DE69803147D1 - Pirani, bei dem nur das Widerstandsfühlerelement beheizbar ist - Google Patents

Pirani, bei dem nur das Widerstandsfühlerelement beheizbar ist

Info

Publication number
DE69803147D1
DE69803147D1 DE69803147T DE69803147T DE69803147D1 DE 69803147 D1 DE69803147 D1 DE 69803147D1 DE 69803147 T DE69803147 T DE 69803147T DE 69803147 T DE69803147 T DE 69803147T DE 69803147 D1 DE69803147 D1 DE 69803147D1
Authority
DE
Germany
Prior art keywords
pirani
heated
sensor element
resistance sensor
resistance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69803147T
Other languages
English (en)
Other versions
DE69803147T2 (de
Inventor
Daniel Granville Bills
Michael Dale Borenstein
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Azenta Inc
Original Assignee
Helix Technology Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Helix Technology Corp filed Critical Helix Technology Corp
Application granted granted Critical
Publication of DE69803147D1 publication Critical patent/DE69803147D1/de
Publication of DE69803147T2 publication Critical patent/DE69803147T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/10—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured
    • G01L21/12—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured measuring changes in electric resistance of measuring members, e.g. of filaments; Vacuum gauges of the Pirani type

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
DE69803147T 1997-07-21 1998-02-06 Pirani, bei dem nur das Widerstandsfühlerelement beheizbar ist Expired - Lifetime DE69803147T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/897,629 US6023979A (en) 1997-07-21 1997-07-21 Apparatus and methods for heat loss pressure measurement

Publications (2)

Publication Number Publication Date
DE69803147D1 true DE69803147D1 (de) 2002-02-21
DE69803147T2 DE69803147T2 (de) 2002-08-22

Family

ID=25408155

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69803147T Expired - Lifetime DE69803147T2 (de) 1997-07-21 1998-02-06 Pirani, bei dem nur das Widerstandsfühlerelement beheizbar ist

Country Status (4)

Country Link
US (2) US6023979A (de)
EP (1) EP0893677B1 (de)
JP (1) JP2839244B1 (de)
DE (1) DE69803147T2 (de)

Families Citing this family (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6938493B2 (en) 1997-07-21 2005-09-06 Helix Technology Corporation Apparatus and methods for heat loss pressure measurement
US6658941B1 (en) * 1997-07-21 2003-12-09 Helix Technology Corporation Apparatus and methods for heat loss pressure measurement
JP3555844B2 (ja) * 1999-04-09 2004-08-18 三宅 正二郎 摺動部材およびその製造方法
US20110301569A1 (en) 2001-01-20 2011-12-08 Gordon Wayne Dyer Methods and apparatus for the CVCS
KR100407815B1 (ko) * 2001-05-04 2003-12-01 학교법인 포항공과대학교 펠티어 효과를 이용한 열전도형 진공 게이지
US6969198B2 (en) * 2002-11-06 2005-11-29 Nissan Motor Co., Ltd. Low-friction sliding mechanism
JP3891433B2 (ja) * 2003-04-15 2007-03-14 日産自動車株式会社 燃料噴射弁
EP1479946B1 (de) * 2003-05-23 2012-12-19 Nissan Motor Co., Ltd. Kolben für eine Brennkraftmaschine
EP1482190B1 (de) * 2003-05-27 2012-12-05 Nissan Motor Company Limited Wälzkörper
JP2005008851A (ja) * 2003-05-29 2005-01-13 Nissan Motor Co Ltd 硬質炭素薄膜付き機械加工工具用切削油及び硬質炭素薄膜付き機械加工工具
JP4863152B2 (ja) * 2003-07-31 2012-01-25 日産自動車株式会社 歯車
WO2005014761A2 (ja) * 2003-08-06 2005-02-17 Nissan Motor Co., Ltd. 低摩擦摺動機構、低摩擦剤組成物及び摩擦低減方法
JP4973971B2 (ja) * 2003-08-08 2012-07-11 日産自動車株式会社 摺動部材
JP2005054617A (ja) * 2003-08-08 2005-03-03 Nissan Motor Co Ltd 動弁機構
JP4117553B2 (ja) * 2003-08-13 2008-07-16 日産自動車株式会社 チェーン駆動装置
US7771821B2 (en) * 2003-08-21 2010-08-10 Nissan Motor Co., Ltd. Low-friction sliding member and low-friction sliding mechanism using same
EP1508611B1 (de) 2003-08-22 2019-04-17 Nissan Motor Co., Ltd. Getriebe enthaltend eine getriebeölzusammensetzung
US7249516B2 (en) * 2004-07-28 2007-07-31 Brooks Automation, Inc. Method of operating a resistive heat-loss pressure sensor
KR20070085218A (ko) 2004-07-28 2007-08-27 브룩스 오토메이션, 인크. 저항성 열손실 압력 센서의 작동 방법
US20060021444A1 (en) * 2004-07-28 2006-02-02 Helix Technology Corporation Method of operating a resistive heat-loss pressure sensor
US7207224B2 (en) * 2005-06-10 2007-04-24 Brooks Automation, Inc. Wide-range combination vacuum gauge
US7418869B2 (en) 2005-06-10 2008-09-02 Brooks Automation, Inc. Wide-range combination vacuum gauge
US7331237B2 (en) * 2006-02-01 2008-02-19 Brooks Automation, Inc. Technique for improving Pirani gauge temperature compensation over its full pressure range
US7278322B1 (en) 2006-03-30 2007-10-09 International Business Machines Corporation Semiconductor based pressure sensor
DE102007053944A1 (de) 2007-11-09 2009-05-20 Vacuubrand Gmbh + Co Kg Wärmeleitungs-Gasdruckmeßanordnung
DE102007053943C5 (de) 2007-11-09 2017-11-23 Vacuubrand Gmbh + Co Kg Wärmeleitungs-Gasdruckmeßanordnung
DE102013012434A1 (de) * 2012-07-30 2014-01-30 Heinz Plöchinger Sensoren zur Erfassung von Fluid-Eigenschaften mit Wärmeverlustausgleich und dessen Betriebsweise
DE202014007298U1 (de) 2014-09-12 2015-12-16 Vacuubrand Gmbh + Co Kg Gasdruckmessvorichtung
DE102014013270A1 (de) 2014-09-12 2016-03-17 Vaccubrand Gmbh + Co Kg Gasdruckmessvorrichtung
US10436665B2 (en) 2017-06-01 2019-10-08 Heinz Plöchinger Fluid property sensor with heat loss compensation and operating method thereof
US10845263B2 (en) 2018-04-17 2020-11-24 Mks Instruments, Inc. Thermal conductivity gauge

Family Cites Families (23)

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Publication number Priority date Publication date Assignee Title
US1448540A (en) * 1917-07-14 1923-03-13 Western Electric Co Apparatus for measuring gas pressures
US1668106A (en) * 1923-07-26 1928-05-01 Bbc Brown Boveri & Cie Hot-wire vacuum meter
US1778508A (en) * 1925-10-20 1930-10-14 Western Electric Co Apparatus for measuring and recording pressures
US1873984A (en) * 1928-09-14 1932-08-30 Sieber Fritz Indicating device
US2938387A (en) * 1956-12-10 1960-05-31 Cons Vacuum Corp Automatic control circuit
DE1094341B (de) * 1958-12-13 1960-12-08 Cons Electrodynamics Corp Anordnung zur selbsttaetigen Steuerung der Temperatur eines stromdurchflossenen Widerstandes
US3199356A (en) * 1961-11-06 1965-08-10 Andriulis Vytautas Pressure gauge
DE1648592A1 (de) * 1967-10-25 1971-04-01 Leybold Heraeus Gmbh & Co Kg Messverfahren zur Messung kleiner Differenzdruecke
US3580081A (en) * 1969-09-10 1971-05-25 Veeco Instr Inc Vacuum gauge
US4106350A (en) * 1977-08-29 1978-08-15 Morris Richard T Thin wire pressure sensor
DE3131506A1 (de) * 1981-08-08 1983-03-17 Leybold-Heraeus GmbH, 5000 Köln Verfahren zum betrieb eines geregelten pirani-vakuummeters und dafuer geeignetes pirani-vakuummeter
GB2105047B (en) * 1981-08-28 1986-04-03 British Oxygen Co Ltd Pirani gauges
DE3230405A1 (de) * 1981-08-28 1983-03-10 Boc Ltd., London Gasdruck-messschaltung
US4682503A (en) * 1986-05-16 1987-07-28 Honeywell Inc. Microscopic size, thermal conductivity type, air or gas absolute pressure sensor
DE58905634D1 (de) * 1989-01-23 1993-10-21 Balzers Hochvakuum Gasdruck-Messgerät.
US5079954A (en) * 1990-12-27 1992-01-14 The Boc Group, Inc. Vacuum gauge
CH684805A5 (de) 1992-07-20 1994-12-30 Balzers Hochvakuum Verfahren zur Wandlung eines gemessenen Signals, Wandler zu dessen Ausführung sowie Messanordnung.
DE4308433A1 (de) * 1993-03-17 1994-09-22 Leybold Ag Wärmeleitungsvakuummeter mit Meßzelle, Meßgerät und Verbindungskabel
DE4308434A1 (de) * 1993-03-17 1994-09-22 Leybold Ag Temperaturkompensation bei einem geregelten Wärmeleitungsvakuummeter
US5347869A (en) * 1993-03-25 1994-09-20 Opto Tech Corporation Structure of micro-pirani sensor
EP0660096B1 (de) * 1993-12-23 1999-03-17 Heimann Optoelectronics GmbH Mikrovakuumsensor
US5557972A (en) * 1994-09-13 1996-09-24 Teledyne Industries, Inc. Miniature silicon based thermal vacuum sensor and method of measuring vacuum pressures
US5633465A (en) 1995-02-07 1997-05-27 Kaufmann; James Pirani pressure sensor

Also Published As

Publication number Publication date
JPH1151797A (ja) 1999-02-26
DE69803147T2 (de) 2002-08-22
EP0893677B1 (de) 2002-01-16
US6227056B1 (en) 2001-05-08
EP0893677A1 (de) 1999-01-27
US6023979A (en) 2000-02-15
JP2839244B1 (ja) 1998-12-16

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Legal Events

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8364 No opposition during term of opposition