DE69815926D1 - Austauschkraftmessgerät - Google Patents
AustauschkraftmessgerätInfo
- Publication number
- DE69815926D1 DE69815926D1 DE69815926T DE69815926T DE69815926D1 DE 69815926 D1 DE69815926 D1 DE 69815926D1 DE 69815926 T DE69815926 T DE 69815926T DE 69815926 T DE69815926 T DE 69815926T DE 69815926 D1 DE69815926 D1 DE 69815926D1
- Authority
- DE
- Germany
- Prior art keywords
- measuring device
- force measuring
- exchange force
- exchange
- measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/34—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring roughness or irregularity of surfaces
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/02—Multiple-type SPM, i.e. involving more than one SPM techniques
- G01Q60/08—MFM [Magnetic Force Microscopy] combined with AFM [Atomic Force Microscopy
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
- G01Q60/32—AC mode
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
- G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/50—MFM [Magnetic Force Microscopy] or apparatus therefor, e.g. MFM probes
- G01Q60/54—Probes, their manufacture, or their related instrumentation, e.g. holders
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
- Y10S977/852—Manufacture, treatment, or detection of nanostructure with scanning probe for detection of specific nanostructure sample or nanostructure-related property
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Measuring Magnetic Variables (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9713297 | 1997-04-15 | ||
JP09713297A JP3210961B2 (ja) | 1997-04-15 | 1997-04-15 | 交換相互作用力の測定装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69815926D1 true DE69815926D1 (de) | 2003-08-07 |
DE69815926T2 DE69815926T2 (de) | 2004-04-22 |
Family
ID=14184050
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69815926T Expired - Fee Related DE69815926T2 (de) | 1997-04-15 | 1998-04-15 | Austauschkraftmessgerät |
Country Status (7)
Country | Link |
---|---|
US (1) | US6078174A (de) |
EP (1) | EP0872707B1 (de) |
JP (1) | JP3210961B2 (de) |
KR (1) | KR100263528B1 (de) |
CN (1) | CN1161605C (de) |
DE (1) | DE69815926T2 (de) |
HK (1) | HK1018312A1 (de) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3566567B2 (ja) * | 1998-12-17 | 2004-09-15 | 独立行政法人 科学技術振興機構 | 磁気共鳴型交換相互作用力顕微鏡及びそれを用いた観察方法 |
JP4510277B2 (ja) * | 2000-12-15 | 2010-07-21 | エスアイアイ・ナノテクノロジー株式会社 | 走査型プローブ顕微鏡 |
US6545495B2 (en) * | 2001-04-17 | 2003-04-08 | Ut-Battelle, Llc | Method and apparatus for self-calibration of capacitive sensors |
JP4832296B2 (ja) | 2003-07-15 | 2011-12-07 | ユニバーシティ・オブ・ブリストル | 原子間力顕微鏡用プローブ |
GB0316577D0 (en) * | 2003-07-15 | 2003-08-20 | Univ Bristol | Atomic force microscope |
CN100356160C (zh) * | 2005-05-25 | 2007-12-19 | 中国科学院上海微系统与信息技术研究所 | 一种经改进的微悬臂梁弹性系数的测试方法 |
CN1979126B (zh) * | 2005-12-07 | 2012-08-22 | 国际商业机器公司 | 用于样品分析的方法及设备 |
US8069492B2 (en) * | 2008-03-31 | 2011-11-29 | Seagate Technology Llc | Spin-torque probe microscope |
CN104865408A (zh) * | 2015-04-28 | 2015-08-26 | 中山大学 | 一种调控原子力显微镜悬臂梁共振频率的方法和装置 |
RU2696518C1 (ru) * | 2018-07-02 | 2019-08-02 | Федеральное государственное бюджетное образовательное учреждение высшего образования "Астраханский государственный технический университет" ФГБОУ ВО "АГТУ" | Устройство биметаллического днища головки цилиндров двигателя внутреннего сгорания |
CN110127588B (zh) * | 2019-05-22 | 2022-02-22 | 季华实验室 | 用于加工衬底材料的钝化层的探针 |
CN110146370B (zh) * | 2019-05-30 | 2020-08-25 | 中国科学技术大学 | 一种微小力的加载测量装置和方法 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01259210A (ja) * | 1988-04-08 | 1989-10-16 | Nippon Telegr & Teleph Corp <Ntt> | 表面形状測定装置 |
JP3076889B2 (ja) * | 1993-09-02 | 2000-08-14 | セイコーインスツルメンツ株式会社 | 磁気力顕微鏡 |
JP3226424B2 (ja) * | 1994-09-02 | 2001-11-05 | キヤノン株式会社 | 走査型プローブ顕微鏡ならびに該顕微鏡を用いた加工装置および情報処理装置 |
US5966053A (en) * | 1995-04-10 | 1999-10-12 | International Business Machines Corporation | Apparatus and method for controlling a mechanical oscillator |
JPH08313545A (ja) * | 1995-05-16 | 1996-11-29 | Olympus Optical Co Ltd | カンチレバー |
JPH08313544A (ja) * | 1995-05-24 | 1996-11-29 | Hitachi Ltd | 電子顕微鏡及びこれを用いた試料観察方法 |
-
1997
- 1997-04-15 JP JP09713297A patent/JP3210961B2/ja not_active Expired - Lifetime
-
1998
- 1998-04-14 US US09/059,399 patent/US6078174A/en not_active Expired - Fee Related
- 1998-04-15 CN CNB981096956A patent/CN1161605C/zh not_active Expired - Fee Related
- 1998-04-15 DE DE69815926T patent/DE69815926T2/de not_active Expired - Fee Related
- 1998-04-15 EP EP98302918A patent/EP0872707B1/de not_active Expired - Lifetime
- 1998-04-15 KR KR1019980013437A patent/KR100263528B1/ko not_active IP Right Cessation
-
1999
- 1999-07-29 HK HK99103269A patent/HK1018312A1/xx not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
EP0872707A1 (de) | 1998-10-21 |
US6078174A (en) | 2000-06-20 |
JP3210961B2 (ja) | 2001-09-25 |
CN1161605C (zh) | 2004-08-11 |
KR19980081427A (ko) | 1998-11-25 |
CN1212365A (zh) | 1999-03-31 |
KR100263528B1 (ko) | 2000-08-01 |
EP0872707B1 (de) | 2003-07-02 |
DE69815926T2 (de) | 2004-04-22 |
JPH10288620A (ja) | 1998-10-27 |
HK1018312A1 (en) | 1999-12-17 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |