DE69803335T2 - Herstellung von sub-lithographischen Strukturen - Google Patents

Herstellung von sub-lithographischen Strukturen

Info

Publication number
DE69803335T2
DE69803335T2 DE69803335T DE69803335T DE69803335T2 DE 69803335 T2 DE69803335 T2 DE 69803335T2 DE 69803335 T DE69803335 T DE 69803335T DE 69803335 T DE69803335 T DE 69803335T DE 69803335 T2 DE69803335 T2 DE 69803335T2
Authority
DE
Germany
Prior art keywords
sub
manufacture
lithographic structures
lithographic
structures
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69803335T
Other languages
English (en)
Other versions
DE69803335D1 (de
Inventor
Robert Ploessl
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Qimonda AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Application granted granted Critical
Publication of DE69803335D1 publication Critical patent/DE69803335D1/de
Publication of DE69803335T2 publication Critical patent/DE69803335T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
    • H01L21/76802—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics
    • H01L21/76816—Aspects relating to the layout of the pattern or to the size of vias or trenches
DE69803335T 1997-06-30 1998-05-29 Herstellung von sub-lithographischen Strukturen Expired - Lifetime DE69803335T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/884,732 US6051497A (en) 1997-06-30 1997-06-30 Formation of sub-groundrule features

Publications (2)

Publication Number Publication Date
DE69803335D1 DE69803335D1 (de) 2002-02-28
DE69803335T2 true DE69803335T2 (de) 2002-09-19

Family

ID=25385267

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69803335T Expired - Lifetime DE69803335T2 (de) 1997-06-30 1998-05-29 Herstellung von sub-lithographischen Strukturen

Country Status (8)

Country Link
US (1) US6051497A (de)
EP (1) EP0889516B1 (de)
JP (1) JPH1174273A (de)
KR (1) KR100536051B1 (de)
CN (1) CN1121718C (de)
DE (1) DE69803335T2 (de)
HK (1) HK1015544A1 (de)
TW (1) TW405200B (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6740573B2 (en) * 1995-02-17 2004-05-25 Micron Technology, Inc. Method for forming an integrated circuit interconnect using a dual poly process
US6162731A (en) * 1999-06-08 2000-12-19 United Silicon Incorporated Method of defining a conductive layer
KR100393945B1 (ko) * 2001-02-24 2003-08-06 이노스텍 (주) 금속 박막 저항체 소자의 제조 방법 및 이를 이용한 금속 박막 온도 센서의 제조 방법
TW559950B (en) * 2002-03-13 2003-11-01 Macronix Int Co Ltd Memory device and method of forming passivation film thereof

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5651855A (en) * 1992-07-28 1997-07-29 Micron Technology, Inc. Method of making self aligned contacts to silicon substrates during the manufacture of integrated circuits
US5328553A (en) * 1993-02-02 1994-07-12 Motorola Inc. Method for fabricating a semiconductor device having a planar surface
US5490634A (en) * 1993-02-10 1996-02-13 Michigan Biotechnology Institute Biological method for coal comminution
US5494857A (en) * 1993-07-28 1996-02-27 Digital Equipment Corporation Chemical mechanical planarization of shallow trenches in semiconductor substrates
US5661053A (en) * 1994-05-25 1997-08-26 Sandisk Corporation Method of making dense flash EEPROM cell array and peripheral supporting circuits formed in deposited field oxide with the use of spacers
US5506172A (en) * 1994-08-29 1996-04-09 Micron Technology, Inc. Semiconductor processing method of forming an electrical interconnection between an outer layer and an inner layer
JP3413697B2 (ja) * 1995-11-17 2003-06-03 ソニー株式会社 配線形成方法
US5639692A (en) * 1996-04-08 1997-06-17 Chartered Semiconductor Manufacturing Pte, Ltd. Non-etch back SOG process using a metal via stud
JPH1010716A (ja) * 1996-06-19 1998-01-16 Brother Ind Ltd 感光記録媒体及びそれを使用する画像形成装置
JPH10107161A (ja) * 1996-09-27 1998-04-24 Sony Corp 半導体装置及びその製造方法

Also Published As

Publication number Publication date
HK1015544A1 (en) 1999-10-15
CN1204151A (zh) 1999-01-06
KR19990007420A (ko) 1999-01-25
US6051497A (en) 2000-04-18
CN1121718C (zh) 2003-09-17
EP0889516A2 (de) 1999-01-07
TW405200B (en) 2000-09-11
DE69803335D1 (de) 2002-02-28
EP0889516A3 (de) 1999-10-13
JPH1174273A (ja) 1999-03-16
KR100536051B1 (ko) 2006-02-28
EP0889516B1 (de) 2002-01-02

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: QIMONDA AG, 81739 MUENCHEN, DE