DE69817875D1 - Bestimmung der geschwindigkeit eines fluids mit hilfe von laufzeitmessungen von wärmepulsen - Google Patents

Bestimmung der geschwindigkeit eines fluids mit hilfe von laufzeitmessungen von wärmepulsen

Info

Publication number
DE69817875D1
DE69817875D1 DE69817875T DE69817875T DE69817875D1 DE 69817875 D1 DE69817875 D1 DE 69817875D1 DE 69817875 T DE69817875 T DE 69817875T DE 69817875 T DE69817875 T DE 69817875T DE 69817875 D1 DE69817875 D1 DE 69817875D1
Authority
DE
Germany
Prior art keywords
fluid
determining
speed
heat pulse
pulse measurements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69817875T
Other languages
English (en)
Other versions
DE69817875T2 (de
Inventor
Bonne Ulrich
David Kubisiak
J Matthys
B Schuldt
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honeywell Inc
Original Assignee
Honeywell Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell Inc filed Critical Honeywell Inc
Publication of DE69817875D1 publication Critical patent/DE69817875D1/de
Application granted granted Critical
Publication of DE69817875T2 publication Critical patent/DE69817875T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P5/00—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft
    • G01P5/10—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring thermal variables
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6845—Micromachined devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
    • G01F1/6884—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element making use of temperature dependence of optical properties
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
    • G01F1/69—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element of resistive type
    • G01F1/692—Thin-film arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/704—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow using marked regions or existing inhomogeneities within the fluid stream, e.g. statistically occurring variations in a fluid parameter
    • G01F1/708—Measuring the time taken to traverse a fixed distance
    • G01F1/7084—Measuring the time taken to traverse a fixed distance using thermal detecting arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P5/00—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft
    • G01P5/18—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring the time taken to traverse a fixed distance
    • G01P5/22—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring the time taken to traverse a fixed distance using auto-correlation or cross-correlation detection means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Engineering & Computer Science (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)
  • Measuring Volume Flow (AREA)
DE69817875T 1997-12-31 1998-12-17 Bestimmung der geschwindigkeit eines fluids mit hilfe von laufzeitmessungen von wärmepulsen Expired - Lifetime DE69817875T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US2157 1997-12-31
US09/002,157 US6234016B1 (en) 1997-12-31 1997-12-31 Time lag approach for measuring fluid velocity
PCT/US1998/026774 WO1999034221A2 (en) 1997-12-31 1998-12-17 Device and method for measuring fluid velocity by determining the time-of-flight of heat pulses

Publications (2)

Publication Number Publication Date
DE69817875D1 true DE69817875D1 (de) 2003-10-09
DE69817875T2 DE69817875T2 (de) 2004-07-29

Family

ID=21699474

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69841024T Expired - Fee Related DE69841024D1 (de) 1997-12-31 1998-12-17 Vorrichtung und Verfahren zur Bestimmung der Strömungsgeschwindigkeit mit Hilfe von Laufzeitmessungen von Wärmepulsen
DE69817875T Expired - Lifetime DE69817875T2 (de) 1997-12-31 1998-12-17 Bestimmung der geschwindigkeit eines fluids mit hilfe von laufzeitmessungen von wärmepulsen

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE69841024T Expired - Fee Related DE69841024D1 (de) 1997-12-31 1998-12-17 Vorrichtung und Verfahren zur Bestimmung der Strömungsgeschwindigkeit mit Hilfe von Laufzeitmessungen von Wärmepulsen

Country Status (4)

Country Link
US (1) US6234016B1 (de)
EP (3) EP1363130A3 (de)
DE (2) DE69841024D1 (de)
WO (1) WO1999034221A2 (de)

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US8446220B2 (en) 2011-05-09 2013-05-21 Honeywell International Inc. Method and apparatus for increasing the effective resolution of a sensor
DE102011075519A1 (de) * 2011-05-09 2012-11-15 Innovative Sensor Technology Ist Ag Verfahren und Vorrichtung zum thermischen Bestimmen des Massedurchflusses eines Mediums in einer Leitung
US8718981B2 (en) 2011-05-09 2014-05-06 Honeywell International Inc. Modular sensor assembly including removable sensing module
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US9874467B2 (en) * 2015-02-23 2018-01-23 Aceinna, Inc. MEMS thermal flow sensor with compensation for fluid composition
US10480974B2 (en) * 2015-10-05 2019-11-19 Siargo Ltd. Composite MEMS flow sensor on silicon-on-insulator device and method of making the same
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Also Published As

Publication number Publication date
EP1049935A2 (de) 2000-11-08
EP1363130A2 (de) 2003-11-19
EP1275967A1 (de) 2003-01-15
EP1049935B1 (de) 2003-09-03
DE69841024D1 (de) 2009-09-10
DE69817875T2 (de) 2004-07-29
WO1999034221A2 (en) 1999-07-08
EP1363130A3 (de) 2004-06-09
US6234016B1 (en) 2001-05-22
WO1999034221A3 (en) 1999-09-10
WO1999034221A8 (en) 1999-12-02
EP1275967B1 (de) 2009-07-29

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