DE69816320D1 - Profilmessung mit hoher Geschwindigkeit durch CCD, das Profillinien per Bildperiode aufgreift - Google Patents

Profilmessung mit hoher Geschwindigkeit durch CCD, das Profillinien per Bildperiode aufgreift

Info

Publication number
DE69816320D1
DE69816320D1 DE69816320T DE69816320T DE69816320D1 DE 69816320 D1 DE69816320 D1 DE 69816320D1 DE 69816320 T DE69816320 T DE 69816320T DE 69816320 T DE69816320 T DE 69816320T DE 69816320 D1 DE69816320 D1 DE 69816320D1
Authority
DE
Germany
Prior art keywords
profile
ccd
frame period
per frame
picks
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69816320T
Other languages
English (en)
Other versions
DE69816320T2 (de
Inventor
Bojko Vodanovic
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rudolph Technologies Inc
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of DE69816320D1 publication Critical patent/DE69816320D1/de
Application granted granted Critical
Publication of DE69816320T2 publication Critical patent/DE69816320T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/02Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/024Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by means of diode-array scanning
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/70SSIS architectures; Circuits associated therewith
    • H04N25/71Charge-coupled device [CCD] sensors; Charge-transfer registers specially adapted for CCD sensors
    • H04N25/73Charge-coupled device [CCD] sensors; Charge-transfer registers specially adapted for CCD sensors using interline transfer [IT]
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/50Control of the SSIS exposure
    • H04N25/53Control of the integration time
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N3/00Scanning details of television systems; Combination thereof with generation of supply voltages
    • H04N3/10Scanning details of television systems; Combination thereof with generation of supply voltages by means not exclusively optical-mechanical
    • H04N3/14Scanning details of television systems; Combination thereof with generation of supply voltages by means not exclusively optical-mechanical by means of electrically scanned solid-state devices
    • H04N3/15Scanning details of television systems; Combination thereof with generation of supply voltages by means not exclusively optical-mechanical by means of electrically scanned solid-state devices for picture signal generation
    • H04N3/155Control of the image-sensor operation, e.g. image processing within the image-sensor
DE69816320T 1997-09-02 1998-09-01 Profilmessung mit hoher Geschwindigkeit durch CCD, das Profillinien per Bildperiode aufgreift Expired - Lifetime DE69816320T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US08/922,026 US6335757B1 (en) 1997-09-02 1997-09-02 CCD imaging device for high speed profiling
US922026 1997-09-02
PCT/CA1998/000830 WO1999012001A1 (en) 1997-09-02 1998-09-01 Interline transfer ccd driven with enhanced frame transfer frequency for high speed profiling

Publications (2)

Publication Number Publication Date
DE69816320D1 true DE69816320D1 (de) 2003-08-14
DE69816320T2 DE69816320T2 (de) 2004-05-13

Family

ID=25446370

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69816320T Expired - Lifetime DE69816320T2 (de) 1997-09-02 1998-09-01 Profilmessung mit hoher Geschwindigkeit durch CCD, das Profillinien per Bildperiode aufgreift

Country Status (8)

Country Link
US (2) US6335757B1 (de)
EP (1) EP1023574B1 (de)
JP (1) JP4259749B2 (de)
KR (1) KR100566731B1 (de)
AT (1) ATE244870T1 (de)
AU (1) AU8969298A (de)
DE (1) DE69816320T2 (de)
WO (1) WO1999012001A1 (de)

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US6549647B1 (en) * 2000-01-07 2003-04-15 Cyberoptics Corporation Inspection system with vibration resistant video capture
DE10194788T1 (de) 2000-01-07 2003-02-27 Cyberoptics Corp Phasenprofilometriesystem mit telezentrischem Projektor
US6593705B1 (en) 2000-01-07 2003-07-15 Cyberoptics Corporation Rapid-firing flashlamp discharge circuit
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US20050185175A1 (en) * 2002-07-16 2005-08-25 Canos Avelino C. Rotary support and apparatus used for the multiple spectroscopic characterisation of samples of solid materials
US7012631B2 (en) * 2002-09-17 2006-03-14 Bojko Vodanovic Absolute position determination for a CCD-based acquisition unit
EP1465106A1 (de) * 2003-04-04 2004-10-06 Automation Technology GmbH Verfahren und Bildverarbeitungseinheit zur schnellen Auswertung digitaler Bilddaten
US7777199B2 (en) * 2004-09-17 2010-08-17 Wichita State University System and method for capturing image sequences at ultra-high framing rates
JP2007173774A (ja) * 2005-11-22 2007-07-05 Matsushita Electric Ind Co Ltd 固体撮像装置
KR100738551B1 (ko) * 2006-01-17 2007-07-11 삼성전자주식회사 화상형성기기의 히터롤러
US7591165B2 (en) * 2006-03-29 2009-09-22 Tekscan Incorporated Control circuit for sensor array and related methods
US7884871B2 (en) * 2007-06-15 2011-02-08 Aptina Imaging Corporation Images with high speed digital frame transfer and frame processing
US8059280B2 (en) 2008-01-31 2011-11-15 Cyberoptics Corporation Method for three-dimensional imaging using multi-phase structured light
CN102300056B (zh) * 2011-08-25 2013-07-10 西北核技术研究所 一种提高面阵ccd帧频的方法及高帧频ccd器件
WO2013078655A1 (zh) * 2011-12-01 2013-06-06 华为技术有限公司 一种光信号补偿装置
US8878256B2 (en) 2013-01-07 2014-11-04 Semiconductor Components Industries, Llc Image sensors with multiple output structures
US8878255B2 (en) 2013-01-07 2014-11-04 Semiconductor Components Industries, Llc Image sensors with multiple output structures
US10126252B2 (en) 2013-04-29 2018-11-13 Cyberoptics Corporation Enhanced illumination control for three-dimensional imaging
US9504620B2 (en) 2014-07-23 2016-11-29 American Sterilizer Company Method of controlling a pressurized mattress system for a support structure
CN104159043B (zh) * 2014-08-07 2017-09-29 西北核技术研究所 一种超高速双帧图像获取方法
CN112261304B (zh) * 2020-09-15 2021-10-01 中国科学院上海技术物理研究所 一种基于帧转移ccd的定帧频成像系统曝光时长调控方法

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Also Published As

Publication number Publication date
KR20010023563A (ko) 2001-03-26
US6335757B1 (en) 2002-01-01
JP4259749B2 (ja) 2009-04-30
AU8969298A (en) 1999-03-22
US6885400B1 (en) 2005-04-26
DE69816320T2 (de) 2004-05-13
ATE244870T1 (de) 2003-07-15
JP2001515285A (ja) 2001-09-18
EP1023574A1 (de) 2000-08-02
EP1023574B1 (de) 2003-07-09
WO1999012001A1 (en) 1999-03-11
KR100566731B1 (ko) 2006-04-03

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