DE69808776D1 - Magnetfeldfühler - Google Patents

Magnetfeldfühler

Info

Publication number
DE69808776D1
DE69808776D1 DE69808776T DE69808776T DE69808776D1 DE 69808776 D1 DE69808776 D1 DE 69808776D1 DE 69808776 T DE69808776 T DE 69808776T DE 69808776 T DE69808776 T DE 69808776T DE 69808776 D1 DE69808776 D1 DE 69808776D1
Authority
DE
Germany
Prior art keywords
magnetic sensor
magnetic
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69808776T
Other languages
English (en)
Other versions
DE69808776T2 (de
Inventor
Hong Wan
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honeywell Inc
Original Assignee
Honeywell Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell Inc filed Critical Honeywell Inc
Publication of DE69808776D1 publication Critical patent/DE69808776D1/de
Application granted granted Critical
Publication of DE69808776T2 publication Critical patent/DE69808776T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09—Magnetoresistive devices
    • G01R33/093—Magnetoresistive devices using multilayer structures, e.g. giant magnetoresistance sensors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y25/00—Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09—Magnetoresistive devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09—Magnetoresistive devices
    • G01R33/096—Magnetoresistive devices anisotropic magnetoresistance sensors

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Measuring Magnetic Variables (AREA)
  • Hall/Mr Elements (AREA)
DE69808776T 1997-08-14 1998-08-14 Magnetfeldfühler Expired - Lifetime DE69808776T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/911,550 US5952825A (en) 1997-08-14 1997-08-14 Magnetic field sensing device having integral coils for producing magnetic fields
PCT/US1998/016922 WO1999009427A1 (en) 1997-08-14 1998-08-14 Magnetic field sensing device

Publications (2)

Publication Number Publication Date
DE69808776D1 true DE69808776D1 (de) 2002-11-21
DE69808776T2 DE69808776T2 (de) 2003-12-11

Family

ID=25430448

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69808776T Expired - Lifetime DE69808776T2 (de) 1997-08-14 1998-08-14 Magnetfeldfühler

Country Status (5)

Country Link
US (1) US5952825A (de)
EP (1) EP1004033B1 (de)
JP (1) JP5044070B2 (de)
DE (1) DE69808776T2 (de)
WO (1) WO1999009427A1 (de)

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US20020103430A1 (en) * 2001-01-29 2002-08-01 Hastings Roger N. Catheter navigation within an MR imaging device
DE10104116A1 (de) * 2001-01-31 2002-08-01 Philips Corp Intellectual Pty Anordnung zum Erfassen des Drehwinkels eines drehbaren Elements
US6756782B2 (en) * 2001-06-01 2004-06-29 Koninklijke Philips Electronics N.V. Magnetic field measuring sensor having a shunt resistor and method of regulating the sensor
JP2003008101A (ja) * 2001-06-20 2003-01-10 Ricoh Co Ltd トンネル磁気抵抗効果素子及びこの素子を用いた方位検知システム
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US6700371B2 (en) * 2001-09-05 2004-03-02 Honeywell International Inc. Three dimensional conductive strap for a magnetorestrictive sensor
US6717403B2 (en) 2001-09-06 2004-04-06 Honeywell International Inc. Method and system for improving the efficiency of the set and offset straps on a magnetic sensor
DE10149776B4 (de) * 2001-10-09 2006-06-29 Robert Bosch Gmbh Sensorvorrichtung zur Messung von Magnetfeldern und Herstellungsverfahren derselben
US7208940B2 (en) * 2001-11-15 2007-04-24 Honeywell International Inc. 360-Degree magnetoresistive rotary position sensor
US6667682B2 (en) * 2001-12-26 2003-12-23 Honeywell International Inc. System and method for using magneto-resistive sensors as dual purpose sensors
US7046117B2 (en) * 2002-01-15 2006-05-16 Honeywell International Inc. Integrated magnetic field strap for signal isolator
US7005958B2 (en) * 2002-06-14 2006-02-28 Honeywell International Inc. Dual axis magnetic sensor
US6750751B2 (en) 2002-08-01 2004-06-15 Honeywell International, Inc. Integrated magnetic signal isolator with feedback
US7259545B2 (en) * 2003-02-11 2007-08-21 Allegro Microsystems, Inc. Integrated sensor
US7016163B2 (en) * 2003-02-20 2006-03-21 Honeywell International Inc. Magnetic field sensor
US20050190507A1 (en) * 2004-03-01 2005-09-01 Peter Littlewood Magnetic field sensor
US7126330B2 (en) * 2004-06-03 2006-10-24 Honeywell International, Inc. Integrated three-dimensional magnetic sensing device and method to fabricate an integrated three-dimensional magnetic sensing device
FR2874703B1 (fr) * 2004-08-27 2007-02-09 Centre Nat Rech Scient Cnrse Capteur de champ magnetique et module elementaire incorporant ce capteur
US7777607B2 (en) * 2004-10-12 2010-08-17 Allegro Microsystems, Inc. Resistor having a predetermined temperature coefficient
US7271587B2 (en) * 2004-12-16 2007-09-18 Honeywell International Inc. High resolution and low power magnetometer using magnetoresistive sensors
US7154267B2 (en) 2005-01-07 2006-12-26 Honeywell International, Inc. Method and system for electronic compass calibration and verification
DE102005047413B8 (de) * 2005-02-23 2012-06-06 Infineon Technologies Ag Magnetfeldsensorelement und Verfahren zum Durchführen eines On-Wafer-Funktionstests, sowie Verfahren zur Herstellung von Magnetfeldsensorelementen und Verfahren zur Herstellung von Magnetfeldsensorelementen mit On-Wafer-Funktionstest
US7768083B2 (en) 2006-01-20 2010-08-03 Allegro Microsystems, Inc. Arrangements for an integrated sensor
US7388372B2 (en) * 2006-05-31 2008-06-17 Caterpillar Inc. Electrical system with magnetoresistive sensors
US7528592B2 (en) * 2006-05-31 2009-05-05 Caterpillar Inc. Magnetoresistive sensor for current sensing
CN101611327A (zh) * 2007-02-14 2009-12-23 Nxp股份有限公司 具有组合的反位线圈和补偿线圈的mr磁力计
CN101652671A (zh) * 2007-03-30 2010-02-17 Nxp股份有限公司 磁阻传感器
WO2008146184A2 (en) * 2007-05-29 2008-12-04 Nxp B.V. External magnetic field angle determination
DE102007041230B3 (de) * 2007-08-31 2009-04-09 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Kalibrierbarer mehrdimensionaler magnetischer Punktsensor sowie entsprechendes Verfahren und Computerprogramm dafür
US20090072823A1 (en) * 2007-09-17 2009-03-19 Honeywell International Inc. 3d integrated compass package
US7795862B2 (en) 2007-10-22 2010-09-14 Allegro Microsystems, Inc. Matching of GMR sensors in a bridge
US20090152356A1 (en) * 2007-12-14 2009-06-18 Honeywell International Inc. Non-contact magnetic pattern recognition sensor
US8253414B2 (en) * 2007-12-27 2012-08-28 Infineon Technologies Ag Integrated circuit including a magnetic field sensitive element and a coil
JP2009180608A (ja) * 2008-01-30 2009-08-13 U R D:Kk Ｉｃチップ形電流センサ
US8242776B2 (en) 2008-03-26 2012-08-14 Everspin Technologies, Inc. Magnetic sensor design for suppression of barkhausen noise
US7816905B2 (en) * 2008-06-02 2010-10-19 Allegro Microsystems, Inc. Arrangements for a current sensing circuit and integrated current sensor
US20090315554A1 (en) * 2008-06-20 2009-12-24 Honeywell International Inc. Integrated three-dimensional magnetic sensing device and method to fabricate an integrated three-dimensional magnetic sensing device
US20100113918A1 (en) * 2008-10-31 2010-05-06 General Electric Company System and method for tracking object
DE102009028956A1 (de) * 2009-08-28 2011-03-03 Robert Bosch Gmbh Magnetfeldsensor
US20110169488A1 (en) * 2010-01-08 2011-07-14 Everspin Technologies, Inc. Method and structure for testing and calibrating magnetic field sensing device
JP5594915B2 (ja) * 2010-03-12 2014-09-24 アルプス・グリーンデバイス株式会社 電流センサ
US8525514B2 (en) * 2010-03-19 2013-09-03 Memsic, Inc. Magnetometer
US8698490B2 (en) * 2010-12-15 2014-04-15 Infineon Technologies Ag Magnetoresistive angle sensors having conductors arranged in multiple planes
IT1403434B1 (it) * 2010-12-27 2013-10-17 St Microelectronics Srl Sensore di campo magnetico avente elementi magnetoresistivi anisotropi, con disposizione perfezionata di relativi elementi di magnetizzazione
IT1403433B1 (it) 2010-12-27 2013-10-17 St Microelectronics Srl Sensore magnetoresistivo con capacita' parassita ridotta, e metodo
EP2671091B1 (de) * 2011-02-03 2014-12-24 Sensitec GmbH Magnetfeldsensor
US20140347047A1 (en) * 2011-02-22 2014-11-27 Voltafield Technology Corporation Magnetoresistive sensor
CN102540113B (zh) 2011-11-11 2014-07-02 江苏多维科技有限公司 磁场传感器
US20130207645A1 (en) * 2012-02-09 2013-08-15 Xiao-Qiao KONG Magnetic sensor apparatus
US20130207646A1 (en) * 2012-02-09 2013-08-15 Xiao-Qiao KONG Magnetic sensor apparatus
US20130207644A1 (en) * 2012-02-09 2013-08-15 Xiao-Qiao KONG Magnetic sensor apparatus
US9279865B2 (en) 2012-05-09 2016-03-08 Everspin Technologies, Inc. Method and structure for testing and calibrating three axis magnetic field sensing devices
US9372242B2 (en) * 2012-05-11 2016-06-21 Memsic, Inc. Magnetometer with angled set/reset coil
ITTO20120614A1 (it) 2012-07-11 2014-01-12 St Microelectronics Srl Sensore magnetoresistivo integrato multistrato e relativo metodo di fabbricazione
TWI468716B (zh) * 2012-11-12 2015-01-11 Voltafield Technology Corp 整合式磁阻感測裝置
US9134385B2 (en) 2013-05-09 2015-09-15 Honeywell International Inc. Magnetic-field sensing device
JP6228663B2 (ja) * 2014-04-07 2017-11-08 アルプス電気株式会社 電流検知装置
JP2016001118A (ja) * 2014-06-11 2016-01-07 三菱電機株式会社 電流検出装置、磁界検出装置及びこれらの方法
JP6203409B2 (ja) * 2014-08-07 2017-09-27 アルプス電気株式会社 磁気センサーおよびその磁気センサーを備えた電流センサー
CN104280700B (zh) * 2014-09-28 2017-09-08 江苏多维科技有限公司 一种单芯片差分自由层推挽式磁场传感器电桥及制备方法
CN106125020B (zh) * 2015-05-08 2019-02-26 爱盛科技股份有限公司 磁场感测装置及磁场感测模块
RU2617454C1 (ru) * 2016-02-17 2017-04-25 Российская Федерация, от имени которой выступает Государственная корпорация по атомной энергии "Росатом" Способ изготовления магниторезистивного датчика
US10782153B2 (en) 2016-03-08 2020-09-22 Analog Devices Global Multiturn sensor arrangement and readout
CN205581283U (zh) * 2016-04-11 2016-09-14 江苏多维科技有限公司 一种具有初始化线圈封装的磁电阻传感器
CN105911490B (zh) * 2016-05-12 2018-06-15 美新半导体（无锡）有限公司 具有自检重置导线的磁场传感器
US10564228B2 (en) 2017-01-27 2020-02-18 Mitsubishi Electric Corporation Magnetoresistive effect element unit and magnetoresistive effect element device
CN107015171B (zh) * 2017-03-24 2023-10-24 江苏多维科技有限公司 一种具有磁滞线圈的磁传感器封装结构
US10816615B2 (en) 2017-05-19 2020-10-27 Asahi Kasei Microdevices Corporation Magnetic sensor
US10935612B2 (en) 2018-08-20 2021-03-02 Allegro Microsystems, Llc Current sensor having multiple sensitivity ranges
JP6993956B2 (ja) * 2018-12-12 2022-01-14 Tdk株式会社 磁気センサ装置
CN111586960B (zh) 2019-02-15 2021-09-14 华为技术有限公司 一种抗干扰电路板及终端
US11460521B2 (en) 2019-03-18 2022-10-04 Analog Devices International Unlimited Company Multiturn sensor arrangement
RU2738998C1 (ru) * 2019-07-10 2020-12-21 Общество с ограниченной ответственностью "Корпорация "Аксион" (ООО "Корпорация "Аксион") Магниторезистивный датчик магнитного поля
CN110780243A (zh) * 2019-11-19 2020-02-11 中国电子科技集团公司第四十九研究所 用于水下导航的高灵敏度微型磁传感单元、含有该传感单元的传感器及传感单元的制备方法
JP2021148625A (ja) 2020-03-19 2021-09-27 Tdk株式会社 磁気センサ装置
US11187764B2 (en) 2020-03-20 2021-11-30 Allegro Microsystems, Llc Layout of magnetoresistance element
US11567108B2 (en) 2021-03-31 2023-01-31 Allegro Microsystems, Llc Multi-gain channels for multi-range sensor
CN113257511A (zh) * 2021-05-11 2021-08-13 电子科技大学 一种Set/Reset线圈及其设计方法
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Also Published As

Publication number Publication date
WO1999009427A1 (en) 1999-02-25
US5952825A (en) 1999-09-14
DE69808776T2 (de) 2003-12-11
JP5044070B2 (ja) 2012-10-10
JP2001516031A (ja) 2001-09-25
EP1004033A1 (de) 2000-05-31
EP1004033B1 (de) 2002-10-16

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