DE69820308D1 - Mikrotechnologischer ableitender optisch-thermischer Gassensor - Google Patents

Mikrotechnologischer ableitender optisch-thermischer Gassensor

Info

Publication number
DE69820308D1
DE69820308D1 DE69820308T DE69820308T DE69820308D1 DE 69820308 D1 DE69820308 D1 DE 69820308D1 DE 69820308 T DE69820308 T DE 69820308T DE 69820308 T DE69820308 T DE 69820308T DE 69820308 D1 DE69820308 D1 DE 69820308D1
Authority
DE
Germany
Prior art keywords
microtechnological
gas sensor
thermal gas
dissipative optical
dissipative
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69820308T
Other languages
English (en)
Other versions
DE69820308T2 (de
Inventor
R Andrew Wood
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honeywell Inc
Original Assignee
Honeywell Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell Inc filed Critical Honeywell Inc
Application granted granted Critical
Publication of DE69820308D1 publication Critical patent/DE69820308D1/de
Publication of DE69820308T2 publication Critical patent/DE69820308T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/171—Systems in which incident light is modified in accordance with the properties of the material investigated with calorimetric detection, e.g. with thermal lens detection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03—Cuvette constructions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis

Landscapes

  • Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Pathology (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)
  • Optical Measuring Cells (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
DE69820308T 1997-04-30 1998-04-28 Mikrotechnologischer ableitender optisch-thermischer Gassensor Expired - Lifetime DE69820308T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US846724 1997-04-30
US08/846,724 US5892140A (en) 1997-04-30 1997-04-30 Micromachined inferential opto-thermal gas sensor

Publications (2)

Publication Number Publication Date
DE69820308D1 true DE69820308D1 (de) 2004-01-15
DE69820308T2 DE69820308T2 (de) 2004-11-25

Family

ID=25298760

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69801747T Expired - Lifetime DE69801747D1 (de) 1997-04-30 1998-04-28 Mikrotechnologischer ableitender optisch-thermischer gassensor
DE69820308T Expired - Lifetime DE69820308T2 (de) 1997-04-30 1998-04-28 Mikrotechnologischer ableitender optisch-thermischer Gassensor

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE69801747T Expired - Lifetime DE69801747D1 (de) 1997-04-30 1998-04-28 Mikrotechnologischer ableitender optisch-thermischer gassensor

Country Status (6)

Country Link
US (2) US5892140A (de)
EP (2) EP1120642B1 (de)
JP (2) JP4122067B2 (de)
CA (1) CA2284486C (de)
DE (2) DE69801747D1 (de)
WO (1) WO1998049539A1 (de)

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US6550310B1 (en) 2000-11-28 2003-04-22 Honeywell International Inc. Catalytic adsorption and oxidation based carbon monoxide sensor and detection method
US6474138B1 (en) 2000-11-28 2002-11-05 Honeywell International Inc. Adsorption based carbon monoxide sensor and method
US6631638B2 (en) 2001-01-30 2003-10-14 Rosemount Aerospace Inc. Fluid flow sensor
GB0205794D0 (en) 2002-03-12 2002-04-24 Montelius Lars G Mems devices on a nanometer scale
DE10214769A1 (de) * 2002-04-03 2003-10-16 Bosch Gmbh Robert Vorrichtung und Sensor zur Aufnahme von Lichtsignalen sowie Herstellungsverfahren
FR2838423B1 (fr) * 2002-04-12 2005-06-24 Thales Sa Procede de fabrication d'une microstructure comportant une cavite sous vide et microstructure correspondante
AU2003259171A1 (en) * 2002-07-19 2004-02-09 Board Of Regents, The University Of Texas System Time-resolved exhaust emissions sensor
US7795586B2 (en) * 2002-09-17 2010-09-14 Robert Bosch Gmbh Device for detecting and device for measuring the concentration of a substance
US7205675B2 (en) 2003-01-29 2007-04-17 Hewlett-Packard Development Company, L.P. Micro-fabricated device with thermoelectric device and method of making
DE10337750A1 (de) * 2003-08-07 2005-03-10 Bosch Gmbh Robert Verfahren zur Regelung eines Umluft- und/oder Zuluftanteils in einer Fahrgastzelle
DE102004032176A1 (de) * 2004-07-02 2006-01-26 Robert Bosch Gmbh Beschichteter mikromechanischer Strahler
US20060081983A1 (en) * 2004-10-14 2006-04-20 Giles Humpston Wafer level microelectronic packaging with double isolation
DE102005021614A1 (de) * 2005-05-11 2006-11-23 Hella Kgaa Hueck & Co. Sensoranordnung, insbesondere zur Bestimmung der Luftgüte
US20080265870A1 (en) * 2007-04-27 2008-10-30 Nair Balakrishnan G Particulate Matter Sensor
DE102007035129A1 (de) * 2007-07-25 2009-01-29 Abb Ag System und Verfahren zur vorausschauenden Überwachung und zum Schutz elektrischer Einrichtungen
WO2009032262A1 (en) * 2007-08-30 2009-03-12 Ceramatec, Inc. Ceramic particulate matter sensor with low electrical leakage
US7998417B2 (en) * 2008-08-22 2011-08-16 Board Of Regents, University Of Texas System Particulate matter sensor with a heater
US7891232B2 (en) * 2008-11-21 2011-02-22 Board Of Regents, The University Of Texas System Rigid particulate matter sensor
KR20110106407A (ko) 2008-12-23 2011-09-28 쓰리엠 이노베이티브 프로퍼티즈 컴파니 미세다공성 유기실리케이트 재료를 갖는 유기 화학적 센서
JP5662945B2 (ja) 2008-12-23 2015-02-04 スリーエム イノベイティブ プロパティズ カンパニー 微多孔性有機ケイ酸塩材料を有する有機化学センサ
US8161796B2 (en) * 2009-04-16 2012-04-24 Emisense Technologies Llc Particulate matter sensor with an insulating air gap
DE102012004977B3 (de) * 2012-03-14 2013-04-25 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung und Verfahren zum Messen eines Zielgases
FI20125665L (fi) * 2012-06-15 2013-12-16 Vaisala Oyj Anturi ja menetelmä ankariin olosuhteisiin tarkoitetun anturin yhteydessä
EP3265766B1 (de) 2015-03-05 2023-09-27 Honeywell International Inc. Verwendung ausgewählter glastypen und glasdicken im optischen pfad zur beseitigung von querempfindlichkeit auf wasserabsorptionsspitzen
CN108351293A (zh) 2015-09-10 2018-07-31 霍尼韦尔国际公司 具有归一化响应和改进灵敏度的气体检测器
US10393591B2 (en) 2015-10-09 2019-08-27 Honeywell International Inc. Electromagnetic radiation detector using a planar Golay cell
DE102016122479B4 (de) 2016-11-22 2020-10-22 Infineon Technologies Ag Infrarotemitteranordnung und Verfahren zum Herstellen einer Infrarotemitteranordnung
WO2020176577A1 (en) * 2019-02-27 2020-09-03 Gentex Corporation Tactical chemical detector
EP3705872A1 (de) * 2019-03-08 2020-09-09 Infineon Technologies AG Gassensor
DE102022128472A1 (de) 2022-10-27 2024-05-02 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein Anordnung und Verfahren zur Bestimmung der Konzentration eines oder mehrerer Stoffe in einem flüssigen oder gasförmigen Medium

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US4738266A (en) * 1983-05-09 1988-04-19 Thatcher John B Apnoea monitor
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US4727006A (en) * 1986-02-12 1988-02-23 The United States Of America As Represented By The Secretary Of The Army Method of monitoring electrochemical cells
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US5081998A (en) * 1989-09-01 1992-01-21 Critikon, Inc. Optically stabilized infrared energy detector
US5053754A (en) * 1990-04-02 1991-10-01 Gaztech Corporation Simple fire detector
FI96450C (fi) * 1993-01-13 1996-06-25 Vaisala Oy Yksikanavainen kaasun pitoisuuden mittausmenetelmä ja -laitteisto
US5691704A (en) * 1996-01-29 1997-11-25 Engelhard Sensor Technologies, Inc. Practical and improved fire detector
US5444249A (en) * 1994-02-14 1995-08-22 Telaire Systems, Inc. NDIR gas sensor
US5464983A (en) * 1994-04-05 1995-11-07 Industrial Scientific Corporation Method and apparatus for determining the concentration of a gas
FI98325C (fi) * 1994-07-07 1997-05-26 Vaisala Oy Selektiivinen infrapunadetektori
DE4434814A1 (de) * 1994-09-29 1996-04-04 Microparts Gmbh Infrarotspektrometrischer Sensor für Gase
US5600148A (en) * 1994-12-30 1997-02-04 Honeywell Inc. Low power infrared scene projector array and method of manufacture
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JPH0989773A (ja) * 1995-09-20 1997-04-04 Horiba Ltd 赤外線ガス分析計

Also Published As

Publication number Publication date
EP0979400B1 (de) 2001-09-19
US5892140A (en) 1999-04-06
WO1998049539A1 (en) 1998-11-05
EP1120642A3 (de) 2001-10-24
DE69820308T2 (de) 2004-11-25
US5861545A (en) 1999-01-19
JP2008180724A (ja) 2008-08-07
DE69801747D1 (de) 2001-10-25
CA2284486A1 (en) 1998-11-05
EP1120642A2 (de) 2001-08-01
EP0979400A1 (de) 2000-02-16
JP2001522460A (ja) 2001-11-13
JP4122067B2 (ja) 2008-07-23
EP1120642B1 (de) 2003-12-03
CA2284486C (en) 2006-08-15

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Legal Events

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