DE69803503D1 - Membranventil - Google Patents
MembranventilInfo
- Publication number
- DE69803503D1 DE69803503D1 DE69803503T DE69803503T DE69803503D1 DE 69803503 D1 DE69803503 D1 DE 69803503D1 DE 69803503 T DE69803503 T DE 69803503T DE 69803503 T DE69803503 T DE 69803503T DE 69803503 D1 DE69803503 D1 DE 69803503D1
- Authority
- DE
- Germany
- Prior art keywords
- diaphragm valve
- diaphragm
- valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
- F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
- F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Diaphragms And Bellows (AREA)
- Fluid-Driven Valves (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9701933A FR2759759B1 (fr) | 1997-02-17 | 1997-02-17 | Dispositif d'obturation pour vanne a membrane |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69803503D1 true DE69803503D1 (de) | 2002-03-14 |
DE69803503T2 DE69803503T2 (de) | 2002-08-14 |
Family
ID=9503899
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69803503T Expired - Fee Related DE69803503T2 (de) | 1997-02-17 | 1998-02-16 | Membranventil |
Country Status (4)
Country | Link |
---|---|
US (1) | US5967492A (de) |
EP (1) | EP0864789B1 (de) |
DE (1) | DE69803503T2 (de) |
FR (1) | FR2759759B1 (de) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4119275B2 (ja) * | 2003-02-18 | 2008-07-16 | 忠弘 大見 | 真空排気系用のダイヤフラム弁 |
KR20050114721A (ko) * | 2003-04-14 | 2005-12-06 | 스와겔로크 컴패니 | 다이어프램 밸브용 밸브 시트 |
US7090112B2 (en) * | 2003-08-29 | 2006-08-15 | The Boeing Company | Method and sealant for joints |
US20050109973A1 (en) * | 2003-11-21 | 2005-05-26 | Glime William H. | Valve diaphragm |
US7243903B2 (en) * | 2005-06-22 | 2007-07-17 | Wincek Christopher P | Valve diaphragm with a compression restraining ring, and valve including same |
MX2008011599A (es) * | 2006-03-15 | 2009-02-10 | Norgren Gmbh | Valvula de diafragma de una pieza de membrana doble. |
US20090114873A1 (en) * | 2007-11-05 | 2009-05-07 | Richard Anagnos | Diaphragm for use with control valves |
US11047490B2 (en) | 2016-08-25 | 2021-06-29 | Kitz Sct Corporation | Diaphragm valve and flow rate control device for semiconductor manufacturing apparatus |
USD926944S1 (en) * | 2019-11-25 | 2021-08-03 | Joseph P. Marcilese | Fluid connector |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR1274331A (fr) * | 1960-07-15 | 1961-10-20 | Robinet à diaphragme | |
JPH0251671A (ja) * | 1988-08-12 | 1990-02-21 | Motoyama Seisakusho:Kk | メタルダイヤフラム弁 |
FR2677425A1 (fr) * | 1991-06-07 | 1992-12-11 | Transfluid Sa | Membrane metallique pour vanne a membrane. |
FR2677424A1 (fr) | 1991-06-07 | 1992-12-11 | Transfluid Sa | Embase pour vanne dont l'obturateur est constitue par une membrane metallique. |
JP2927582B2 (ja) * | 1991-08-26 | 1999-07-28 | 清原 まさ子 | 制御器 |
US5326078A (en) * | 1993-07-08 | 1994-07-05 | Benkan Corporation | Metal diaphragm valve |
JP3372091B2 (ja) * | 1993-11-15 | 2003-01-27 | 株式会社本山製作所 | ダイヤフラム弁構造 |
-
1997
- 1997-02-17 FR FR9701933A patent/FR2759759B1/fr not_active Expired - Fee Related
-
1998
- 1998-02-16 DE DE69803503T patent/DE69803503T2/de not_active Expired - Fee Related
- 1998-02-16 EP EP98390004A patent/EP0864789B1/de not_active Expired - Lifetime
- 1998-02-17 US US09/024,645 patent/US5967492A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
FR2759759A1 (fr) | 1998-08-21 |
EP0864789A1 (de) | 1998-09-16 |
US5967492A (en) | 1999-10-19 |
DE69803503T2 (de) | 2002-08-14 |
FR2759759B1 (fr) | 1999-05-21 |
EP0864789B1 (de) | 2002-01-23 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |