DE69825045D1 - Manipulator mit erweitertem bewegungsbereich - Google Patents

Manipulator mit erweitertem bewegungsbereich

Info

Publication number
DE69825045D1
DE69825045D1 DE69825045T DE69825045T DE69825045D1 DE 69825045 D1 DE69825045 D1 DE 69825045D1 DE 69825045 T DE69825045 T DE 69825045T DE 69825045 T DE69825045 T DE 69825045T DE 69825045 D1 DE69825045 D1 DE 69825045D1
Authority
DE
Germany
Prior art keywords
manipulator
movement range
extended movement
extended
range
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69825045T
Other languages
English (en)
Other versions
DE69825045T2 (de
Inventor
Nabil Khater
A Baker
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Credence Systems Corp
Original Assignee
Credence Systems Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Credence Systems Corp filed Critical Credence Systems Corp
Application granted granted Critical
Publication of DE69825045D1 publication Critical patent/DE69825045D1/de
Publication of DE69825045T2 publication Critical patent/DE69825045T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06705—Apparatus for holding or moving single probes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manipulator (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
DE69825045T 1997-04-30 1998-04-30 Manipulator mit erweitertem bewegungsbereich Expired - Fee Related DE69825045T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US846691 1997-04-30
US08/846,691 US6023173A (en) 1997-04-30 1997-04-30 Manipulator with expanded range of motion
PCT/US1998/008924 WO1998049569A1 (en) 1997-04-30 1998-04-30 Manipulator with expanded range of motion

Publications (2)

Publication Number Publication Date
DE69825045D1 true DE69825045D1 (de) 2004-08-19
DE69825045T2 DE69825045T2 (de) 2005-07-21

Family

ID=25298664

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69825045T Expired - Fee Related DE69825045T2 (de) 1997-04-30 1998-04-30 Manipulator mit erweitertem bewegungsbereich

Country Status (6)

Country Link
US (1) US6023173A (de)
EP (1) EP0979415B1 (de)
JP (1) JP2001523343A (de)
KR (1) KR20010012130A (de)
DE (1) DE69825045T2 (de)
WO (1) WO1998049569A1 (de)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6853181B1 (en) 2003-12-31 2005-02-08 Teradyne, Inc. Silicon-on-insulator channel architecture for automatic test equipment
US6837125B1 (en) 1999-07-14 2005-01-04 Teradyne, Inc. Automatic test manipulator with support internal to test head
ATE253226T1 (de) * 1999-07-14 2003-11-15 Teradyne Inc Manipulator für eine automatische testeinrichtung mit innerhalb des testkopfs befindlicher stütze
US6310486B1 (en) * 1999-10-01 2001-10-30 Teradyne, Inc. Integrated test cell
MY138984A (en) * 2000-03-01 2009-08-28 Intest Corp Vertical counter balanced test head manipulator
US6940273B2 (en) * 2001-07-05 2005-09-06 Cornelia Heigl Handling device, especially for positioning a test head on a testing device
US6766996B1 (en) 2001-07-16 2004-07-27 Reid-Ashman Manufacturing, Inc. Manipulator
US6646431B1 (en) 2002-01-22 2003-11-11 Elite E/M, Inc. Test head manipulator
US6828774B2 (en) * 2002-02-27 2004-12-07 Teradyne, Inc. Rear-mounted gimbal for supporting test head
WO2004070400A1 (en) * 2003-01-28 2004-08-19 Intest Ip Corporation Wrist joint for positioning a test head
US7235964B2 (en) * 2003-03-31 2007-06-26 Intest Corporation Test head positioning system and method
US20050039888A1 (en) * 2003-08-21 2005-02-24 Pfahnl Andreas C. Two-phase cooling apparatus and method for automatic test equipment
JP2005091041A (ja) * 2003-09-12 2005-04-07 Advantest Corp 半導体試験装置
DE102004008402B4 (de) * 2004-02-20 2007-04-12 Heigl, Helmuth, Dr. Handhabungsvorrichtung, insbesondere zum Positionieren eines Testkopfs an einer Prüfeinrichtung
EP2273279A1 (de) 2005-04-27 2011-01-12 Aehr Test Systems, Inc. Vorrichtung zur Prüfung elektronischer Vorrichtungen
DE102005048237B3 (de) * 2005-10-07 2007-03-15 Hubertus Heigl Handhabungsvorrichtung zum Positionieren eines Testkopfs, insbesondere an einer Prüfeinrichtung
US7800382B2 (en) 2007-12-19 2010-09-21 AEHR Test Ststems System for testing an integrated circuit of a device and its method of use
US8030957B2 (en) 2009-03-25 2011-10-04 Aehr Test Systems System for testing an integrated circuit of a device and its method of use
CN102998550B (zh) * 2012-08-20 2015-05-13 昆山洺九机电有限公司 网络头插拔检测机
CN103353560B (zh) * 2013-06-21 2016-04-20 东莞市融汇机械设备电子有限公司 电子产品多工位自动检测设备
KR20230021177A (ko) 2017-03-03 2023-02-13 에어 테스트 시스템즈 일렉트로닉스 테스터
CN107505124B (zh) * 2017-08-02 2018-09-04 大连理工大学 一种精确控制横向载荷松脱试验机
CN109001572B (zh) * 2018-07-25 2020-12-11 陈昱见 排线装配检测装置
CN116457670A (zh) 2020-10-07 2023-07-18 雅赫测试系统公司 电子测试器
US11498207B2 (en) * 2021-01-08 2022-11-15 Teradyne, Inc. Test head manipulator configured to address uncontrolled test head rotation
US20230358803A1 (en) * 2022-05-06 2023-11-09 Nanya Technology Corporation Probing device and inspection method using the same

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4527942A (en) * 1982-08-25 1985-07-09 Intest Corporation Electronic test head positioner for test systems
US4705447A (en) * 1983-08-11 1987-11-10 Intest Corporation Electronic test head positioner for test systems
US4973015A (en) * 1987-09-17 1990-11-27 Schlumberger Technologies, Inc. Manipulator apparatus for test head support and orientation
US5241870A (en) * 1991-07-22 1993-09-07 Intest Corporation Test head manipulator
US5598104A (en) * 1994-10-13 1997-01-28 International Business Machines Corporation Breakaway test probe actuator used in a probing apparatus
JPH08211123A (ja) * 1994-11-24 1996-08-20 Advantest Corp テスト・ヘッド接続装置を装備した半導体試験装置
EP0811167B1 (de) * 1995-02-23 2001-09-05 Aesop Inc. Manipulator für einen testkopf einer automatischen testanlage
US5606262A (en) * 1995-06-07 1997-02-25 Teradyne, Inc. Manipulator for automatic test equipment test head

Also Published As

Publication number Publication date
EP0979415A1 (de) 2000-02-16
EP0979415B1 (de) 2004-07-14
DE69825045T2 (de) 2005-07-21
WO1998049569A1 (en) 1998-11-05
EP0979415A4 (de) 2000-08-16
US6023173A (en) 2000-02-08
JP2001523343A (ja) 2001-11-20
KR20010012130A (ko) 2001-02-15

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee