DE10194788T1 - Phasenprofilometriesystem mit telezentrischem Projektor - Google Patents

Phasenprofilometriesystem mit telezentrischem Projektor

Info

Publication number
DE10194788T1
DE10194788T1 DE10194788T DE10194788T DE10194788T1 DE 10194788 T1 DE10194788 T1 DE 10194788T1 DE 10194788 T DE10194788 T DE 10194788T DE 10194788 T DE10194788 T DE 10194788T DE 10194788 T1 DE10194788 T1 DE 10194788T1
Authority
DE
Germany
Prior art keywords
profilometry system
phase profilometry
telecentric projector
telecentric
projector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
DE10194788T
Other languages
English (en)
Inventor
David M Kranz
Eric P Rudd
David Fishbaine
Carl Haugan
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cyberoptics Corp
Original Assignee
Cyberoptics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/522,519 external-priority patent/US6549647B1/en
Priority claimed from US09/524,133 external-priority patent/US6750899B1/en
Application filed by Cyberoptics Corp filed Critical Cyberoptics Corp
Publication of DE10194788T1 publication Critical patent/DE10194788T1/de
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2518—Projection by scanning of the object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/70—SSIS architectures; Circuits associated therewith
    • H04N25/71—Charge-coupled device [CCD] sensors; Charge-transfer registers specially adapted for CCD sensors
DE10194788T 2000-01-07 2001-01-05 Phasenprofilometriesystem mit telezentrischem Projektor Ceased DE10194788T1 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US17504900P 2000-01-07 2000-01-07
US09/522,519 US6549647B1 (en) 2000-01-07 2000-03-10 Inspection system with vibration resistant video capture
US09/524,133 US6750899B1 (en) 2000-01-07 2000-03-10 Solder paste inspection system
PCT/US2001/000330 WO2001051887A1 (en) 2000-01-07 2001-01-05 Phase profilometry system with telecentric projector

Publications (1)

Publication Number Publication Date
DE10194788T1 true DE10194788T1 (de) 2003-02-27

Family

ID=27390494

Family Applications (1)

Application Number Title Priority Date Filing Date
DE10194788T Ceased DE10194788T1 (de) 2000-01-07 2001-01-05 Phasenprofilometriesystem mit telezentrischem Projektor

Country Status (6)

Country Link
US (1) US6577405B2 (de)
JP (1) JP2003527582A (de)
KR (1) KR100729290B1 (de)
DE (1) DE10194788T1 (de)
GB (1) GB2375392B (de)
WO (1) WO2001051887A1 (de)

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Also Published As

Publication number Publication date
GB2375392A (en) 2002-11-13
WO2001051887A1 (en) 2001-07-19
KR20020067605A (ko) 2002-08-22
JP2003527582A (ja) 2003-09-16
KR100729290B1 (ko) 2007-06-25
US6577405B2 (en) 2003-06-10
US20010033386A1 (en) 2001-10-25
GB0215884D0 (en) 2002-08-14
GB2375392B (en) 2004-12-15

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Legal Events

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8110 Request for examination paragraph 44
8125 Change of the main classification

Ipc: G01B 11/25 AFI20051017BHDE

R002 Refusal decision in examination/registration proceedings
R003 Refusal decision now final

Effective date: 20110329