DE60006126D1 - Kapazitiver druckwandler mit verbessertem elektrodensitz - Google Patents

Kapazitiver druckwandler mit verbessertem elektrodensitz

Info

Publication number
DE60006126D1
DE60006126D1 DE60006126T DE60006126T DE60006126D1 DE 60006126 D1 DE60006126 D1 DE 60006126D1 DE 60006126 T DE60006126 T DE 60006126T DE 60006126 T DE60006126 T DE 60006126T DE 60006126 D1 DE60006126 D1 DE 60006126D1
Authority
DE
Germany
Prior art keywords
pressure converter
capacitive pressure
electrode seat
improved electrode
seat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60006126T
Other languages
English (en)
Other versions
DE60006126T2 (de
Inventor
Jeffrey Lischer
D Blankenship
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MKS Instruments Inc
Original Assignee
MKS Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MKS Instruments Inc filed Critical MKS Instruments Inc
Application granted granted Critical
Publication of DE60006126D1 publication Critical patent/DE60006126D1/de
Publication of DE60006126T2 publication Critical patent/DE60006126T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/04—Means for compensating for effects of changes of temperature, i.e. other than electric compensation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
DE60006126T 1999-07-23 2000-07-14 Kapazitiver druckwandler mit verbessertem elektrodensitz Expired - Lifetime DE60006126T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US360308 1999-07-23
US09/360,308 US6105436A (en) 1999-07-23 1999-07-23 Capacitive pressure transducer with improved electrode support
PCT/US2000/019177 WO2001007883A1 (en) 1999-07-23 2000-07-14 Capacitive pressure transducer with improved electrode support

Publications (2)

Publication Number Publication Date
DE60006126D1 true DE60006126D1 (de) 2003-11-27
DE60006126T2 DE60006126T2 (de) 2004-07-22

Family

ID=23417454

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60006126T Expired - Lifetime DE60006126T2 (de) 1999-07-23 2000-07-14 Kapazitiver druckwandler mit verbessertem elektrodensitz

Country Status (5)

Country Link
US (1) US6105436A (de)
EP (1) EP1200810B1 (de)
JP (1) JP4880154B2 (de)
DE (1) DE60006126T2 (de)
WO (1) WO2001007883A1 (de)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6772640B1 (en) 2000-10-10 2004-08-10 Mks Instruments, Inc. Multi-temperature heater for use with pressure transducers
FR2818676B1 (fr) * 2000-12-27 2003-03-07 Freyssinet Int Stup Procede de demontage d'un cable de precontrainte et dispositif pour la mise en oeuvre
US7252011B2 (en) 2002-03-11 2007-08-07 Mks Instruments, Inc. Surface area deposition trap
US6722205B2 (en) * 2002-06-24 2004-04-20 Honeywell International, Inc. Unitary pressure sensor housing and assembly
US6837111B2 (en) * 2002-06-24 2005-01-04 Mykrolis Corporation Variable capacitance measuring device
US7000482B2 (en) * 2002-06-24 2006-02-21 Mykrolis Corporation Variable capacitance measuring device
DE10243515A1 (de) * 2002-09-19 2004-04-01 Robert Bosch Gmbh Sensor
US6993973B2 (en) * 2003-05-16 2006-02-07 Mks Instruments, Inc. Contaminant deposition control baffle for a capacitive pressure transducer
US7272976B2 (en) * 2004-03-30 2007-09-25 Asml Holdings N.V. Pressure sensor
US7204150B2 (en) * 2005-01-14 2007-04-17 Mks Instruments, Inc. Turbo sump for use with capacitive pressure sensor
US7000479B1 (en) 2005-05-02 2006-02-21 Mks Instruments, Inc. Heated pressure transducer
US7124640B1 (en) 2005-07-13 2006-10-24 Mks Instruments, Inc. Thermal mounting plate for heated pressure transducer
US20090015269A1 (en) * 2007-07-13 2009-01-15 Pinto Gino A Stray Capacitance Compensation for a Capacitive Sensor
WO2011097249A1 (en) 2010-02-02 2011-08-11 Mks Instruments, Inc. Capacitive pressure sensor
US8561471B2 (en) 2010-02-02 2013-10-22 Mks Instruments, Inc. Capacitive pressure sensor with improved electrode structure
EP2761265B1 (de) * 2011-09-29 2019-11-06 MKS Instruments, Inc. Kapazitiver drucksensor mitverbesserter elektrodenstruktur.
US8887575B2 (en) 2011-10-11 2014-11-18 Mks Instruments, Inc. Pressure sensor
JP6059641B2 (ja) * 2013-11-25 2017-01-11 株式会社堀場エステック 静電容量型圧力センサ
JP6059642B2 (ja) * 2013-11-25 2017-01-11 株式会社堀場エステック 静電容量型圧力センサ
WO2015076413A1 (ja) 2013-11-25 2015-05-28 株式会社堀場エステック 静電容量型圧力センサ
WO2015076414A1 (ja) 2013-11-25 2015-05-28 株式会社堀場エステック 静電容量型圧力センサ
CN105092110A (zh) * 2014-05-06 2015-11-25 无锡华润上华半导体有限公司 压力传感器及其制作方法
CN110879111B (zh) * 2019-11-27 2021-07-27 中国科学院微电子研究所 柔性电极支撑结构
CN110926662B (zh) * 2019-11-29 2022-02-08 中国科学院微电子研究所 一种薄膜式电容传感器
CN110987281B (zh) * 2019-11-29 2022-06-07 中国科学院微电子研究所 环形支撑结构及应用其的陶瓷电容式压力传感器
US11287342B2 (en) 2020-03-20 2022-03-29 Mks Instruments, Inc. Capacitance manometer with improved baffle for improved detection accuracy

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4168517A (en) * 1977-11-10 1979-09-18 Lee Shih Y Capacitive pressure transducer
US4357834A (en) * 1980-09-03 1982-11-09 Hokushin Electric Works, Ltd. Displacement converter
US4433580A (en) * 1982-07-22 1984-02-28 Tward 2001 Limited Pressure transducer
US4499773A (en) * 1983-04-28 1985-02-19 Dresser Industries, Inc. Variable capacitance pressure transducer
US4572204A (en) * 1984-03-21 1986-02-25 Hewlett-Packard Company Pressure dome with compliant chamber
JPH01201103A (ja) * 1988-02-05 1989-08-14 Nekushii Kenkyusho:Kk 接触検出装置
US4823603A (en) * 1988-05-03 1989-04-25 Vacuum General, Inc. Capacitance manometer having stress relief for fixed electrode
US4977480A (en) * 1988-09-14 1990-12-11 Fuji Koki Mfg. Co., Ltd. Variable-capacitance type sensor and variable-capacitance type sensor system using the same
US5155653A (en) * 1991-08-14 1992-10-13 Maclean-Fogg Company Capacitive pressure sensor
JPH10170540A (ja) * 1996-12-13 1998-06-26 Miyota Co Ltd 加速度センサ
US5911162A (en) * 1997-06-20 1999-06-08 Mks Instruments, Inc. Capacitive pressure transducer with improved electrode support

Also Published As

Publication number Publication date
EP1200810B1 (de) 2003-10-22
JP2003505688A (ja) 2003-02-12
US6105436A (en) 2000-08-22
EP1200810A1 (de) 2002-05-02
DE60006126T2 (de) 2004-07-22
JP4880154B2 (ja) 2012-02-22
WO2001007883A1 (en) 2001-02-01

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Legal Events

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