DE69807876D1 - Kapazitiver druckwandler mit verbessertem elektrodenträger - Google Patents

Kapazitiver druckwandler mit verbessertem elektrodenträger

Info

Publication number
DE69807876D1
DE69807876D1 DE69807876T DE69807876T DE69807876D1 DE 69807876 D1 DE69807876 D1 DE 69807876D1 DE 69807876 T DE69807876 T DE 69807876T DE 69807876 T DE69807876 T DE 69807876T DE 69807876 D1 DE69807876 D1 DE 69807876D1
Authority
DE
Germany
Prior art keywords
pressure transducer
capacitive pressure
electrode carrier
improved electrode
improved
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69807876T
Other languages
English (en)
Other versions
DE69807876T2 (de
Inventor
A Denner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MKS Instruments Inc
Original Assignee
MKS Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MKS Instruments Inc filed Critical MKS Instruments Inc
Publication of DE69807876D1 publication Critical patent/DE69807876D1/de
Application granted granted Critical
Publication of DE69807876T2 publication Critical patent/DE69807876T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0618—Overload protection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
DE69807876T 1997-06-20 1998-06-04 Kapazitiver druckwandler mit verbessertem elektrodenträger Expired - Lifetime DE69807876T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/880,035 US5911162A (en) 1997-06-20 1997-06-20 Capacitive pressure transducer with improved electrode support
PCT/US1998/011645 WO1998059228A2 (en) 1997-06-20 1998-06-04 Capacitive pressure transducer with improved electrode support

Publications (2)

Publication Number Publication Date
DE69807876D1 true DE69807876D1 (de) 2002-10-17
DE69807876T2 DE69807876T2 (de) 2003-05-28

Family

ID=25375383

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69807876T Expired - Lifetime DE69807876T2 (de) 1997-06-20 1998-06-04 Kapazitiver druckwandler mit verbessertem elektrodenträger

Country Status (7)

Country Link
US (1) US5911162A (de)
EP (1) EP0990127B1 (de)
JP (1) JP4264672B2 (de)
KR (1) KR100423596B1 (de)
DE (1) DE69807876T2 (de)
TW (1) TW392067B (de)
WO (1) WO1998059228A2 (de)

Families Citing this family (70)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040099061A1 (en) * 1997-12-22 2004-05-27 Mks Instruments Pressure sensor for detecting small pressure differences and low pressures
US6568274B1 (en) * 1998-02-04 2003-05-27 Mks Instruments, Inc. Capacitive based pressure sensor design
US6508131B2 (en) 1999-05-14 2003-01-21 Rosemount Inc. Process sensor module having a single ungrounded input/output conductor
US6295875B1 (en) 1999-05-14 2001-10-02 Rosemount Inc. Process pressure measurement devices with improved error compensation
US6578427B1 (en) * 1999-06-15 2003-06-17 Envec Mess- Und Regeltechnik Gmbh + Co. Capacitive ceramic relative-pressure sensor
US6105436A (en) * 1999-07-23 2000-08-22 Mks Instruments, Inc. Capacitive pressure transducer with improved electrode support
US6532834B1 (en) * 1999-08-06 2003-03-18 Setra Systems, Inc. Capacitive pressure sensor having encapsulated resonating components
US6782754B1 (en) 2000-07-07 2004-08-31 Rosemount, Inc. Pressure transmitter for clean environments
US6772640B1 (en) 2000-10-10 2004-08-10 Mks Instruments, Inc. Multi-temperature heater for use with pressure transducers
FR2818676B1 (fr) * 2000-12-27 2003-03-07 Freyssinet Int Stup Procede de demontage d'un cable de precontrainte et dispositif pour la mise en oeuvre
US6612176B2 (en) * 2000-12-28 2003-09-02 Mks Instruments, Inc. Pressure transducer assembly with thermal shield
US6516672B2 (en) 2001-05-21 2003-02-11 Rosemount Inc. Sigma-delta analog to digital converter for capacitive pressure sensor and process transmitter
US20030121332A1 (en) * 2001-12-21 2003-07-03 Mathew Santhi E. Pressure transducer with dual slope output
US7252011B2 (en) 2002-03-11 2007-08-07 Mks Instruments, Inc. Surface area deposition trap
US6839546B2 (en) 2002-04-22 2005-01-04 Rosemount Inc. Process transmitter with wireless communication link
US6837112B2 (en) * 2003-03-22 2005-01-04 Stec Inc. Capacitance manometer having a relatively thick flush diaphragm under tension to provide low hysteresis
US6993973B2 (en) * 2003-05-16 2006-02-07 Mks Instruments, Inc. Contaminant deposition control baffle for a capacitive pressure transducer
US8145180B2 (en) 2004-05-21 2012-03-27 Rosemount Inc. Power generation for process devices
US8787848B2 (en) 2004-06-28 2014-07-22 Rosemount Inc. RF adapter for field device with low voltage intrinsic safety clamping
US8160535B2 (en) * 2004-06-28 2012-04-17 Rosemount Inc. RF adapter for field device
US7262693B2 (en) * 2004-06-28 2007-08-28 Rosemount Inc. Process field device with radio frequency communication
US7347099B2 (en) * 2004-07-16 2008-03-25 Rosemount Inc. Pressure transducer with external heater
US7201057B2 (en) * 2004-09-30 2007-04-10 Mks Instruments, Inc. High-temperature reduced size manometer
US7141447B2 (en) * 2004-10-07 2006-11-28 Mks Instruments, Inc. Method of forming a seal between a housing and a diaphragm of a capacitance sensor
US7137301B2 (en) * 2004-10-07 2006-11-21 Mks Instruments, Inc. Method and apparatus for forming a reference pressure within a chamber of a capacitance sensor
US7240560B2 (en) * 2004-10-18 2007-07-10 Silverbrook Research Pty Ltd Pressure sensor with remote power source
US7093494B2 (en) * 2004-10-18 2006-08-22 Silverbrook Research Pty Ltd Micro-electromechanical pressure sensor
US7159467B2 (en) * 2004-10-18 2007-01-09 Silverbrook Research Pty Ltd Pressure sensor with conductive ceramic membrane
US7234357B2 (en) * 2004-10-18 2007-06-26 Silverbrook Research Pty Ltd Wafer bonded pressure sensor
US7194901B2 (en) * 2004-10-18 2007-03-27 Silverbrook Research Pty Ltd Pressure sensor with apertured membrane guard
US7143652B2 (en) * 2004-10-18 2006-12-05 Silverbrook Research Pty Ltd Pressure sensor for high acceleration environment
US7089798B2 (en) * 2004-10-18 2006-08-15 Silverbrook Research Pty Ltd Pressure sensor with thin membrane
US7680460B2 (en) * 2005-01-03 2010-03-16 Rosemount Inc. Wireless process field device diagnostics
US7334484B2 (en) * 2005-05-27 2008-02-26 Rosemount Inc. Line pressure measurement using differential pressure sensor
EP1896910A1 (de) 2005-06-27 2008-03-12 Rosemount, Inc. Feldgerät mit hochfrequenzkommunikation mit dynamisch einstellbarem energieverbrauch
US7124640B1 (en) 2005-07-13 2006-10-24 Mks Instruments, Inc. Thermal mounting plate for heated pressure transducer
US7379792B2 (en) * 2005-09-29 2008-05-27 Rosemount Inc. Pressure transmitter with acoustic pressure sensor
US7679033B2 (en) * 2005-09-29 2010-03-16 Rosemount Inc. Process field device temperature control
US7748277B2 (en) * 2005-10-19 2010-07-06 Cardiomems, Inc. Hermetic chamber with electrical feedthroughs
US7415886B2 (en) * 2005-12-20 2008-08-26 Rosemount Inc. Pressure sensor with deflectable diaphragm
US7308830B2 (en) * 2006-01-26 2007-12-18 Rosemount Inc. Pressure sensor fault detection
US8898036B2 (en) 2007-08-06 2014-11-25 Rosemount Inc. Process variable transmitter with acceleration sensor
US7484416B1 (en) 2007-10-15 2009-02-03 Rosemount Inc. Process control transmitter with vibration sensor
US7779698B2 (en) * 2007-11-08 2010-08-24 Rosemount Inc. Pressure sensor
US8694060B2 (en) 2008-06-17 2014-04-08 Rosemount Inc. Form factor and electromagnetic interference protection for process device wireless adapters
US8929948B2 (en) 2008-06-17 2015-01-06 Rosemount Inc. Wireless communication adapter for field devices
WO2009154756A1 (en) 2008-06-17 2009-12-23 Rosemount Inc. Rf adapter for field device with variable voltage drop
CA2726534C (en) 2008-06-17 2016-03-22 Rosemount Inc. Rf adapter for field device with loop current bypass
US8327713B2 (en) 2008-12-03 2012-12-11 Rosemount Inc. Method and apparatus for pressure measurement using magnetic property
US7870791B2 (en) * 2008-12-03 2011-01-18 Rosemount Inc. Method and apparatus for pressure measurement using quartz crystal
US7954383B2 (en) * 2008-12-03 2011-06-07 Rosemount Inc. Method and apparatus for pressure measurement using fill tube
US9674976B2 (en) * 2009-06-16 2017-06-06 Rosemount Inc. Wireless process communication adapter with improved encapsulation
US8626087B2 (en) 2009-06-16 2014-01-07 Rosemount Inc. Wire harness for field devices used in a hazardous locations
FR2947629B1 (fr) * 2009-07-06 2012-03-30 Tronic S Microsystems Dispositif de mesure de pression et son procede de fabrication
SG182731A1 (en) 2010-02-02 2012-08-30 Mks Instr Inc Capacitive pressure sensor
US8429978B2 (en) * 2010-03-30 2013-04-30 Rosemount Inc. Resonant frequency based pressure sensor
US8234927B2 (en) 2010-06-08 2012-08-07 Rosemount Inc. Differential pressure sensor with line pressure measurement
US8132464B2 (en) 2010-07-12 2012-03-13 Rosemount Inc. Differential pressure transmitter with complimentary dual absolute pressure sensors
US10761524B2 (en) 2010-08-12 2020-09-01 Rosemount Inc. Wireless adapter with process diagnostics
CN103998909B (zh) 2011-09-29 2016-04-27 Mks仪器公司 具有改善的电极结构的电容式压力传感器
WO2013055882A1 (en) 2011-10-11 2013-04-18 Mks Instruments, Inc. Pressure sensor
US9310794B2 (en) 2011-10-27 2016-04-12 Rosemount Inc. Power supply for industrial process field device
US8752433B2 (en) 2012-06-19 2014-06-17 Rosemount Inc. Differential pressure transmitter with pressure sensor
US9048901B2 (en) 2013-03-15 2015-06-02 Rosemount Inc. Wireless interface within transmitter
DE102014200500A1 (de) * 2014-01-14 2015-07-16 Robert Bosch Gmbh Mikromechanische Drucksensorvorrichtung und entsprechendes Herstellungsverfahren
US9383283B2 (en) * 2014-01-16 2016-07-05 Sensata Technologies, Inc. Pressure transducer with capacitively coupled source electrode
DE102014012918B4 (de) 2014-09-05 2019-01-03 Heinz Plöchinger Dual-Kapazitäts-Manometer mit kleinem Messvolumen
US11287342B2 (en) 2020-03-20 2022-03-29 Mks Instruments, Inc. Capacitance manometer with improved baffle for improved detection accuracy
DE102022102437A1 (de) 2022-02-02 2023-08-03 Heinz Plöchinger Korrekturverfahren für Dual-Kapazitäts-Manometer
US11467051B1 (en) 2022-04-11 2022-10-11 Heinz Plöchinger Method for correcting a dual capacitance pressure sensor

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3318153A (en) * 1962-12-04 1967-05-09 Rosemount Eng Co Ltd Diode loop capacitor comparative circuit including a pair of transformer windings coupled in phase
DE1282302B (de) * 1964-03-11 1968-11-07 Micromatic Hone Corp Kapazitativer Messumformer
US3619742A (en) * 1970-05-21 1971-11-09 Rosemount Eng Co Ltd Shielded capacitance pressure sensor
SE412956B (sv) * 1974-04-04 1980-03-24 Rosemount Inc Kapacitiv avkenningsanordning
US4084438A (en) * 1976-03-29 1978-04-18 Setra Systems, Inc. Capacitive pressure sensing device
US4168518A (en) * 1977-05-10 1979-09-18 Lee Shih Y Capacitor transducer
JPS5831855B2 (ja) * 1977-06-22 1983-07-08 富士電機株式会社 圧力測定装置の製造方法
US4136603A (en) * 1977-11-14 1979-01-30 The Foxboro Company Diaphragm assembly
US4322775A (en) * 1979-10-29 1982-03-30 Delatorre Leroy C Capacitive pressure sensor
US4434203A (en) * 1980-10-27 1984-02-28 Setra Systems, Inc. Diaphragm
US4358814A (en) * 1980-10-27 1982-11-09 Setra Systems, Inc. Capacitive pressure sensor
GB2188155B (en) * 1986-03-21 1990-01-10 Furness Controls Ltd Pressure transducer
US4735090A (en) * 1986-11-28 1988-04-05 Honeywell Inc. Flange mounted pressure transmitter
US4785669A (en) * 1987-05-18 1988-11-22 Mks Instruments, Inc. Absolute capacitance manometers
US4823603A (en) * 1988-05-03 1989-04-25 Vacuum General, Inc. Capacitance manometer having stress relief for fixed electrode
JPH0227541U (de) * 1988-08-11 1990-02-22
US4977480A (en) * 1988-09-14 1990-12-11 Fuji Koki Mfg. Co., Ltd. Variable-capacitance type sensor and variable-capacitance type sensor system using the same
US5020377A (en) * 1990-01-23 1991-06-04 Kavlico Corporation Low pressure transducer using metal foil diaphragm
JPH04204339A (ja) * 1990-11-30 1992-07-24 Sumitomo Electric Ind Ltd 静電容量式圧力検知装置
US5150275A (en) * 1991-07-01 1992-09-22 Setra Systems, Inc. Capacitive pressure sensor
US5155653A (en) * 1991-08-14 1992-10-13 Maclean-Fogg Company Capacitive pressure sensor
US5499533A (en) * 1992-08-26 1996-03-19 Miller; Mark Downhole pressure gauge converter
US5442962A (en) * 1993-08-20 1995-08-22 Setra Systems, Inc. Capacitive pressure sensor having a pedestal supported electrode
JPH0943083A (ja) * 1995-08-02 1997-02-14 Omron Corp 静電容量型圧力センサ及びそれを用いた血圧計，圧力測定装置並びにガスメータ

Also Published As

Publication number Publication date
US5911162A (en) 1999-06-08
JP4264672B2 (ja) 2009-05-20
KR20010013934A (ko) 2001-02-26
TW392067B (en) 2000-06-01
EP0990127B1 (de) 2002-09-11
EP0990127A2 (de) 2000-04-05
WO1998059228A2 (en) 1998-12-30
DE69807876T2 (de) 2003-05-28
KR100423596B1 (ko) 2004-03-22
JP2002505749A (ja) 2002-02-19
WO1998059228A3 (en) 1999-03-18

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition