DE69502805D1 - Membranventil - Google Patents

Membranventil

Info

Publication number
DE69502805D1
DE69502805D1 DE69502805T DE69502805T DE69502805D1 DE 69502805 D1 DE69502805 D1 DE 69502805D1 DE 69502805 T DE69502805 T DE 69502805T DE 69502805 T DE69502805 T DE 69502805T DE 69502805 D1 DE69502805 D1 DE 69502805D1
Authority
DE
Germany
Prior art keywords
diaphragm valve
diaphragm
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69502805T
Other languages
English (en)
Other versions
DE69502805T2 (de
Inventor
Kazuhiro Yoshikawa
Tetsuya Kojima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujikin Inc
Original Assignee
Fujikin Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikin Inc filed Critical Fujikin Inc
Publication of DE69502805D1 publication Critical patent/DE69502805D1/de
Application granted granted Critical
Publication of DE69502805T2 publication Critical patent/DE69502805T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K41/00—Spindle sealings
    • F16K41/10—Spindle sealings with diaphragm, e.g. shaped as bellows or tube
    • F16K41/12—Spindle sealings with diaphragm, e.g. shaped as bellows or tube with approximately flat diaphragm

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Diaphragms And Bellows (AREA)
  • Details Of Valves (AREA)
DE69502805T 1995-02-15 1995-09-26 Membranventil Expired - Fee Related DE69502805T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP02713595A JP3291151B2 (ja) 1995-02-15 1995-02-15 ダイヤフラム弁

Publications (2)

Publication Number Publication Date
DE69502805D1 true DE69502805D1 (de) 1998-07-09
DE69502805T2 DE69502805T2 (de) 1999-01-14

Family

ID=12212618

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69502805T Expired - Fee Related DE69502805T2 (de) 1995-02-15 1995-09-26 Membranventil

Country Status (8)

Country Link
US (1) US5669596A (de)
EP (1) EP0727603B1 (de)
JP (1) JP3291151B2 (de)
KR (1) KR0173532B1 (de)
CA (1) CA2159306C (de)
DE (1) DE69502805T2 (de)
IL (1) IL116719A (de)
TW (1) TW452033U (de)

Families Citing this family (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5771884A (en) * 1997-03-14 1998-06-30 Nellcor Puritan Bennett Incorporated Magnetic exhalation valve with compensation for temperature and patient airway pressure induced changes to the magnetic field
US5881997A (en) * 1997-11-24 1999-03-16 Fujikin Incorporated Metal diaphragm type valve
JP3764574B2 (ja) * 1997-12-10 2006-04-12 株式会社フジキン 金属ダイヤフラム型バルブ
FI104854B (fi) * 1998-09-17 2000-04-14 Valmet Automation Inc Läpivientikalvorakenne
JP2001173801A (ja) * 1999-10-08 2001-06-29 Neriki:Kk 容器弁
AT410362B (de) 2000-04-20 2003-04-25 Vaillant Gmbh Ventil
US6378548B1 (en) * 2000-05-31 2002-04-30 United Dominion Industries, Inc. Varying size diaphragm valve assemblies utilizing diaphragm of uniform size
JP3756135B2 (ja) * 2002-08-12 2006-03-15 アドバンス電気工業株式会社 ダイヤフラム弁構造
US7021330B2 (en) 2003-06-26 2006-04-04 Planar Systems, Inc. Diaphragm valve with reliability enhancements for atomic layer deposition
US6907897B2 (en) * 2003-06-26 2005-06-21 Planar Systems, Inc. Diaphragm valve for high-temperature precursor supply in atomic layer deposition
US6941963B2 (en) * 2003-06-26 2005-09-13 Planar Systems, Inc. High-speed diaphragm valve for atomic layer deposition
JP4340119B2 (ja) * 2003-10-02 2009-10-07 シーケーディ株式会社 薬液弁
EP1906066A1 (de) 2006-09-28 2008-04-02 Luxembourg Patent Company S.A. Ventil, insbesondere für Behälter von ultrahochreinem Gas
US20080216643A1 (en) * 2007-03-07 2008-09-11 Cano Jose R Biased actuator systems
US9874883B2 (en) 2009-07-02 2018-01-23 Tescom Corporation Diaphragm interface apparatus to improve a cycle life of a diaphragm
JP5486995B2 (ja) * 2010-04-08 2014-05-07 株式会社コガネイ 開閉弁
KR20130092981A (ko) * 2010-04-20 2013-08-21 카프니아, 인코포레이티드 일체형 밸브를 가진 압축 가스 실린더
JP5717180B2 (ja) * 2011-01-25 2015-05-13 株式会社フジキン 流体制御器
US9016307B2 (en) 2012-07-20 2015-04-28 Itt Manufacturing Enterprises Llc. Quick connect, post energized flanged joint for a diaphragm valve
US9157534B2 (en) 2012-07-20 2015-10-13 Itt Manufacturing Enterprises Llc. Two-stud diaphragm for diaphragm valves
US9322482B2 (en) 2012-07-20 2016-04-26 Itt Manufacturing Enterprises Llc. Temperature compensating flanged joint for a teflon diaphragm valve
KR102092807B1 (ko) 2013-02-01 2020-03-24 스와겔로크 컴패니 용접된 다이어프램 시트 캐리어를 갖는 다이어프램 밸브
US9454158B2 (en) 2013-03-15 2016-09-27 Bhushan Somani Real time diagnostics for flow controller systems and methods
US9371925B2 (en) 2013-07-30 2016-06-21 Tescom Corporation Fluid regulators having corrugated diaphragms
US9441745B2 (en) 2014-03-03 2016-09-13 Emerson Process Management Regulator Technologies, Inc. Apparatus to interface with a corrugated diaphragm
JP6193955B2 (ja) * 2014-12-11 2017-09-06 Ckd株式会社 流体制御バルブ
PL3271623T3 (pl) * 2015-03-19 2021-07-19 Gea Tuchenhagen Gmbh Zawór wzniosowy z urządzeniem do odsprzęgania obrotu
WO2016190875A1 (en) * 2015-05-28 2016-12-01 Emerson Process Management Regulator Technologies, Inc. Apparatus to interface with a corrugated diaphragm
EP3438510A4 (de) * 2016-03-28 2019-11-06 Eagle Industry Co., Ltd. Metallmembrandämpfer
JP6919659B2 (ja) * 2016-09-29 2021-08-18 日立金属株式会社 流量制御弁及びそれを用いた質量流量制御装置
US10983538B2 (en) 2017-02-27 2021-04-20 Flow Devices And Systems Inc. Systems and methods for flow sensor back pressure adjustment for mass flow controller
JP6914159B2 (ja) * 2017-09-26 2021-08-04 株式会社キッツエスシーティー ダイヤフラムバルブの組立方法とその組立構造並びにダイヤフラムバルブ
JP7061794B2 (ja) * 2018-08-10 2022-05-02 アドバンス電気工業株式会社 ダイヤフラム部材
WO2020066584A1 (ja) * 2018-09-25 2020-04-02 株式会社フジキン バルブ
JP7350342B2 (ja) * 2018-09-27 2023-09-26 株式会社フジキン バルブ、バルブの弁体ユニットの交換方法、および、バルブの組立方法
JP7324018B2 (ja) * 2019-03-19 2023-08-09 株式会社鷺宮製作所 溶接構造
TWI770615B (zh) * 2020-09-22 2022-07-11 和正豐科技股份有限公司 氟樹脂膜片閥

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR477869A (fr) * 1915-01-08 1915-11-12 Enrique Blasco Gelpi Dispositif constitué par un ou plusieurs diaphragmes spécialement métalliques, destinés à substituer ou remplacer les morceaux d'étoupe, les étoupières et les presse-étoupes dans les robinets
US2521891A (en) * 1944-03-28 1950-09-12 Jesse W Beams Valve
GB958810A (en) * 1960-08-05 1964-05-27 Nordiska Armaturfab Ab Improvements in or relating to valves for controlling fluid flow
US4231549A (en) * 1978-12-11 1980-11-04 Kerotest Manufacturing Corp. Valve stem and valve disc connection for a diaphragm valve
US4354666A (en) * 1980-06-12 1982-10-19 Kerotest Manufacturing Corp. High pressure packless metal diaphragm valve
US4671490A (en) * 1986-05-16 1987-06-09 Nupro Co. Diaphragm valve
US4750709A (en) * 1986-05-16 1988-06-14 Nupro Company Diaphragm valve
AT394626B (de) * 1990-05-17 1992-05-25 Balik Gmbh Membranventil

Also Published As

Publication number Publication date
TW452033U (en) 2001-08-21
IL116719A0 (en) 1996-05-14
CA2159306A1 (en) 1996-08-16
EP0727603A1 (de) 1996-08-21
US5669596A (en) 1997-09-23
JPH08219303A (ja) 1996-08-30
KR0173532B1 (ko) 1999-04-01
DE69502805T2 (de) 1999-01-14
IL116719A (en) 1998-12-27
JP3291151B2 (ja) 2002-06-10
CA2159306C (en) 1998-08-18
EP0727603B1 (de) 1998-06-03

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee