DE69803147T2 - Pirani, bei dem nur das Widerstandsfühlerelement beheizbar ist - Google Patents
Pirani, bei dem nur das Widerstandsfühlerelement beheizbar istInfo
- Publication number
- DE69803147T2 DE69803147T2 DE69803147T DE69803147T DE69803147T2 DE 69803147 T2 DE69803147 T2 DE 69803147T2 DE 69803147 T DE69803147 T DE 69803147T DE 69803147 T DE69803147 T DE 69803147T DE 69803147 T2 DE69803147 T2 DE 69803147T2
- Authority
- DE
- Germany
- Prior art keywords
- pirani
- heated
- sensor element
- resistance sensor
- resistance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L21/00—Vacuum gauges
- G01L21/10—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured
- G01L21/12—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured measuring changes in electric resistance of measuring members, e.g. of filaments; Vacuum gauges of the Pirani type
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/897,629 US6023979A (en) | 1997-07-21 | 1997-07-21 | Apparatus and methods for heat loss pressure measurement |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69803147D1 DE69803147D1 (de) | 2002-02-21 |
DE69803147T2 true DE69803147T2 (de) | 2002-08-22 |
Family
ID=25408155
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69803147T Expired - Lifetime DE69803147T2 (de) | 1997-07-21 | 1998-02-06 | Pirani, bei dem nur das Widerstandsfühlerelement beheizbar ist |
Country Status (4)
Country | Link |
---|---|
US (2) | US6023979A (de) |
EP (1) | EP0893677B1 (de) |
JP (1) | JP2839244B1 (de) |
DE (1) | DE69803147T2 (de) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102007053943A1 (de) | 2007-11-09 | 2009-05-20 | Vacuubrand Gmbh + Co Kg | Wärmeleitungs-Gasdruckmeßanordnung |
DE102007053944A1 (de) | 2007-11-09 | 2009-05-20 | Vacuubrand Gmbh + Co Kg | Wärmeleitungs-Gasdruckmeßanordnung |
DE202014007298U1 (de) | 2014-09-12 | 2015-12-16 | Vacuubrand Gmbh + Co Kg | Gasdruckmessvorichtung |
DE102014013270A1 (de) | 2014-09-12 | 2016-03-17 | Vaccubrand Gmbh + Co Kg | Gasdruckmessvorrichtung |
Families Citing this family (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6658941B1 (en) * | 1997-07-21 | 2003-12-09 | Helix Technology Corporation | Apparatus and methods for heat loss pressure measurement |
US6938493B2 (en) | 1997-07-21 | 2005-09-06 | Helix Technology Corporation | Apparatus and methods for heat loss pressure measurement |
JP3555844B2 (ja) * | 1999-04-09 | 2004-08-18 | 三宅 正二郎 | 摺動部材およびその製造方法 |
US20110301569A1 (en) | 2001-01-20 | 2011-12-08 | Gordon Wayne Dyer | Methods and apparatus for the CVCS |
KR100407815B1 (ko) * | 2001-05-04 | 2003-12-01 | 학교법인 포항공과대학교 | 펠티어 효과를 이용한 열전도형 진공 게이지 |
US6969198B2 (en) * | 2002-11-06 | 2005-11-29 | Nissan Motor Co., Ltd. | Low-friction sliding mechanism |
JP3891433B2 (ja) * | 2003-04-15 | 2007-03-14 | 日産自動車株式会社 | 燃料噴射弁 |
EP1479946B1 (de) * | 2003-05-23 | 2012-12-19 | Nissan Motor Co., Ltd. | Kolben für eine Brennkraftmaschine |
EP1482190B1 (de) * | 2003-05-27 | 2012-12-05 | Nissan Motor Company Limited | Wälzkörper |
JP2005008851A (ja) * | 2003-05-29 | 2005-01-13 | Nissan Motor Co Ltd | 硬質炭素薄膜付き機械加工工具用切削油及び硬質炭素薄膜付き機械加工工具 |
JP4863152B2 (ja) * | 2003-07-31 | 2012-01-25 | 日産自動車株式会社 | 歯車 |
CN101760286B (zh) * | 2003-08-06 | 2013-03-20 | 日产自动车株式会社 | 低摩擦滑动机构、低摩擦剂组合物以及减小摩擦的方法 |
JP2005054617A (ja) * | 2003-08-08 | 2005-03-03 | Nissan Motor Co Ltd | 動弁機構 |
JP4973971B2 (ja) * | 2003-08-08 | 2012-07-11 | 日産自動車株式会社 | 摺動部材 |
JP4117553B2 (ja) * | 2003-08-13 | 2008-07-16 | 日産自動車株式会社 | チェーン駆動装置 |
US7771821B2 (en) * | 2003-08-21 | 2010-08-10 | Nissan Motor Co., Ltd. | Low-friction sliding member and low-friction sliding mechanism using same |
EP1508611B1 (de) | 2003-08-22 | 2019-04-17 | Nissan Motor Co., Ltd. | Getriebe enthaltend eine getriebeölzusammensetzung |
US20060021444A1 (en) * | 2004-07-28 | 2006-02-02 | Helix Technology Corporation | Method of operating a resistive heat-loss pressure sensor |
US7249516B2 (en) * | 2004-07-28 | 2007-07-31 | Brooks Automation, Inc. | Method of operating a resistive heat-loss pressure sensor |
KR20070085218A (ko) | 2004-07-28 | 2007-08-27 | 브룩스 오토메이션, 인크. | 저항성 열손실 압력 센서의 작동 방법 |
US7418869B2 (en) | 2005-06-10 | 2008-09-02 | Brooks Automation, Inc. | Wide-range combination vacuum gauge |
US7207224B2 (en) * | 2005-06-10 | 2007-04-24 | Brooks Automation, Inc. | Wide-range combination vacuum gauge |
US7331237B2 (en) * | 2006-02-01 | 2008-02-19 | Brooks Automation, Inc. | Technique for improving Pirani gauge temperature compensation over its full pressure range |
US7278322B1 (en) | 2006-03-30 | 2007-10-09 | International Business Machines Corporation | Semiconductor based pressure sensor |
US9606074B2 (en) | 2012-07-30 | 2017-03-28 | Heinz Plöchinger | Fluid property sensor with heat loss compensation and operating method thereof |
US10436665B2 (en) | 2017-06-01 | 2019-10-08 | Heinz Plöchinger | Fluid property sensor with heat loss compensation and operating method thereof |
US10845263B2 (en) | 2018-04-17 | 2020-11-24 | Mks Instruments, Inc. | Thermal conductivity gauge |
Family Cites Families (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1448540A (en) * | 1917-07-14 | 1923-03-13 | Western Electric Co | Apparatus for measuring gas pressures |
US1668106A (en) * | 1923-07-26 | 1928-05-01 | Bbc Brown Boveri & Cie | Hot-wire vacuum meter |
US1778508A (en) * | 1925-10-20 | 1930-10-14 | Western Electric Co | Apparatus for measuring and recording pressures |
US1873984A (en) * | 1928-09-14 | 1932-08-30 | Sieber Fritz | Indicating device |
US2938387A (en) * | 1956-12-10 | 1960-05-31 | Cons Vacuum Corp | Automatic control circuit |
DE1094341B (de) * | 1958-12-13 | 1960-12-08 | Cons Electrodynamics Corp | Anordnung zur selbsttaetigen Steuerung der Temperatur eines stromdurchflossenen Widerstandes |
US3199356A (en) * | 1961-11-06 | 1965-08-10 | Andriulis Vytautas | Pressure gauge |
DE1648592A1 (de) * | 1967-10-25 | 1971-04-01 | Leybold Heraeus Gmbh & Co Kg | Messverfahren zur Messung kleiner Differenzdruecke |
US3580081A (en) * | 1969-09-10 | 1971-05-25 | Veeco Instr Inc | Vacuum gauge |
US4106350A (en) * | 1977-08-29 | 1978-08-15 | Morris Richard T | Thin wire pressure sensor |
DE3131506A1 (de) * | 1981-08-08 | 1983-03-17 | Leybold-Heraeus GmbH, 5000 Köln | Verfahren zum betrieb eines geregelten pirani-vakuummeters und dafuer geeignetes pirani-vakuummeter |
DE3230405A1 (de) * | 1981-08-28 | 1983-03-10 | Boc Ltd., London | Gasdruck-messschaltung |
GB2105047B (en) * | 1981-08-28 | 1986-04-03 | British Oxygen Co Ltd | Pirani gauges |
US4682503A (en) * | 1986-05-16 | 1987-07-28 | Honeywell Inc. | Microscopic size, thermal conductivity type, air or gas absolute pressure sensor |
EP0379841B2 (de) * | 1989-01-23 | 1998-11-04 | Balzers Aktiengesellschaft | Gasdruck-Messgerät |
US5079954A (en) * | 1990-12-27 | 1992-01-14 | The Boc Group, Inc. | Vacuum gauge |
CH684805A5 (de) | 1992-07-20 | 1994-12-30 | Balzers Hochvakuum | Verfahren zur Wandlung eines gemessenen Signals, Wandler zu dessen Ausführung sowie Messanordnung. |
DE4308434A1 (de) * | 1993-03-17 | 1994-09-22 | Leybold Ag | Temperaturkompensation bei einem geregelten Wärmeleitungsvakuummeter |
DE4308433A1 (de) * | 1993-03-17 | 1994-09-22 | Leybold Ag | Wärmeleitungsvakuummeter mit Meßzelle, Meßgerät und Verbindungskabel |
US5347869A (en) * | 1993-03-25 | 1994-09-20 | Opto Tech Corporation | Structure of micro-pirani sensor |
EP0660096B1 (de) * | 1993-12-23 | 1999-03-17 | Heimann Optoelectronics GmbH | Mikrovakuumsensor |
US5557972A (en) * | 1994-09-13 | 1996-09-24 | Teledyne Industries, Inc. | Miniature silicon based thermal vacuum sensor and method of measuring vacuum pressures |
US5633465A (en) | 1995-02-07 | 1997-05-27 | Kaufmann; James | Pirani pressure sensor |
-
1997
- 1997-07-21 US US08/897,629 patent/US6023979A/en not_active Expired - Lifetime
-
1998
- 1998-02-06 EP EP98102089A patent/EP0893677B1/de not_active Expired - Lifetime
- 1998-02-06 DE DE69803147T patent/DE69803147T2/de not_active Expired - Lifetime
- 1998-03-05 JP JP10053876A patent/JP2839244B1/ja not_active Expired - Fee Related
-
1999
- 1999-12-30 US US09/475,392 patent/US6227056B1/en not_active Expired - Lifetime
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102007053943A1 (de) | 2007-11-09 | 2009-05-20 | Vacuubrand Gmbh + Co Kg | Wärmeleitungs-Gasdruckmeßanordnung |
DE102007053944A1 (de) | 2007-11-09 | 2009-05-20 | Vacuubrand Gmbh + Co Kg | Wärmeleitungs-Gasdruckmeßanordnung |
DE102007053943B4 (de) | 2007-11-09 | 2009-07-30 | Vacuubrand Gmbh + Co Kg | Wärmeleitungs-Gasdruckmeßanordnung |
DE102007053943C5 (de) * | 2007-11-09 | 2017-11-23 | Vacuubrand Gmbh + Co Kg | Wärmeleitungs-Gasdruckmeßanordnung |
DE202014007298U1 (de) | 2014-09-12 | 2015-12-16 | Vacuubrand Gmbh + Co Kg | Gasdruckmessvorichtung |
EP2995922A1 (de) | 2014-09-12 | 2016-03-16 | Vacuubrand Gmbh + Co Kg | Gasdruckmessvorrichtung |
DE102014013270A1 (de) | 2014-09-12 | 2016-03-17 | Vaccubrand Gmbh + Co Kg | Gasdruckmessvorrichtung |
Also Published As
Publication number | Publication date |
---|---|
US6023979A (en) | 2000-02-15 |
JPH1151797A (ja) | 1999-02-26 |
EP0893677B1 (de) | 2002-01-16 |
US6227056B1 (en) | 2001-05-08 |
JP2839244B1 (ja) | 1998-12-16 |
DE69803147D1 (de) | 2002-02-21 |
EP0893677A1 (de) | 1999-01-27 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |