法
KR960039200A (ko) * 1995-04-13 1996-11-21 김광호 산화장치 및 산화방법
JP3421483B2 (ja) * 1995-08-25 2003-06-30 株式会社東芝 半導体装置の製造方法
IL125366A (en) * 1996-01-29 2001-12-23 Fujikin Kk A method of generating moisture, a reactor for generating moisture, a method for cooling a reactor temperature to generate moisture and a method for creating a platinum-coated stripping layer.

Also Published As

Publication number Publication date
IL127395A0 (en) 1999-10-28
KR19990062953A (ko) 1999-07-26
IL127395A (en) 2001-06-14
EP0922905A2 (de) 1999-06-16
DE69829543T2 (de) 2006-03-30
KR100361958B1 (ko) 2003-04-26
CA2255370A1 (en) 1999-06-10
TW386187B (en) 2000-04-01
CA2255370C (en) 2002-07-23
JPH11171503A (ja) 1999-06-29
EP0922905A3 (de) 2001-11-14
EP0922905B1 (de) 2005-03-30
JP3644810B2 (ja) 2005-05-11
SG74106A1 (en) 2000-07-18
US6334962B1 (en) 2002-01-01

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