DE69803503T2 - Membranventil - Google Patents

Membranventil

Info

Publication number
DE69803503T2
DE69803503T2 DE69803503T DE69803503T DE69803503T2 DE 69803503 T2 DE69803503 T2 DE 69803503T2 DE 69803503 T DE69803503 T DE 69803503T DE 69803503 T DE69803503 T DE 69803503T DE 69803503 T2 DE69803503 T2 DE 69803503T2
Authority
DE
Germany
Prior art keywords
diaphragm valve
diaphragm
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69803503T
Other languages
English (en)
Other versions
DE69803503D1 (de
Inventor
Pierre Navratil
Alain Gotas
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Qualiflow S A
Original Assignee
Qualiflow S A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Qualiflow S A filed Critical Qualiflow S A
Publication of DE69803503D1 publication Critical patent/DE69803503D1/de
Application granted granted Critical
Publication of DE69803503T2 publication Critical patent/DE69803503T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
DE69803503T 1997-02-17 1998-02-16 Membranventil Expired - Fee Related DE69803503T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9701933A FR2759759B1 (fr) 1997-02-17 1997-02-17 Dispositif d'obturation pour vanne a membrane

Publications (2)

Publication Number Publication Date
DE69803503D1 DE69803503D1 (de) 2002-03-14
DE69803503T2 true DE69803503T2 (de) 2002-08-14

Family

ID=9503899

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69803503T Expired - Fee Related DE69803503T2 (de) 1997-02-17 1998-02-16 Membranventil

Country Status (4)

Country Link
US (1) US5967492A (de)
EP (1) EP0864789B1 (de)
DE (1) DE69803503T2 (de)
FR (1) FR2759759B1 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4119275B2 (ja) * 2003-02-18 2008-07-16 忠弘 大見 真空排気系用のダイヤフラム弁
US20070045587A1 (en) * 2003-04-14 2007-03-01 Terrence Kolenc Diaphragm valve seat
US7090112B2 (en) * 2003-08-29 2006-08-15 The Boeing Company Method and sealant for joints
US20050109973A1 (en) * 2003-11-21 2005-05-26 Glime William H. Valve diaphragm
US7243903B2 (en) * 2005-06-22 2007-07-17 Wincek Christopher P Valve diaphragm with a compression restraining ring, and valve including same
CN101405528B (zh) * 2006-03-15 2011-12-14 诺格伦有限责任公司 隔膜阀及用于弹性加载隔膜阀的方法
US20090114873A1 (en) * 2007-11-05 2009-05-07 Richard Anagnos Diaphragm for use with control valves
JP6995047B2 (ja) * 2016-08-25 2022-01-14 株式会社キッツエスシーティー ダイヤフラムバルブと半導体製造装置用流量制御機器
USD926944S1 (en) * 2019-11-25 2021-08-03 Joseph P. Marcilese Fluid connector

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1274331A (fr) * 1960-07-15 1961-10-20 Robinet à diaphragme
JPH0251671A (ja) * 1988-08-12 1990-02-21 Motoyama Seisakusho:Kk メタルダイヤフラム弁
FR2677424A1 (fr) 1991-06-07 1992-12-11 Transfluid Sa Embase pour vanne dont l'obturateur est constitue par une membrane metallique.
FR2677425A1 (fr) 1991-06-07 1992-12-11 Transfluid Sa Membrane metallique pour vanne a membrane.
JP2927582B2 (ja) * 1991-08-26 1999-07-28 清原 まさ子 制御器
US5326078A (en) * 1993-07-08 1994-07-05 Benkan Corporation Metal diaphragm valve
JP3372091B2 (ja) * 1993-11-15 2003-01-27 株式会社本山製作所 ダイヤフラム弁構造

Also Published As

Publication number Publication date
DE69803503D1 (de) 2002-03-14
US5967492A (en) 1999-10-19
EP0864789A1 (de) 1998-09-16
FR2759759A1 (fr) 1998-08-21
EP0864789B1 (de) 2002-01-23
FR2759759B1 (fr) 1999-05-21

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee